Applications of variable angle spectroscopic ellipsometry to strained SiGe alloy heterostructures

Variable angle spectroscopic ellipsometry (VASE) has been used to characterize several Si_xGe_1−x/Ge heterostructures. First, Si_xGe_1−x/Ge superlattice (SL) structures were characterized in terms of the layer thicknesses, composition, x, of the Si_xGe_{1− x} layer, and oxide thickness. High-resolution X-ray diffraction results are also presented for the Si_xGe_1−x/Ge SL structures and are shown to be in close agreement with the VASE results once strain effects are taken into account. VASE has also been used to study thick, Ge-rich Si_xGe_1−x/Ge heterostructures that have been grown on Si substrates. A stepped buffer has been deposited first in order to minimize the strain in the Si_xGe_1−x/Ge layers. VASE can be used to give a qualitative determination of the residual strain along with the thickness of all layers within the optical penetration depth from the surface.     

Effects of oxygen partial pressure on lead content of PLZT thin films produced by excimer laser deposition

Excimer laser ablation has been used to produce thin films of lanthanum-modified lead zirconate titanate (PLZT), or Pb_1−xLa_x(Zr_1−yTi_y)_1−x/4O₃. PLZT is an interesting class of materials since it has a wide range of compositionally dependent electro-optical properties and strong non-linear optical characteristics. PLZT thin films of 7/0/100, 28/0/100 and 0/0/100 compositions have been deposited onto crystalline Si100 and amorphous fused silica substrates. Effects of oxygen backfill pressure on the Pb:(Ti + La) ratios were investigated. The results indicate that controlling the oxygen backfill pressure during laser deposition strongly influences the stoichiometry and crystal structure of PLZT thin films.     

Molecular beam epitaxy synthesis of Si1−yCy and Si1−x−yGexCy alloys and Ge islands using an electron cyclotron resonance argon/methane plasma

We report the growth of Si_1−yC_y and Si_1−x−yGe_xC_y alloys on Si(001) by electron cyclotron resonance plasma-assisted Si molecular beam epitaxy using an argon/methane gas mixture. Various Si/Si_1−yC_y and Si/Si_1−x−yGe_xC_y multilayers have been grown and characterized principally by X-ray diffraction and Raman spectroscopy. The influence of growth parameters and electron cyclotron resonance plasma source operating conditions on the C substitutional incorporation was studied. Under optimum growth conditions the structures show good structural properties and sharp interfaces with carbon being essentially substitutionally incorporated up to concentrations of 1%. No significant carbon incorporation was measured in films grown under a high methane partial pressure without plasma excitation. Si_1−x−yGe_xC_y layers grown with this technique exhibit the strain compensation and enhanced thermal stability expected for these ternary alloys. Carbon pre-deposition of Si through surface exposure to the argon/methane plasma is shown to act as an antisurfactant on the growth of Ge islands by suppressing the formation of a Ge wetting layer on the surface.     

Doping and electrical characteristics of in-situ heavily B-doped Si1−x−yGexCy films epitaxially grown using ultraclean LPCVD

Doping and electrical characteristics of in-situ heavily B-doped Si_1−x−yGe_xC_y (0.22<x<0.6, 0<y<0.02) films epitaxially grown on Si(100) were investigated. The epitaxial growth was carried out at 550°C in a SiH₄–GeH₄–CH₃SiH₃–B₂H₆–H₂ gas mixture using an ultraclean hot-wall low-pressure chemical vapor deposition (LPCVD) system. It was found that the deposition rate increased with increasing GeH₄ partial pressure, and only at high GeH₄ partial pressure did it decrease with increasing B₂H₆ as well as CH₃SiH₃ partial pressures. With the B₂H₆ addition, the Ge and C fractions scarcely changed and the B concentration (C_B) increased proportionally. The C fraction increased proportionally with increasing CH₃SiH₃ partial pressures. These results can be explained by the modified Langmuir-type adsorption and reaction scheme. In B-doped Si_1−x−yGe_xC_y with y=0.0054 or below, the carrier concentration was nearly equal to C_B up to approximately 2×10²⁰ cm⁻³ and was saturated at approximately 5×10²⁰ cm⁻³, regardless of the Ge fraction. The B-doped Si_1−x−yGe_xC_y with high Ge and C fractions contained some electrically inactive B even at the lower C_B region. Resistivity measurements show that the existence of C in the film enhances alloy scattering. The discrepancy between the observed lattice constant and the calculated value at the higher Ge and C fraction suggests that the B and C atoms exist at the interstitial site more preferentially.     

