纳米尺度多晶硅微结构刻蚀研究

以HBr作为刻蚀气体,采用ICP金属刻蚀系统对气体流量、刻蚀压力、离子源功率、偏压功率等工艺参数与刻蚀速率、刻蚀选择比和侧壁垂直度的对应关系进行了大量工艺实验。借助理论分析和工艺条件的优化,开发出一套可满足制备侧壁垂直度的纳米尺度多晶硅密排线结构的优化刻蚀工艺技术。实验结果表明:当采用900 W的离子源功率、11 W的偏压功率、25 cm3/min流量的HBr气体和3 mTorr(1 mTorr=0.133 3 Pa)刻蚀压力的工艺条件时,多晶硅与二氧化硅的刻蚀选择比大于100∶1;在保持离子源功率、偏压功率、气体流量不变的条件下,单纯提高反应腔工艺压力则会大幅提高上述选择比值,同时损失多晶硅和二氧化硅的刻蚀均匀性;HBr气体流量的变化在上述功率及反应腔工艺压力的工艺范围内,对多晶硅与二氧化硅的刻蚀选择比和多晶硅刻蚀的形貌特征均无显著影响。采用上述优化的刻蚀工艺条件,配合纳米电子束光刻技术成功得到多晶硅纳米尺度微结构,其最小线宽为40 nm。     

瞄准误差和Gamma-Gamma大气湍流下信号束散角的优化分析

在自由空间激光通信(FSO)系统中,瞄准误差和大气湍流严重影响系统通信链路,是链路性能恶化的两大主要因素.通过对联合信道的理论分析,建立了信道模型,并利用Meijer G函数推导出了直接探测系统和相干探测系统平均信道容量的表达式.通过在Matlab中的仿真结果可知,在给定瞄准误差和大气湍流的条件下,信号光的光束束散角并非越小越好,而是存在最优束散角,该束散角不仅可以保证系统性能良好,而且使得发射系统功率取得最小值,并且采用相干探测系统可以抑制大气湍流对系统的影响,有效提高系统的性能.     

三轴离子束抛光系统驻留时间算法

在光学离子束抛光工艺中,驻留时间求解是一个关键问题。多数驻留时间求解算法要求离子束在工件表面的材料去除速率在加工过程中保持不变。然而,离子束在工件表面的材料去除速率与离子束入射角度有关。为此,在加工曲面工件时,通常采用精密五轴联动运动平台对离子源的运动及姿态进行实时控制,使得在加工曲面工件时离子束相对工件表面的入射角度始终保持不变,从而保证去除函数在整个离子束抛光过程中保持不变。提出了一种基于仿真加工的迭代驻留时间求解算法,在求解驻留时间的过程中考虑到入射角度带来的去除速率变化,从而使得在离子束抛光系统中只需采用三轴运动控制平台对离子源的运动进行控制,而不再需要对离子源的姿态进行实时控制。入射角度与去除速率曲线可以事先通过实验测得。与五轴运动平台相比,三轴平台更稳定、经济且易于控制。仿真结果表明,算法在三轴离子束抛光系统中具有较好的适用性。     

Performance enhancement of free space optical communication system using beam-optimized serial relaying in saturated atmosphere with pointing errors

In this paper, the performance improvement of a free space optical communication system with multi-hop and beam optimization has been studied. Novel closed-form expressions for the end-to-end average bit error rate, outage probability and average capacity of multi-hop free space communication system with decode-and-forward relaying are derived. Beam optimization is done using Nelder–Mead simplex algorithm. A composite channel model using atmospheric attenuation, turbulence and pointing errors is used to model the atmospheric impairments. The saturated atmospheric conditions are modeled by negative exponential channel model, and pointing error effects are considered by normalized jitter standard deviation parameter. The performance of the free space optical communication system in terms of end-to-end average bit error rate, outage probability and average channel capacity in saturated atmospheric turbulence conditions and pointing errors is significantly enhanced by using beam-optimized serial relaying with decode-and-forward transmission. The simulation results obtained by Monte Carlo simulation are in agreement with the results obtained from the closed-form expressions.     

Particle-in-Cell Simulation of the Focusing Properties of High Energy Electron Beam in Plasma Ion Channel

The focusing properties of high energy electron beam in ion channel is investigated in the paper. The collisions of electrons with the neutral gas and the ionization resulted are considered to study the formation of ion channels with PIC method. The effects of various parameters on the beam focusing are analyzed.     

