Growth and properties of digitally-alloyed AlGaInP by solid source molecular beam epitaxy

Digital alloying using molecular beam epitaxy (MBE) was investigated to produce AlGaInP quaternary alloys for bandgap engineering useful in 600-nm band optoelectronic device applications. Alternating Ga_0.51In_0.49P/Al_0.51In_0.49P periodic layers ranging from 4.4 monolayers (ML) to 22.4 ML were used to generate 4,000-Å-thick (Al_0.5Ga_0.5)_0.51In_0.49P quaternary materials to understand material properties as a function of constituent superlattice layer thickness. High-resolution x-ray diffraction (XRD) analysis exhibited fine satellite peaks for all the samples confirming that digitally-alloyed (Al_0.5Ga_0.5)_0.51In_0.49P preserved high structural quality consistent with cross-sectional transmission electron microscopy (X-TEM) images. Low-temperature photoluminescence (PL) measurements showing a wide span of luminescence energies ～ 170 meV can be obtained from a set of identical composition digitally-alloyed (Al_0.5Ga_0.5)_0.51In_0.49P with different superlattice periods, indicating the bandgap tunability of this approach and its viability for III-P optoelectronic devices grown by MBE.     

Growth and evaluation of lpe graded composition AlxGa1−xAs layers for high efficiency graded bandgap solar cells

A melt-mixing LPE growth technique to obtain a graded composition Al_xGa_1−xAs layer is described. The graded bandgap AlGaAs/GaAs solar cell requires the Al fraction (x) in the Al_xGa_1−xAs surface layer to increase from the junction towards the surface. The graded composition Al_xGa_1−xAs layer creates a built-in electric field for minority carriers which improves the carrier collection process. This graded bandgap solar cell should enable one to realize the full potential of GaAs as a material for solar energy conversion. Quantitative evaluation of the composition profile for these graded layers is needed to develop the proper growth technique and to understand the resulting solar cell characteristics. Rutherford backscattering analysis technique is described which has been successfully used to profile such layers.     

Structural and optical properties of InAs quantum dots in AlGaAs matrix

Structural and optical properties of InAs quantum dots (QDs) grown in a wide-bandgap Al_0.3Ga_0.7As matrix is studied. It is shown that a high temperature stability of optical properties can be achieved owing to deep localization of carriers in a matrix whose band gap is wider than that in GaAs. Specific features of QD formation were studied for different amounts of deposited InAs. A steady red shift of the QD emission peak as far as ∼1.18 μm with the effective thickness of InAs in Al_0.3Ga_0.7As increasing was observed at room temperature. This made it possible to achieve a much higher energy of exciton localization than for QDs in a GaAs matrix. To obtain the maximum localization energy, the QD sheet was overgrown with an InGaAs layer. The possibility of reaching the emission wavelength of ~1.3 μm is demonstrated. __________ Translated from Fizika i Tekhnika Poluprovodnikov, Vol. 37, No. 5, 2003, pp. 578–582. Original Russian Text Copyright ? 2003 by Sizov, Samsonenko, Tsyrlin, Polyakov, Egorov, Tonkikh, Zhukov, Mikhrin, Vasil’ev, Musikhin, Tsatsul’nikov, Ustinov, Ledentsov.     

Enhanced/suppressed interdiffusion of InGaAs-GaAs-AlGaAs strained layers by controlling impurities and gallium vacancies

The interdiffusion of In and Ga at an InGaAs-GaAs interface subjected to different annealing temperatures, times, and environments is demonstrated. The interdiffusion coefficients and activation energies are determined by correlating the shift in the photoluminescence peaks with the calculated quantum well transition energies based on an error function composition profile. The results indicate that a higher In composition In_xGa_1-xGaAs single quantum well (SQW) leads to a higher interdiffusion coefficient of In and Ga in an As overpressure annealing condition. Also, As overpressure increases the interdiffusion, whereas Ga overpressure reduces the interdiffusion. The thermal activation energies for different In composition InGaAs-GaAs SQW’s (x = 0.057, 0.10, 0.15) range from 3.3 to 2.6 eV for an As overpressure environment and from 3 to 2.23 eV for the Ga overpressure situation. With respect to impurity induced disordering by Zn using a Ga or As overpressure significantly effects the depth of the Zn diffusion front but significant mixing does occur in either case when the impurity front reaches the quantum well.     

