0.5μm分步光刻机关键参数测量与分析

主要对 0 5 μm分步光刻机的几个代表性参数即 :投影镜头分辨率、照明均匀性、套刻精度、工作台步进精度、镜头畸变等引起误差的原因 ,测量和计算方法以及采取的相应措施作了一些归纳性总结 ,在解释问题的同时 ,也提出了相应的解决办法 ,为下一代光刻机的研制打下一定的基础。     

步进扫描投影光刻机中的曝光剂量控制技术研究

讨论了步进扫描投影光刻机中的曝光剂量控制技术 ,详细阐述了步进扫描投影光刻机中的曝光剂量控制原理 ,提出了一种曝光剂量控制算法。实验表明 ,应用此剂量控制技术使系统的曝光剂量控制精度达到 1.3 7% ,剂量重复精度达到 0 .3 1% ,满足亚半微米光刻图形的曝光剂量控制要求     

SSB500系列步进投影光刻机

国家重点新产品:SSB500步进投影光刻机上海微电子装备有限公司(SMEE)主要致力于量产型IC制造、先进封装、3D-TSV、MEMS、OLED-TFT制造等领域的投影光刻机系列产品的研发、制造及销售,公司目前拥有600系列IC前道扫描光刻     

浸没式光刻技术

所谓浸没式光刻技术,是在光刻机的投影镜头与硅片之间用一种液体充满,以获得更好的分辨率及增大镜头的数值孔径。今天,193nm光刻机的数值孔径为0.85左右,采用浸没式光刻技术后,可以将其提高到1郾0以上。2003年5月,Intel宣布放弃157nm光刻机的开发,并将193nm光刻机的功能扩展至4     

上海光机所高端光刻机成像质量原位检测技术研究成绩斐然

近期，上海光机所王向朝研究员课题组与上海微电子装备有限公司合作，利用国家“十五”863计划集成电路制造装备重大专项”100nm分辨率步进扫描投影光刻机”的研发平台，对高端光刻机成像质量原位检测技术进行了系统和深入的研究，在高端光刻机投影物镜的轴向像质、垂轴像质、静态与动态像质以及波像差的原位检测技术等领域获得了多项重要研究成果。     

国外光刻设备市场概况及发展趋势(续)

泛。对于给定的分辨率来说。其焦深远比紫外大得多。IBM公司最早将此技术应用于Perkin-Elmer公司的扫描投影光刻机上;西德的Karlsuss也早已有市售的准分子激光接触/接近式光刻机。而最引人注目的就是GCA公司于1988年推出的第一台商品化准分子激光步进     

亚微米i线和g线投影光刻物镜研制

本文介绍了分步重复投影光刻机的i线和g线投影光刻物镜主要技术指标、设计要点、研制中解决的关键单元技术和设计试制结果。结果表明数值孔径NA＝0．42i线和NA＝0．45g线、视场15×15mm以及畸变＜±0．1μm的五倍缩小投影光刻物镜研制成功。     

步进扫描投影光刻机工件台和掩模台的进展

着重介绍了当前国外步进扫描投影光刻机的工件台和掩模台的发展状况，并对套刻精度和整机精度进行了分析。     

投影光刻机TTL对准原理与故障分析

论述了ASML公司某型投影光刻机TTL对准系统的基本原理和主要构成,介绍了对准系统在光刻工艺中的工作过程,结合多年的投影光刻机维修经验总结了对准系统的常见故障,并给出了分析以及解决方法。     

M552型全自动投影光刻机

<正> 世界上很多半导体器件制造厂广泛使用的1:1扫描投影光刻机已成为一种主要的光刻设备。但是,随着以256K 动态 RAM 为代表的真正超 LSI 的正式投产,对光刻设备提出了更高的分辨率,更严格的对准确精度。而以往的1:1投影光刻机,有些地方已无法满足上述要求。珀金·埃尔默公司在多年技术积累和经     

改善响应速度及色差的垂直配向显示模式

在通常垂直配向模式的像素结构基础上,通过搭配相应的驱动方法适当改进结构,可以实现同时改善垂直配向模式的响应速度及色差。     

Implication of transistor frequency dependence on intermodulation distortion

An analysis is presented for third-order and second-order nonlinear distortion as a function of frequency for a transistor biased in the common-emitter configuration. It is found that, at high frequency, it is the curvature in the loaded cutoff frequency versus collector current curve that determines the degree of intermodulation distortion. Design proposals for obtaining linear cutoff frequency curves (i.e., small third-order distortion) will be discussed.     

Broadband Frequency Invariant Beamformer

In the broadband signal processing, the array has different relative aperture for the different frequency bins, which results in waveform distortion. Moreover, the greater the bandwidth is, the more serious the distortion becomes. It is valuable to study the Frequency-invariant beam patterns (FIBPs) for receiving broadband signals without distortion. Based on the array dimensions, this paper will summarize some new methods to design a broadband beamformer with an FIBP. There will be two categories: One-dimensional arrays and Multi-dimensional arrays. For one-dimensional array, there are sampling rate method, minimax frequency invariant beamforming, etc. For multi-dimensional array, there are Bessel function method, Bessel function and phase mode method, and so on. Finally, we will discuss the pros and cons of every method.     

