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1.
一种新型半导体材料—纳米晶硅   总被引:1,自引:0,他引:1  
一种新型半导体材料──纳米晶硅李建军,魏希文,万明芳(大连理工大学半导体研究室116023)一、引言继非晶硅、多晶硅、微晶硅之后,纳米晶硅是近几年发展起来的又一种新型半导体材料。纳米固体材料是一种既不同于晶态也不同于非晶态的第三类固体材料,由1~15...  相似文献   

2.
本文在微晶硅材料性能研究的基础上制备了微晶硅薄膜晶体管(TFT).发现微晶硅的柱状生长模式会导致其结构和电学性能的不均匀性.由于材料的柱状生长模式使得其晶化百分比、晶粒尺寸和暗电导受到薄膜厚度的调制.平行于衬底和垂直于衬底方向的电导率随着材料沉积条件的变化呈现出不同的变化规律,后者始终保持在 10-6 s/an~10-5 s/cm 量级.确定了用于 TFT 有源层的微晶硅薄膜沉积条件中的硅烷浓度应高于 2%,晶化百分比应为40%~50%左右.制备的微晶硅 TFT 器件具有良好的稳定性,开态电流的衰退和阈值电压的漂移分别为 25%和1 Ⅴ,进而还发现了一种新颖的自恢复现象.  相似文献   

3.
VHF-PECVD制备微晶硅材料及电池   总被引:2,自引:2,他引:0  
采用VHF-PECVD技术制备了不同功率系列的微晶硅薄膜和电池,测试结果表明:制备的适用于微晶硅电池的有源层材料的暗电导和光敏性都在电池要求的参数范围内.低功率或高功率条件下,电池从n和p方向的喇曼测试结果是不同的,在晶化率方面材料和电池也有很大的差别,把相应的材料应用于电池上时,这一点很重要.采用VHFPECVD技术制备的微晶硅电池效率为5%,Voc=0.45V,Jsc=22mA/cm2,FF=50%,Area=0.253cm2.  相似文献   

4.
采用高压RF-PECVD技术制备了本征微晶硅薄膜和n-i-p结构微晶硅太阳电池。详细研究了n-i-p微晶硅太阳电池中n/i 和 i/p 缓冲层对太阳电池性能的影响。实验结果表明,提高n/i 界面晶化率以及在i/p 界面加入非晶缓冲层均有利于太阳电池性能的提高。通过优化界面缓冲层,微晶硅单结电池和非晶硅/微晶硅叠层电池的性能得到大幅度提高。  相似文献   

5.
在掺杂P室采用甚高频等离子体增强化学气相沉积(VHF—PECVD)技术,制备了不同硅烷浓度条件下的本征微晶硅薄膜.对薄膜电学特性和结构特性的测试结果分析表明:随硅烷浓度的增加,材料的光敏性先略微降低后提高,而晶化率的变化趋势与之相反;X射线衍射(xRD)测试表明材料具有(220)择优晶向.在P腔室中用VHF—PECVD方法制备单结微晶硅太阳能电池的i层和p层,其光电转换效率为4.7%,非晶硅/微晶硅叠层电池(底电池的p层和i层在P室沉积)的效率达8.5%.  相似文献   

6.
采用等离子体化学气相沉积(PECVD)方法制备了硼掺杂微晶硅薄膜和微晶硅薄膜太阳电池.研究了乙硼烷含量、p型膜厚度及沉积温度对硼掺杂薄膜生长特性和高沉积速率的电池性能的影响.通过对p型微晶硅薄膜沉积参数的优化,在本征层沉积速率为0.78nm/s的高沉积速率下,制备了效率为5.5%的单结微晶硅薄膜太阳电池.另外,对p型微晶硅薄膜的载流子疏输运机理进行了讨论.  相似文献   

7.
采用VHF-PECVD技术制备了不同功率系列的微晶硅薄膜和电池,测试结果表明:制备的适用于微晶硅电池的有源层材料的暗电导和光敏性都在电池要求的参数范围内.低功率或高功率条件下,电池从n和p方向的喇曼测试结果是不同的,在晶化率方面材料和电池也有很大的差别,把相应的材料应用于电池上时,这一点很重要.采用VHF-PECVD技术制备的微晶硅电池效率为5%,Voc=0.45V,Jsc=22mA/cm2,FF=50%,Area=0.253cm2.  相似文献   

