基于共振隧穿理论的GaAs基RTD的设计与研制

以共振能级的透射系数半峰宽(FWHM)做为共振隧穿二极管(RTD)材料结构设计的依据,对GaAs/AlAs/In0.1Ga0.9As材料体系的RTD进行了设计.用分子束外延(MBE)进行了RTD结构材料制备,X射线双晶衍射(XRD)分析表明,制备的异质结界面光滑、层厚准确.RTD采用台面结构,器件特性测试结果表明,峰值...     

MBE生长RTD材料的X射线双晶衍射研究

用分子束外延技术(MBE)生长了GaAs基共振隧穿二极管(RTD)的材料结构,利用X射线双晶衍射(XRD)方法对材料进行了测试分析.结果表明,材料的双晶衍射峰半峰宽达到16.17",GaAs层与In0.1Ga0.9As层的相对晶格失配率仅为0.015 6%.对实验样品进行了双晶衍射回摆曲线的模拟,模拟结果与测试结果符合较好,说明生长的RTD材料结构与设计相符合.通过制成器件对材料进行验证,室温下对器件进行直流测试,PVCR达到5.1,峰值电流密度达到73.6 kA/cm2.     

InP材料体系RTD的研制

报道了InP衬底AlAs /In0.53Ga0.47As/AlAs结构共振隧穿二极管(RTD)的研制过程.衬底片选用(001)半绝缘InP单晶片,结构材料使用分子束外延(MBE)技术制备,并用PL谱对外延片进行测试,器件采用台面结构.测得RTD器件室温下的峰谷电流比(PVCR)为7.4,峰值电流密度(Jp)为1.06×105A/cm-2,是国内首例成功的InP材料体系RTD.     

一种新材料结构的RTD器件的设计及实现

设计了一种带有Al0.22Ga0.78As/In0.15Ga0.85As/GaAs发射极空间层和GaAs/In0.15Ga0.85As/GaAs量子阱的共振隧穿二极管(RTD)材料结构,并且成功地制作了相应的RTD器件.在室温下,测试了RTD器件的直流特性,计算了RTD器件的峰谷电流比和可资电流密度.在分析器件特性的基础上,指出调整材料结构和优化工艺参数将进一步提高RTD器件的性能.     

共振隧穿二极管的设计、研制和特性分析

用分子束外延技术在半绝缘GaAs衬底上生长制备了不同结构的AlAs/GaAs/InGaAs两垒一阱RTD单管.经过材料生长设计和工艺的改进,测得室温下器件的最高PVCR为2.4,峰值电流密度达到36.8kA/cm2.进行直流参数测试,得到RTD的I-V特性曲线,对量子阱宽度和帽层厚度对I-V特性的影响进行了分析.     

共振隧穿二极管的设计、研制和特性分析

用分子束外延技术在半绝缘GaAs衬底上生长制备了不同结构的AlAs/GaAs/InGaAs两垒一阱RTD单管.经过材料生长设计和工艺的改进,测得室温下器件的最高PVCR为2.4,峰值电流密度达到36.8kA/cm2.进行直流参数测试,得到RTD的I-V特性曲线,对量子阱宽度和帽层厚度对I-V特性的影响进行了分析.     

共振隧穿二极管的材料结构设哥——共振隧穿器件讲座（5）

在系统细致分析RTD材料结构参数与器件特性参数关系的基础上，确立了RTD材料结构的设计原则和设计方法，并对以SI—GaAs为衬底的RTD分子束外延（MBE）材料生长结构进行了设计。所研制出的RTD参数实测结果证实了此设计方法是正确的。     

GaAs基共振遂穿二极管的材料结构研究

用分子束外延技术在半绝缘GaAs衬底上生长了三种不同材料结构的RTD.主要针对阱结构进行了对比设计,然后对设计结构进行了常温下的I-V特性测试,测试结果中器件的PVCR值最高达到了6,V<,p>降低到了0.41 V.同时常温下测试了其中一种设计结构的敏感单元在四种不同发射极面积下的I-V特性曲线.最后对器件阱结构和发射...     

InP基共振遂穿二极管器件（RTD）研究

我们在实验中对InGaAs/AlAs/InP共振遂穿二极管（RTD）材料结构进行了优化设计,并用MBE设备在(100)半绝缘InP单晶片上生长了RTD外延材料。我们采用电子束光刻工艺和空气桥互连技术,制作了InP基RTD器件。并在室温下测试了器件的电学特性：峰值电流密度24.6kA/cm2,峰谷电流比(PVCR)为8.6。     

两种不同结构InGaP/GaAs HBT的直流特性分析

InGaP/GaAs异质结双极晶体管(HBT)是当前微波毫米波领域中具有广阔发展前景的高速固态器件,其直流特性是器件重要参数之一.本文采用Medici软件对两种InGaP/GaAs外延结构HBT的直流特性和高频特性进行了模拟计算,并实际制备出了两种材料结构的大尺寸(发射极面积100μm×100μm)双台面InGaP/GaAs HBT器件,对其直流特性进行了测试和分析,两种外延结构的器件共射直流增益分别为50和350,模拟得其最大截止频率分别为8和10GHz.     

