直线度误差分离方法的误差分析

本文在研究精密和超精密加工技术的发展对直线度误差分离技术所提出的新要求的基础上,定量分析了传感器初始对准误差、忽略摆角误差和传感器漂移特性差异在时域和频域直线度误差分离方法中造成的误差,同时指出了频域方法中权系数对测量误差的放大作用。     

基于频域--时域的机床直行部件运动误差在线测量

提出了以频域三点法求得的直线度误差为递推叠代初值的精确时域两点法测量机床直行部件运动误差的新方法。频域三点法所使用的测量数据是通过把传感器拾取的原始数据做对称延拓预处理后得到的，这样就可以避免经典频域三点法测量直线度误差时，由于直线度误差的非周期性、非封闭性以及端点不连续而引起的高阶谐波分量失真边缘效应。同时，利用现代控制理论分析了经典频域三点法的谐波抑制特性。并通过实验验证了该方法的正确性。     

时域二点法和三点法直线度EST的误差分析

时域二点法和三点法直线度ＥＳＴ的误差分析＊张镭张玉（东北大学沈阳１１０００６）０引言自八十年代初,日本学者田中等人首次将误差分离技术（ＥＳＴ）引入直线度误差测量中以来〔１、２〕,该项研究已成为国内外学者的重要前沿课题。尤其是时域ＥＳＴ避免了频域法所必...     

时域三点法测量直线度信息高精度获取方法研究

常规时域三点法在直线度误差测量中会把零位和随机误差的影响迭代放大,使得直线度重构曲线失真,无法得到正确的直线度误差。通过对常规时域三点法数据处理误差放大机理进行研究,提出了基于比较消除法的误差等效均化的处理办法,并利用仿真和实验证实了其有效性和实用性。优化了时域三点法的直线度测量,使得直线度信息高精度获取成为可能。     

使用短基准的超精密长导轨直线度误差测量方法

在超精密加工与检测技术中,高精度长导轨直线度误差的测量与补偿技术一直是一个研究重点。在系统研究现有各种导轨直线度误差测量方法的基础上,提出一种使用短基准的导轨直线度误差测量方法,将长导轨直线度误差的测量问题分解为具有一定重叠区域的数段较短导轨直线度误差的测量问题。直接利用超精密直线度物理基准测量各段导轨直线度误差,通过将各段导轨直线度误差拼接起来,重构出长导轨的直线度误差。利用空间坐标变换关系建立基于最小二乘法的直线度误差测量算法,以及相对机械运动误差对测量结果影响的数学模型,分析研究重叠区域二次采样点的匹配误差,以及测量误差、采样频率等因素对重叠区域长度选择的影响规律。对长550 mm的气浮导轨进行实际测量试验,仿真与测量试验表明上述方法简单实用,可操作性强。     

机床直行部件运动误差的在线测量

提出了采用精确时域两点法测量机床直行部件运动误差的新方法。该方法可以克服利用经典频域三点法测量直行部件运动误差时,由于误差的非周期性、非封闭性以及端点不连续而引起的高阶谐波分量失真等边缘效应。另外,该方法既可以得到机床直行部件的运动误差,又可以得到在该机床上加工零件的直线度形状误差,这些测量信息都有助于诊断机床的误差源,以提高机床的加工精度。     

基于误差分离技术的圆度误差在位测量

总结了现有用于在位圆度误差测量的误差分离技术,并对经典频域三点法、时域三点法、频域三点法的近似实现方法和频域三点法的改进实现方法的测量特点进行了评述。针对球度误差没有实现在位测量的问题,将圆度误差分离技术引伸到球度误差分离技术,并在理论上进行了探讨。     

基于误差分离技术的圆度误差在位测量

总结了现有用于在位圆度误差测量的误差分离技术,并对经典频域三点法、时域三点法、频域三点法的近似实现方法和频域三点法的改进实现方法的测量特点进行了评述.针对球度误差没有实现在位测量的问题,将圆度误差分离技术引伸到球度误差分离技术,并在理论上进行了探讨.     

高精度零件直线度采取误差分离技术的测量

高精度零件的直线度测量（例如理石平尺、精密导轨等）,其测量误差可通过两次测量,利用误差分离的方法消除测量基准的误差影响,本文通过直线度检查仪对理石平尺的测量实例来探讨一下如何进行误差分离法检测直线度,以及平尺两平面的平行度。本文将以平尺的测量为例介绍如何利用误差分离技术测量高精度零件的直线度方法探讨。     

传感器调零误差对直线误差分离的影响规律及其确定方法分析

分析了多点法直线 EST中传感器初始调零误差对直线误差分离结果的影响 ,指出不同方法的影响规律不同 :时域三点法中调零误差使直线形状误差按抛物线规律呈非线性增大 ,对直线误差评定产生很大影响 ;时域二点法中调零误差使直线形状误差线性增大 ,但对评定无影响 ;频域三点法的直线误差则不受调零误差的影响。提出了通过构造软基准来确定调零误差的两种方法 :时域频域结合法和对称反转配置法 ,可以克服常规方法的局限性     

Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage

This paper describes the measurement of straightness error motions (vertical straightness and horizontal straightness) and rotational error motions (pitch, yaw and roll) of a commercial precision linear air-bearing stage actuated by a linear motor. Each of the error motions was measured by two different methods for assurance of reliability. The stage was placed in the XY-plane and moved along the X-direction. The pitch error and yaw error, which were measured by an autocollimator and the angle measurement kit of a laser interferometer, were about 8.7 and 1.6 arc-s, respectively, over a travel of 150 mm with a moving speed of 10 mm/s. The roll error was measured by the autocollimator through scanning a flat mirror along the X-direction. The second method for roll error measurement was to scan two capacitance-type displacement probes along the flat surface placed in the XZ-plane. The two probes with their sensing axes in the Y-direction were aligned with a certain spacing along the Z-axis. The roll error can be obtained by dividing the difference of the outputs of the two probes by the spacing between the two probes. The roll error was measured to be approximately 11.8 arc-s over the 150 mm travel. The horizontal straightness error and the vertical straightness error (Y- and Z-straightness errors) were measured by using the straightness measurement kit of the laser interferometer. The second method for straightness measurement was to scan the flat surface with a capacitance-type displacement probe. The horizontal and vertical straightness errors of the stage over the 150 mm travel were measured to be approximately 207 and 660 nm, respectively.     

双PSD实现长直导轨四自由度测量的新方法

介绍一种基于双二维PSD实现大长度宽范围直线导轨俯仰角、偏摆角以及空间二维直线度等四个自由度在线测量的新型方法,对其测量原理进行了分析和论证,并建立了求取长直导轨俯仰角、偏摆角的数学模型和基于激光空间偏角修正基础上的二维直线度的数学模型;讨论了影响测量过程的各种因素,提出了消除其影响所应采取的措施。该测量方法提高了长直导轨直线度的测量精度和效率。     

三测头法误差分离技术的理论与试验

建立回转体零件频域三测头法误差分离数学模型,采用离散傅里叶变换法对误差分离基本方程进行求解,并通过计算机仿真对该数学模型进行验证和分析;采用经TALYROND262形状测量仪标定过的试件,在MB1332A半自动外圆磨床上进行圆度、圆柱度和轴线直线度误差在位测量对比试验,仿真结果和试验均成功地证明理论和数学模型的正确性,并得出结论:频域三测头误差分离方法基本上能实现各项误差的完全分离,适于在位测量,并可获得较高的在位测量精度。     

A new digital measurement method for accurate curve grinding process

In this paper, an online measurement and error compensation system for curve grinding based on pattern recognition was presented and verified by experiments. The measurement system organization and its principle of operation were introduced in detail. The work piece and grinding wheel image were sampled at certain positions to avoid spark influence. In order to increase system resolution, images were sampled only at local areas of the work piece and grinding wheel. A discrimination technology based on a circular tolerance zone was proposed which can solve the problem of local image edge comparison. For image de-noising, a local threshold algorithm was applied to determine new wavelet coefficients. Furthermore, a two-step edge detection method was used to realize sub-pixel precision. Finally, a series of experiments were carried out to examine the detection precision of the image measurement system and its influencing factors. From experiments, it can be said that the proposed method in this paper is effective, and its detection precision is much better than traditional methods.     

A new 2D error separation technique for performance tests of CNC machine tools

The error separation technique is widely adopted for many machine tool performance tests. The most common applications include roughness measurement, straightness measurement and spindle measurement. In this paper, two error-separation technologies, the straightness reversal technique and the semi-reversal technique, are developed. The straightness reversal technique can be adopted for the straightness measurement of a linear axis. The semi-reversal technique can be adopted for setting error separation in a contouring test and in the spindle error measurement. In this paper, mathematical models have been developed. In order to verify the possibility of the semi-reversal technique, related experimental work has been carried out.     

小型精密X－Y工作台误差的理论分析及补偿

从理论上分析了小型精密X-Y工作台的各种误差。针对这些误关,给出一些确实可行的措施来减小机械系统的误差；用软件对系统的几种误差进行了补偿。在此基础上,讨论了工作台开环系统及闭环系统的精度。提出了测量导轨直线性误差的新方案,使测量方法的原理误差降低到完全可以忽略不计的程度。     

小型精密X－Y工作台误差的理论分析及补偿

从理论上分析了小型精密ｘ－Ｙ工作台的各种误差。针对这些误关，给出一些确实可行的措施来减小机械系统的误差；用软件对系统的几种误差进行了补偿。在此基础上，讨论了工作台开环系统及闭环系统的精度。提出了测量导轨直线性误差的新方案，使测量方法的原理误差降低到完全可以忽略不计的程度。