Temperature dependence of the photoluminescence properties and band gap energy of InxGa1−xAs/GaAs quantum wells

The effective band gap energy of In_xGa_1−xAs/GaAs strained quantum wells (QWs) is investigated by photoluminescence spectroscopy (PL) in the range 12–295 K. The temperature dependence of the band gap energy of strained QWs correlates well with that of bulk In_xGa_1−xAs of similar composition. Deviations from the band gap variation of bulk material at low temperatures (12–90 K) are interpreted in terms of exciton localization. The differences ΔE(12 K) between the measured PL peak energies and the expected transition energies at 12 K (obtained by simulating the measured temperature dependence of the PL peak positions by the well-known Varshni relation) are suggested to be closely related to the Stokes shifts that often exist between PL and PL excitation spectra of QWs. A linear relation is found between the PL full-width at half-maximum measured at 12 K and ΔE for a range of QWs prepared under different growth conditions. Excitonic recombination is inferred to be dominant in the PL transitions at the highest temperatures investigated—even at room temperature.     

Comparative research on the influence of varied Al component on the active layer of AlGaN photocathode

To theoretically research the influence of a varied Al component on the active layer of AlGaN photocathodes, the first principle based on density functional theory is used to calculate the formation energy and band structure of Al_xGa_1-xN with x at 0, 0.125, 0.25, 0.325, and 0.5. The calculation results show that the formation energy declines along with the Al component rise, while the band gap is increasing with Al component increasing. Al_xGa_1-x with x at 0, 0.125, 0.25, 0.325, and 0.5 are direct band gap semiconductors, and their absorption coefficient curves have the same variation tendency. For further study, we designed two kinds of reflection-mode AlGaN photocathode samples. Sample 1 has an Al_xGa_1-x active layer with varied Al component ranging from 0.5 to 0 and decreasing from the bulk to the surface, while sample 2 has an Al_xGa_1-x active layer with the fixed Al component of 0.25. Using the multi-information measurement system, we measured the spectral response of the activated samples at room temperature. Their photocathode parameters were obtained by fitting quantum efficiency curves. Results show that sample 1 has a better spectral response than sample 2 at the range of short-wavelength. This work provides a reference for the structure design of the AlGaN photocathode.     

Process parameter dependence of impurity-free interdiffusion in GaAs/AlxGa1−xAs and InxGa1−yAs/GaAs multiple quantum wells

The dependence of the impurity-free interdiffusion process on the properties of the dielectric cap layer has been studied, for both unstrained GaAs/Al_xGa_1−xAs and pseudomorphic In_y Ga_1−yAs/GaAs MQW structures grown by molecular beam epitaxy. The influence of the cap layer thickness, composition, and deposition technique on the degree of interdiffusion were all systematically investigated. Electron-beam evaporated SiO₂ films of varying thickness, chemical-vapor-deposited SiO_xN_y films of varying composition, and spin-on SiO₂ films were used as cap layers during rapid thermal annealing (850-950°C). Photoluminescence at 10K has been employed to determine the interdiffusioninduced bandgap shifts and to calculate the corresponding Al-Ga and In-Ga interdiffusion coefficients. The latter were found to increase with the cap layer thickness (e-beam SiO₂) up to a limit determined by saturation of the outdiffused Ga concentration in the SiO₂ caps. A maximum concentration of [Ga] = 4–7 ×10¹⁹ cm⁻³ in the SiO₂ caps was determined using secondary ion mass spectroscopy profiling. Larger band-edge shifts are also obtained when the oxygen content of SiO_xN_y cap layers is increased, although the differences are not sufficiently large for a laterally selective interdiffusion process based on variations in cap layer composition alone. Much larger differences are obtained by using different deposition techniques for the cap layers, indicating that the porosity of the cap layer is a much more important parameter than the film composition for the realization of a laterally selective interdiffusion process. For the calculated In_0.2Ga_0.8As/GaAs interdiffusion coefficients, activation energies E_A and prefactors D_o were estimated to ranging from 3.04 to 4.74 eV and 5 × Kh⁻³ to 2 × 10⁵ cm²/s, respectively, dependent on the cap layer deposition technique and the depth of the MQW from the sample surface.     

