Scaling down lateral dimensions of silicon nanopillars fabricated by reactive ion etching with Au/Cr self-assembled clusters as an etch mask

Nanodot and nanopillar structures and precisely controlled reproducible fabrication thereof are of great interest in common nanoelectronic devices, including photonic crystals and surface plasmon resonance instruments. In this work, fabrication process of the silicon nanopillar structures is described. It includes self-organization of gold and chromium clusters at thickness close to that of one atomic diameter to serve as etching masks followed by the reactive ion etching to form silicon nanopillars. Scanning electron microscopy and X-ray photoelectron spectroscopy were used to characterize self-organized gold and chromium clusters as well as the final silicon nanopillars. This method was found to produce silicon nanopillars of sub-10 nm lateral dimensions and the diameter-to-height aspect ratio of up to 1:14.     

Enhanced field emission from ZnO nanoneedles on chemical vapour deposited diamond films

ZnO nanoneedles were coated on hot filament chemical vapour deposited diamond thin films to enhance the field emission properties of ZnO nanoneedles. The virgin diamond films and ZnO nanoneedles on diamond films were characterized using scanning electron microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. The field emission studies reveal that the ZnO nanoneedles coated on diamond film exhibit better emission characteristics, with minimum threshold field (required to draw a current density ~ 1 μA/cm²) as compared to ZnO needles on silicon and virgin diamond films. The better emission characteristic of ZnO nanoneedles on diamond film is attributed to the high field-enhancement factor resulting due to the combined effect of the ZnO nanoneedles and diamond film.     

Nanopillar arrays on semiconductor membranes as electron emission amplifiers

A new transmission-type electron multiplier was fabricated from silicon-on-insulator (SOI) material by integrating an array of one-dimensional (1D) silicon nanopillars onto a two-dimensional (2D) silicon membrane. Primary electrons are injected into the nanopillar-membrane (NPM) system from the flat surface of the membrane, while electron emission from the nanopillars is probed by an anode. The secondary electron yield (SEY) from the nanopillars in the current device is found to be about 1.8 times that of the plain silicon membrane. This gain in electron number is slightly enhanced by the electric field applied from the anode. Further optimization of the dimensions of the NPM and an application of field emission promise an even higher gain for detector applications and allow for probing of electronic/mechanical excitations in an NPM system stimulated by incident particles or radiation.     

Synthesis and cathode luminescence properties of ZnO multipod nanoneedles

Zinc oxide (ZnO) multipod nanoneedles over a large area have been synthesized on silicon substrate by thermally oxidizing zinc foil at 650 °C. These nanoneedles have sharp tails with diameter down to less than 100 nm, with length of 10 μm, growing from the surface of the silicon substrate and legs connected at a common base. X-ray diffraction (XRD) confirmed the sample as pure ZnO nanostructures with growth direction of [002]. The cathode luminescence behaviors at different regions of an individual nanoneedle of these multipod ZnO nanostructures were characterized. It is shown the whole nanostructures are luminescent, while the tips have relative higher visible emission than the bottom. The cathode luminescence mechanisms were also discussed.     

The Pd catalyst effect on low temperature hydrogen desorption from hydrided ultrathin Mg nanoblades

We present hydrogenation/de-hydrogenation properties of ultrathin Mg nanoblades coated with Pd as a catalyst. The hydrided Pd/Mg/Pd and Pd/Mg nanoblades were highly curved as observed by ex situ scanning electron microscopy. An in situ thermal desorption spectroscopy (TDS) study showed that the hydrided Pd/Mg/Pd nanostructure has a low hydrogen desorption temperature, at ～365?K. Through a combinational microstructure and TDS analysis of hydrided Pd/Mg/Pd nanoblades as well as hydrided Pd/Mg/Pd nanoblades covered with an additional ultrathin Mg layer, we found that the effect of Pd catalyst on reducing the hydrogen desorption temperature is significantly stronger than the conventionally proposed mechanisms due to grain size and strain.     

