UV-LIGA和微细电火花加工技术组合制作三维金属微结构

为了制作三维金属微结构,研究了UV-LIGA和微细电火花加工技术组合的工艺方法。使用UV-LIGA技术制作了准三维金属微结构,然后,对该微结构进行微细电火花加工制作三维金属微结构。使用提出的方法制作出了局部为梯形凸台和锥形凹槽三维微结构的镍模具,给出了梯形凸台和锥形凹槽的尺寸。分析了微细电火花加工中放电参数对表面粗糙度的影响,在工作电压为65V,标称电容为100pF时得到了Ra为0.08μm的微细电火花加工表面。研究结果表明,使用该方法可实现三维金属微结构的制作;通过减小工作电压和标称电容的方法可降低微细电火花加工的表面粗糙度。     

超声复合放电微细加工试验研究

分析了超声复合放电加工的机理,用微细电火花放电工艺制作了多种截面的微细工具电极。进行了超声和超声复合放电加工的试验,结果表明:超声加工是制作硬脆材料微结构的有效方法,制作的金属材料微结构有较好的精度,且加工效率高。     

基于热学仿真的微细电火花加工表面形貌预测

根据热传导基本理论和微细电火花加工的实际情况,建立起微细电火花加工的热传播模型.采用ANSYS分析软件,基于有限元方法对P+硅和45钢两种材料单脉冲放电情况的温度场进行了数值模拟,分析了微细电火花铣削加工中表面粗糙度与放电能量之间的关系.结果表明,微细电火花仿真能够很好地模拟放电凹坑的温度场分布,进而预测加工表面形貌.     

飞秒激光切割与微细电阻滑焊组合制备三维金属微结构

提出了一种采用飞秒激光切割结合微细电阻滑焊制备3D金属微结构的工艺方法(微型化双工位金属箔叠层制造法,(Micro-DLOM)),并通过制备具有复杂形状的3D微型腔模具验证了该工艺方法的可行性。首先,以厚度为10μm的0Cr18Ni9不锈钢箔为基材,在110mW的飞秒激光功率、100μm/s的切割速度和0.75μm的切割补偿量下获得二维微结构,并分析了激光功率和切割速度对切割精度的影响;然后,利用微细电阻滑焊对多层二维微结构进行热扩散焊接,通过多层二维微结构的叠加拟合形成具有曲面特征的微型腔,并对焊接区进行了X射线衍射(XRD)分析。分析发现:微细电阻滑焊所产生的热量仅使焊接区主要物相的相对含量发生了变化,而没有使该区域产生新的物相。与UV-LIGA工艺相比,本工艺可以加工具有自由曲面特征的三维微结构,并且单层钢箔越薄,成形精度越高;与飞秒激光分层平面扫描烧蚀工艺相比,本工艺仅需切割每层二维结构的轮廓,提高了成形效率;与微细电火花加工工艺相比,虽然所成形的微型腔表面粗糙度相对较差,但却省去了制备微电极的工艺步骤,并且不存在微电极工作过程中的损耗问题,所以可以加工深宽比不受限制的微模具。     

Fabrication of 3D metal micro-structure based on fs laser cutting and micro electric resistance slip welding

提出了一种采用飞秒激光切割结合微细电阻滑焊制备3D金属微结构的工艺方法(微型化双工位金属箔叠层制造法,(Micro-DLOM)),并通过制备具有复杂形状的3D微型腔模具验证了该工艺方法的可行性.首先,以厚度为10 μm的0Crl8Ni9不锈钢箔为基材,在110 mW的飞秒激光功率、100 μm/s的切割速度和0.75 μm的切割补偿量下获得二维微结构,并分析了激光功率和切割速度对切割精度的影响;然后,利用微细电阻滑焊对多层二维微结构进行热扩散焊接,通过多层二维微结构的叠加拟合形成具有曲面特征的微型腔,并对焊接区进行了X射线衍射( XRD)分析.分析发现:微细电阻滑焊所产生的热量仅使焊接区主要物相的相对含量发生了变化,而没有使该区域产生新的物相.与UV-LIGA工艺相比,本工艺可以加工具有自由曲面特征的三维微结构,并且单层钢箔越薄,成形精度越高;与飞秒激光分层平面扫描烧蚀工艺相比,本工艺仅需切割每层二维结构的轮廓,提高了成形效率;与微细电火花加工工艺相比,虽然所成形的微型腔表面粗糙度相对较差,但却省去了制备微电极的工艺步骤,并且不存在微电极工作过程中的损耗问题,所以可以加工深宽比不受限制的微模具.     