Characterization of AlxInyGa1−x−yN quaternary alloys grown on sapphire substrates by molecular-beam epitaxy

High-resolution X-ray diffraction (HR-XRD) with rocking curve, atomic force microscopy (AFM) and photoluminescence (PL) spectroscopy have been performed on high-quality quaternary Al_xIn_yGa_1−x−yN thin films at room temperature. The Al_xIn_yGa_1−x−yN films were grown on c-plane (0 0 0 1) sapphire substrates with AlN as buffer layers using a molecular beam epitaxy (MBE) technique with aluminum (Al) mole fractions x ranging from 0.0 to 0.2 and constant indium (In) mole fraction y=0.1. HR-XRD measurements confirmed the high crystalline quality of these alloys without any phase separation. The X-ray rocking curve of Al_xIn_yGa_1−x−yN films typically shows full widths at half maximum (FWHM) intensity between 14.4 and 28.8 arcmin. AFM measurements revealed a two-dimensional (2D) growth mode with a smooth surface morphology of quaternary epilayers. PL spectra exhibited both an enhancement of the integrated intensity and an increasing blueshift with increased Al content with reference to the ternary sample In_0.1Ga_0.90N. Both effects arise from Al-enhanced exciton localization. PL was used to determine the behavior of the energy band gap of the quaternary films, which was found to increase with increasing Al composition from 0.05 to 0.2. This trend is expected since the incorporation of Al increases the energy band gap of ternary In_0.1Ga_0.90N (3.004 eV). We have also investigated the bowing parameter for the variation of energy band gaps and found it to be very sensitive on the Al composition. A value of b=10.4 has been obtained for our quaternary Al_xIn_yGa_1−x−yN alloys.     

Improved quality of AlxGa1−x as grown on se-Doped AlxGa1−x as substrate-Layers by metalorganic chemical vapor deposition

Al_xGa_1−xAs epilayers were grown directly on different Al_xGa_1−xAs substrate-layers by metalorganic chemical vapor deposition (MOCVD). The quality of Al_xGa_1−-xAs layers was significantly improved when Se-doped Al_xGa_1−xAs substrate-layers were used. Al_0.13Ga_0.87As epilayers with excellent morphology, optical, and crystal quality were grown on Se-doped Al_0.26Ga_0.74As. The full width at half maximum of the bound exciton peak as low as 4.51 meV was measured by low-temperature (14.9K) photoluminescence. The improvement is attributed to a Se passivation effect at the surface of Se-doped Al_xGa_1−xAs substrate-layers. Results suggest that Se will reduce and delay the formation of native oxides.     

Effect of surface encapsulation and As4 overpressure on Si diffusion and impurity-induced layer disordering in GaAs,AlxGa1-xAs,and AlxGa1-xAs-GaAs quantum well heterostructures

Data are presented demonstrating that the surface encapsulant and the As₄ overpressure strongly affect Si diffusion in GaAs and Al_xGa_1-xAs, and thus are important parameters in impurity-induced layer disordering. Increasing As₄ overpressure results in anincrease in diffusion depth in the case of GaAs, and adecrease in diffusion depth for Al_xGa_1-xAs. In addition, the band-edge exciton is observed in absorption on an Al_xGa_1-xAs-GaAs superlattice that is diffused with Si and is converted to bulk crystal Al_yGa_1-yAs via impurity-induced layer disordering. In contrast, the exciton is not observed in absorption on GaAs diffused with Si in spite of the high degree of compensation. These data indicate that the Si diffusion process, and the properties of the diffused material, are different for GaAs and for Al_xGa_1-xAs-GaAs superlattices converted into uniform Al_yGa_1-yAs (0 ≤y ≤x ≤ 1) via impurity-induced layer disordering with the amphoteric dopant Si.     

The Investigation of Plasmon-Longitudinal Optical Phonon Coupling and Surface Polariton Modes in Donor Doped GaAs-Al0.33Ga0.67As Multi Quantum Wells

Infrared Fourier transform spectroscopy has been used to investigate phonon, plasmon, surface polariton and plasma-longitudinal optical phonon coupling in highly donor doped multi quantum wells (GaAs/Al_0.33Ga_0.67As) and direct band gap n- type Al_XGa_1-XAs thin layer on GaAs substrate. Using different samples with different concentration of free carriers. The dispersion equation of coupling modes have been calculated by using the condition which the dielectric functions of samples are zero for longitudinal coupled modes and experimental papameters which have been obtained from the best fit p-polarized oblique incidence far infrared reflection spectra. In MQW samples, the free carriers confined to the well and carriers are quasi two dimensional. So, plasmon- LO phonon coupling occur in the well (GaAs). In n- type Al_XGa_1-XAs thin layer, the coupled modes consist of three branches of the high, intermediate and low frequency modes. Their frequencies depend on both concentration and alloy composition. To analyses the surface polariton modes we carry out attenuated total reflection (ATR) measurements. In order to support our assignment the magnetic field profiles and surface polariton dispersion curves have been calculated.     

