共查询到19条相似文献,搜索用时 359 毫秒
1.
依据测量薄膜和光之间相互作用可确定薄膜特性的原理,并基于光反射干涉谱与德国最新研发薄膜分析软件SCOUT的新方法可测量已知或未知材料的多层薄膜厚度及其折射率n、消光系数k。通过实际测试证明:该方法可测试单晶硅、玻璃、ITO玻璃基底上沉积薄膜的厚度,样品基本不需要特别准备,对样品无破坏性,测试精准。理论上可以测量所有透光或半透光薄膜的厚度和光学常数,操作非常简便,适合于镀膜行业的在线检测和实时监控,且SCOUT软件在多层膜及多种材料的研发、制备等方面具有应用潜力。 相似文献
2.
3.
纳米磁性多层膜的微波电磁特性研究 总被引:6,自引:1,他引:5
采用射频磁控溅射法制备了FeCoB/SiO2纳米磁性多层膜,并对其微波特性进行研究。用微波谐振腔法测量了该薄膜的复磁导率.2GHz频率处复磁导率实部及虚部分别可达251和22.7。重点研究了多层膜结构中介质层厚度及薄膜总厚度对磁导率的影响,同时结合直流电阻率ρ、静态磁参数Bs、Hc的测量结果分析.探讨了纳米磁性多层膜的微波高磁导率机理.并提出了微波频率下获得高磁导率及低磁损耗的途径。实验结果也表明这种纳米磁性多层膜材料有望在高频平面变压器、平面电感器、薄膜电磁干扰抑制器等领域获得应用。 相似文献
4.
薄膜厚度的均匀性是影响沉积方法应用的一个重要的因素,利用脉冲真空电弧离子镀技术在Si基片上沉积山类金刚石薄膜,采用轮廓仪对膜的厚度进行了测量,研究服不同工艺参数对薄膜均匀性的影响。实验结果表明:脉冲离子源阴极和基片的距离,主回路工作电压以及沉积频率对薄膜均匀性有不同程度的影响。根据分析结果,找出最佳工艺参数,通过比较两种离子源的结果表明,离子源结构对其镀膜均匀性有较大的影响。 相似文献
5.
对磁控溅射PZT铁电多层薄膜进行了分析。结果表明:通过多层薄膜合理的设计和厚度控制,可以改善薄膜进一步的器件应用提供了可能性。通过研究发现,制备多层较理想的溅射条件是衬底温度T=650℃,薄膜子层厚度约为300nm,衬底则以MgO(100)单晶、Si2(100)单晶为佳。结构分析的结果显示出:PZT以铁电膜中的晶粒排列整齐,颗粒大小均匀,基本上和衬底成定向织构,膜的角度对多层膜的绝缘性能影响不大, 相似文献
6.
对磁控溅射PZT铁电多层薄膜进行了分析,结果表明:通过对多层薄膜合理的设计和厚度控制,可以改善薄膜的性能,为进一步的器件应用提供了可能性。通过研究发现。制备多层膜较理想的溅射条件是衬底温度Ts=650℃,薄膜子层厚度约为300um,衬底则以MgO(100)单晶、SiO2(100)单晶为佳。结构分析的结果显示出:PZT多层铁电膜中的晶粒排列整齐,颗粒大小均匀,基本上和衬底成定向织构,膜的电畴呈180°。通过比较可以发现,子层厚度及总厚度超薄,膜的介电常数越大,弛豫频率也越高。但薄膜总厚度对多层膜的绝缘性能影响不大,这说明薄膜的绝缘性质主要是由金属-铁电薄膜的界面决定的。在不同的电压下,多层膜的传导性能影响肖特基势垒的穿透和Fowler-Nordheim隧穿。 相似文献
7.
8.
9.
根据薄膜的成核统计理论,考虑吸附粒子的碰撞、迁移、蒸发等因素,针对薄膜单层和多层核生长类型的生长,用计算机进行仿真模拟.同时研究了几种因素对粒子沉积成膜的影响.根据计算机模拟情况,得出了粒子百分变化与成团粒子百分变化关系、生长过程对粒子沉积成膜的影响.论证了按成核理论下的随机统计规律生成的多层粒子膜,其厚度方面的不均匀性与实际是一致的.并给出了计算机模拟研究薄膜微观生长过程的立体图象. 相似文献
10.