微细电火花加工系统及其工艺技术

开发了一套微细电火花加工系统,该系统不仅能加工微细轴、微细孔,还能实现微三维结构的微细电火花加工。研究了针对该系统的微细电火花加工工艺技术,研究了放电电压、放电电容等工艺参数,主轴转速,以及工作液介质对微细电火花加工效率、相对电极损耗率的影响规律。采用旋转削边电极技术大大提高了进行大深径比微细孔加工时的加工效率。进行了大量的加工实验,加工出了最小直径为6μm的微细轴以及最小直径为10μm的微细孔;通过对电极损耗的在线补偿策略研究,实现了微三维结构的加工,加工出了外径为4mm、具有24个叶片的微型涡轮盘及具有微三维结构的微细梁,充分证实了该系统的广泛适用性。     

超声复合微细电火花加工机理与试验

微结构电火花加工短路、断路或电弧放电作用,降低加工效率及精度。提出将超声频振动与微细电火花加工复合,利用电极与工件之间的超声频相对运动,产生规则的、参数可控的微细脉冲放电;构造、完善超声复合微细电火花试验系统,进行微结构超声复合电火花加工试验,有效避免短路、断路及电弧脉冲,有效提高加工精度与效率。TG662     

几种最新加工微阵列方法的比较

分别介绍了使用LIGA技术、微细电火花线切割技术(μ-WEDM)、微磨技术、组合式加工技术加工微阵列的最新方法.使用移动LIGA技术加工微针阵列、微细电火花技术加工复杂的三维微阵列电极、微磨技术加工微锥塔阵列、和UV-LIGA技术与微细电火花技术组合加工微阵列电极的工艺方法.主要论述各种方法加工高深宽比阵列结构的原理及其优缺点以及加工中的效率、成本等问题.     

基于支持向量机的电火花加工8418钢表面粗糙度预测模型

由于电火花加工过程的复杂性,单纯通过电火花加工实验方法研究各种放电参数及非电参数对工件表面粗糙度Ra的影响不但耗费大量时间,而且实验成本较高,为此基于支持向量机提出了一种适用于电火花加工表面粗糙度预测的模型。利用遗传算法对该模型中的各参数进行优化,预测不同电火花加工参数组合下的表面粗糙度;以电火花加工8418模具钢为例,将预测值与实验值进行对比,并且通过实验验证了电火花加工8418钢表面粗糙度预测模型参数的准确性;最后进行了误差分析,模型的最大误差值为2.27%。     

微细电火花线切割加工表面凸峰的高斯曲率

微细电火花线切割表面微观三维形貌与传统切削加工表面完全不同,属于各向同性表面,在对其进行三维粗糙度评定时,测量方向对混合参数的影响很大,测量方向选择不当,混合参数的计算精度很低,甚至出现计算结果与被测表面实际观测结果相反的情况。根据微细电火花线切割加工表面凸峰的特点,采用高斯曲率表征其表面凸峰的凹凸性,消除了测量方向对计算结果的影响。经试验验证,高斯曲率对微细电火花线切割加工表面凸峰的表征结果准确,计算精度高。     

Laminated fabrication of 3D queue micro-electrode and its application in micro-EDM

3D micro-electrode used in micro electrical discharge machining (micro-EDM) is difficult to be fabricated. Based on laminated object manufacturing (LOM) process, this paper superimposed multilayer 2D micro-structures together to fit out 3D micro-electrode and applied it in micro-EDM to process 3D micro-cavity mold. Firstly, 100-μm-thick Cu foils were cut by wire-electrical discharge machining (WEDM) to obtain multilayer 2D micro-structures, and then these 2D micro-structures were connected together to fit out 3D micro-electrode through vacuum pressure thermal diffusion welding. Secondly, under the effect of 80-V voltage, 0.2-MHz pulse frequency, 800-ns pulse width, and 4200-ns pulse interval, the 3D micro-electrode was applied in micro-EDM and 3D micro-cavity mold with high surface quality was obtained. Thirdly, in order to reduce the adverse impact of electrode wear on machining precision of 3D micro-cavity mold, 3D queue micro-electrode was used to process the same 3D micro-cavity mold, in which the first electrode is for rough machining and the others for fine machining. Finally, based on the above studies, two kinds of 3D queue micro-electrodes were fabricated, and the 3D micro-cavity molds with surface roughness Ra?=?0.48 μm were obtained through micro-EDM. Compared with the scanning 3D micro-EDM process, the 3D micro-cavity mold can be obtained through up and down reciprocating method of the 3D queue micro-electrode, featuring simple machining process and high efficiency.     

Study on tungsten electrode deposition effect of 3D metal micro-mold during laminated slip welding

3D metal micro-mold fabricated through the micro double-staged laminated object manufacturing process is formed via stacking and fitting of multi-layer 2D micro structures. In this paper, it is suggested that micro-electric resistance slip welding technology be adopted to optimize the connection of micro structures in 3D metal micro-mold. Moreover, the deposition effect of tungsten electrode which was formed on the micro-mold surface and produced during micro-electric resistance slip welding is also studied. Firstly, the temperature field of electric resistance slip welding was simulated by ANSYS software and the maximum temperature in the slip welding area is 1,219 °C when the number of slip welding discharge is 160, which is far lower than the melting point of tungsten electrode material (3,410 °C). Hence, bulk tungsten will not shed during slip welding; however, the wear of the tungsten electrode will be deposited on the surface of the micro-mold in micro-particle shape. Secondly, the influence of slip welding discharge and surface roughness of tungsten electrode on tungsten deposition effect is studied and the study shows that: the content of tungsten within the slip welding area increases gradually as the number of slip welding discharge increases, and decreases gradually as surface roughness of tungsten electrodes increases. Finally, under 160 time’s slip welding discharge and using tungsten electrodes (0.5-mm diameter and 0.12-μm surface roughness), the 3D metal micro-molds which contains 0.4 % tungsten in slip welding area and has a good quality surface was obtained.     