High performance aluminum arsenic intraband resonant microwave devices

We report on GaAs/AlAs triple-barrier quantum well intraband (TBQWI) heterostructures grown by molecular beam epitaxy (MBE) on n⁺ GaAs substrate. Heterostructure quality was evaluated by X-ray diffraction and photoluminescence spectrum measurements. The position of the broad peak near 65.84° corresponds well to the diffraction from the (4 0 0) face of AlAs layers assuming intensity of total AlAs spacers and barriers. The 10K photoluminescence (PL) data has a strong peak at 8140 Å. The PL spectrum is dominated by a sharp peak centered at the emission energy of 1.52 eV attributed to the energy of e1-hh bond exciton of GaAs layer. TBQWI heterostructures were grown and processed into resonant tunneling diode (RTD). Room temperature electrical measurement of the TBQWI RTD yielded maximum peak to valley current ratio (PVCR) of 120 with peak current density (J_p) of 2.1 kA/cm². The high PVCR of this GaAs/AlAs TBQWI RTD is, to the better of our knowledge, one of the higher PVCRs obtained in any intraband tunnel device.     

RTD在压力下的弛豫振荡特性

报道了共振隧穿二极管(RTD)在压力下的弛豫振荡特性.采用Pspice 8.0软件仿真并设计了振荡电路,测得其振荡频率达200kHz.在(100)半绝缘(SI)GaAs衬底上利用分子束外延(MBE)技术生长了AlAs/InxGa1-xAs/GaAs双势垒共振隧穿结构(DBRTS),并采用Au/Ge/Ni/Au金属化和空气桥结构成功加工出了RTD.由于RTD的压阻效应,采用显微喇曼光谱仪标定所加应力大小,对RTD在加压条件下的振荡特性进行了研究,结果表明其弛豫振荡频率大致有-17.9kHz/MPa的改变量.     

RTD在压力下的弛豫振荡特性

报道了共振隧穿二极管(RTD)在压力下的弛豫振荡特性.采用Pspice 8.0软件仿真并设计了振荡电路,测得其振荡频率达200kHz.在(100)半绝缘(SI)GaAs衬底上利用分子束外延(MBE)技术生长了AlAs/InxGa1-xAs/GaAs双势垒共振隧穿结构(DBRTS),并采用Au/Ge/Ni/Au金属化和空气桥结构成功加工出了RTD.由于RTD的压阻效应,采用显微喇曼光谱仪标定所加应力大小,对RTD在加压条件下的振荡特性进行了研究,结果表明其弛豫振荡频率大致有-17.9kHz/MPa的改变量.     

器件模拟对AlGaAs/GaAs RTD的特性分析(英文)

使用SILVACO公司的器件模拟软件ATLAS对AlGaAs/GaAs共振隧穿二极管(RTD)进行了器件模拟,得到了不同结构的RTD的I-V特性曲线。对量子阱宽度、掺杂浓度、势垒宽度和高度对RTD的I-V特性的影响进行了详细的分析。     

Spectral responses of GaAs photodiodes fabricated by rapid thermaldiffusion

The spectral responses of GaAs photodiodes fabricated by rapid thermal diffusion (RTD) of Zn are presented. The authors tried controlling the p⁺-n junction depth by the heating rate of RTD, without extending the diffusion time. It is found that Zn diffuses from the surface to a deeper position as the heating rate increases. Consequently, the spectral response of photodiodes formed by RTD is strongly dependent on the heating rate of RTD. A large improvement in the short-wavelength response between 400 and 800 nm is observed as the heating rate decreases     

Effects of Rapid Thermal Annealing on Optical Properties of GaInNAs/GaAs Single Quantum Well Grown by Plasma-Assisted Molecular Beam Epitaxy

The effects of Rapid Thermal Annealing (RTA) on the optical properties of GaInNAs/GaAs Single Quantum Well (SQW) grown by plasma-assisted molecular beam epitaxy are investigated. Ion removal magnets were applied to reduce the ion damage during the growth process and the optical properties of GaInNAs/GaAs SQW are remarkably improved.RTA was carried out at 650℃ and its effect was studied by the comparising the roomtemperature PhotoLuminescence (PL) spectra for the non ion-removed (grown without magnets) sample with for the ion-removed (grown with magnets) one. The more significant improvement of PL characteristics for non ion-removed GaInNAs/GaAs SQW after annealing (compared with those for ion-removed) indicates that the nonradiative centers removed by RTA at 650℃ are mainly originated from ion damage. After annealing the PL blue shift for non ionremoved GaInNAs/GaAs SQW is much larger than those for InGaAs/GaAs and ion-removed GaInNAs/GaAs SQW. It is found that the larger PL blue shift of GaInNAs/GaAs SQW is due to the defect-assisted In-Ga interdiffusion rather than defect-assisted N-As interdiffusion.     

Band-bending effect of low temperature GaAs on a pseudomorphic modulation-doped field-effect transistor

Low temperature photoluminescence (PL) measurements on pseudomorphic modulation-doped transistors with a low-temperature (LT) GaAs layer in the GaAs buffer layer clearly show a decrease in the quantum well PL transition energies compared to a structure with no LT GaAs. Self-consistent calculations of the electron and hole bandstructure suggest that the observed increase in the redshift in PL energies with increasing quantum well-LT GaAs spacing can be attributed to band bending induced by the Fermi level pinning at the undoped GaAs/LT GaAs interface and a novel carrier compensation effect of LT GaAs.