尺蠖式压电陶瓷驱动电源设计

为了满足尺蠖式压电陶瓷驱动器的控制需要,设计了相应的驱动电源。DSP是控制器,通过网口接收上位机的控制命令,通过异步总线与FPGA进行数据通信,FPGA操作4路D/A生成4路满足相应时序要求的波形,波形经过精密运放前级放大和由分立元器件搭建的功率放大,输出到尺蠖式压电陶瓷驱动器的电源输入端。测试和试验表明,电源带宽高,纹波小,阶跃响应特性和动态特性良好,能够精确的控制尺蠖式压电陶瓷驱动器微位移定位,可以应用在精密工程技术领域中。     

基于虚拟仪器的压电陶瓷线性化研究

本文根据压电陶瓷的非线性特性,提出了一种采用离散电压点线性化压电陶瓷的方法。利用数模输出卡,输出不同步长的单个的离散电压,控制电陶瓷伸长的速度,从而达到利用选取的电压值参数来控制压电陶瓷伸长速度的目的。选取恰当的电压值,可以使得压电陶瓷在时间域上线性的伸长而达到线性化的。设计基于LabVIEW的控制系统,并对线性化方法进行了原理分析和实验。实验结果表明,该系统可以有效的在0~300V范围内使压电陶瓷的伸长量与时间成线性关系,定位精度为1nm。     

Hysteresis nonlinearity compensator for piezoelectric actuator

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using the hysteresis nonlinearity compensator. Recently, several printing methods that cost less and are faster than previous semiconductor processes have been developed for the production of electric paper and RFID. The system proposed in this study prints by spraying the molten metal, and consists of a nozzle, heating furnace, operating actuator, and an XYZ 3-axis stage. As an operating system, the piezoelectric (PZT) method has very valuable uses. However, the PZT actuator has a hysteresis nonlinearity due to the ferroelectric characteristics of the PZT element. This causes problems in the system position control characteristics and deteriorates the performance of the system. This study proposed an inverse hysteresis model, a mathematic modeling method that can express the geometric relationship between voltage and displacement, in order to reduce the hysteresis of the PZT actuator. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good tracking performance.     

压电驱动器系统的控制设计

针对压电伺服系统中执行机构的应用特点,分析指出压电超声马达不适宜用作高精度伺服系统中的执行机构,而是应该采用压电堆驱动的执行机构。对于压电堆驱动器的迟滞特性,提出采用便于进行仿真研究的Bouc-Wen迟滞模型,用Bouc-Wen模型分析了压电堆驱动器的非线性迟滞特性和它的补偿问题。提出了采用基于负反馈原理的扰动观测器来补偿迟滞,进一步分析了具有迟滞特性的压电伺服系统的自振荡问题,并与齿隙滞环引起的自振荡进行了比较,指出带压电滞环反馈的系统中是不会出现自振荡的。基于上述分析,提出了一种压电伺服系统的设计指导,并给出了仿真结果。     

Investigation of omnidirectional piezoelectric actuator

A study of a novel design composite piezoelectric actuator for omnidirectional object positioning is given in the paper. The actuator consists of a vibrating disc with a small cylinder mounted at the centre and a piezoceramic disc. The cylinder magnifies resonant bending vibrations of the vibrating disc and transmits driving force to the slider. Electrodes of the piezoceramic disc cover all the surface of the bottom and are divided into four equal sectors. 2D motion and rotation of the slider is achieved depending on the excitation scheme of the electrodes. Numerical modeling based on the finite element method was performed to obtain resonance frequencies and modal shapes of the actuator and to calculate the trajectories of contact point’s movements under different excitation schemes of the electrodes. A prototype actuator was made and experimental outcomes of the oscillations of the working surfaces are given. Results of the numerical and experimental investigations are analyzed and discussed.     

Lead-free piezoelectric ceramics based on perovskite structures

The piezoelectric properties of a solid solution based on three components of bismuth sodium titanate (Bi_1/2Na_1/2)TiO₃ (BNT), bismuth potassium titanate, (Bi_1/2K_1/2)TiO₃ (BKT), and barium titanate, BaTiO₃ (BT), that is x(Bi_1/2Na_1/2)TiO₃−y(Bi_1/2K_1/2)TiO₃−zBaTiO₃, [, abbreviated as BNBKy:z(x)] and potassium niobate, KNbO₃ (KN) based ceramics, that is KN+MnCO₃ x wt.%, [abbreviated as KN−Mn x], were studied as a lead-free piezoelectric material. In the case of BNBK2:1 system, high piezoelectric properties were obtained near the MPB composition, and the highest electromechanical coupling factor, k ₃₃ and piezoelectric constant, d ₃₃, were 0.58 for BNBK2:1(0.89) and 181 pC/N for BNBK2:1(0.88). Nevertheless, the depolarization temperature, T _d , shifts to lower temperature around the MPB compositions, and the T _d ’s of BNBK2:1(0.88–0.90) are only about 100 °C. On the tetragonal side, the T _d shifts to higher temperature with increasing the lattice anisotropy, c/a. As T _d higher than 200 °C was obtained in the range of x < 0.78, with a k ₃₃ and d ₃₃ for BNBK2:1(0.78) being 0.45 and 128 pC/N, respectively. In the case of Mn doped KN ceramics, dense and non deliquescence KN ceramic were successfully obtained via ordinary firing technique in air by optimizing the fabrication process. Mn doping for KN ceramics was effective to obtain full poling state easily under poling conditions of high temperature and high electric field. As a result, we obtained the excellent piezoelectric properties of k ₃₃ = 0.507 for KN−Mn0.2.     