Bending strength analysis of micro WC-shaft manufactured by micro electro-discharge machining

Micro electro-discharge machining (micro-EDM) is a critical technology to fabricate high aspect ratio 3D micro-components. However, the surfaces of micro-components manufactured by micro-EDM will exhibit micro-cracks to produce notch effects, and lead to stress concentrate and reduction of fatigue strength. This paper performs micro-bending tests to investigate the influence of various roughness and size on the bending fracture strength of micro WC-shafts manufactured by micro-EDM. The experimental results indicate that the surface roughness, axial surface area, volume, and length of the specimen will affect its bending fracture strength. For specimens with the same size, the mean bending fracture strength decreases as the surface roughness increases, and the bending fracture probability of the specimens also increases (roughness effect). For specimens with the same roughness, reducing the length or axial surface area will increase the mean bending fracture strength, and reduces the bending fracture probability (size effect).     

在金属基底上制作高深宽比金属微光栅的方法

根据光学领域对高深宽比金属微器件的需求,利用UV-LIGA工艺在金属基底上制作了具有高深宽比的金属微光栅。采用分层曝光、一次显影的方法制作了微电铸用SU-8胶厚胶胶模,解决了高深宽比厚胶胶模制作困难的问题。由于电铸时间长易导致铸层缺陷,故采取分次电铸等措施得到了电铸光栅结构;同时通过线宽补偿的方法解决了溶胀引起的线宽变小问题。在去胶工序中,采用"超声-浸泡-超声"循环往复的方法。最终,制作了周期为130μm、凸台长宽高为900μm×65μm×243μm的金属微光栅,其深宽比达到5,尺寸相对误差小于1%,表面粗糙度小于6.17nm。本文提出的工艺方法克服了现有方法制作金属微光栅时高度有限、基底易碎等局限性,为在金属基底上制作高深宽比金属微光栅提供了一种可行的工艺参考方案。     

基于UV-LIGA技术制造微结构器件试验研究

试验研究了UV-LIGA各工艺环节（包括前后烘、曝光、显影、去胶、电铸等）对金属基片上制造金属微结构器件质量的影响，并组合优化了操作条件和工艺参数。试验结果表明：采用优化后的UV—LIGA工艺条件，制造出的金属微结构器件（如微齿轮、微流道）轮廓清晰，表面质量好，无明显缺陷，与基底结合良好。     

空气中微细电火花沉积的工艺规律研究

论述了一种新的电火花加工方法，它通过合理选择工艺条件在空气中将金属材料放电沉积在工件上。对电火花沉积加工的基本原理进行了分析，预测了实现条件，使用通用的电火花成形加工机床和常见的电极材料黄铜，在空气介质中，通过大量实验对微细电火花沉积进行了系统研究，得出各工艺参数的影响规律。在高速钢工件表面沉积出直径为0．19mm、高度为7.35mm的微小圆柱体。对沉积材料的测试表明，沉积材料致密，与基体结合紧密，成分取决于工具电极材料，同时基体硬度得到提高。     

UV-LIGA制作超高微细阵列电极技术

采用UV-LIGA技术制作了超高金属微细阵列电极,并利用电解置桩的方法辅助去除SU-8胶。通过单次涂胶和提高前烘温度、降低后烘温度的方法制作了厚度达1mm的SU-8胶结构;采取反接电极法在金属基底上电解得到微坑,增强电铸金属电极与金属基底的结合力,保证去胶后电铸金属的完整性。选取优化的工艺参数:单次注射式涂胶,前烘110℃/12h,适量曝光剂量,分步后烘50℃/5min、70℃/10min、90℃/30min,反接电极电解10V/15min等,获得了高900μm、线宽300μm的金属微细阵列电极结构。试验表明,UV-LIGA技术是一种高效、经济的制造超高微细阵列电极的有效手段。     

Punching of noncircular micro-holes and development of micro-forming

In this paper, vibration-EDM technology was introduced by the vibrating worktable designed to fabricate noncircular micro-electrodes and micro die-openings using wire electro-discharge grinding (WEDG). Micro punches and micro die-openings with different clearances were fabricated by controlling the spark gap in micro electrical discharge machining (micro-EDM). The micro-punching experiments include producing triangular and hexagonal micro-holes with a side length of 200 μm on brass strip. Punching of successive hexagonal micro-holes was also carried out successfully. The micro-forming experiments were conducted on copper and brass, producing cup-shaped protrusions with a diameter of 300 μm. All the experimental results show that the modified micro-punching machine is able to perform both micro-punching and micro-forming operations.