Gamma-Gamma大气湍流中部分相干光通信系统性能研究

部分相干光在湍流大气中传输时,可以有效抑制湍流所引起的光强闪烁效应,从而改善通信链路性能。针对Gamma-Gamma大气湍流信道模型和部分相干光的光束特性,得到了采用OOK调制方式下部分相干光通信系统的平均误码率、中断概率和平均信道容量三个性能指标的解析表达式;在此基础上,分析了光束的空间相干长度和通信距离对通信链路的性能影响。计算结果表明,在相同的大气湍流条件和传输距离下,随着部分相干光的空间相干长度的减小,系统的误码率和中断概率逐步降低,在平均信噪比为30 dB时,系统的误码率可以达到10-5,中断概率低于10-6;另外,系统的平均信道容量会随着光束相干长度的减小而增加,在信噪比等于12 dB时,平均信道容量达到3.8 b/sHz-1。分析结果为部分相干光在湍流大气中实现可靠通信提供了理论依据。     

激光熔覆同轴送粉喷嘴研制

针对现有送粉喷嘴粉末汇聚性差、出粉口容易堵塞以及受热变形的缺点,设计了一种四孔式同轴送粉喷嘴。喷嘴中央为激光束及保护气通道,沿中心锥孔轴向均布的4个小孔,为粉末通道。建立了数值计算模型,应用FLUENT软件对粉末通道不同出口形状和不同倾角条件下粉末流场情况进行数值模拟,选择最优方案。计算结果表明,在其他工艺参数一定的前提下,采用收缩出口与粉末通道倾角为70°时有利于改善熔覆成形效果。最后利用研制的送粉喷嘴进行粉末汇聚、激光熔覆成形等实验,验证该送粉喷嘴的实验效果。     

波束波导传输系统与天线设计

波束波导传输系统具有功率容量高、不需要旋转关节等优点,非常适合在大功率微波系统中应用。本文简单介绍了波束波导系统,设计了一款基于波束波导传输系统的天线,讨论了其馈源的设计及镜面的选取,并利用基于GRASP软件的QUAST模块进行了优化分析。为进一步验证GRASP计算的可靠性,将波束波导天线前两个反射面在HFSS中进行了仿真,并与GRASP所得结果进行了比较,比较结果显示两者吻合较好。     

窄带波束信道MIMO系统的容量分析

最近的研究表明,多输入多输出(MIMO)技术在不增加功率和带宽消耗的情况下具有大幅提高无线通信速率的潜力.在传统的MIMO系统(称为天线信道MIMO系统)中,多个接收天线的输出被直接选作多输出信号.提出了波束信道MIMO系统的结构.在波束信道MIMO系统中,多个波束的输出被选作多输出信号.基于阵列方向响应矢量,提出了窄带MIMO信道冲激响应矩阵的仿真算法.基于提出的信道冲激响应矩阵算法,给出了天线信道MIMO系统和波束信道MIMO系统容量极限的分析算法.理论分析和仿真结果都表明:波束信道能够提高信噪比(SNR),降低信道间的互相关性,因此波束信道MIMO系统比天线信道MIMO系统具有更大的容量极限.     

基于相位补偿的非理想无线轨道角动量复用通信系统研究

电磁波轨道角动量各模态间满足严格正交性,为无线通信系统提供了一个新的复用维度。当前无线轨道角动量通信的研究仍集中于理想视距(LoS)场景,在实际通信场景中,多径效应和非对齐效应等非理想传输情况通常是无法避免的,这会使得无线轨道角动量多入多出(OAM-MIMO)通信系统的性能遭受较大损失。为提升非理想无线OAM-MIMO通信系统性能,该文建模了一种更加符合实际传输场景的毫米波OAM-MIMO 10射线信道模型;然后评估了多径效应和非对齐效应带来的性能损失问题;最后,提出了一种低复杂度的平均相位补偿与迭代功率分配(APC-IPA)联合优化方案来消除非对齐和多径效应造成的相位偏差,提升系统信道容量。仿真结果表明:在同时遭受非对齐和多径效应时,所提APC-IPA联合方案能够有效地提升系统信道容量。     

用于材料改性的宽束离子源现状及其发展

本文叙述了对材料表面改性的宽束离子源的要求，重点介绍了考夫曼型气体离子源及电子束蒸发强流金属离子源，也介绍了ＲＦ、ＥＣＲ离子源及ＭＥＶＶＡ源。     

多波束卫星通信功率带宽联合优化算法

在多波束卫星通信系统中,资源利用率受星上能量的限制,提高资源利用率非常重要。为提高星上资源优化的灵活性,在考虑自由空间损耗、天线增益、雨衰和波束间干扰的基础上,提出一种基于不同业务需求和信道条件的多波束卫星通信下行链路功率带宽联合优化算法。该联合优化算法采用二阶差分目标函数,运用拉格朗日对偶理论和次梯度法求得该联合优化问题最优解的下界。仿真结果分析表明,与单独地优化功率和带宽算法相比,该功率带宽联合优化算法可以根据不同的业务需求和信道条件更加灵活地分配系统容量,提高了资源利用率。      

Electrical characterization of platinum deposited by focused ion beam

Focused ion beam (FIB) systems are commonly used to image, repair and modify integrated circuits by cutting holes in passivation to create vias or to selectively break metal tracks. The ion beam can also be used to deposit a metal, such as platinum, to create new connections. These techniques are very useful tools for debugging designs and testing possible changes to the circuit without the expense of new mask sets or silicon. This paper presents test structures which can be used to characterize a FIB induced platinum deposition process. Sheet resistance test structures have been fabricated using a FIB tool and the results of testing these structures are presented. The sheet resistance data has been used to fabricate platinum straps with a known resistance. This extends the capability of the focused ion beam system beyond the deposition of simple conducting straps. The design of the test structures has been improved through the use of current flow simulation to investigate the effects of geometry and misalignment on the measurement accuracy. The results of these simulations are also presented.     