Bond-lengths of the atomic nearest-neighbor and next-nearest-neighbor in A1−xBxC1−yDy III–V solid solutions

On the basis of the FDUC model and the hypothesis of the constant covalent radii, the expressions of the atomic nearest-neighbor and the next-nearest-neighbor bond-lengths were derived for A_1−xB_xC_1−yD_y III–V quaternary solid solutions. This set of bond-length expressions predicts the averaged bond-lengths and bond angles at any concentration (x, y) for the III–V pseudobinary and quaternary solid solutions, which are only dependent on the lattice parameters and the concentrations of the pure end compounds. When x=0, 1 or y=0, 1, A_1−xB_xC_1−yD_y III–V quaternary solid solutions degenerate into the relative pseudobinary solid solutions, in which the nearest-neighbor and the next-nearest-neighbor bond-lengths agree well with the experimental results. Further discussion and comparison with other theoretical models are also given in this paper.     

Structural and optical characterization of β-FeSi2 layers on Si formed by ion beam synthesis

Structural and optical properties have been investigated for surface β-FeSi₂ layers on Si(100) and Si(111) formed by ion beam synthesis using ⁵⁶Fe ion implantations with three different energies (140–50 keV) and subsequent two-step annealing at 600 °C and up to 915 °C. Rutherford backscattering spectrometry analyses have revealed Fe redistribution in the samples after the annealing procedure, which resulting in a Fe-deficient composition in the formed layers. X-ray diffraction experiments confirmed the existence of /gb-FeSi₂ by annealing up to 915 °C, whereas the phase transformation from the β to phase has been induced at 930 °C. In photoluminescence measurements at 2 K, both β-FeSi₂/Si(100) and β-FeSi₂/Si(111) samples, after annealing at 900–915 °C for 2 h, have shown two dominant emissions peaked around 0.836 eV and 0.80 eV, which nearly coincided with previously reported PL emissions from the sample prepared by electron beam deposition. Another β-FeSi₂/Si(100) sample has shown sharp emissions peaked at 0.873 eV and 0.807 eV. Optical absorption measurements at room temperature have revealed the allowed direct bandgap of 0.868–0.885 eV as well as an absorption coefficient of the order of 10⁴ cm⁻¹ near the absorption edge for all samples.     

Magnetic behaviour of Cd and Cr substituted cobalt ferrites

Polycrystalline samples with general formula Cd_xCo_1−xFe_2−yCr_yO₄ (x=0, 0.25, 0.50, 0.75 and 1.00; y=0, 0.15 and 0.30) were prepared by standard ceramic techniques. The samples were characterized by XRD, IR, SEM and VSM techniques. The magnetic properties were studied at room temperature. The Neel's two-sublattice model is found to exist for lower concentration of Cd (x<0.25). Thereafter (x≥0.25) the canted spin model is found to exist for which Yafet–Kittel (Y–K) angles are calculated. The saturation magnetic moment is found to reduce with the substitution of Cr³⁺, and is explained on the basis of cation distribution. No magnetic transformation is observed for the samples with higher cadmium concentrations (for x=0.75 and 1.00).     

