利用总积分散射仪研究不同清洗技术下的基片表面粗糙度

为了探讨不同清洗工艺对基片表面微观粗糙度的影响,利用总积分散射(TIS)仪分别对不同条件下超声清洗的K9玻璃基片,End-hall离子源清洗的K9玻璃基片和Kaufmann离子源清洗的熔石英基片的表面均方根(RMS)粗糙度进行了系统表征.结果表明,K9玻璃基片经不同条件下的超声波清洗后,由于清洗过程中表面受到损伤,其RMS粗糙度均有所增加;而对于End-hall离子源和Kaufmann离子源清洗的基片,其表面RMS粗糙度的变化受清洗过程中离子束流、清洗时间和离子束能量等实验参量的影响较为明显,选择合适的实验参量可以降低基片表面粗糙度.     

钛合金等离子氮化表面的细菌粘附研究

本文对用作口腔修复材料的钛合金(Ti6Al4V)进行等离子氮化处理.分析和表征改性层显微组织的显微硬度、元素分布情况及改性层相结构;比较了改性前后表面粗糙度、表面形貌及细菌粘附情况.结果显示:钛舍金表面经等离子氯化得到的改性层均匀、致密,厚度约为2.8μm,表面显微硬度值为HK0.0251 443,改性层由TiN及Ti2N两种氮化物组成.与改性前相比,试样表面形貌发生变化,表面粗糙度提高,改性后的钛合金表面可以显著地减少细菌粘附.     

计算机硬盘基片的化学机械清洗技术研究

目前,CMP技术对计算机硬盘基片(盘片)进行抛光,盘片表面粗糙度达到原子级平整,抛光后表面的清洗质量直接关系到CMP最终技术水平的高低.采用静态浸泡实验以及浸泡、擦洗、超声清洗实验,结合一系列的表面微观分析,研究了盘片CMP后清洗过程中的化学作用、机械作用以及清洗剂、清洗方式等物理化学要素对CMP后清洗效果的影响.结果表明,CMP后清洗是一种机械作用、化学作用等综合作用的过程.采用优化的清洗工艺及清洗剂,得到了低腐蚀、高洁净、平整的硬盘基片表面.     

不同衬底上溅射Cu膜的表面形貌

采用磁控溅射工艺在石英、云母与Ti/Si衬底上制备100 nm厚Cu膜,并在300℃条件下进行原位退火.用原子力显微镜(AFM)观察薄膜表面形貌,基于粗糙度方法与分形理论对其量化表征.结果表明:分形维数Di比粗糙度Rrms更能准确地表征薄膜表面几何形态;石英衬底上Cu膜具有较为复杂的表面结构,其Df值大于沉积在云母和Ti/Si衬底上薄膜的;经过退火处理后,所有薄膜的表面形貌均趋于平滑化,Df值减小.     

纳秒脉冲激光清洗扫描速度对TC4钛合金表面氧化膜清洗质量的影响

采用纳秒脉冲激光器对TC4钛合金表面的氧化膜及油污进行激光清洗，研究了扫描速度对清洗后试样表面形貌、成分、元素含量及价态的影响规律，并分析了扫描速度对表面粗糙度、硬度和耐腐蚀性能的影响。结果表明：当扫描速度为500 mm/s时，激光对基体的损伤大且会发生热氧化，表面形成TiO,O含量较高。随着扫描速度由3000 mm/s增加至10000 mm/s，表面逐渐变得光滑平整，O含量先降低后升高，Ti含量则先升高后降低。当扫描速度为9000 mm/s时，表面Ti含量(质量分数)达到最大值84.24%,O含量(质量分数)降至最小值4.54%，且粗糙度(R_a)最低约为0.907μm，清洗效果最佳。扫描速度的增加使清洗后表面的粗糙度先升高后降低。此外，激光清洗可使TC4钛合金表面的硬度和耐腐蚀性能有所提高。     

激光参量对碳钢表面清洗质量的影响

为了研究激光工艺参量对碳钢表面锈蚀污染层清洗质量的影响规律,采用Nd∶ YAG准连续激光器对Q235钢板试样进行了激光除锈清洗试验,并观测了试样表面清洗质量。分析了激光清洗污染物烧蚀的工作机理,并试验研究了激光能量密度、扫描速率、扫描宽度、离焦量和重复频率等工艺参量对清洗质量的影响,在此基础上进行了正交试验;通过对激光清洗前后试件进行表面粗糙度、形貌和能谱分析,获得了Q235钢最佳激光工艺参量分别为扫描速率900mm/min、离焦量1mm、能量密度7.6J/cm2、扫描宽度30mm。结果表明,激光除锈后表面粗糙度和3维形貌得到改善,激光清洗样品的粗糙度值接近无锈样品,激光清洗样品的形貌与无锈样品基本相同;激光清洗后材料表面的锈蚀层基本去除,表面存在重焰的微结构。激光清洗能满足对碳钢表面锈蚀污染层的清洗质量要求。     

