体硅加工的压电式微加速度计的设计

提出并设计了一种采用体硅微制造工艺制造的压电式微加速度计,其中体硅加工的硅质量块由悬臂梁支撑且悬臂梁部分区域沉积ZnO压电薄膜.通过对压电悬臂梁建立一维解析模型,研究了影响加速度计灵敏度的结构因素.在此基础上,利用有限元方法软件ANSYS设计了实际的微加速度计,并对六种不同的微加速度计结构进行了分析,得到了不同结构微加速度计的工作频率范围及灵敏度结果.     

MEMS微惯性测量组合标定技术研究

在介绍MEMS微惯性测量组合组成结构的基础上,根据MEMS陀螺和MEMS加速度计的输出模型,提出并推导了一种MEMS微惯性测量组合标定方法。利用该方法标定微陀螺的基本思路是:设置转台以速率方式运行,并且确定合适的旋转角速率间隔,使微惯性测量组合每个轴向的陀螺仪分别敏感不同的角速率,然后通过一系列计算,求解出待标定的零点偏置电压、刻度因子、交叉耦合系数及其对应的安装误差角。标定加速度计的方法类似,不同之处是设置转台以位置方式运行。理论分析和实验结果表明,利用本文所介绍的这种标定方法能够准确地将MEMS微惯性测量组合的输出电压值转化为对应的角速度和比力信息,为后续精确的姿态解算和导航计算奠定基础。     

硅微机械陀螺表头温度特性研究与测试

硅微机械陀螺目前已经能达到较高的精度,但温度的变化对它的性能有较大的影响.为了改善硅微机械陀螺的温度性能,从硅微机械陀螺的基本原理入手,通过分析及测量微机械表头的传递函数中各个参数随温度的变化规律以及它们对陀螺性能的影响,找到了影响陀螺温度性能的关键参数和改进方法,对陀螺的微结构设计和陀螺的温度补偿电路设计都有重要的指导意义.     

提高NGIMU性能的加速度计动态补偿器的研究

无陀螺惯性测量技术是利用加速度计代替传统的陀螺,构成无陀螺惯性测量组合(NGIMU)实现制导的.首先,基于NGIMU九加速度计配置方案,根据加速度计的动态特性,推导了模型的动态导航方程,然后通过对加速度计进行动态补偿达到提高系统导航精度的目的,最后进行了系统三个方向角度运算的仿真验证.仿真结果表明,当加速度计输入信号的动态特性越强,NGIMU的导航误差越大,在动态补偿后系统的导航精度得到了有效提高.     

无陀螺微惯性测量装置

首先简要介绍了惯性测量装置及微惯性测量装置的特点及分类,指出了采用无陀螺技术设计微惯性测量装置的优势。并介绍了国内外无陀螺测量技术发展状况,提出了一种新颖的结构设计,推导了导航方程的算法,利用了多传感器的冗余信息对算法进行优化,降低了求解微分方程的累积误差,提高了无陀螺微惯性测量组合的导航精度,最后进行了仿真计算,验证了该方案的可行性。     

基于MEMS和CORTEX-M3的微惯性测量单元研制

从工程实际出发,给出了一种基于新型Cortex-M3内核ARM和MEMS惯性传感器的低成本、高性能微型惯性测量单元的结构框架。详细介绍了采用三轴MEMS陀螺、三轴MEMS加速度计和三轴磁阻传感器研制的微惯性测量单元硬件设计方案,分析了陀螺和加速度计的信号噪声,利用均值滤波法对信号进行预处理,对预处理后的信号采用FIR滤波器进行滤波,对陀螺和加速度计进行了标定。该测量单元已应用于某小型无人机的姿态测量,达到预期效果。     

基于非线性滤波的无人机组合导航新方法研究

提出一种基于微惯性测量装置/多卜勒测速系统的无人机组合导航新方法,并采用非线性滤波-Unscented卡尔曼滤波(UKF)来解决系统状态方程和量测方程的非线性问题.首先,采用低精度的微陀螺和微加速度计作为惯性测量器件构成MIMU,将其与多卜勒测速系统(DVS)构成MIMU/DVS组合导航系统;然后,以MIMU和DVS的系统误差作为状态,利用各子系统输出的速度信息构造量测,设计卡尔曼滤波器,采用UKF法对导航系统误差进行估计,进而对系统进行误差校正.仿真结果表明,基于非线性滤波的MIMU/DVS无人机组合导航新方法具有较高的导航精度,同时有效地降低了系统成本,具有良好的工程应用价值.     

