共查询到17条相似文献,搜索用时 62 毫秒
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本文介绍了硅片背面激光损伤吸杂实验,用金相显微镜观察证实了高温退火后激光损伤的热稳定性,研究了激光损伤对氧化层错(OSF)和载流子寿命的影响,用中子活化分析法测出了吸杂效果。 相似文献
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多晶硅吸杂效能的研究 总被引:3,自引:1,他引:3
用透射电镜(TEM)、扫描电镜(SEM)和光学显微镜研究了淀积在单晶衬底上的多晶硅层的吸杂能力。研究显示多晶硅还存在两种吸杂的效能:一是能增强内吸杂;二是即使多晶硅在工艺流程中耗尽,在衬底中产生的层错和位错会继续起着吸杂作用。 相似文献
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硅中的金属离子杂质会明显降低少子寿命,并进一步影响硅器件的性能。因此对硅片背面喷砂工艺进行了系统的研究。通过喷砂工艺,在硅片背面形成软损伤层,使硅片具有了吸杂能力,并从吸杂机理出发,解决了吸杂工艺带来的硅抛光片表面颗粒效应,并对硅抛光片的吸杂效果及表面颗粒度进行了表征,为具有吸杂性能的“开盒即用”硅抛光片的批量化生产提供了有力的技术保证。 相似文献
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文章讨论了等离子体损伤造成的EEPROM电路失效,从隧道氧化层质量、器件结构、PECVD、等离子体腐蚀几方面分析了工艺中造成等离子体损伤的原因。分析结论得出金属腐蚀工艺中存在的天线效应和电子阴影效应对隧道氧化层质量有决定性影响。 相似文献
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应用微波光电导衰减仪的方法研究了在不同温度情况下引入铁沾污后再分别进行磷吸杂和等离子体增强化学气相沉积钝化处理对铸造多晶硅片电学性能的影响.实验发现:在中、低温(低于900℃以下)情况下被铁沾污后的多晶硅材料经磷吸杂处理后再结合氢钝化可以显著地改善材料的电学性能;而对于高温(1100℃)情况下被铁沾污后的多晶硅材料经磷吸杂处理后其少子寿命降低,使接着进行的氢钝化也没有明显效果.这表明磷吸杂和氢钝化可以有效地改善被铁沾污后的多晶硅的电学性能,但是改善的效果与铁在硅体内的不同存在形态有关.磷吸杂和氢钝化中只对以间隙态或以其他复合体形态存在的铁有明显的吸杂作用,而对于以沉淀形态存在的铁却没有作用;氢钝化在金属杂质被吸杂移走之后才是最有效的. 相似文献
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铸造多晶硅中铁的磷吸杂和氢钝化机理 总被引:3,自引:0,他引:3
应用微波光电导衰减仪的方法研究了在不同温度情况下引入铁沾污后再分别进行磷吸杂和等离子体增强化学气相沉积钝化处理对铸造多晶硅片电学性能的影响.实验发现:在中、低温(低于900℃以下)情况下被铁沾污后的多晶硅材料经磷吸杂处理后再结合氢钝化可以显著地改善材料的电学性能;而对于高温(1100℃)情况下被铁沾污后的多晶硅材料经磷吸杂处理后其少子寿命降低,使接着进行的氢钝化也没有明显效果.这表明磷吸杂和氢钝化可以有效地改善被铁沾污后的多晶硅的电学性能,但是改善的效果与铁在硅体内的不同存在形态有关.磷吸杂和氢钝化中只对以间隙态或以其他复合体形态存在的铁有明显的吸杂作用,而对于以沉淀形态存在的铁却没有作用;氢钝化在金属杂质被吸杂移走之后才是最有效的. 相似文献
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The oxidation induced stacking faults (OISFs) exposed on the surface of polished silicon substrate are harmful to the electrical performance and reliability of the device region located on the wafer surface. This work investigates the characteristics of the novel nano colloidal silica alkaline slurry, including polyamine and complex non-ions surface surfactant. The experimental results show that when the pH value is higher than 10.1, the removal rate can be higher than 750 nm/min and the surface roughness can be lower than 0.3 nm (10 × 10 μ2). The surface OISFs existing on the wafer are efficiently controlled with the slurry, and the defect density on the polished wafer surface decreases greatly as well. 相似文献
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本文对激光光束通过望远系统后光束的变化进行了分析,并对6倍望远镜进行了激光损伤和破坏的实验研究,实验结果表明,激光对望远系统的损伤破坏主要是热效应所致,损伤破坏的情况与激光的能量,波长,脉冲宽度和望远系统的结构有关。 相似文献
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The crystalline quality of wafer bonded (WB) silicon on insulator (SOI) structures thermal treated in dry oxygen ambients
has been investigated by means of transmission electron microscopy and defect etching. The main crystallographic defects present
in the SOI layers are dislocations, amorphous precipitates, and oxidation induced stacking faults (OISF). The evolution of
the OISFs with time and temperature has also been investigated. The main feature observed is that the OISF in WB SOI structures
undergo a retrogrowth process at temperatures around T = 1195°C for times of t = 2h. This result is very similar to that recently
reported for oxygen implanted SOI (SIMOX) but considerably different from that observed in bulk silicon. The experimental
data fits nicely a model recently proposed for the retrogrowth of OISF in thin SOI layers. This model considers that the self-interstitial
supersaturation is considerably reduced compared to bulk silicon due to the relative fast point defect recombination inside
the top silicon layer. 相似文献
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Chuan Luo Yutong Chen Zhenkai Huang Mi Fu Wenbin Ou Tianrui Huang Kan Yue 《Advanced functional materials》2023,33(49):2304486
Soft ionic conductors hold great potential for soft ionotronics, such as ionic skin, human–machine interface and soft luminescent device. However, most hydrogel and ionogel-based soft ionic conductors suffer from freezing, evaporation and liquid leakage problems, which limit their use in complex environments. Herein, a class of liquid-free ionic conductive elastomers (ICEs) is reported as an alternative soft ionic conductor in soft ionotronics. These liquid-free ICEs offer a combination of desirable properties, including extraordinary stretchability (up to 1913%), toughness (up to 1.08 MJ cm−3), Young's modulus (up to 0.67 MPa), rapid fully self-healing capability at room temperature, and good conductivity (up to 1.01 × 10−5 S cm−1). The application of these ICEs is demonstrated by creating a wearable sensor that can detect and discriminate minimal deformations and human body movements, such as finger or elbow joint flexion, walking, running, etc. In addition, self-healing soft ionotronic devices are demonstrated to confront mechanical breakdown, such as an ionic skin and an alternating-current electroluminescent device that can reuse from damage. It is believed that these liquid-free ICEs hold great promises for applications in wearable devices and soft ionotronics. 相似文献