激光清洗FV520B钢表面氧化色工艺参数对表面粗糙度的影响

采用波长为1064 nm的脉冲光纤激光器对FV520B合金钢表面的高温氧化色层进行清洗,以激光功率、脉冲频率、清洗次数和基体原始粗糙度作为变量,考察各参数对试样表面氧化色清除效果及清洗后表面粗糙度的影响规律.研究结果表明:对于200#砂纸打磨的预处理样品(粗糙度约为0.503 μm),当清洗激光功率为40～120W时,清洗后试样表面粗糙度无明显变化,当激光功率为120～200W时,随着激光功率的增大,粗糙度逐渐减小;在激光功率为120W、脉冲频率为20 kHz的条件下,对200#砂纸打磨的预处理样品(粗糙度约为0.503 μm)进行多次清洗,当清洗次数达到2时,粗糙度显著降低(粗糙度降低40.8％),继续增大清洗次数,粗糙度降低效果不明显,确定最佳清洗参数为激光功率120W、脉冲频率20 kHz、清洗次数2.此外,当清洗参数一定时,随着预处理试样初始粗糙度的减小,氧化色层的去除率下降,且清洗后粗糙度的降低效果不明显.     

定向离子清洗对基片表面性质的影响

为提高高功率激光薄膜的抗激光损伤能力，研究了定向离子清洗对玻璃基片表面性质的影响。用End-Hall型离子源在不同清洗参数下对K9玻璃基片进行了清洗，用光学显微镜验证了基片的二次污染和离子的清洗效果，用静滴接触角仪测量了基片在离子清洗前后对水滴的接触角，用原子力显微镜和轮廓仪分别观测了不同参数的离子清洗前后的基片表面形貌和粗糙度，分析了基片清洗后表面性质如清洁、表面能、接触角、表面粗糙度、表面形貌的变化机理。研究表明定向离子清洗可有效去除二次污染、增加基片表面能、控制基片表面粗糙度和表面形貌，是一种有效改善基片表面性质的处理方法。     

脉冲频率对油漆漆层激光清洗作用机制的影响

针对表面涂有150 μm厚环氧基底漆涂层的2024铝合金,采用不同脉冲频率的纳秒脉冲激光进行激光清洗试验,分析了激光清洗后试样的表面形貌、表面粗糙度、清洗厚度以及清洗机理等.试验结果表明:表面粗糙度(Ra)受频率的影响较小且在3 μm左右.计算了不同脉冲频率下的清洗深度,结果发现,当频率为10 kHz时,清洗深度约为130 μm.通过数值模拟分别研究了激光清洗过程中脉冲频率对烧蚀机制中烧蚀量和剥离机制中热应力的影响.数值模拟结果表明:烧蚀量随着频率的增大而降低,在5～25 kHz范围内烧蚀量的最大降幅超过9％;通过最大热应力与脉冲能量密度的线性拟合计算得到剥离机制的触发阈值约为1.64 J/cm2;在脉冲能量密度高于1.64 J/cm2的条件下,频率越高,越难积热,从而使得烧蚀机制越弱;越大的频率使得热应力超过结合力的频次更多,剥离机制增强,能获得更好的清洗效果.     

5083铝合金阳极氧化膜激光清洗工艺研究

采用纳秒脉冲光纤激光器对5083铝合金阳极氧化膜进行清洗，对清洗试样的表面形貌、表面粗糙度、元素组成和含量、清洗率及清洗机制等进行分析。研究表明，脉冲频率影响扫描振镜方向的光斑搭接率，激光行进速度影响清洗方向的光斑搭接率，在过高的激光能量下清除氧化膜时会造成基体二次氧化。工艺参数对表面粗糙度的影响规律不同，表面粗糙度随单脉冲能量的增加先增大后减小，随脉冲频率的增加出现两次先减小后增大，随激光行进速度的增加先增大后减小再增大。当单脉冲能量为100 mJ、脉冲频率为9.67 kHz、扫描振镜速度为4000 mm/s、激光行进速度为6.5 mm/s时，5.27μm厚的氧化膜几乎被清洗干净，表面粗糙度为Sa=0.608μm，优于机械打磨表面粗糙度（1.18μm），清洗率达97.14%，与参数优化前相比清洗率提升了2.43%。激光清除5083铝合金氧化膜的机制为热烧蚀、弹性振动剥离和孔洞爆破。     

