融合自适应卡尔曼和小波的MEMS陀螺去噪方法

为提高MEMS陀螺仪信号的测量精度,提出一种融合卡尔曼和小波的MEMS陀螺仪自适应抗野值去噪方法。卡尔曼滤波中根据信息对干扰数据进行实时检测,通过修正增益或状态的一步预测值抑制野值对滤波精度的影响,然后利用小波分析对滤波后的陀螺仪信号的低频、高频分量同时进行阈值处理。实验表明该方法去噪效果优于卡尔曼滤波和Visushrink,陀螺仪x、y、z轴零偏不稳定性在该方法下比卡尔曼滤波分别提高了31.0%、29.3%、30.5%,比Visushrink分别提高了2.4%、12.1%、12.4%。     

基于压缩感知理论的MEMS陀螺仪信号降噪研究

通过分析传统小波阈值滤波的局限性,将基于压缩感知的小波滤波方法应用于低精度MEMS(micro electro mechanicalsystem)陀螺仪信号降噪中,并与小波阈值滤波方法进行了实验对比,实验结果表明:基于压缩感知的小波滤波方法可以有效地去除MEMS陀螺仪输出信号中的噪声,并且在压缩比较大时基于压缩感知的滤波方法去噪效果优于小波阈值滤波方法,改善了低精度MEMS陀螺仪零偏稳定性,为工程中解决低精度MEMS陀螺仪降噪问题提供了新思路。     

MEMS陀螺与编码器在机器人自主定位中的应用

为提高微机械陀螺仪输出精度及移动机器人定位精度,研究了基于微机械陀螺仪与光电编码器的移动机器人自主定位方法。实时小波滤波法算法去除微机械陀螺仪输出数据噪声;通过微陀螺精度校正平台,用加权最小二乘支持向量回归机算法对微机械的先验数据作回归运算,构造先验回归决策函数,运用回归决策函数补偿微机械陀螺仪输出误差,提高微机械陀螺仪的角速率输出准确度;实验证实了方法能较好提高了MEMS陀螺仪的准确度,可以应用于移动机器人的自主定位之中。     

卡尔曼滤波在MEMS惯性姿态测量中的应用

由于测控成本和有效载荷的限制,一般采用微机电系统(MEMS)惯性传感器来测量小型无人机的飞行姿态。在MC9S12XS128单片机上通过嵌入式软件编程实现了卡尔曼滤波算法,并在JZJ-1型自准直仪转台上对MEMS加速度计和陀螺仪的输出信号进行了数据融合试验,较好地解决了MEMS惯性测量系统的零漂和机械振动干扰问题。     

基于刚度轴偏角预估机制的 MEMS 多环谐振陀螺全闭环控制方法

针对微机电系统多环谐振陀螺正交闭环回路存在控制误差问题,提出一种基于刚度轴偏角预估机制的多环陀螺全闭环控制方法。该方法通过对微机电系统多环谐振陀螺刚度轴偏角预估,实现正交闭环回路参数自动优化调整。同时,提出了基于刚度轴偏角预估机制的全数字化闭环控制方法,实现微机电系统多环谐振陀螺的驱动、检测、正交、模态匹配环路的全闭环控制。该方法可提升正交闭环回路信噪比,增强陀螺正交漂移的抑制能力,降低陀螺零偏输出,改善陀螺的零偏不稳定性。实验结果表明,采用本文提出的基于刚度轴偏角预估机制的全闭环控制方法后,微机电系统多环谐振陀螺的零偏输出由0.201°/s降低为0.021 3°/s,零偏不稳定性由39.42°/h降低为1.237°/h,分别降低了9.44倍和31.86倍,验证了该方法对提升微机电系统多环谐振陀螺仪性能的有效性。     

基于EMMAP的MEMS陀螺噪声估计与滤波方法研究

针对MEMS陀螺仪测量精度低、随机噪声具有不确定性和非线性的问题,提出一种基于最大期望算法(Expectation maximum,EM)和极大后验估计(Maximum a posterion,MAP)的无迹卡尔曼滤波(Unscented Kalman filter,UKF)——EMMAP-UKF的陀螺噪声估计与滤波方法。根据极大后验估计原理,构造出一种次优无偏MAP噪声统计估计模型,并在此基础上引入最大期望算法将噪声估计问题转换为数学期望极大化问题,实现对观测噪声方差的动态调整,最终实现陀螺仪随机漂移误差的估计与滤波处理。最后通过Allan方差对陀螺噪声滤波方法的性能进行评估,通过半实物仿真验证了本方法的有效性。     