Type I and Type II Alignment of the Light Hole Band in In0.15Ga0.85As/GaAs and in ln0.15Ga0.85As/Al0.15Ga0.85As Strained Quantum Wells

We present results of photoluminescence and cathodoluminescence measurements of strained undoped In_0.15Ga_0.85As/GaAs and In_0.15Ga_0.85As/Al_0.15Ga_0.85As quantum well structures, designed to throw light on the current controversy over light-hole band alignment at low In content. We compare these data with theoretical calculations of the confined state energies within the eight band effective mass approximation. Our analysis shows that for In_0.15Ga_0.85As/GaAs, the observed two transitions are consistent with either type I or type II alignment of the light hole band for band offset ratios within the accepted range. In the case of In_0.15Ga_0.85As/Al_0.15Ga_0.85As, however, our results clearly indicate type II alignment for the light hole band. We derive the band offset ratio Q, defined here as Q = δE_c/δE_g where δE_c is the conduction band offset and δE_g is the bandgap difference between the quantum well and the barrier in the presence of strain, for the In_0.15Ga_0.85As/Al_0.15Ga_0.85As system to be Q = 0.83 and discuss it in the context of the common anion rule.     

Quantum-confined stark effect and localization of charge carriers in Al0.3Ga0.7N/Al0.4Ga0.6N quantum wells with different morphologies

The electric fields in Al_0.3Ga_0.7N/Al_0.4Ga_0.6N quantum wells are estimated. The quantum wells are grown by plasma-assisted molecular-beam epitaxy with plasma activation of nitrogen. The three-dimensional and planar modes of buffer layer growth are used. The transition to the three-dimensional mode of growth yields a substantial increase in the photoluminescence intensity of the quantum wells and a shift of the photoluminescence line to shorter wavelengths. These effects are attributed to the fact that, because of the extra three-dimensional localization of charge carriers in the quantum-well layer, the quantum-confined Stark effect relaxes. The effect of localization is supposedly due to spontaneous composition fluctuations formed in the AlGaN alloy and enhanced by the three-dimensional growth.     

Photoluminescence studies of In0.7Al0.3As/In0.75Ga0.25As/In0.7Al0.3As metamorphic heterostructures on GaAs substrates

The influence of the design of the metamorphic buffer of In_0.7Al_0.3As/In_0.75Ga_0.25As metamorphic nanoheterostructures for high-electron-mobility transistors (HEMTs) on their electrical parameters and photoluminescence properties is studied experimentally. The heterostructures are grown by molecular-beam epitaxy on GaAs (100) substrates with linear or step-graded In _x Al_{1 ? x} As metamorphic buffers. For the samples with a linear metamorphic buffer, strain-compensated superlattices or inverse steps are incorporated into the buffer. At photon energies ?ω in the range 0.6–0.8 eV, the photoluminescence spectra of all of the samples are identical and correspond to transitions from the first and second electron subbands to the heavy-hole band in the In_0.75Ga_0.25As/In_0.7Al_0.3As quantum well. It is found that the full width at half-maximum of the corresponding peak is proportional to the two-dimensional electron concentration and the luminescence intensity increases with increasing Hall mobility in the heterostructures. At photon energies ?ω in the range 0.8–1.3 eV corresponding to the recombination of charge carriers in the InAlAs barrier region, some features are observed in the photoluminescence spectra. These features are due to the difference between the indium profiles in the smoothing and lower barrier layers of the samples. In turn, the difference arises from the different designs of the metamorphic buffer.     

Application of photoluminescence spectroscopy to studies of In0.38Al0.62As/In0.38Ga0.62As/GaAs metamorphic nanoheterostructures

The results of studies of the surface morphology, electrical parameters, and photoluminescence properties of In_0.38Al_0.62As/In_0.38Ga_0.62As/In_0.38Al_0.62As metamorphic nanoheterostructures on GaAs substrates are reported. Some micron-sized defects oriented along the [011] and \([0\bar 11]\) directions and corresponding to regions of outcropping of stacking faults are detected on the surface of some heterostructures. The Hall mobility and optical properties of the samples correlate with the surface defect density. In the photoluminescence spectra, four emission bands corresponding to the recombination of charge carriers in the InGaAs quantum well (1–1.2 eV), the InAlAs metamorphic buffer (1.8–1.9 eV), the GaAs/AlGaAs superlattice at the buffer-substrate interface, and the GaAs substrate are detected. On the basis of experimentally recorded spectra and self-consistent calculations of the band diagram of the structures, the compositions of the alloy constituents of the heterostructures are established and the technological variations in the compositions in the series of samples are determined.     