光引发碳微球表面接枝聚甲基丙烯酸

采用光引发聚合方法在经浓HNO3氧化和KH-570硅烷偶联剂处理的碳微球(CMB)表面接枝聚甲基丙烯酸(PMAA),制得PMAA/CMB复合物。探讨了引发剂偶氮二异丁腈(AIBN)用量对PMAA接枝率的影响以及样品在水和乙醇中的分散性。通过场发射扫描电子显微镜、傅里叶变换红外光谱、X射线光电子能谱和热重分析仪对产物进行了形貌和结构表征。结果表明CMB经氧化处理和硅烷化改性后,其表面可接枝PMAA,制得PMAA/CMB复合物;并且当甲基丙烯酸(MAA)与AIBN摩尔比为1∶0.05时,PMAA的接枝率约为10%,在水和乙醇中的分散性也得到了改善。     

聚甲基丙烯酸甲酯与SiO_2的复合研究

将正硅酸乙酯和乙醇的混合溶液加入到乙醇、水和氨水的混合溶液中,水解制备出单分散SiO2的乙醇分散液,然后分离出SiO2纳米粒子.接着利用硅烷偶联剂KH-570对SiO2纳米粒子进行表面改性以改善其亲油性.通过分散性试验,发现SiO2纳米粒子的亲水性明显降低而亲油性明显增加,证明硅烷偶联剂KH-570已经成功地接枝到纳米SiO2颗粒表面.采用超声波分散方法将其分散在含有甲基丙烯酸甲酯的乙酸乙酯和苯组成的混合溶液中,采用原位聚合法制备出PMMA/SiO2纳米复合材料.利用DSC、TGA和FTIR实验方法及溶解性实验对PMMA/SiO2纳米复合材料进行了测试.试验结果表明,SiO2纳米粒子在复合材料中起着物理交联点和化学交联点的作用.     

摩擦强度对薄膜表面形态的作用:原子力显微镜下的观察

展示了摩擦强度对聚酰亚胺薄膜表面形态的影响，原子力显微图像显示，机械摩擦会使聚酰亚胺薄膜表面上形成微沟槽，这些沟槽的表面具有丰富的表面精细构造。原子显微图像还揭示了机械摩擦可以改变被磨擦聚酰亚胺膜的表面形态。     

超声磨削表面三维形貌建模与试验研究

为了研究超声磨削的工件三维形貌,建立了砂轮表面三维形貌,通过对超声磨削磨粒运动轨迹分析,建立了磨粒在工件表面的切削过程模型。提出了大量随机分布磨粒切削工件路径的离散算法和最小高度值包络曲面提取算法,实现了超声磨削表面三维形貌的建立。进行超声磨削试验,结果表明：该模型能有效预测超声磨削的表面形貌,为超声磨削的工艺优化提供了理论依据。     

Phase Segregation in Thin Films of Conjugated Polyrotaxane– Poly(ethylene oxide) Blends: A Scanning Force Microscopy Study

Scanning force microscopy (SFM) is used to study the surface morphology of spin‐coated thin films of the ion‐transport polymer poly(ethylene oxide) (PEO) blended with either cyclodextrin (CD)‐threaded conjugated polyrotaxanes based on poly(4,4′‐diphenylene‐vinylene) (PDV), β‐CD–PDV, or their uninsulated PDV analogues. Both the polyrotaxanes and their blends with PEO are of interest as active materials in light‐emitting devices. The SFM analysis of the blended films supported on mica and on indium tin oxide (ITO) reveals in both cases a morphology that reflects the substrate topography on the (sub‐)micrometer scale and is characterized by an absence of the surface structure that is usually associated with phase segregation. This observation confirms a good miscibility of the two hydrophilic components, when deposited by using spin‐coating, as suggested by the luminescence data on devices and thin films. Clear evidence of phase segregation is instead found when blending PEO with a new organic‐soluble conjugated polymer such as a silylated poly(fluorene)‐alt‐poly(para‐phenylene) based polyrotaxane (THS–β‐CD–PF–PPP). The results obtained are relevant to the understanding of the factors influencing the interfacial and the intermolecular interactions with a view to optimizing the performance of light‐emitting diodes, and light‐emitting electrochemical cells based on supramolecularly engineered organic polymers.     