8.
高气压耗尽RF-PECVD在高速生长优质微晶硅材料和太阳能电池方面具有巨大的优势.采用这种沉积方法,本征微晶硅材料的生长速度提高到0.32 nm/s,晶化率达58.2%.把这种高速生长的微晶硅材料用作太阳电池的本征吸收层,在没有优化工艺参数和没有采用ZnO增反电极时,电池的转换效率达到4.8%.  相似文献   

9.
1nm/s高速率微晶硅薄膜的制备及其在太阳能电池中的应用   总被引:2,自引:0,他引:2  
采用甚高频等离子体增强化学气相沉积技术,在相对较高气压和较高功率条件下,制备了不同硅烷浓度的微晶硅材料.材料沉积速率随硅烷浓度的增加而增大,通过对材料的电学特性和结构特性的分析得知:获得了沉积速率超过1 nm/s高速率器件质量级微晶硅薄膜,并且也初步获得了效率达6.3%的高沉积速率微晶硅太阳电池.  相似文献   

10.
采用甚高频等离子体增强化学气相沉积技术,在相对较高气压和较高功率条件下,制备了不同硅烷浓度的微晶硅材料.材料沉积速率随硅烷浓度的增加而增大,通过对材料的电学特性和结构特性的分析得知:获得了沉积速率超过1 nm/s高速率器件质量级微晶硅薄膜,并且也初步获得了效率达6.3%的高沉积速率微晶硅太阳电池.  相似文献   

11.
论述分析了国内外晶体硅太阳电池回收技术现状,研究了太阳电池的结构及制备工艺,提出了废弃多晶硅太阳电池回收高纯硅片的工艺.依次去除铝背场/铝硅合金层/背银、氮化硅减反膜/正银、磷扩散层及金属杂质,得到高纯硅片.硅原料的回收率高达76.4%,回收的高纯硅片经检验检测,其电阻率、间隙氧浓度、代位碳含量和少子寿命均符合GB/T 29055-2012中规定的性能参数.该回收工艺路线简单,回收率高,成本低,适于产业化推广.废弃太阳电池的回收再利用不仅可以在一定程度上缓解硅原料短缺的问题,还可以减少废弃的太阳电池给环境造成负担.  相似文献   

12.
The efficiency of commercial solar cells depends not only on the design and technology used to make the solar cell, but just as importantly on the minority carrier lifetime in the silicon wafer material. This paper presents a design strategy based on matching the efficiency potential of the silicon material to that of the silicon substrate in order to minimize the $/W cost of a solar cell. The flexibility of the buried contact technology allows this design strategy to be fully utilized and a range of buried contact solar cell structures can be developed, each suited to a particular type of commercial silicon substrate. The paper demonstrates that simplified buried contact solar cells are best suited to multicrystalline silicon material. Generation I buried contact solar cells are optimally matched to conventional Czochralski (CZ) substrates, and double-sided buried contact (DS BC) structures will allow the thinner, higher lifetime wafers to reach their full efficiency potential  相似文献   

13.
Thin-film silicon solar cells usually contain amorphous silicon layers made by plasma enhanced chemical vapor deposition (PECVD). This CVD method has the advantage that large-area devices can be manufactured at a low processing temperature, thus facilitating low-cost solar cells on glass, metal foil, or polymer foil. In order to obtain higher conversion efficiencies while keeping the manufacturing cost low, a new development is to introduce low bandgap materials in a multijunction device structure. A frequently used low bandgap material is amorphous silicon-germanium. Record initial efficiencies in excess of 15% have been reported for triple-junction solar cells comprising these alloys. In this paper, we present a novel manufacturing method for amorphous silicon based tandem cells suitable for roll-to-roll production  相似文献   