Spectroscopic ellipsometry analysis of GaAs1 − xNx layers grown by molecular beam epitaxy

In this work, we present the effect of nitrogen incorporation on the dielectric function of GaAsN samples, grown by molecular beam epitaxy (MBE) followed by a rapid thermal annealing (for 90 s at 680 °C). The GaAs_1 − xN_x samples with N content up to 1.5% (x = 0.0%, 0.1%, 0.5%, 1.5%), are investigated using room temperature spectroscopic ellipsometry (SE). The optical transitions in the spectral region around 3 eV are analyzed by fitting analytical critical point line shapes to the second derivative of the dielectric function. It was found that the features associated with E₁ and E₁ + Δ₁ transitions are blue-shifted and become less sharp with increasing nitrogen incorporation, in contrast to the case of E₀ transition energy in GaAs_1 − xN_x. An increase of the split-off Δ₁ energy with nitrogen content was also obtained, in agreement to results found with MOVPE GaAs_1 − xN_x grown samples.     

On the formation of radiation-induced defects in fluoroaluminate glasses

The spectra of electron paramagnetic resonance (EPR) of fluoroaluminate glass (FAG-36) based on mineral usovite Ba₂CaMgAlF₁₄ were studied. The paramagnetic centers responsible for EPR signals were induced by ion bombardment of the substrates prepared from this glass. The N⁺, O⁺, Ar⁺ and Pb + ions with energy E = 150 keV were used. The integrated dose D was 2 × 10¹⁶ ions/cm². It is shown by means of isochronal anneal experiments and computer simulation of the EPR spectra that they contain four components: broad Gaussian line (GL) with g = 2.016 and σ oscillating in the range 30–40; two anisotropic spectra with g_z = 2.016, g_y = 2.009; g_x = 2.001 (FA₁) and g_z = 2.045; g_y = 2.010; g_x = 1.98 (FA₂) as well as narrow isotropic line of Lorentzian shape with g = 2.0025 and ΔH = 0.6 mT. The comparison of obtained results with literature data for γ-irradiated fluoride glasses and ion-implanted oxide glasses of different compositions permitted to conclude that GL is due to hole defects typical of fluoride glasses and localized on several anions (fluorines and oxygen(s)); anisotropic FA₁- and FA₂-spectra are attributed to molecular 0₂⁻-ions, and narrow isotropic signal is supposedly assigned to big molecular ions (O₂O⁻, 0₄⁻ , CO⁺, CO⁻) located in voids of damaged implantation layer.     

Non-collinear magnetism and exchange couplings in FeCo/Mn superlattices

We present the main results of a systematic study of the magnetic properties of Fe_xCo_{1 − x}/Mn_n for various Fe concentrations x and Mn thicknesses n. We show that the magnetic order in the Mn spacer changes from collinear to non-collinear when the Fe concentration decreases. This behaviour is discussed in relation with a bulk ‘canted’ magnetic state nearly degenerate with the collinear AF order. The origin of the exchange of stability between these two magnetic states is ascribed to a stronger collinear character of the Fe/Mn interface than the Co/Mn one.     

III–V–N compounds for infrared applications

III–V alloys containing nitrogen and As or P are potential candidate materials for infrared applications. The most studied material in this system is GaAs_1−xN_x. After reviewing the early experiments, and some theoretical predictions, we describe growth experiments by metalorganic molecular beam epitaxy, in which highly crystalline, single phase material was obtained for x≤0.18. Room temperature photoluminescence was measured for layers with x=0.73%. The GaAsN alloys seem to exhibit a composition dependent bowing parameter.     

Investigation of MBE grown GaAs/AlGaAs/InGaAs heterostructures

This paper reports on the influence of the In mole fraction variation (0.1≤x≤0.25) of MBE grown pseudomorphic GaAs/Al_yGa_1−yAs/In_xGa_1−xAs heterostructures on the material quality and the performance of the fabricated devices. For x=0.1–0.15, the carrier mobility in the samples was 4500 cm² V⁻¹ s (at 300 K) and 37 000 cm²V⁻¹ s (at 77 K) and decreased significantly at low temperatures as x was increasing up to 0.25. Transistors with gate length of 0.8 m and In_0.1Ga_0.9As channels exhibited transconductances of 200–220 mSm mm⁻¹ and output conductances of 0.15–0.20 mSm mm⁻¹, while gate-source breakdown voltages were 27–28 V. Delay times of the designed and fabricated ICs frequency dividers by 2 were 130–140 ps.     