Fabrication and characterization of ZnO nanoneedle array using metal organic chemical vapor deposition

High density and vertically well-aligned ZnO nanoneedle arrays were fabricated on the ZnO thin film deposited on silicon substrates. The ZnO buffer layer and nanoneedles were synthesized by metal organic chemical vapor deposition using diethylzinc and oxygen gas. The ZnO buffer film was grown at 250 degrees C and the growth temperature of nanoneedles was in the range of 480-500 degrees C. As-grown ZnO nanoneedles showed single crystalline structure of ZnO (002). The crystalline properties of three samples (A: as-deposited ZnO buffer layer, B: annealed buffer film, C: ZnO nanoneedles) were compared using XRD and Raman spectroscopy. The synthesized ZnO nanoneedles (sample C) showed highest crystalline quality among three samples. The field emission properties of ZnO nanoneedles were investigated, which showed low turn on field of 4.8 Vmicrom(-1) and high field enhancement factor of 3.2 x 103.     

Unusual magnesium crystalline nanoblades grown by oblique angle vapor deposition

We observed the growth of unusual Mg nanoblades by oblique angle deposition. Although the vapor flux is obliquely incident, these nanoblades stand vertically on the substrates. The thickness of the Mg nanoblades along the incident vapor direction is reduced to approximately 15 nm to -30 nm at a vapor incident angle approximately 75 degrees, while the width perpendicular to the incident vapor direction is as wide as a few hundred nm. In addition to the anisotropic blade morphology, a (1010) [0001] biaxial (II-O) texture was observed using in situ reflection high energy electron diffraction (RHEED). The tilt angles of the texture axis and the nanoblades are correlated with the high surface diffusion on the (0001) surface along the [2130] direction. We also propose that the observed very thin thickness of the nanoblade along the vapor flux direction is due to the appearance of the surface steps parallel to the [0110] direction and the low surface diffusion on the top surface of the nanoblades.     

Fabrication of metallic nanodots in large-area arrays by mold-to-mold cross imprinting (MTMCI)

We have developed a mold-to-mold cross imprint (MTMCI) process, which redefines an imprint mold with another imprint mold. By performing MTMCI on two identical imprint molds with silicon spacer nanowires in a perpendicular arrangement, we fabricated a large array of sub-30-nm silicon nanopillars. Large-area arrays of Pt dots are then produced using nanoimprint lithography with the silicon nanopillar mold.     

Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

We demonstrate the use of copolymer micelle lithography using polystyrene-block-poly(2-vinylpyridine) reverse micelle thin films in their as-coated form to create nanopillars with tunable dimensions and spacing, on different substrates such as silicon, silicon oxide, silicon nitride and quartz. The promise of the approach as a versatile application oriented platform is highlighted by demonstrating its utility for creating super-hydrophobic surfaces, fabrication of nanoporous polymeric membranes, and controlling the areal density of physical vapor deposition derived titanium nitride nanostructures.     

Silica coating of polymer nanowires produced via nanoimprint lithography from femtosecond laser machined templates

In this paper we report on the fabrication of regular arrays of silica nanoneedles by deposition of a thin layer of silica on patterned arrays of polymer nanowires (or polymer nanohair). An array of high-aspect-ratio nanoscale diameter holes of depths greater than 10?μm was produced at the surface of a fused silica wafer by an amplified femtosecond laser system operated in single-pulse mode. Cellulose acetate (CA) film was imprinted into the nanoholes and peeled off to form a patterned array of standing CA nanowires, a negative replica of the laser machined nanoholes. The cellulose acetate replica was then coated with silica in a chemical vapor deposition process using silicon tetrachloride vapor at 65?°C. Field emission scanning electron microscopy, focused ion beam sectioning, energy dispersive x-ray analysis and Fourier-transform infrared spectroscopy were used to characterize the silica nanoneedles. Precisely patterned, functionalized arrays of standing silica nanoneedles are useful for a number of applications.     

Deconfinement leads to changes in the nanoscale plasticity of silicon

Silicon crystals have an important role in the electronics industry, and silicon nanoparticles have applications in areas such as nanoelectromechanical systems, photonics and biotechnology. However, the elastic-plastic transition observed in silicon is not fully understood; in particular, it is not known if the plasticity of silicon is determined by dislocations or by transformations between phases. Here, based on compression experiments and molecular dynamics simulations, we show that the mechanical properties of bulk silicon and silicon nanoparticles are significantly different. We find that bulk silicon exists in a state of relative constraint, with its plasticity dominated by phase transformations, whereas silicon nanoparticles are less constrained and display dislocation-driven plasticity. This transition, which we call deconfinement, can also explain the absence of phase transformations in deformed silicon nanowedges. Furthermore, the phenomenon is in agreement with effects observed in shape-memory alloy nanopillars, and provides insight into the origin of incipient plasticity.     

Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy

Using a simple two step fabrication process substrates with a large and uniform Raman enhancement, based on flexible free standing nanopillars can be manufactured over large areas using readily available silicon processing equipment.     

Understanding the kinetics and nanoscale morphology of electron-beam-induced deposition via a three-dimensional Monte Carlo simulation: the effects of the precursor molecule and the deposited material

The electron-beam-induced deposition of silicon oxide from tetraethyorthosilicate and tungsten from tungsten hexafluoride is simulated via a Monte Carlo simulation. Pseudo one-dimensional nanopillars are grown using comparable electron-beam parameters and a comparison of the vertical and lateral growth rate and the pillar morphology is correlated to the precursor and deposited material parameters. The primary and secondary electrons (type I) are found to dominate the vertical growth rate and the lateral growth rate is dominated by forward and secondary electrons (type II). The resolution and morphology of the nanopillars are affected by the effective electron interaction volume and the resultant surface coverage of the precursor species in the effective electron interaction region. Finally, the simulated results are compared to previously reported experimental results.     

A nanoscale memory and transistor using backside trapping

We report results on a new structure that provides a scalable memory cell and a scalable transistor simultaneously in the same structure. The operational distinction is achieved through a difference in the bias range. The device employs a modified silicon-on-insulator substrate where charge is stored in a defected region underneath a thin single-crystal silicon layer employed for the formation of the transistor channel. At low voltages (below 1.5 V), the device operates as a transistor making use of the front silicon interface (preferred form), or the back interface, or both. The memory operation is obtained by use of high voltages, which allow injection of charge into the defected region in a stack of insulating films underneath the thin silicon channel, as well as the removal of the charge. The transistors are scalable because of the thin silicon technology and the memories are highly scalable because they allow efficient coupling between the carriers and storage region. The structure provides for a very useful decoupling of the memory read and transistor operation from the memory electrical storage operation. The experimental operation of the devices is described.     

Tunable visible and near-IR emission from sub-10 nm etched single-crystal Si nanopillars

Visible and near-IR photoluminescence (PL) is reported from sub-10 nm silicon nanopillars. Pillars were plasma etched from single crystal Si wafers and thinned by utilizing strain-induced, self-terminating oxidation of cylindrical structures. PL, lifetime, and transmission electron microscopy were performed to measure the dimensions and emission characteristics of the pillars. The peak PL energy was found to blue shift with narrowing pillar diameter in accordance with a quantum confinement effect. The blue shift was quantified using a tight binding method simulation that incorporated the strain induced by the thermal oxidation process. These pillars show promise as possible complementary metal oxide semiconductor compatible silicon devices in the form of light-emitting diode or laser structures.     

应用纳米压痕法测定柱状纳米材料的力学特性（英文）

纳米压痕法在确定纳米结构材料,特别是具有较大高宽比的一维纳米结构/对象的力学特性时,若纳米结构沿压入方向的等效刚度远小于针尖-样品的接触刚度,应用常规数据分析(Oliver-Pharr)模型会导致较大的测量偏差.对常规Oliver-Pharr解析模型进行了推广,以补偿一维纳米材料等效刚度对测量结果的影响,进而提出了适用于此类测量对象的通用纳米压痕分析模型,并应用于分析柱状微纳米结构的准静态压痕测量数据.实验中应用原子力显微镜(AFM)定量测量了湿法刻蚀获得的一维单晶硅柱状结构的几何参数(包括硅纳米柱的直径和长度).实验结果表明,应用常规模型分析对较大高宽比的硅纳米柱(直径386 nm,长500 nm)的压痕数据会导致大于50%的偏差.应用修正模型分析实验数据时,测量结果不受被测对象几何参数的影响,因而可以有效提高应用纳米压痕法对微纳米结构材料,特别是一维材料的测量精度.     

