SiO2/Si波导应力双折射数值分析

采用有限元法对SiO2/Si掩埋光波导制备工艺中的应力变化进行了系统的分析,在此基础上,应用有限差分束传播法(FDBPM)对应力光波导的双折射进行了计算.结果表明上包层的玻璃化过程是SiO2/Si波导形成水平方向和垂直方向应力差的主要原因,相应的应力双折射系数B在10-4量级.进一步的分析表明上包层B,P重掺杂可明显减小波导的双折射系数.     

SiON对Si基SiO2 AWG偏振补偿的数值分析

采用全矢量交替方向隐含迭代方法系统分析了高折射率SiON薄膜对Si基SiO2阵列波导光栅中波导应力双折射的影响.分析结果表明在芯区上或下表面沉积SiON薄膜可以明显减小Si基SiO2阵列波导光栅(AWG)中波导的应力双折射,但这两种补偿方法容易使模场偏移中心位置,不利于波导与光纤的耦合.理想的补偿方法是在芯区上下同时补偿,可减小模场偏移,并用该方法设计了偏振无关的16通道AWG.     

SiON对Si基SiO2 AWG偏振补偿的数值分析

采用全矢量交替方向隐含迭代方法系统分析了高折射率SiON薄膜对Si基SiO2阵列波导光栅中波导应力双折射的影响.分析结果表明在芯区上或下表面沉积SiON薄膜可以明显减小Si基SiO2阵列波导光栅(AWG)中波导的应力双折射,但这两种补偿方法容易使模场偏移中心位置,不利于波导与光纤的耦合.理想的补偿方法是在芯区上下同时补偿,可减小模场偏移,并用该方法设计了偏振无关的16通道AWG.     

硅基纳米波导的双模干涉

硅基(SOI)波导是近年集成光电子和集成波导的重要方向。对硅基纳米波导进行数值计算,讨论了空气包层和SiO2包层两种情况的双模传输特性,得到两种包层结构的双模工作区域和双模拍长与波导结构的关系。研究了SOI纳米波导中双模干涉现象以及双折射和温度对双模干涉的影响。     

SiON对Si基SiO_2AWG偏振补偿的数值分析

采用全矢量交替方向隐含迭代方法系统分析了高折射率 Si ON薄膜对 Si基 Si O2 阵列波导光栅中波导应力双折射的影响 .分析结果表明在芯区上或下表面沉积 Si ON薄膜可以明显减小 Si基 Si O2 阵列波导光栅 (AWG)中波导的应力双折射 ,但这两种补偿方法容易使模场偏移中心位置 ,不利于波导与光纤的耦合 .理想的补偿方法是在芯区上下同时补偿 ,可减小模场偏移 ,并用该方法设计了偏振无关的 1 6通道 AWG.     

激光直写法制备条形光波导中的功率密度阈值

采用溶胶-凝胶法(sol-gel)在Si基SiO2衬底上制备了SiO2-TiO2芯层薄膜,构成了以SiO2为下包层,空气为上包层的平面光波导。利用光纤激光器对平面波导的芯层进行直写,结合后续的化学腐蚀工艺得到了SiO2-TiO2条形光波导,并着重研究了激光直写波导过程中存在的功率密度阈值以及阈值随薄膜预热处理温度的变化关系。研究结果表明,激光直写SiO2-TiO2波导存在起始收缩阈值和烧蚀损伤阈值;随着薄膜热处理温度的提高,两个阈值同时增大,其中损伤阈值的增大趋势要大于收缩阈值;因而薄膜可承受的直写光斑直径变小,所得波导宽度显著减小。最后对直写制得条形光波导的导光性能作了测试分析,验证了波导的三维导光性。     

Si基SiO2波导芯层热应力的理论研究

结合弹性多层板热应力理论和应力集中效应给出了Si基SiO2波导芯层热应力的解析解,推导了芯层应力差的解析表达式.说明对于传统阵列波导光栅,芯层应力差来源于初始翘曲和波导各层热膨胀系数差;系统分析了波导各层材料对芯层应力差的影响,指出调节衬底的热膨胀系数、上包层的热膨胀系数、衬底的厚度和下包层的厚度都可以消除芯层应力差,但改变衬底和上包层热膨胀系数是调节芯层应力差的主要手段;讨论了几种常见金属应力板对芯层应力差的影响.结果表明,在阵列波导底部高温粘贴适当厚度的金属板可消除芯层应力差.     