Tunable Chemical and Topographic Patterns Based on Binary Colloidal Crystals (BCCs) to Modulate MG63 Cell Growth

More effective and diversified surface modification strategies are required for materials used in biomedical engineering. Combining surface modification involving bioactive signals or nonfouling polymers with tunable topography has the potential to meet this need. Here, a method is reported to generate bioactive surfaces having tunable topographies based on self‐assembled binary colloidal crystals (BCCs), where the colloids are premodified with nonfouling molecules or cell adhesive peptides. The BCCs are fabricated from silica (Si) microspheres and polymer nanospheres. The Si microspheres are either modified with poly(ethylene glycol) (PEG) or with the cell adhesive arginine–glycine–aspartic acid (RGD) peptide prior to BCC fabrication. Four types of BCCs are explored in cell studies using MG63 cells. BCC surfaces coupled with PEG or RGD peptides are found to significantly modulate cell adhesion, spreading, and morphology, which is attributed to the combination of BCC topography and the molecules at the particle surface within the BCC. PEG‐modified BCCs are expected to find applications where limited cell adhesion is required, while the RGD‐modified BCCs have the potential for enhancing cell growth on medical devices such as bone implants. More advanced cell biology applications such as controlled stem cell differentiation are also anticipated to find use from BCCs.     

改性碳纤维制备及其RCS性能研究

碳纤维是新兴的功能材料,具备一定导电性能,在雷达干扰方面具有广阔的应用前景。采用化学镀沉积方法,在碳纤维表面沉积铜镀层,然后再采用化学气相沉积工艺,在同镀层表面沉积镍镀层。通过SEM、EDS、XRD等分析手段对改性碳纤维进行了表征,测试了改性碳纤维材料镀层的表观形貌和组成成分,并利用RCS测试系统对改性碳纤维的RCS性能进行了测试。结果表明,得到的改性碳纤维表面合金镀层均匀、平整,合金镀层主要为金属单质状态存在。改性碳纤维的RCS性能较原丝有很大增幅,且与理论值相近。     

Enhanced performance of inverted organic solar cell by a solution-based fluorinated acceptor doped P3HT:PCBM layer

An inverted organic solar cell based on strong electron acceptor 2,3,5,6-tetrafluoro-7,7,8,8-tetracyanoquinodimethane (F4-TCNQ) doped poly (3-hexylthiophene) P3HT: [6,6]-phenyl-C₆₁-butyric acid methyl ester (PCBM) was fabricated to figure out the p-type doping effect on the device performance. It was found that the doping concentration played a critical role on the electrical output of the devices. An enhanced power conversion efficiency (PCE) of 4.22% was achieved, in comparison of PCE of 3.68% for the device based on pristine P3HT:PCBM. The topography morphology of the active film, the hole mobility, the ultraviolet–visible absorption spectrum, the photoluminescence (PL) lifetime and the Fermi energy level of P3HT film with and without F4-TCNQ doping were characterized to investigate the doping effect. The measured results indicated that the hole mobility and absorption of P3HT film was slightly modified with F4-TCNQ doping. On the contrary, the active film morphology, the PL lifetime and the Fermi energy level of P3HT changed dramatically with doping. It was found that F4-TCNQ preferred to approach to the air/liquid interface during the solvent dry process, leading to F4-TCNQ-rich upper layer due to its low surface energy. The layer with proper thickness between anode and active layer dramatically improve the interface contact, resulting in the enhanced device performance.     

In situ and real-time metrology during rinsing of micro- and nano-structures

A new technology, called electro-chemical residue sensor (ECRS), has been developed for the in situ and real-time measurement of the residual impurities left on the wafer surface and in the fine structures of patterned wafers during typical rinse processes. The key components of this technology, which consist of the sensor hardware and a process model, are described. The testing results of the ECRS show that the residual impurity concentration is significantly different from what is typically provided by the bulk water resistivity, which is usually employed for determining the progress of the rinse. As a case study, the new metrology method has been applied to the removal of sulfate ions from patterned wafers; the importance of various surface interactions, charge effects, and transport processes is determined. Two examples of the use of the ECRS for the development of novel rinse recipes to reduce water usage are also discussed.     

溶液中细胞色素b6f的原子力显微镜和扫描隧道显微镜观测

本文用原子力显微镜(atomic force microscope,AFM)和扫描隧道显微镜(scanning tunneling microscope,STM)在Tricine-NaOH-OG缓冲溶液中研究了细胞色素b6f(Cytochrome b6f,Cyt b6f)在固体表面上的吸附形态。首先用AFM观察了吸附在云母表面上的cyt b6f复合体,观察到了分散较好的蛋白质颗粒。进一步用高分辨率的电化学STM(EC-STM)观察了吸附在Au(111)表面上的cyt b6f分子,在浓度较低时发现了其二聚体的吸附形态,而在浓度较高时cyt b6f分子在Au(111)表面聚集成薄膜。