Cell adhesion and migration on nanopatterned substrates and their effects on cell-capture yield

With scanning electron microscopy analysis, we investigated the role of nanoscale topography on cellular activities; e.g.?cell adhesion and spreading by culturing A549 cells (human lung carcinoma cell line cells) for 1-48?h on three sets of nanostructures; quartz nanopillars (QNPs), silicon nanopillars and silicon nanowire (SiNW) arrays, along with planar glass substrates. We found that cells on QNP arrays developed a longer shape than those on SiNW arrays. In addition, we studied how cell morphologies influence the cell-capture yield on the three sets of nanostructures. This research showed that the filopodial formations were directing the cell-capture yield on nanostructured substrates. This finding implies the possibility of using nanoscale topography features to control the filopodial formation including extension and migration from the cells. Using streptavidin-functionalized SiNW substrate, we further demonstrated a substantially higher yield (～91.8?±?5.9%) than the planar glass wafers (～24.1?±?7.5%) in the range of 200-3000 cells.     

Simple solution phase synthesis of 3-D assembly of ZnO nanoneedles and its efficient field emission

Three dimensional (3-D) assemblies of ZnO nanoneedles have been synthesized on silicon substrate by a unique chemical process. Each nanoneedle in the assemblies was hexagonal faceted having [001] growth direction and tip diameter approximately 20 nm. The growth of 3-D assemblies was governed by the initial nuclei formation, followed by their aggregation and subsequently nanoneedle formation from each nucleus. Room temperature photoluminescence (PL) spectrum of the assemblies showed two prominent peaks, one narrow peak in the ultraviolet region (385 nm) and another broad peak in the visible region (440 nm-600 nm). The 3-D assemblies of ZnO nanoneedles showed very good field emission property with turn-on voltages 390 V, 530 V and 680 V for the anode-emitter distances of 100 microm, 200 microm and 300 microm respectively. The turn-on voltages showed a linear relationship with the anode-emitter distance. Field enhancement factor (beta) for the nanostructure was calculated to be 2873. The high beta value and the low turn-on field are attributed to the sharp needle like structure and their interesting three dimensional assemblies.     

Zinc oxide nanostructures: epitaxially growing from hexagonal zinc nanostructures

The epitaxial growth of ZnO nanosheets and nanoneedles from a Zn/ZnO core/shell structure is verified by an experiment in which the ZnO nanoneedles and nanosheets are synthesized in air within an ultra-low temperature range from?250 to 400?°C by thermal oxidation of Zn films made up of hexagonal nanodiscs or nanoprisms. The hexagonal Zn structures are oxidized to form a Zn/ZnO core/shell structure with an epitaxial relationship; ZnO nanoneedles and nanosheets are found to grow epitaxially from the ZnO shell, along sixfold symmetric [Formula: see text] directions, showing the same lattice orientation as the Zn core. The stability difference among different facets of hexagonal Zn crystal structures plays a key role in the formation of ZnO nanosheets, nanoneedles and the Zn/ZnO core/shell structure, as well as ZnO hollow structures. A vapor-solid mechanism is suggested to explain the epitaxial growth process of the ZnO products. Photoluminescence properties of the ZnO nanostructures are also explored.     

Influence of Nanopillar Arrays on Fibroblast Motility,Adhesion, and Migration Mechanisms

Surfaces decorated with high aspect ratio nanostructures are a promising tool to study cellular processes and design novel devices to control cellular behavior. However, little is known about the dynamics of cellular phenomenon such as adhesion, spreading, and migration on such surfaces. In particular, how these are influenced by the surface properties. In this work, fibroblast behavior is investigated on regular arrays of 1 µm high polymer nanopillars with varying pillar to pillar distance. Embryonic mouse fibroblasts (NIH‐3T3) spread on all arrays, and on contact with the substrate engulf nanopillars independently of the array pitch. As the cells start to spread, different behavior is observed. On dense arrays which have a pitch equal or below 1 µm, cells are suspended on top of the nanopillars, making only sporadic contact with the glass support. Cells stay attached to the glass support and fully engulf nanopillars during spreading and migration on the sparse arrays which have a pitch of 2 µm and above. These alternate states have a profound effect on cell migration rates. Dynamic F‐actin puncta colocalize with nanopillars during cell spreading and migration. Strong membrane association with engulfed nanopillars might explain the reduced migration rates on sparse arrays.