功放的数字基带预失真技术研究

在射频通信中,大功率放大器是无线通信系统中的必要组成部分,它的非线性失真除了会造成信号带外的频谱扩展,引起临道干扰外,还会造成带内信号失真,提高误码率.因此,如何克服功放的非线性就成了通信领域的一个重要课题和研究热点.本文采用基于查找表的自适应算法,设计了自适应数字基带预失真器并进行了仿真和综合.结果表明自适应数字基带预失真方法可有效地提高功放线性度,从而提高系统性能.     

单片机在大功率功放电路中的应用

大功率功放存在2大问题:第一是输出信号失真,主要有:非线性失真和削波失真,这会影响音质,严重时还会烧坏扬声器。第二是保护问题。主要有:扬声器短路保护、输出信号直流保护。保护做得不好,很容易烧坏功放输出管和扬声器。单片机具有强大的测控功能,可以用来解决大功率功放的失真校正和电路保护的问题。实践证明,本系统有较好的效果。将讨论如何用单片机ATMEL 89C2051实现这一目标。     

Generation and cancellation of second-order harmonic distortion inanalog optical systems by interferometric FM-AM conversion

The generation of strong harmonic distortion from interferometric FM-AM conversion in analog lightwave systems is demonstrated both theoretically and experimentally. The effect results from the combined effects of wavelength chirping of the laser coupled with the nonlinear transmission characteristics of a dispersive element in the optical beam path. It is shown that reflections as small as 2-10^-4 will result in second-order distortion as large as -65 dBc. The effect can also be used to cancel any laser- or detector-induced harmonic distortion. In one example, the -36 dBc second-order distortion in a distributed-feedback (DFB) laser is improved to better than -70 dBc     

基于SSE和SSIM的H.264帧内预测模式选择改进算法

在H.264的帧内预测模式选择过程中,率失真优化(RDO)的失真测度用当前编码块和预测块之间的平方误差和(SSE)或绝对误差和(SAD)来度量,而这两种失真测度被证明不能很好地符合人眼视觉(HVS)。该文参考软件JM16.2,提出了联合SSE和结构相似度(SSIM)作为失真测度用于RDO的方法(CSSRDO)。算法首先找到SSIM和码率的近似关系, 然后综合以SSE作为失真测度的RDO函数,并结合人眼视觉特性,建立了联合SSE和SSIM作为失真测度的RDO模型。实验表明,将CSSRDO用于H.264帧内预测模式选择获得了比JM16.2更高的编码效率和更好的重建图像质量。     

A generalization of the Pursley-Davisson- Mackenthun universal variable-rate coding theorem

Suppose nature selects a source from among a class of sources according to some prior probability distribution. With respect to a given fidelity criterion and a given distortion level, it is shown that there exists a variable-rate code such that the following is true. It is highly likely that nature will choose a source whose average distortion with respect to the given code achieves the given distortion level and whose average rate is approximately the optimum rate theoretically attainable. Only a very weak assumption has to be made. The assumption is satisfied, for example, for separable metric space alphabets and a distortion measure which is a nondecreasing continuous function of the metric. This generalizes work of Pursley, Davisson, and Mackenthun and settles a conjecture of Pursley and Davisson.     

Dispersion characteristics of square pulse with finite rise time insingle, tapered, and coupled microstrip lines

The distortion of an electrical pulse, with finite risetime (quadratic-linear-quadratic transition) caused by dispersion as it propagates along a uniform microstrip, a tapered microstrip and a coupled pair of microstrips is investigated. Closed-form analysis equations for single and coupled microstrips are used to find the frequency-dependent phase velocities. Results are presented for two different taper profiles: exponential and triangular distributions. It is concluded that the optimization of the profile will provide the least pulse distortion     

基于极坐标Lagrange插值的航拍图像畸变校正算法

由于航拍图像的拍摄高度远低于卫星图像拍摄高度,因此每个拍摄地点的建筑投影差大小和方向都不相同,图片畸变严重。此外,考虑到图像边缘区域的畸变程度远大于图像中心区域的畸变程度,本文提出了一种基于极坐标的Lagrange插值的逐点畸变校正方法。利用该方法在极坐标系内对单个像素点进行插值,然后根据插值结果对像素点进行校正,再将其坐标从极坐标系变换回直角坐标系,最后采用此方法在整个航拍图像内逐点进行畸变校正。实验结果表明,校正后的航拍图像畸变程度不超过3%,证明该方法不但能有效地校正畸变图像,且与传统的利用DLT线性求解畸变校正矩阵等校正方法相比具有更为广泛的适用性。