Franz–Keldysh oscillations in photoreflectance spectra of complex AlxGa1−xAs structures

Room temperature photoreflectance spectroscopy (PR) was used to investigate MBE grown Al_xGa_1−xAs/GaAs doped structures. For some structures photoreflectance spectra exhibit superposition of Franz – Keldysh oscillations. Using the 632.8 nm line from an He – Ne laser and the 457.9 nm line from an Ar⁺ laser alternately as the pump light, the Franz – Keldysh oscillations from different interfaces were separated. From the period of the oscillations, the built‐in electric field at two interfaces was determined. The dependence of the direct band‐gap energy on the Al content was also investigated. To obtain the direct band gap energy, the measured photoreflectance spectra were analysed using Aspnes lineshape procedure. The determined E^AlGaAs dependence on x for doped Al_xGa_1−xAs layers was compared with previous data. Copyright © 2000 John Wiley & Sons, Ltd.     

分子束外延生长的GaAs-AlxGa1-xAs多层异质结构中的“精细低维调制条纹”的观察

应用透射式电子显微镜观察了GaAs-Al_xGa_1-xAs多层异质结结构中的“精细低维调制条纹”。在邻近GaAs-Al_xGa_1-xAs超晶格层的缓冲层中和与这缓冲层邻近的GaAs-Al_xGa_1-xAs超晶格层的小区域中发现了等宽度的“精细低维调制条纹”,其宽度为9.1Å的GaAs条纹,12Å的Al_xGa_1-xAs条纹。文中介绍了用显微密度计获得的这些条纹的密度分布结果。同时还给出了GaAs-Al_xGa_1-xAs 多层异质结结构的晶格像和用X射线能量散射谱技术获得的成分定量分析结果。     

Effects of growth interruption on the optical properties of AIGaAs/GaAs and GaAs/InGaAs quantum wells grown by atmospheric pressure organometallic chemical vapor deposition

In this study, the effects of growth interruptions on Al_0.17Ga_0.83As/GaAs and GaAs/ In_xGa_1-xAs quantum wells (QWs) grown by organometallic chemical vapor deposition (OMCVD) were assessed using low-temperature photoluminescence (PL) and photoluminescence excitation (PLE) spectroscopies. Growth interruption times were varied between 60, 10, and 0 sec. For both material systems, as the interruption time was reduced, the ground-state QW transition energies increased, while the linewidths of the peaks decreased. For the Al_0.17Ga_0.83As/GaAs structures, 5 K PL data suggests that the incorporation of impurities is enhanced by longer growth interruption times. In addition, as the interruption time was reduced, the energy separation between the 5 K PL and PLE peaks (Stokes shift) decreased, and was as low as 2.6 meV for no interruption. For GaAs/In_0.11Ga_0.89As samples, 2 K PL data indicated that the incorporation of donor species was not a function of the growth interruption time.     

Dry etching characteristics of In1-x-y Ga x Al y as alloys in CCl2F2:Ar and CH4:H2:Ar discharges

The etching characteristics of InGaAlAs alloys lattice-matched to InP were investigated using low pressure (1 mTorr) electron cyclotron resonance CH₄:H₂:Ar or CCl₂F₂:Ar discharges with additional radiofrequency biasing of the samples. Using CCl₂F₂:Ar discharges with ≥250V negative bias it is possible to obtain equi-rate etching of the material for all compositions between In_0.53Ga_0.47As and In_0.52Al_0.48As. At lower bias values, formation of A1F₃ on the surface leads to an inhibition of the etch rates. By making use of the differential etch rates of InGaAlAs layers of different compositions in CH₄:H₂:Ar mixtures, it is possible to choose dc bias values that allow one to stop the etching at a pre-selected depth in a multi-layer structure. For example, for -150 V bias, one can etch through In_0.53Ga_0.47As, In_0.53Ga_0.40Al_0.07As and Ino.53Ga_0.30Al_0.17As layers, and stop at an underlying layer with composition In_0.53Ga_0.20Al_0.27As.     

Analysis of inelastic scattering of quasi-two-dimensional electrons of a superlattice by acoustic phonons with allowance made for the miniband dispersion

Formulas for the effective momentum-relaxation time and mobility of quasi-two-dimensional electrons of a superlattice with consideration of inelastic scattering by acoustic phonons and the dispersion of the miniband energy spectrum as a function of the longitudinal wave vector have been obtained. Numerical calculation was performed for a nondegenerate gas of quasi-2D electrons in a symmetrical GaAs/Al_0.36Ga_0.64As superlattice with a quantum well width of 5 nm at T=77 K. It was shown that consideration of the elasticity of scattering and the dispersion of the miniband energy spectrum gives rise to a significant increase in the electron mobility.