14.
To further lower production costs and increase conversion efficiency of thin‐film silicon solar modules, challenges are the deposition of high‐quality microcrystalline silicon (μc‐Si:H) at an increased rate and on textured substrates that guarantee efficient light trapping. A qualitative model that explains how plasma processes act on the properties of μc‐Si:H and on the related solar cell performance is presented, evidencing the growth of two different material phases. The first phase, which gives signature for bulk defect density, can be obtained at high quality over a wide range of plasma process parameters and dominates cell performance on flat substrates. The second phase, which consists of nanoporous 2D regions, typically appears when the material is grown on substrates with inappropriate roughness, and alters or even dominates the electrical performance of the device. The formation of this second material phase is shown to be highly sensitive to deposition conditions and substrate geometry, especially at high deposition rates. This porous material phase is more prone to the incorporation of contaminants present in the plasma during film deposition and is reported to lead to solar cells with instabilities with respect to humidity exposure and post‐deposition oxidation. It is demonstrated how defective zones influence can be mitigated by the choice of suitable plasma processes and silicon sub‐oxide doped layers, for reaching high efficiency stable thin film silicon solar cells.  相似文献   

15.
邱冬冬  王睿  程湘爱  孙永江 《激光技术》2011,35(5):632-635,683
为了研究太阳能电池在连续激光辐照下的波段性效应,使用位于波段内外的3种波长连续激光对单晶硅太阳能电池的辐照效应和损伤效应进行了实验研究,采用观察电池对激光的响应,对比电池的损伤形貌和太阳能电池组成材料的吸收曲线差异的方法,得到了太阳能电池对本征吸收长波限附近波长激光的吸收机制,分析了10.6μm激光和1064nm激光对...  相似文献   

16.
Solar cells are currently fabricated from a variety of silicon-based materials.Now the major silicon material for solar cells is the scrap of electronic grade silicon(EG-Si).But in the current market it is difficult to secure a steady supply of this material.Therefore,alternative production processes are needed to increase the feedstock.In this paper,EBM is used to purify silicon.MG-Si particles after leaching with an initial purity of 99.88%in mass as starting materials were used.The final purity of the...  相似文献   

17.
A simple theoretical model of the radiative recombination in amorphous hydrogenated silicon films containing silicon nanocrystals is suggested. This material is used for the fabrication of modern thin-film solar cells. The calculation results are in good agreement with experimental data on the photoluminescence spectra.  相似文献   

18.
Solar cells are currently fabricated from a variety of silicon-based materials.Now the major silicon material for solar cells is the scrap of electronic grade silicon(EG-Si).But in the current market it is difficult to secure a steady supply of this material.Therefore,alternative production processes are needed to increase the feedstock.In this paper,EBM is used to purify silicon.MG-Si particles after leaching with an initial purity of 99.88%in mass as starting materials were used.The final purity of the silicon disk obtained after EBM was above 99.995%in mass.This result demonstrates that EBM can effectively remove impurities from silicon.This paper mainly studies the impurity distribution in the silicon disk after EBM.  相似文献   

19.
Thin-film polysilicon solar cells are a promising low-cost alternative for bulk silicon solar cells due to their reduced material thickness. Recently, we showed that the use of an amorphous silicon/polycrystalline silicon heterojunction emitter instead of a diffused homojunction emitter led to a boost in the open-circuit voltage by 90 mV. Now, we present a full evidence that shows that this improvement is related to the absence of dopant smearing along the grain boundaries. By using scanning spreading resistance microscopy, we found an enlargement of the junction area by a factor of five in case of a homojunction. The tips of the dopant spikes represent lowly doped areas with an enhanced recombination.  相似文献   

20.
In order to raise the efficiency of solar cells and reduce the cost of their production, a new process for obtaining silicon ingots based on the so-called moonlike technology is developed. New technologies, which use “solar-grade” silicon, make it possible to fabricate solar cells at a lower cost with a higher efficiency of solar-energy conversion. It is exactly for this reason that the “monolike” process was tested and optimized by us for Kazakhstan solar-grade silicon. The aim of this study is a comparison of the characteristics of solar cells fabricated from “monolike” silicon with those of solar cells obtained on the basis of multicrystalline silicon grown by oriented crystallization. For our study, ingots of multicrystalline silicon are grown on an industrial scale and through the use of Kazakhstan-sourced silicon; solar cells are fabricated and the characteristics of the obtained silicon ingots and solar cells are studied.  相似文献   

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