Growth of lithium doped silver niobate single crystals and their piezoelectric properties

Lithium doped silver niobate (Ag_1−xLi_xNbO₃, 0 < x < 0.1) is one of the candidate materials for lead-free piezoelectric materials. In this study, Ag_1−xLi_xNbO₃ single crystals were successfully grown by a slow cooling method. Crystal structure was assigned to perovskite-type orthorhombic (monoclinic) phase. Dielectric properties were measured as a function of temperature. As a result, with increasing lithium contents, the phase transition at around 60 °C was shifted to lower temperature while the phase transition at around 400 °C was shifted to higher temperature. On the basis of these peak shifts, the lithium contents in Ag_1−xLi_xNbO₃ single crystals were determined. Moreover, P–E hysteresis measurement revealed that pure silver niobate crystal was weak ferroelectrics with P_r of 0.095 μC/cm² while Ag_0.9Li_0.1NbO₃ (ALN10) crystal was normal ferroelectrics with P_r of 10.68 μC/cm². About this ALN10 crystal, polling treatment was performed and finally piezoelectric properties were measured. As a result, high electromechanical coupling coefficient k₃₁ over 70% was observed.     

Ag glasses based on Zn-phosphate

The partial substitution of Zn²⁺ for Ag⁺ in Ag₄P₂O₇ leads to the formation of a wide glassy domain of composition [Ag₄P₂O₇] _(1−y) [Zn₂P₂O₇] _(y) with 0.20y0.87. The introduction of AgI in these materials results in a new series of glasses of formula [(Ag₄P₂O₇)_(1−y) (Zn₂P₂O₇)_(y)] _(1−X) [AgI] _(x), which domain for the composition y = 0.25 corresponds to 0x 0.64. The structure as well as the thermal and electrical properties of these materials are compared with those of the [AgPO₃] _(1−X) [AgI] _(x) and [Ag₄P₂O₇] _(1−x) [AgI] _(x) glasses.     

Optical transitions near the band edge in bulk CuInxGa1−xSe2 from ellipsometric measurements

From the analysis of the variation of optical absorption coefficient with incident photon energy between 0.8 and 2.6 eV, obtained from ellipsometric data, the energy E_G of the fundamental absorption edge and E_G′ of the forbidden direct transition for CuIn_xGa_1−xSe₂ alloys are estimated. The change in E_G and the spin-orbit splitting Δ_SO=E_G′−E_G with the composition x can be represented by parabolic expression of the form E_G(x)=E_G(0)+ax+bx² and Δ_SO(x)=Δ_SO(0)+a′x+b′x², respectively. b and b′ are called “bowing parameters”. Theoretical fit gives a=0.875 eV, b=0.198 eV, a′=0.341 eV and b′=−0.431 eV. The positive sign of b and negative sign of b′ are in agreement with the theoretical prediction of Wei and Zunger [Phys. Rev. B 39 (1989) 6279].     

The electronic structure of colossal magnetoresistive manganites

The ferromagnetic manganites A_{1 − x}B_xMnO₃ (A a trivalent element and B divalent) have been the subject of intensive study in the past few years. These manganites exhibit colossal magnetoresistance (CMR), i.e. their resistance can drop several orders of magnitude under influence of an external magnetic field. Electronic structure calculations show that these manganites are half-metallic: they are conducting for one spin direction exclusively. The possible relation between half-metallic magnetism and colossal magnetoresistance is discussed.     