高Q值微机电陀螺的快速起振控制

针对高Q值微机电陀螺的快速起振问题,研究其驱动轴控制方法。分析了高Q值谐振器的振动相位随频率的变化率,阐明了锁相环方案启动时间长且对初始频率偏差敏感的原因。用平均法推导了自激振荡方案下起振初始阶段振幅随时间的变化规律。提出了"自激-锁相"驱动轴控制方案,先采用自激振荡方式使陀螺快速起振,再转为锁相环方式使振动频率精确稳定。经实验测试,采用锁相环方案,当初始频率偏差在±10 Hz以内,陀螺的启动时间为2s;采用自激-锁相方案,只要初始频率偏差在±1 000Hz以内,陀螺均可在0.3s内达到频率误差小于0.01%,在0.4s内达到振幅误差小于0.1%。"自激-锁相"方案大幅度缩短了陀螺的启动时间,而且对陀螺初始频率的设置偏差不敏感,对环境温度变化的适应性好,适用于微机电陀螺的批量生产。     

基于卡尔曼滤波的微压电陀螺的误差补偿

卡尔曼滤波是提高陀螺精度的重要手段。陀螺原始信号中常常含有大量随机误差,这使得陀螺的精度大大降低。研究了适用于陀螺精度的滤波方法,探讨了基于卡尔曼滤波的方法在提高陀螺精度上的应用,并通过分析验证了所研究的算法的有效性和适用性。     

新型驻波模式的声表面波MEMS-IDT陀螺仪

文中提出了一种新型基于驻波模式的声表面波(SAW)MEMS-IDT陀螺仪,包括一个谐振腔内驻波反节点位置分布金属点阵的两端SAW谐振器和一组平行于谐振器设置的双延迟线型SAW振荡器.SAW谐振器形成稳定的驻波,由于旋转利用分布的金属点阵产生Coriolis力并激发垂直于旋转方向的二次SAW,并与SAW延迟线上传播的SAW产生相干效应,以此改变声波速度,从而导致延迟线型振荡器的频率输出发生变化.双延迟线振荡器结构有效地降低由于外围温度等干扰的影响.单相单向换能器(SPUDT)以及梳状换能器结构用于构建SAW延迟线,以改善振荡器的频率稳定性.所研制的用于构建陀螺仪的80 MHz两端谐振器以及延迟线器件的测试结果表现出低损耗等特点.利用旋转台对所研制的SAW陀螺仪进行性能评价,在0～1 000 deg/s范围内表现出良好的灵敏度(119 Hz/(deg·s))以及线性度性能.     

Design and Fabrication of MEMS Gyroscopes on the Silicon-on-insulator Substrate with Decoupled Oscillation Modes

The mode coupling is a major factor to affect the precision of the micro electromechanical systems(MEMS) gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network(MuPEN) method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator(SOI) process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/((o)?s) and the quality factor(Q-factor) is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.     

Investigating the effects of quadrature error in parametrically and harmonically excited MEMS rate gyroscopes

Some factors like environmental conditions and manufacturing errors affect performance of a MEMS rate gyroscope. Because they may result to parameter mismatch between the designed gyroscope and the fabricated one. The Parametrically excited gyros are more robust to these changes than the harmonically excited gyros. However, these types of gyros also experience reduction in their accuracy in angular velocity determination due to these changes. One of parameters that affect the accuracy of the gyroscope is quadrature error that here, its effect in the accuracy of angular velocity determination is investigated in two typically designed harmonically and parametrically excited MEMS gyroscopes. The studies are done solving the gyroscopes’ equations analytically and numerically after addition of quadrature error. Finally, it’s found that the quadrature error reduces the accuracy of the gyroscope. Accuracy reduction (equivalent to output error increasing) decreases with increasing angular velocity or decreasing quadrature error almost the same for two types of gyroscope.     

