共查询到20条相似文献,搜索用时 548 毫秒
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分析硅青铜(QSi1-3)保持架镀银的优点和技术难点,详细介绍了硅青铜保持架的镀银工艺流程和技术参数,并对保持架镀银后的表面质量、镀银层厚度和结合力进行了检测分析,确保了镀银质量满足工艺要求。 相似文献
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微型电容式压力传感器的制作与测试 总被引:4,自引:0,他引:4
从应用开发MEMS产品的实用角度出发,介绍了利用硅一硅键合技术制作的微型电容式压力传感器,给出了详细的制作工艺及主要工艺步骤图。对微传感器所用的测试装置的组成、测试电路的工作过程进行了详细介绍和深入分析。最后对不同尺寸的微传感器器件进行了测试,并对测试结果进行具体分析。结果表明:该微传感器具有良好的线性工作范围、良好的稳定性和较高的灵敏度。 相似文献
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简要介绍了利用硅的各向异性腐蚀工艺研制的非整体膜结构的敏感硅芯片,较详细地报告了用此硅芯片封装成的加速度敏感元件,最后介绍这种加速度计的优良性能。 相似文献
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根据感应耦合等离子(Inductively coupled plasma,ICP)刻蚀的机理,针对热氧化硅薄膜微拉伸梁的结构特点,研究ICP刻蚀制作3D微拉伸梁结构的工艺并解决其中的难点问题。介绍ICP刻蚀工艺参数对刻蚀质量的影响,包括存在的微负载效应和深宽比效应。详细介绍热氧化硅薄膜微拉伸梁的制作,其关键步骤是双掩膜两次ICP刻蚀形成阶梯状窗口结构,并在硅衬底表面形成释放了的热氧化硅薄膜梁。利用ICP刻蚀对单晶硅的高选择性,此制作工艺适用于各种薄膜的微拉伸梁制作。 相似文献
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介绍了作者近年来在硅微机械加工技术和半导体集成电路技术相结合的基础上研制的硅微机械与光纤组合式阵列声传感器、集成硅微机械光压力传感器和微型多道成像光谱分析系统的结构、工作原理及制造工艺. 相似文献
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本文首先讨论了用特殊函数法对扩散硅差压变送器进行数字补偿的技术,并详细介绍了利用线性插值法进行传感器信号处理的原理和方法。 相似文献
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Uncooled IR imaging using optomechanical detectors 总被引:3,自引:0,他引:3
In this study, we present an uncooled infrared imaging detector using knife-edge filter optical readout method. The tilt angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10(-5) degrees. A deformation magnifying substrate-free microcantilever unit is specially designed. The multi-fold legs of microcantilever are interval metal coated to form a thermal deformation magnifying structure. Thermal and thermomechanical performance of this microcantilever unit are modeled and analyzed. An FPA with 100 x 100 pixels is fabricated and thermal images of human body are obtained by this detector. 相似文献
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研究了压阻复合层微机械悬臂梁红外探测器的热挠曲理论模型。利用IC工艺和微机械加工技术设计制作了一种硅/铝/碳纳米管三层微机械悬臂梁红外探测器,该探测器基于硅和铝两种材料热膨胀系数的差异,存在双物质效应,不同温度下梁的挠度不同,其形变可通过梁根部的压敏电桥检测。为提高探测器的红外吸收特性,实验探索出了在微机械悬臂梁上涂敷碳纳米管吸热层的工艺方法。实验研究了具有碳纳米管薄膜吸热层的三层微机械悬臂梁红外热探测器对红外辐射的响应规律,结果表明涂敷碳纳米管吸热层使响应灵敏度提高近一倍。 相似文献
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介绍了一种两总线智能化的气体检测系统的工作原理及设计方法。探测器采用抗中毒型催化燃烧式气体传感器,用红外遥控调节零点和增益。通讯采用直流电源载波方法,信号线与电源线公用,不仅降低了布线成本,而且提高了系统可靠性。 相似文献
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Furstenberg R Kendziora CA Stepnowski SV McGill RA 《The Review of scientific instruments》2007,78(6):064903
We report a new experimental apparatus for infrared microthermography applicable to a wide class of samples including semitransparent ones and perforated devices. This setup is particularly well suited for the thermography of microfabricated devices. Traditionally, temperature calibration is performed using calibration hot plates, but this is not applicable to transmissive samples. In this work a custom designed miniature calibration oven in conjunction with spatial filtering is used to obtain accurate static and transient temperature maps of actively heated devices. The procedure does not require prior knowledge of the emissivity. Calibration and image processing algorithms are discussed and analyzed. We show that relatively inexpensive uncooled bolometer arrays can be a suitable detector choice in certain radiometric applications. As an example, we apply this method in the analysis of temperature profiles of an actively heated microfabricated preconcentrator device that incorporates a perforated membrane and is used in trace detection of illicit substances. 相似文献
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肖莉萍 《机电产品开发与创新》2010,23(6):112-113
针对某背景项目,开展8~12μm非制冷红外热像组件工程设计。用以替代某设备的微光夜视组件,实现全天候观测,并对红外探测头低温不启动提出了解决方法。 相似文献
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Thermal detectors of uncooled multi-element infrared imaging arrays. I. Thermally insulated elements
The current status of the list of elements of uncooled infrared (IR) imaging arrays based on thermal insulation of their sensors and on accumulation of heat in the element volume during the time necessary for taking one frame is considered. Specific features of operation and the structure of resistive microbolometers and pyroelectric elements are described, as well as typical parameters of these elements. Prospects of improving the parameters of thermally insulated sensors of megapixel arrays are considered. It is noted that the main factor limiting further improvement of the parameters of pixels in IR imaging arrays and increasing the size of the latter is the value of the thermal resistance between the sensor and the substrate. At the modern level of technology development, the thermal resistance has actually reached the limiting value. Another physical principle of operation of IR detectors is required for a further increase in the sensitivity of sensors, a decrease in their response time, and an increase in the size of uncooled megapixel IR arrays; this principle should not include the necessity of thermal insulation of IR detectors. The operation principle based on using pyrotechnical effects will be considered in the second part of the paper. 相似文献
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恶劣气象条件对红外鱼眼跟踪系统影响的研究 总被引:2,自引:1,他引:1
随着战场空间的不断拓展和红外探测技术飞快发展,全空域的红外探测系统的威胁侦测成为提高已方武器系统生存能力的关键。然而,由于恶劣气象条件对红外的衰减作用,使得红外探测系统的作战效能受到了一定的影响和限制。文中基于红外鱼眼镜头的多目标跟踪系统,分别分析了霾、雾、雨、雪等恶劣气象对红外辐射衰减的衰减系数,以及衰减系数与能见度之间的相互关系,对各种不同气象条件的衰减效应进行了分析比较,并通过理论分析和实验得出了恶劣气象对鱼眼红外多目标跟踪系统的影响。 相似文献
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