Si基SiO2波导芯层热应力的理论研究

结合弹性多层板热应力理论和应力集中效应给出了Si基SiO2波导芯层热应力的解析解,推导了芯层应力差的解析表达式.说明对于传统阵列波导光栅,芯层应力差来源于初始翘曲和波导各层热膨胀系数差;系统分析了波导各层材料对芯层应力差的影响,指出调节衬底的热膨胀系数、上包层的热膨胀系数、衬底的厚度和下包层的厚度都可以消除芯层应力差,但改变衬底和上包层热膨胀系数是调节芯层应力差的主要手段;讨论了几种常见金属应力板对芯层应力差的影响.结果表明,在阵列波导底部高温粘贴适当厚度的金属板可消除芯层应力差.     

低双折射系数的硅基二氧化硅波导制备与数值分析

采用非传统工艺制备了硅基二氧化硅光波导,制备的波导侧向存在一硅层.利用有限元法(FEM)从理论上分析了侧向硅层存在时的硅基二氧化硅光波导的应力分布,并采用全矢量隐含迭代法束传播法(ADI-BPM)对制备的光波导双折射系数进行计.结果表明,侧向硅层的存在可平衡硅基二氧化波导在水平方向与垂直方向的应力,减小这两个方向上的应力差,有助于减小硅基二氧化硅光波导的应力双折射.     

低功耗有机/无机混合结构热光开关的研制

利用聚合物材料SU-8作为芯层、聚合物材料PMMA作为上包层和无机材料SiO2作为下包层,设计并研制了一种有机/无机混合结构的Mach-Zehnder干涉(MZI)热光(TO)开关。为了保证波导中的单模传输、减小模式辐射损耗和衬底泄露损耗、缩短响应时间并降低器件功耗,对其结构参数做了优化。利用化学气相沉积(CVD)、涂膜和湿法刻蚀等工艺制备了器件样品。在1 550nm工作波长下,器件的开和关状态的驱动功率分别为0和13mW(开关功率为13mW),开和关状态间的消光比为18.3dB。在方波驱动电压信号作用下,测得器件的上升和下降时间分别为126和134μs。与无机材料Si/SiO2和全聚合物材料研制的TO开关相比,本文研制的混合结构器件综合利用了芯层聚合物材料热光系数大、上/下缓冲层厚度均较小以及Si/SiO2导热系数大的优点,因此同时具备了较低的功耗和较快的响应时间,在光通信系统中具有较好的应用前景。     

Birefringence free planar optical waveguide made by flamehydrolysis deposition (FHD) through tailoring of the overcladding

Stresses developing in a planar waveguide resulting from the different thermal expansion coefficients of the substrate and the three glass layers (buffer, core and cladding) were analyzed using a finite element method. It can be shown that mainly the thermal expansion of the overcladding determines the birefringence in the finished waveguide. Based on that result, recipes for an overcladding made with the flame-hydrolysis-deposit ion (FHD)-process were devised. We demonstrate the absence of birefringence in a commercial waveguide layer overclad with this glass. The high doping levels required for the cladding to have a thermal expansion coefficient sufficient for this raises concerns about the moisture sensitivity of such a glass. We examined the depth dependent composition of the glass using WD-ESCA (wavelength dispersive electron microprobe) and show, that at the surface a layer depleted of dopants is formed during the high temperature sintering process, This layer can serve as a protective coating to isolate the underlying, higher doped layer from the effects of moisture. Analysis of the stresses shows that this does not effect the birefringence behavior of the waveguide     

硅基二氧化硅波导的双折射效应补偿理论分析

使用有限元方法分析了硅基二氧化硅波导的两种偏振补偿方法的可行性.结果表明采用应力释放槽和调节上包层热膨胀系数都可改善波导的偏振相关性.采用应力释放槽可以释放波导中的由于硅衬底与二氧化硅热膨胀系数失配造成的压应力,可以影响芯区附近的应力分布,但是只有释放槽的深度达到一定值时才能改善波导的偏振相关性,增大槽的宽度也在一定程度改善偏振相关性,但效果较差.调节波导上包层的热膨胀系数可以很好的解决波导的偏振相关问题,而调节波导的其它层的热膨胀系数对波导的偏振相关作用较小.     