A modified model reference adaptive control with application to MEMS gyroscope

Micro electro-mechanical systems (MEMS) are increasingly being used in measurement and control problems due to their small size, low cost, and low power consumption. The vibrating gyroscope is a MEMS device that will have a significant impact on stability control systems in the transportation industry. This paper investigates the application of a modified model reference adaptive control for MEMS gyroscope. Using this adaptive control algorithm, an estimation of the angular velocity and the damping and stiffness coefficients in real time is easily computable. Changing the conventional model reference input makes it feasible to utilize a low pass filter to remove unwanted oscillations caused by high adaptation gain. This new adaptive control technique enables quick compensation for large changes in the system dynamics, providing consistent estimation of gyroscope parameters including angular velocity and large robustness to parameter variations and external disturbances. The asymptotic stability of the mentioned adaptive controller is guaranteed using the Lyapunov direct method. Numerical simulation is presented to verify the effectiveness of the proposed control scheme.     

基于修正粒子滤波的MEMS传感器飞行器姿态解算

针对单一采用 MEMS传感器解算飞行器姿态无法克服系统非线性噪声干扰的问题,提出了一种基于修正粒子滤波的 MEMS传感器飞行器姿态解算方法.首先,利用共轭梯度法减小陀螺仪漂移误差,然后,利用加权粒子构造概率密度函数以更新粒子权值,得到优化状态估计值;再将共轭梯度法与修正粒子滤波进行融合,确定加权因子,同时以 STM32与 MEMS传感器为核心设计姿态解算系统.实验结果表明,该方法优化了飞行器静态与动态性能,姿态解算性能良好,系统过渡时间短,跟踪特性较好,且增强了系统的鲁棒性与稳定性.     

一种高性能电磁式微机械振动环陀螺

模态匹配和高的品质因数是提高振动环陀螺性能的关键。设计制作了一种电磁式微机械振动环陀螺,采用了全对称的结构以实现模态匹配。通过理论推导建立了陀螺灵敏度和机械噪声的数学模型,分析了陀螺参数对灵敏度及分辨力的影响。采用（100）晶向的单晶硅及MEMS体硅标准工艺加工了陀螺样片,该工艺简单,无需键合。器件频响实验结果表明,所设计的振动环陀螺驱动模态和检测模态频差小于0.5Hz,大气压下品质因数约为500,在1Pa的低真空下达到14000。锁相放大器测试结果表明,在-200 ~200 o/s测量范围内,陀螺分辨力为0.05o/s,灵敏度为0.2uv/ o/s。测试结果表明该陀螺能够实现模态匹配和较高的品质因数,具有较高的性能指标。     

A parametric study on design of a microrate-gyroscope with parametric resonance

Parametric excitation for MEMS gyroscopes can provide resonance in both the drive and the sense modes, even with mismatched natural frequencies. In this paper, requirements for such a condition are studied by analyzing the effect of each factor on the steady state amplitudes of the two modes. To develop a general study, the governing equation of the gyroscope is scaled and non-dimensionalized. The resulting governing equation is in the form of a cubic Mathieu equation coupled to a Duffing equation. In the study of the scaled system, for a gyroscope with matched natural frequencies, three sets of optimum designs are obtained. Then, the robustness of parametric excitation for a gyroscope with mismatching modes is shown. As the results indicate, parametric excitation is able to provide high accuracy and robustness for MEMS gyroscopes.     

Cascaded Kalman and particle filters for photogrammetry based gyroscope drift and robot attitude estimation

Based on a cascaded Kalman–Particle Filtering, gyroscope drift and robot attitude estimation method is proposed in this paper. Due to noisy and erroneous measurements of MEMS gyroscope, it is combined with Photogrammetry based vision navigation scenario. Quaternions kinematics and robot angular velocity dynamics with augmented drift dynamics of gyroscope are employed as system state space model. Nonlinear attitude kinematics, drift and robot angular movement dynamics each in 3 dimensions result in a nonlinear high dimensional system. To reduce the complexity, we propose a decomposition of system to cascaded subsystems and then design separate cascaded observers. This design leads to an easier tuning and more precise debugging from the perspective of programming and such a setting is well suited for a cooperative modular system with noticeably reduced computation time. Kalman Filtering (KF) is employed for the linear and Gaussian subsystem consisting of angular velocity and drift dynamics together with gyroscope measurement. The estimated angular velocity is utilized as input of the second Particle Filtering (PF) based observer in two scenarios of stochastic and deterministic inputs. Simulation results are provided to show the efficiency of the proposed method. Moreover, the experimental results based on data from a 3D MEMS IMU and a 3D camera system are used to demonstrate the efficiency of the method.     