谐振原理在硅微机械加速度计中的应用

将谐振原理应用于微硅机械加速度计中，可以改善后者输出信号的质量，降低检测难度。随着微机电系统工艺的发展，谐振式微加速度计巳成国硅微机械加速度计发展的新趋势。     

一种小型惯性测量单元的精确标定技术

研究了一种基于MEMS陀螺和加速度计的惯性测量单元(IMU)的系统标定技术,建立了陀螺和加速度计的温度漂移和非线性误差模型,采用逐步线性回归法对以上模型进行了简化,并设计了补偿算法;实时补偿效果表明,在-40℃~60℃的温度变化范围内,惯性测量单元的零位偏值、偏值稳定性和非线性度都达到较高精度,这种误差标定方法可有效解决MEMS-IMU惯性器件误差的标定与补偿问题。     

（中国微米纳米技术学会文章）一种硅微机械结构振动幅度的电学测量方法及实验研究

本文针对硅微机械结构振动幅度由于封装难以计算机视觉测量及电学测量中的精度受接口电路参数影响的问题,在对静电梳齿驱动、平板电容检测的硅微谐振结构进行建模分析后,提出基于单边带电压比的电学测量振动幅度的方法并分析了测量方法的原理。实验表明研制的某硅微机械谐振加速度计在受迫振动下的振动幅度为0.25um,频谱分析还表明存在上电噪声引起的振动幅度,该测试方法还能应用于硅微谐振结构的谐振频率测量,同时为高品质因数的硅微机械谐振结构的可静电自激驱动提供了依据。     

采用单片机的并行图像处理系统

本文介绍了一种用单片机构成的并行计算机结构，主要用于实时图像数据的采集和处理。该结构由１６个以８０３１为核心的处理单元组成。每个处理单元将并行处理一幅图像的１６分之一。     

A multilink active catheter with polyimide-based integrated CMOSinterface circuits

This paper describes an active catheter with flexible polyimide-based integrated CMOS interface circuits for communication and control (C&C IC) to be used for applications in biomedicine. The active catheter has a multilink structure. Distributed micro shape memory alloy (SMA) coils are utilized as actuators for multidegree of freedom movement. The C&C IC's, which are incorporated on the links, require three common lead wires to address all the links and control the selected SMA actuators in the active catheter. An MOS transistor with large channel width is used for switching the SMA actuator. To reduce the system size and simplify the assembly work, the C&C circuit and three lead wires are fabricated on the same substrate using CMOS-compatible polyimide-based process. The outer diameter of the fabricated active catheter is approximately 2.0 mm. The fabricated active catheter has a four-link structure and six degrees of freedom of movement per one link. A simple bending model of one unit is presented and compared with the experiments. The fabricated C&C IC measures 1.0 mm×3.35 mm×0.2 mm. The link addressing and the actuator switching functions of the fabricated chip were confirmed. The minimum access time for addressing and actuating a single unit was 6.4 μs. The active catheter was actuated by the fabricated C&C IC chip with flexible interconnect leads in response to the C&C signals from the outside controller     

基于旋转谐振结构的单芯片二维电场传感器

提出并研制了一种二维电场检测传感芯片,将四个电场测量微型单元和旋转式驱动微结构集成在3. 5 mm ×3. 5 mm的敏感结构上,实现了单芯片的电场二维测量.介绍了传感器的工作原理、敏感结构的设计,以及基于绝缘体上硅( SOI)工艺的单芯片微型二维电场传感器制备工艺技术.成功研制出传感器原理样机,研究了微型二维电场传感器的标定方法,开发了用于电场二维标定的测试装置,并在室温常压下对传感器进行了二维标定.实验结果表明:该传感器能够有效减小电场的轴间耦合干扰,测量误差优于7. 04%,线性度可达到1. 25%.     

基于MEMS技术的低g值微惯性开关的设计与制作

惯性开关是一种感受惯性加速度,执行开关机械动作的精密惯性装置.选用典型的"弹簧-质量-阻尼"结构,研制了一种基于平面矩形螺旋梁的低g值(1gn～30gn)微惯性开关.惯性敏感单元由一个方形质量块和支撑它的两根螺旋梁组成,采用ANSYS有限元软件对其进行了仿真分析.采用MEMS体硅加工工艺和圆片级封装技术,包括KOH腐蚀...     