Lead-free piezoelectric ceramics vs. PZT?

Investigations in the development of lead-free piezoelectric ceramics have recently claimed properties comparable to that of PZT-based materials. In this work, the dielectric and piezoelectric properties of the various systems were contrasted in relation to their respective Curie temperatures. Analogous to PZT, enhanced properties are noted for morphotropic phase boundary (MPB) compositions in the Na,BiTiO₃–BaTiO₃ and the ternary system with K,BiTiO₃, but offer properties significantly lower than that of PZTs. The consequence of a ferroelectric to antiferroelectric transition well below T _C further limits their usefulness. Though comparable with respect to T _C, enhanced properties reported in the K,NaNbO₃ family are the result of increased polarizability associated with the T _{orthor-tetragonal} polymorphic phase transition being compositionally shifted downward and not from a MPB as widely reported. As expected, the properties are strongly temperature dependent unlike that observed for MPB systems.     

Simple new ultrasonic piezoelectric actuator for precision linear positioning

This paper presents a new linear piezoelectric actuator for linear translation. The positioning stage driven by the actuator has a very simple and compact structure consisting of a linear guide and the linear piezoelectric actuator. The operation principle of the linear piezoelectric actuator is first described. Then, the characteristics of the positioning stage are investigated. Experiments indicate that the step size is adjustable and the minimum is 26?nm with an inertial mass of 100?g in the open-loop condition; the stage motion driven by the actuator is controlled to the target position plus or minus <1?μm within 330?ms for a traveling distance of 10?mm in the closed-loop condition.     

Microstructural and piezoelectric properties of PZN substituted PMN-PZT ceramics for multilayer piezoelectric transformer

In this paper, in order to develop the low temperature sintering ceramics for multilayer piezoelectric transformers, Pb[(Mn_1/3,Nb_2/3)_0.07(Zn_1/3Nb_2/3)_a (Zr_0.48Ti_0.52)_1-0.07-aO₃] ceramics were prepared with the variations of PZN from 2 to 14 mol% and their dielectric and piezoelectric properties were investigated. Sintering temperature was varied from 940 to 1000^∘C. At 8 mol% PZN substituted specimen sintered at 970^∘C, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant and peizoelectric constant(d₃₃) showed the optimal values of 0.536, 1803, 1551 and 328[pC/N], respectively, for multilayer piezoelectric transformer application.     

压电驱动器驱动电源设计

针对提高电源的输出质量、容性负载的响应速度等设计要求,设计了一种基于PA78的电压控制型压电陶瓷驱动电源。从理论角度研究了电压控制型驱动电源特点并初步制定了设计方案,以PA78高压功放作为核心器件,对驱动电源的核心电路、直流稳压电路及放电回路等进行设计。在此基础上,对驱动电源电路的稳定性、频响特性等关键性能进行研究。最后搭建了驱动电源测试系统,在容性负载情况下,对驱动电源的线性度、纹波电压等基本性能进行测试和分析,实验结果表明所设计的驱动电源满足设计要求。     

Basic investigations on a piezoelectric bending actuator for micro-electro-mechanical applications

Abstract

This article deals with basic investigations into the development and manufacturing process of a piezoelectric animated micro actuator. The concept of the fabrication of a piezoelectric microactuator will be introduced and first fundamental investigations on materials characterization and process technology for the Pt bottom electrode and piezoelectric PZT layer will be presented. PZT thin film have been deposited with the chemical solution deposition (CSD) technique and have been characterized with dielectric and ferroelectric measurements. For optimization of actuator properties an analytical approach and a simulation with finite element method was carried out. This shows that the cantilever must have a length above 300 μm to reach a tip deflection higher than 10 μm at voltages comparable to those used in integrated circuits (IC). Additionally, stress measurements of each layer have been used to characterize the films mechanically.     