Chemical vapour deposition of molybdenum carbides: aspects of phase stability

Thin films of different molybdenum carbides (δ-MoC_1−x, γ′-MoC_1−x and Mo₂C) have been deposited from a gas mixture of MoCl₅/H₂/C₂H₄ at 800°C by CVD. The H₂ content in the vapour has a strong influence on the phase composition and microstructure. Typically, high H₂ contents lead to the formation of nanocrystalline δ-MoC_1−x films while coarse-grained γ′-MoC_1−x is formed with an H₂-free gas mixture. This phase has previously only been synthesized by carburization of Mo in a CO atmosphere and it has therefore been considered as an oxycarbide phase stabilized by the presence of oxygen in the lattice. Our results, however, show that γ′-MoC_1−x films containing only trace amounts of oxygen can be deposited by CVD. Stability calculations using a FP-LMTO method confirmed that the γ′-MoC_1−x phase is stabilized by oxygen but that the difference in energy between e.g. δ-MoC_0.75 and oxygen-free γ′-MoC_0.75 is small enough to allow the synthesis of the latter phase in the absence of kinetic constraints. Annealing experiments of metastable δ-MoC_1−x and γ′-MoC_1−x films showed two different reaction products suggesting that kinetic effects play an important role in the decomposition of these phases.     

Determination of the E1 and E1+Δ1 energy bands by photoreflectance in AlxGa1−xAs in the region 0<x<0.55

The E₁ and E₁+Δ₁ energy bands of metal–organic chemical vapor deposition grown Al_xGa_1−xAs, with x in the range 0–0.55, have been determined using photoreflectance technique. The aluminum composition for each sample was determined using the energy of the room-temperature photoluminescence compensated peak value and a suitable fundamental band gap formula. The positions of the E₁ and E₁+Δ₁ peaks were determined from curve-fitting an appropriate theoretical model to our experimental data by a modified downhill simplex method. Using the results, we propose new E₁ and E₁+Δ₁ cubic expressions as functions of the aluminum composition, x, and compare them with the available reported expressions.     

Epitaxial grown K1−xRbxTiOPO4 films with extremely flat surfaces for waveguiding

We report on epitaxial {1 0 0} K_1−xRb_xTiOPO₄ waveguide films for the visible spectral range grown on KTiOPO₄ substrates by liquid phase epitaxy. Using the m-line technique a refractive index increase of Δn_x≈0.007 and Δn_z≈0.004 for TM and TE polarisation has been determined for a K_0.78Rb_0.22TiOPO₄ film. Optical transmission and nearfield distribution are comparable to conventional ion-exchanged waveguides. Typical attenuation of about 1 dB/cm for both TM and TE polarisation was obtained at λ=532 and 1064 nm. Energy-dispersive X-ray spectrometry reveals solid-solution films with graded rubidium composition profiles. X-ray rocking curve analyses confirm the epitaxial growth process and indicate perfect and relaxed K_1−xRb_xTiOPO₄ films. Atomic force microscopy investigations reveal regular step structures with step heights Δh<1.3 nm resulting in rms-roughness values of ≈0.4 nm.     

Structural investigation of bulk and thin film PLZT using X-ray absorption spectroscopy

Thin film electro-optic and non-linear optical materials are of interest for applications in high-speed integrated optical devices. Materials of the system Pb_1−x/100La_x/100(Zr_y/100 Ti_1−y/100)_1−x/400O₃ or PLZT x/y/(100−y) are attractive since they can be integrated into Si and GaAs substrates using suitable deposition techniques. In this investigation we examine the structural properties of r.f. magnetron sputter-deposited PLZT using X-ray absorption near-edge spectroscopy (XANES). For XANES analysis, four samples were selected: (1) a highly oriented PLZT 28/0/100 film of ≈ 4500 Å deposited on SiO₂; (2) a highly oriented PLZT 28/0/100 film of ≈ 4500 Å deposited on a 2 ωm SiO₂ buffer layer over a Si(100) substrate; (3) a highly oriented PLZT 28/0/100 film of ≈4500 Å deposited on Al₂O₃ (1 02); and (4) a commercial ceramic wafer of PLZT 9/65/35. The XANES experiments were performed at the Stanford Synchrotron Radiation Laboratory (SSRL) using electron yield and fluorescence techniques. Data was taken at the Ti K-edge (4966.4eV) and compared to reference spectra. Of the reference spectra, the Ti K-edge spectra of the PLZT most closely resemble perovskite (SrTiO₃). The surface and bulk thin film are similar and all the 28/0/100 spectra resemble the spectra of 9/65/35, indicating similar cubic perovskite structures for these materials.