Performance Analysis of the Double-Antenna SDC System Over <Emphasis Type="Italic">N</Emphasis>-Nakagami Fading Channels

The performance of the double-antenna switched diversity combining (SDC) system over N-Nakagami fading channels is investigated in this paper. Based on the method of the probability density function of the signal-to-noise ratio, the exact expressions for the channel capacity and average symbol error probability (ASEP) are derived. Then the channel capacity and ASEP performance under different conditions is evaluated through numerical simulations to verify the analysis. The simulation results showed that the performance of the double-antenna SDC system is improved with the fading coefficient increased, but the level of improvement is declined as the number of cascaded components increased.     

On the possibility of controlling thermal conditions of a typical element of electronic equipment with a local heat source via Natural Convection

The results of mathematical simulation of thermal conditions of a typical element of radio electronics or electronic engineering are reported. The element presents a gas-filled cavity surrounded by finitely thick solid walls and containing a local heat source. It is shown that a change in the emission intensity of the heat source in the initial time stage destabilizes the thermal plume, and a slight external perturbation has a profound effect upon the hydrodynamics and heat transfer in the system. It is established that the possibility exists of controlling the gas flow velocity and the distribution of temperatures in the cavity by choosing the optimal material for the solid walls and the thermal conditions at the outer contour of the decision region.     

偏轴下轨道角动量毫米波通信系统容量分析

轨道角动量（Orbital Angular Momentum, OAM）结合毫米波进行传输可以减少波束功率损耗，提高接收信号纯度，从而增大系统容量。但其必须保证收发两端天线平行共轴对齐，否则将严重影响接收端模态检测的准确性。针对这一问题，本文首先建立了一种OAM毫米波通信系统模型，其次结合OAM模态迁移特性，对横向轴偏移情形下的系统进行了信道建模，包括理论推导偏移下的模态功率分布以及构建信道传输矩阵。进一步基于该矩阵对系统容量进行了计算分析。仿真结果表明，OAM毫米波系统容量会随着偏移距离的增大而呈现下降趋势，并最终趋于稳定。同时发现当选用的模态群组的模态值较小或模态间隔较大时，系统容量受偏移影响相对小一些。为提高偏移场景下的系统性能奠定了理论基础。      

液态金属镓离子源的制备

叙述了为纳米聚焦离子束装置研制的镓液态金属离子源的制备,并对该离子源的I-V特性、角电流密度、稳定性以及寿命等性能进行了测试,结果表明,该源的各项指标均达到了聚焦离子束系统对液态金属离子源的性能要求。     

特种高压器件离子光学系统的计算

特种高压器件主要由离子源、加速系统、靶子等组成,是一种微型加速器。特种高压器件的离子光学系统对特种高压器件的特性影响很大,因此离子光学系统的计算对于特种高压器件的设计具有重要意义。本文从束流光学出发,对特种高压器件的静电场和束包络的解析公式进行了推导和计算;同时利用基于PIC的粒子模拟程序对束流的传输过程进行了数值计算,结果表明两种方法得到的束斑大小吻合较好。     

Kinetics of the vapour phase deposition of epitaxial InP

A detailed experimental study has been carried out to determine the limitations to growth in a horizontal chloride VPE reactor. Growth rate has been examined as a function of input parameters such as temperature, flow rate and gas phase composition in both the source and seed regions of the system. Although it is not possible in a simple system to make every one of these six variables independent of every other, results indicate that source conditions play a significant part in limiting the overall growth process. In general, for fastest growth rate the flow rate and mole fraction over the source should be high, although for most efficient and reproducible growth low mole fraction and flow are more desirable.     

Adaptive coding and modulation for satellite broadband networks: From theory to practice

This paper presents the detailed design and the key system performance results of a comprehensive laboratory demonstrator for a broadband Ka‐band multi‐beam satellite system exploiting the new DVB‐S2 standard with adaptive coding and modulation (ACM). This complete demonstrator allows in‐depth verification and optimization of the ACM techniques applied to large satellite broadband networks, as well as complementing and confirming the more theoretical or simulation‐based findings published so far. It is demonstrated that few ACM configurations (in terms of modulation and coding) are able to efficiently cope with a typical Ka‐band multi‐beam satellite system with negligible capacity loss. It is also demonstrated that the exploitation of ACM thresholds with hysteresis represents the most reliable way to adapt the physical layer configuration to the spatial and time variability of the channel conditions while avoiding too many physical layer configuration changes. Simple ACM adaptation techniques, readily implementable over large‐scale networks, are shown to perform very well, fulfilling the target packet‐error rate requirements even in the presence of deep fading conditions. The impact of carrier phase noise and satellite nonlinearity has also been measured. Copyright © 2009 John Wiley & Sons, Ltd.