压电陶瓷驱动器动态驱动电源设计

针对大位移压电陶瓷驱动器的特点,设计了一种可动态应用的驱动电源,并给出了详细的电路原理图.对驱动电源的性能试验表明,在输入为正弦波、三角波和方波等动态信号时,该驱动电源可以很好的跟随输入信号的变化,显示出优异的动态性能.对压电陶瓷驱动器的驱动试验表明,该驱动电源具有较强的带负载能力,可满足大位移压电陶瓷驱动器的动态驱动...     

Two-dimensional optical scanning of a piezoelectric cantilever actuator

A piezoelectric optical scanning cantilever structure with two-dimensional scanning angles was reported. The theoretical and experimental studies on the structure were carried out. By using finite element method, the effect of the materials and the structure size on the theoretical results were concluded, and a favorable two-dimensional piezoelectric optical scanning structure with a single cantilever was obtained. A two-dimensional piezoelectric optical scanning specimen was fabricated. It was found that a 0.282° bending scanning angle at 1056 Hz and a 0.12° torsional scanning angle at 4612 Hz were obtained under the forcing voltage of 5 V (o–p).     

Electromechanical performance of structurally graded monolithic piezoelectric actuator

In this paper, the effect of structural gradients in monolithic piezoelectric actuators is investigated. Different cross-section profiles were micro-machined with a laser into commercial PZT 5H bulk discs with thicknesses of 375 µm and 500 µm (? 25 mm). Profiles and curvatures of the actuators were measured which showed both concave and convex structures, thus indicating pre-stress of the actuators. After poling, the distribution of out-of-plane displacement was scanned by a fibre-optic laser vibrometer. Maximum displacements of ～6.3 µm and ～24.8 µm were obtained from a freely moving and clamped ～375 µm thick actuator, respectively, in a ±0.5 V/µm electric field at 10 Hz frequency without load. Furthermore, deflection in the centre of the actuators was measured up to 184 mN load using the same electric field and frequency. Bending of the bulk actuators without any additional layer was a consequence of the gradient in poling and driving electric field via thickness variation of the material. Hence, different regions produced strain distribution and bending in a similar fashion to other benders. Actuators with the highest arch height exhibited the highest displacement and load bearing capabilities derived from the increased area moment of inertia and enhanced piezoelectric response due to pre-stress. The results show that the monolithic bending actuators can be realised by simple structural designing of the actuator. Such structural gradients can be one reason contributing to the higher displacement of RAINBOW actuators compared to other pre-stressed actuators. In a further development, the structural gradients can be utilized in high displacement pre-stressed actuators and in miniaturized monolithic piezoelectric devices.     

Microstructure analysis of the Y5V multilayer ceramic capacitors based on BaTiO3

The Y5V-1206 base-metal electrode (BME) multilayer ceramic capacitor (MLCC) chips have been characterised for crystalline phases using X-ray diffractometry (XRD), and microstructure using optical microscopy (OM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The microstructure features found in the Ni electrode and the BaTiO₃ dielectric layer are discussed in terms of the tensile backstresses induced upon firing due to constrained sintering heterogeneously. The chemical compositions containing BaO-excess and additives CaO and ZrO₂, determined for BaTiO₃ grains by energy-dispersive spectroscopy (EDS) equipped in the TEM are also reported. However, no rare-earth oxides were found in the grains. The representative microstructure of BaTiO₃ grains containing dislocations is the “solid-solution” type distinctive from the “core-shell” of the X7R compositions. The fact that no ferroelectric domains were detected suggests that the BaTiO₃ grains are pseudo-cubic with the c/a ratio ≈ 1.0.     

A 2-dimensional impact driven precise actuator using piezoelectric bimorphs

A new precise actuator is proposed, which is actuated by the impact force of an end-loaded piezoelectric bimorph cantilever, and bears two degrees of freedom for translation and rotation. The dynamic characteristics of the piezoelectric bimorph were analyzed by FEM, and are further proved by experimental tests. A new control system for the actuator was put forward and tested, which is called the fixed-frequency with adjustable voltage. In addition, the actuator’s performance of translation and rotation were both measured. The results demonstrate that the actuator is characterized by a simple structure, large movement range, strong driving ability and high positioning resolution. Its cost is estimated at only 1% of the traditional impact actuators. __________ Translated from Journal of Jilin University (Engineering and Technology Edition), 2006, 36(1): 67–71 (in Chinese)     

Energy harvesting using piezoelectric materials

This paper is presented to achieve the objective of energy harvesting from vibrational sources through piezoelectric materials. In this analysis, two piezoelectric buzzers: 35 mm buzzer and 27 mm buzzer were used to carry out the experiment. The experimental set-up includes an electro-dynamic shaker, function generator and a power amplifier. Buzzer of thickness 35 mm gave maximum output at resonant frequency of 23 Hz and 57 g of mechanical stress while buzzer of thickness 27 mm gave maximum output at resonant frequency of 25 Hz and 27 g of weight. The paper also presents some important applications of piezoelectricity in day-to-day life.