850 nm 垂直腔面发射激光器列阵

为了解决垂直腔面发射激光器(VCSEL)列阵中金丝难以键和和电流注入不均匀的问题,提出了一种非闭合型VCSEL列阵结构。该结构通过腐蚀非闭合环形凹槽形成器件台面,从而简化了工艺步骤,减少了器件的损伤。分别对2×2,3×3,4×4阵列的850 nm 非闭合型顶发射VCSEL器件进行了测试和分析,结果显示其室温连续输出功率分别达到80,140和480 mW;阈值电流分别为0.15,0.25和0.4 A;平行方向和垂直方向上的远场发散角分别为9°和9.6°,13.5°和14.4°,15°和14.4°。在脉宽为50 μs、重复频率为100 Hz 时,最大输出功率分别为90,318和1 279 mW;阈值电流分别为0.2,0.5和0.7 A。分别测试了芯片在封装前后的功率曲线,发现芯片在封装之后的热饱和电流要远远高于封装之前,从而说明良好的封装技术可以提高器件的散热效率,降低器件内部发热对器件性能的影响。     

基于改进EMD的微机械陀螺随机误差建模方法

为了降低微机械(MEMS)陀螺仪的随机误差,提出一种将改进的经验模态分解法(EMD)与传统建模滤波方法相结合的新方法对随机误差进行处理。首先采用传统EMD算法将信号分解为有限个本征模态函数(IMF),并根据皮尔逊相关系数准则和噪声统计特性提出一种筛选机制,将IMF分为噪声IMFs、混叠IMFs和信号IMFs 3类;其次,对混叠IMFs进行时间序列建模,建模完成后进行卡尔曼滤波拟合;最后,将建模滤波后的混叠IMFs与信号IMFs进行重构,得到最终去噪信号。实验分析结果表明,本文方法在抑制随机误差的效果上有明显的优势,极大地改善了信号的质量,提高了惯导的解算精度。     

Digital Readout System for Micromachined Gyroscope and Analysis for its Demodulation Algorithm

A new digital readout system for micromachined gyroscope has been proposed to implement flexible parameter adjustment, improve the control performance of gyroscope, and make error compensation. By digitalizing the output of the gyroscope, this system uses a floating-type digital signal processor (DSP) to process the signal demodulation and achieve the feedback control of the gyroscope. Therefore, the small change of capacitance in the micromachined gyroscope can be detected. A new demodulation algorithm of least mean square demodulation (LMSD) has been developed inside DSP. Simulation and measurement results show that LMSD can improve 29% of the noise performance compared with the typical multiplication method. In air pressure, a kind of vibration-wheel micromachined gyroscope has achieved a noise level of 0.0073 deg s⁻¹·Hz^−1/2 over the 100-Hz bandwidth by using this digital readout technology. Translated from J. Tsinghua Univ. (Sci. Tech.), 2004, 44(5) (in Chinese)     

抗野值自适应卫星/微惯性组合导航方法

针对在复杂城市环境下卫星导航系统(GNSS)定位定速存在野值,导致GNSS/微惯性(MEMS-INS)组合导航状态参数滤波估计精度恶化,甚至滤波发散的问题,提出了一种抗野值自适应GNSS/MEMS-INS组合导航算法,以提高组合导航精度和可靠性。该算法利用Allan方差分析建立较为精确的MEMS器件噪声模型,有效降低模型异常和状态扰动的影响。同时利用新息序列构造观测异常检验统计量,并根据该统计量构造自适应新息加权因子调节滤波增益矩阵,削弱观测野值对状态估计的不良影响。实验结果表明,该算法能够有效地控制GNSS定位定速异常的影响,具有较强的实时性和容错性。相比于传统算法,车载定位、定速和定姿精度分别提升35.78%、60.19%和82.41%,验证了本文算法的有效性和实用性。