硅基二氧化硅波导的应力和偏振相关性的数值分析

使用有限元方法分析了硅基二氧化硅光波导的应力分布,结果表明波导主要受横向压应力影响,而且应力主要集中在芯区和包层的界面附近.根据波导的应力分布,得出波导的折射率分布,并使用ADI全矢量方法求解出波导的模式折射率.比较考虑应力和未考虑应力的波导模式折射率可以得出:波导的双折射效应主要是由于波导应力引起的,阵列波导光栅的偏振相关与中心波长的漂移是受阵列波导的应力分布的影响.     

Stress-Induced Birefringence Characteristics of Polymer Optical Rib Waveguides

We report the detailed numerical investigation of stress-induced material birefringence in polymer rib waveguide for the design of nonbirefringent waveguide devices. To accurately simulate the stress-induced effects we propose a more realistic model in the finite element analysis which considers the stresses induced over the entire sequential fabrication process. It is observed that the birefringence is nonuniform, and it is different for different etch depth and core width. The maximum birefringence in the core layer is observed near the lower cladding which decreases to zero toward the top surface. The influence of this material anisotropy on the modal birefringence is analyzed also for different rib structures. We found the stress effects on the modal birefringence to be largely affected by etch depth, while core width has small effect. It is also found that the deeply etched core has better birefringence stability. Finally, an accurate design of the zero-birefringence waveguide is illustrated by taking the stress effects into account, and the results are compared with experimental data. Excellent agreement between calculated and experimental results confirms the potential application of this work to aid in the design of polarization-insensitive waveguide devices.     

Finite Element Analysis of Photonic Crystal Rods With Inhomogeneous Anisotropic Refractive Index Tensor

A procedure for incorporating inhomogeneous anisotropic variations in the refractive index tensor into two-dimensional finite element calculations of the guided mode characteristics of photonic crystal rods is presented. The stress tensor distribution is assumed to be known. Photonic crystal rod designs incorporating stress applying parts are analyzed using this procedure. The predicted guided mode structure is compared to the simplified case described by uniform birefringence revealing differences in the effective indexes of the guided modes, the effective area and eccentricity of the fundamental mode, the modal birefringence, and the overlap with the gain region of active devices. The method is applicable to all dielectric waveguide structures.     

Birefringence in curved single-mode optical fibers due to waveguide geometry effect--Perturbation analysis

The field deformation in curved step-index single-mode circular fibers and the birefringence induced by the curved waveguide geometry are analyzed by a perturbation method. We find that the values of the birefringence are proportional toa^{2}/R_{0}^{2}and are much less than those induced by stress. A square optical waveguide is also investigated. We find birefringence values of roughly the same order of magnitude as those for the circular waveguide.     

类矩形保偏光纤应力双折射分析

采用有限元方法对“类矩形”保偏光纤的应力双折射进行了分析,给出了保偏光纤横截面上的应力分布图形及应力双折射分布曲线;应用全矢量电磁场有限元方法,计算了保偏光纤的两个偏振模场的分布、传输常数及模式双折射.在给定模拟条件下,纤芯的应力双折射约为 3. 33×10-4,其模式双折射约为 3. 72×10-4.计算结果表明,这种“类矩形”保偏光纤与其它保偏光纤相比,有几个明显的优点,即有更佳的应力传递效果、均匀的应力场分布、更大的应力双折射.     

Modal Properties of an Index Guiding Nematic Liquid Crystal Based Photonic Crystal Fiber

This paper presents the results of the modal analysis of an index guiding soft glass photonic crystal fiber infiltrated with a nematic liquid crystal (NLC-PCF). The modal analysis is carried out using the full vectorial finite difference method which is capable of dealing accurately with anisotropic waveguide problems. The analyzed parameters are the effective index, birefringence, dispersion, effective mode area, and confinement losses for the two fundamental polarized modes. The effects of the structure geometrical parameters, rotation angle of the director of the NLC and temperature on the modal properties are investigated. The numerical results reveal that the proposed design offers high birefringence of 0.012 at the operating wavelength 1.55 mum with low losses for the two polarized modes. In addition, the structure is tailored to obtain a flat dispersion over a wide range of wavelengths with high birefringence.