共查询到19条相似文献,搜索用时 640 毫秒
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声表面波气体传感器的最终成功既取决于化学界面膜的性能,也取决于声表面波器件设计的最佳化。给出了声表面波气体传感器的设计考虑。 相似文献
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限于传统涂敷敏感膜的声表面波(SAW)气敏传感器存在成膜困难和选择性差、重复性差以及再生性差等问题,本研究提出一种基于压电基底表面气体气液相转换效应机理的瑞利波传感器。在此基础上开发了一种基于瑞利声表面波传感器和气相色谱(GC)分离柱的便携式气体检测系统。最后实验论证了方案的可行性,初步的实验结果表明该系统具有分析时间短、选择性好、灵敏度高,可检测ppb(10^-9)浓度的混合VOCs以及成本低等优势,显示其在痕量挥发性有机气体检测和分析应用上有良好的潜力和前景。 相似文献
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《Sensors and actuators. B, Chemical》2006,113(1):1-21
This paper revisits the fundamental basis for signal generation in polymer coated SAW vapor sensors and applies the independent component analysis (ICA) for feature extraction from the SAW sensor array data to explore whether the independent components could represent analyte-specific solvation parameters and whether they could form the feature vector for reliable pattern classification. Thermodynamic partitioning of analytes between vapor and polymer phases is treated as independent contributions from different solvation mechanisms, each associated with characteristic ‘environment swap’ energy. The overall equilibrium partition coefficient of an analyte is modeled as product of partial partition coefficients associated with different solvation mechanisms. The polymer films on SAW devices are treated to be acoustically thin. The theory of signal generation accounts for effects from both the mass as well as the viscoelastic loadings. It explains the signal amplification factor due to viscoelastic effects, and models the sensor signal to be proportional to the equilibrium partition coefficient. Thus, the logarithmic signal becomes a linear combination of the partial free energies associated with various solvation mechanisms. A linear-solvation-energy relationship (LSER) like factorization is assumed for the partial free energies where the latter are expressed as product of analyte and complimentary polymer associated solvation parameters. The problem of sensor array signal analysis is then treated as a blind source separation problem with the analyte solvation parameters being the independent sources, the polymer solvation parameters being the mixing weights and the log(signals) being the measured variables. The FastICA algorithm with Gram-Schmidt orthogonalization is applied to determine independent components. The principal component analysis (PCA) is done as pre-processing step for ICA. An experimental SAW sensor array data available in the literature [Rose-Pehrsson et al., Anal. Chem. 60 (1988) 2801–2811] is used to seek validation for our approach, and to examine the role of ICA in SAW sensor array signal processing. In brief, the paper establishes a direct relationship between the independent components and the analyte solvation parameters, and presents ICA as an effective method for feature extraction for pattern recognition in SAW electronic noses. 相似文献
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在声表面波陀螺效应作用过程中,由于哥氏力的作用比较微弱,导致现有的声表面波陀螺仪的检测灵敏度极低。为了改善哥氏力作用,在声表面波传播路径上分布金属点阵以增加质量负载,将有可能获得良好的灵敏度性能。本文结合研究层状介质中声波传输特性的方法对YZ-LiNbO3压电基片上的金属膜层对陀螺效应的影响做了理论计算。对比分析有无金属膜层的压电基片中陀螺效应的大小,以及不同金属材料对陀螺效应的影响作用,验证了用布置重金属点阵的方法来提高行波模式声表面波陀螺仪检测灵敏度的可行性,从而为高性能行波模式声表面波陀螺仪的研制奠定理论基础。 相似文献
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报道了带变迹叉指换能器(IDT)和倾斜金属反射栅的高Q值Y型声表面波(SAW)质量沉积传感器。用P矩阵方法分析了三种不同传感器的通带纹波。分别在振荡和非振荡模式下比较了这些传感器的通带纹波和Q值。分析了获得高Q值的原因。理论和实验结果表明:均匀孔径无反射栅的传感器旁瓣抑制为10dB,振荡模式下其Q值为5289;通过孔径变迹设计,传感器的旁瓣抑制和Q值分别改善到25dB和8689;而对孔径变迹并加入倾斜反射栅的传感器,这两个参数提高到25dB和12477。非振荡模式下带反射栅的传感器比没有反射栅器件的通带纹波约低2dB。因此,变迹IDT和金属反射栅的应用是SAW质量传感器Q值的改善的两个重要因素。由于Q值改善,质量沉积灵敏度达到5.24GHz?cm2/g 相似文献
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Integration of Microfluidics With a Love Wave Sensor for the Fabrication of a Multisample Analytical Microdevice 总被引:1,自引:0,他引:1
《Journal of microelectromechanical systems》2008,17(4):1010-1019
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This paper used the theoretical calculation to simulate the response of surface acoustic wave (SAW) delay-line on quartz substrate
and then compared to the experimental results. The coupling coefficients affected by operation frequency as well as aperture
length were built up by experimental data analysis. Based on the experimental values of these two parameters, the device-coupling
coefficient was defined. This method is new and we has not found in other document. In addition, it improves the simulation
results and helps the analysis process more comprehensive. This study developed ST-cut quartz SAW delay-lines with gold inter-digital
transducer (IDT) operating at 39.5 and 78.9 MHz corresponding to 80 and 40 μm of the wavelength. The differences of aperture
length in IDT designs were investigated to help understand the effects of this parameter on SAW sensor response. The maximum
error of operating frequency is 1%; of insertion loss is 4.25 and 3.13% for bandwidth. The larger of the insertion loss error
is expected owing to the result of mathematical approximation and the quality of quartz substrate. The simulation results
agree with the experimental results shows that the simulation method can apply to quartz-based SAW delay-line as well as for
other material based SAW delay-line applications. The results help understand more about the parameters which effect the insertion
loss, operating frequency and bandwidth. It should be very useful for IDT design in specific, SAW sensor and SAW filter design
in general. 相似文献