基于ADS8568的八路数据采集系统设计

为了提高某惯性测量单元的精度,需对其输出信号进行大量采集以建立误差模型.该惯性测量单元不仅包含6路惯性传感器信号(3路陀螺和3路加速度计),还包括两路温度传感器输出以提供温度补偿,所以设计了基于ADS8568的八路数据采集系统.该系统采用AD芯片ADS8568,实现8路模拟信号的同步采集;以FPGA为主控芯片,控制信号的采集存储;以8G bit FLASH为存储芯片,实现大容量数据的实时存储.经实验验证,该采集系统可以正确采集传感器输出数据,采集到的数据正确有效,可用于误差建模的分析,具有一定的工程实用价值.     

Vision-based mobile robots on highways

Intelligent vehicles are mobile robots on highways. They are expected to improve the safety, efficiency and environmental impacts of the current highway traffic systems. Vision systems will play an important role as sensors for the intelligent vehicles. This paper first compares the vision sensors with other sensing methods from an application point of view and then describes two vision systems, one which we have developed and another which we are developing. Two important features are required for the vision systems applied to intelligent vehicles: three-dimensional (3D) measurement capability and real-time operation. We chose a trinocular stereo vision scheme among a number of 3D vision processing methods because it is suitable for real-time operations with dedicated processor architectures. The trinocular stereo algorithm requires a large number of operations, but all the operations are relatively straightforward and, therefore, they are suitable for custom architecture implementation. The system takes three images simultaneously by using three TV cameras installed on a single horizontal line at the front grill of the test car. Vertical edges are extracted from these images and the spatial offsets (or disparities) among the images are calculated for measuring the distances to the objects. The first version was developed and installed in a car for highway testing. Two custom digital processors were developed: one for edge detection and the other for stereo matching. The test results were encouraging and the architectures based on ASIC (Application Specific Integrated Circuits) are 800 and 550 times more efficient, respectively, compared with conventional microprocessors for edge detection and stereo matching. The second version is currently being developed in order to further reduce the silicon area size. It uses hybrid analog/digital circuit technology while the first version uses only digital circuits. We are developing a hybrid analog/digital array processor chip which includes a large number of processing elements. Each processing element includes a digital memory unit, a data flow control switch unit and an analog arithmetic/logic unit. The analog arithmetic/logic unit reduces the silicon area size significantly compared with the digital one. The data flows among multiple processing elements in the array chip in a form of analog voltage. The data flow is controlled by the data flow switches. The digital memory unit controls the set-up of the data flow control switch and arithmetic/logic units.     

集成微流体测控芯片的研制

设计、研制了集成有微泵、微沟道、微流量传感器、温度传感器的微流体测控芯片.采用有限元软件ANSYS模拟分析了将其作为冷却芯片时微沟道的散热作用,分析确定了芯片上各元件的结构.该集成芯片为硅-玻璃结构,在硅片上,利用ICP法刻蚀无阀微泵泵体和微沟道;在7740玻璃片上,以溅射、剥离法制作微流量和温度传感器;图形精确对准后硅/玻璃以静电键合方法封接.无阀微泵采用压电元件驱动.测试结果表明:集成芯片具有冷却功能,循环水的流速最大可达25.4mm/s.     

基于双轴旋转框架捷联惯性组件快速标定方法研究

现场条件下惯组的标定精度及标定速度直接影响惯性导航系统的使用.基于双轴旋转框架的捷联惯组快速标定法,将带有旋转框架的惯组安装在载体上,只需一次通电后控制双轴框架合理转位,实现惯组误差参数的快速辨识.结果表明6位置快速标定法,可以满足捷联惯组现场标定精度要求且在30 min内即可完成惯组标定,尤其是降低了现场标定时对高精度三轴转台的依赖,极大地提高了器件测试的灵活性.     

A three-dimensional self-reconfigurable system

A three-dimensional (3D) self-reconfigurable system made of identical units is proposed. Each unit has six arms on the surface of its base cube which can connect to neighboring units mechanically. By the connection, a cubic-lattice structure is formed. A unit can carry its neighbor unit from one node of the lattice to another by rotating its arm by 90°. Repeating this movement, the structure can reconfigure itself to realize various 3D structures. The general process of reconfiguration was proposed for this system. A prototype system including six units was made and basic motions of self- reconfiguration were verified.