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带电清洗剂的关键性能及开发思路 总被引:1,自引:0,他引:1
《洗净技术》2004,(10)
文章对带电清洗剂的各项关键性能进行了分析,并着重对带电清洗过程中造成动态绝缘性降低的原因进行了分析,提出了研制具有隔离墙功能带电清洗剂的开发思路 相似文献
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带电清洗用清洗剂的关键性能及开发思路 总被引:1,自引:0,他引:1
文章对带电清洗剂的各项关键性能进行了分析,并着重对带电清洗过程中造成动态绝缘性降低的原因进行了分析,提出了研制具有隔离墙功能带电清洗剂的开发思路。 相似文献
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通信电源是通信设备的动力之源。随着电信事业的不断发展,通信设备对电源各方面的要求也越来越高。原有的通信电源因时间的推移,其容量、技术指标已不能满足通信设备的需求而需要更换。由于在线通信设备工作特性,即必须带电更换通信电源。为此,文中从割接方案制定原则、设备选型、施工场地布置、施工时间选择、注意事项及方案拟制作了一一阐述。 相似文献
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通信电源是通信设备的动力之源。随着电信事业的不断发展,通信设备对电源各方面的要求也越来越高。原有的通信电源因时间的推移,其容量、技术指标已不能满足通信设备的需求而需要更换。由于在线通信设备工作特性,即必须带电更换通信电源。为此,文中从割接方案制定原则、设备选型、施工场地布置、施工时间选择、注意事项及方案拟制作了一一阐述。 相似文献
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针对飞机清洗剂的选型问题,以清洗剂的实际使用效果为评价基准,根据飞机服役环境特点,开展典型气候的自然环境试验;进一步地基于多源信息融合的加权平均数据处理技术,提出了飞机清洗剂优选方法。结合典型装备的清洗剂优选需求,在热带海洋环境下开展了两种清洗剂清洗装备涂层的自然环境试验。研究结果表明:清洗剂定期清洗的试验件综合性能明显地优于未清洗的试验件;多源信息融合可有效地降低不确定性因素对测试结果的影响,所提出的方法正确有效,可用于飞机清洗剂的优选。 相似文献
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焊接属电子设备生产过程中的一个关键步骤.焊接后必须进行清洗才能确保电子设备的可靠性,延缓其工作寿命.本文重点介绍了一种离心清洗技术,清洗洁净度高,能有效去除PCB残留物. 相似文献
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采用纳秒脉冲激光对石化设备普遍使用的20钢表面锈蚀层以及油污进行了激光清洗试验,通过正交实验法得到优化后的激光清洗工艺参数,在激光功率18 W,激光脉冲重复频率75kHz,扫描速度3 000mm/s的清洗工艺参数下可有效去除20钢表面的锈蚀层;在激光功率20 W,激光脉冲重复频率75 kHz,扫描速度2 250 mm/s的清洗工艺参数下可有效去除20钢表面附着的油污。分析了激光清洗前后材料表面形貌的变化,研究了激光清洗前后表面的显微硬度以及耐腐蚀性,结果表明:激光清洗可以在不改变材料的耐腐蚀性能的同时提升材料表面的显微硬度,从而达到理想的激光清洗效果。 相似文献
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Tung Ming Pan Tan Fu Lei Fu Hsiang Ko Tien Sheng Chao Tzu Huan Chiu Ying Hao Lee Chih Peng Lu 《Semiconductor Manufacturing, IEEE Transactions on》2001,14(4):365-371
In this study, various cleaning solutions containing chelating agents with carboxyl acid group (-COOH), such as ethylenediaminetetraacetic acid, citric acid and oxalic acid, were developed for post-poly-Si CMP cleaning. The chelating agent and tetramethylammonium hydroxide (TMAH) were simultaneously added into 2% ammonium hydroxide alkaline solution to promote the removal efficiency on particles and metallic impurities. The effectiveness of various cleaning recipes and their interaction mechanism with the poly-Si surface were studied. We could explain the surface behavior of various cleaning solutions by the different molecular size and charge of chelating agents. Based on the mechanism, the behavior of surface particle and metallic impurity can be realized. The co-existence of TMAH with citric acid or oxalic acid in the alkaline cleaning solutions can significantly enhance the electrical properties of capacitors 相似文献
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A compact system for cleaning wafers in all stages of device manufacture has been developed which uses high frequency (0.8
to 1 MHZ) ultrasonic energy (hence, the term “Megasonic”) and a standard chemical solution which is not heated. The patented
process effectively removes particles down to approximately 0.3 ym diameter simultaneously from the front and back surfaces,
thin organic films, and many ionic impurities. After a brief water rinse, the wafers are dried in a hot air stream. The total
cycle time is approximately 15 minutes, and at least 100 wafers can be cleaned in quartz or plastic carriers at the same time
and without the need for loading or unloading.
Megasonic cleaning has been applied to silicon wafers, ceramics, and photomasks, and has been used for photo-
Paper presented at 20th Annual Electronic Materials Conference, University of California at Santa Barbara, CA, June 30, 1978. 相似文献
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Post-CMP cleaning using acoustic streaming 总被引:1,自引:0,他引:1
Noncontact surface cleaning is a desirable process in post-chemical mechanical polishing cleaning. High-frequency megasonic
cleaning utilizes acoustic streaming as the dominant particle removal mechanism. It is widely used in the semiconductor industry
for the removal of particulate contamination. This paper introduces recent results that involve the removal of silica slurry
using megasonic cleaning. A noncontact (megasonic) cleaning process for the removal of slurry residues from dipped and polished
wafers is presented. Complete particle removal (100%) was achieved using megasonics with deionized water with 1% NH4OH using wafers dipped in silica slurry. The optimum conditions for megasonic cleaning (power, temperature, and time) were
determined for the removal of the silica slurry. Up to 99% particle removal from polished wafers was accomplished using noncontact
megasonic cleaning with 1% ammonia for 15 min. 相似文献
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印制电路板组装件绿色清洗技术 总被引:1,自引:1,他引:0
绿色清洗技术又称为无公害清洗技术,与无铅焊接技术一起并列为电子组装两大关键基础技术之一,统称为电气互联绿色制造技术,是重点攻关内容之一;在介绍了清洗剂的要求与特性的基础上,对清洗技术问题进行了详尽的探讨. 相似文献
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Particle-free wafer cleaning and drying technology 总被引:1,自引:0,他引:1
Mishima H. Yasui T. Mizuniwa T. Abe M. Ohmi T. 《Semiconductor Manufacturing, IEEE Transactions on》1989,2(3):69-75
It is reported that an NH4OH-H2O2 solution is excellent for removing particulate contaminants from VLSI silicon wafers after chemical solution treatment. The ratio of NH4 OH in the solution can be reduced down to 1/10 of the standard ratio while keeping high removal efficiency. By decreasing the NH4 OH content, wafer damage which appears as a so-called haze during the NH4OH-H2O2 treatment is reduced. To establish a particle-free wafer drying system, a particle-generation-free isopropanol (IPA) vapor drying system has been developed. By eliminating all possible particle generation sources from the drying system, ultraclean wafer drying equipment has been realized. A number of parameters to be controlled have been thoroughly investigated. Three were found to seriously influence surface cleanliness after drying: the water content in the IPA, temperature distribution around the wafers, and the IPA vapor velocity. The optimum drying conditions in which high quality of wafer surface cleanliness can be realized were confirmed experimentally 相似文献