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介绍一种微机械音叉陀螺外围电路的基本结构及各组成部分的工作原理。针对机械敏感单元设计了陀螺的外围电路,通过系统分析,建立了数学模型,并利用Matlab对整个模型进行行为级仿真,验证所设计电路的可行性。仿真结果为电路的设计、调试提供了有利的分析方法和手段,具有一定指导意义。 相似文献
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本文以泊松方程和电流连续性方程作为基本方程,并考虑各种物理效应,归纳了几种半导体微传感器的数值模型,提出应用广义Galerkin方法进行微传感器的数值模拟.初步的数值试验表明,广义Galerkin方法可用于微传感器的数值模拟,并具有一定的优越性. 相似文献
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为了快速有效地验证接口电路的可行性,对Si微陀螺建模方法及陀螺结构与接口电路的混合仿真方法进行了研究。在Si微陀螺动力学特性分析的基础上,利用硬件描述语言建立一种以低阶微分方程描述的Si微陀螺解析模型,该模型利用Si微陀螺运动特性来描述陀螺模态之间的耦合行为。利用该模型实现了陀螺结构与接口电路的快速混合仿真。对Si微陀螺自激控制环路进行分析制作了实验电路板,并对电路仿真结果进行了实验验证,测试结果与仿真结果趋势一致。实验表明,该方法能够快速有效地验证接口电路的可行性,为设计Si微陀螺接口电路提供了依据。 相似文献
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微机械陀螺因其微型化、低成本等优点,广泛用于微系统的姿态稳定与控制系统.研究了无驱动结构硅微机械陀螺的信号处理技术.通过硬件电路和软件算法及补偿技术,将旋转载体的滚动、俯仰和偏航的三维姿态角速度信号同时提取并输出.该陀螺可用于旋转载体的姿态测量和控制技术领域. 相似文献
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A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side‐wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS‐compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is and for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is to per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit‐integrated pressure sensor. 相似文献
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基于机械杠杆的位移放大效应,提出了一种具有微杠杆结构的电容检测式微机械陀螺结构,所设计的杠杆放大机构设置在陀螺的检测模态中,通过杠杆将科氏质量块的检测位移放大传递到检测框上,以提升检测位移。建立杠杆结构陀螺的二阶振动微分方程,分析了杠杆结构对微机械陀螺结构静刚度和固有频率的影响,探讨了在不同结构条件下杠杆结构对检测位移的放大效果。通过仿真验证了理论的准确性与可行性,结果表明,在陀螺谐振情况下,可有效增大检测框位移60%以上,提升了检测位移,进而提升检测灵敏度。 相似文献
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This paper proposes an improved design of micromachined tuning fork gyroscope (M-TFG) to decouple the cross talk between driving and sensing directions better and to increase resolution. By employing dual-folds spring suspension, the drive mode and the sense mode are mechanically decoupled. Through careful layout design of the location of the dual-folds spring suspension and the drive combs, the mechanical coupling effect is further decreased by isolating the unwanted excitation from detection. The quality factor investigation demonstrates that high quality factor can be attained by using this structure, which can bring in accurate resolution. As a result, this design has the potential to accomplish low bias drift and accurate resolution for initial level applications. 相似文献
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