应力对多层薄膜窄带滤光片透射特性的影响 总被引:1,自引:1,他引:0
利用薄膜应力公式和弹性力学的小挠度弯曲理论,分析了多层薄膜应变与薄膜厚度变化的关系,建立起基片曲率与薄膜厚度变化关系的理论模型,提出了多层薄膜各层厚度不均匀变化的关系式。膜厚均匀变化只影响中心波长的漂移,而这种膜厚不均匀变化不仅引起中心波长也引起光谱的退化。在基片由10mm厚减薄到1.0mm时,对100GHz的窄带滤光片的模拟结果为中心波长减小0.977nm;0.5dB带宽减小0.19nm。引入膜厚随机误差的模拟结果为中心波长减小1.066nm;纹波增加0.36dB;峰值插损增加0.32dB,光谱进一步退化了。说明了基片曲率变化引起的光学薄膜厚度变化的不均匀性是引起这种窄带干涉滤光片光谱退化的主要原因之一。 相似文献
11.
12.
13.
Charinee Winotapun Supanut Phattarateera Ajcharaporn Aontee Nantaya Junsook Witchuda Daud Noppadon Kerddonfag Wannee Chinsirikul 《Packaging Technology and Science》2019,32(8):405-418
The symmetrical A/B/A structure of multilayer blown films was fabricated in this study. The immiscible low‐density polyethylene/polylactic acid (LDPE/PLA) blend was set as a core (B) layer and LDPE was used as skin (A) layers. The compositions of PLA in the core layer were varied from 20 to 50 wt%. The thickness of each layer was 10 μm (total film thickness of ~ 30 μm). In a blown film co‐extrusion process, the morphology of the fiber/ribbon‐like structures of LDPE/PLA blend was developed. Such structures had interesting effects on gas permeability and aroma barrier properties of the films. For instance, multilayer LDPE films containing 40 and 50 wt% PLA (P40 and P50) showed the reduction of oxygen permeability (PO2) approximately 20% and 43%, respectively, compared with the neat LDPE film. A long tortuous path for gas and aroma transportation through film thickness was created from the developed ribbon‐like structures of the PLA minor phase. For durian packaging application, fresh‐cut durian of 300 g was packed in the developed multilayer films, LDPE, and HDPE (Control), stored at 4°C for 7 days. Results demonstrated that the steady‐state condition of 10% to 13% O2 and 8% to 10% CO2 was achieved in all packages except in the HDPE. Moreover, the P40 and P50 films exhibited an outstanding aroma barrier property for three major durian volatiles : diethyl sulfide, ethyl propanoate, and 2‐ethyl‐1‐hexanol. Overall results clearly indicated that the multilayer LDPE films containing PLA exhibited a significantly improved aroma barrier performance with optimum gas permeability desirable for modified atmosphere packaging to retain quality of fresh‐cut durian throughout the storage period. 相似文献
14.
Thin polymer films can be prepared by spin coating with thicknesses ranging from nanometers to micrometers. The film thickness
is controlled by concentration of the polymer solution, molar mass of the polymer and spinning speed. The patented GYRSET
system for spin coating applications provides a fundamental modification. The bell-shaped cover minimizes air turbulences
inside the process chamber; therefore, better uniformity of the layer is produced. This leads to highly reproducible results,
uniform coverage, and reliable and uniform material application, in particular at lower spin speeds. We focus on the question
how does the GYRSET system change the final film thickness. In particular, we have investigated modifications of the existing
spin coat equation for solutions of polystyrene dissolved in toluene using the GYRSET system. In addition, we compare homogeneity
of films prepared by open spin coating and GYRSET systems.
Received: 9 October 2000 / Reviewed and accepted: 10 October 2000 相似文献
15.
采用磁控溅射方法, 在H2/Ar混合气氛下制备了GZO薄膜和在Ar气氛下制备了GZO/Cu/GZO多层结构薄膜, 分别研究了H2流量和Cu层厚度对薄膜透明导电性能的影响。在此基础上, 在H2/Ar混合气氛下制备了GZO/Cu/GZO多层结构薄膜, 对Cu层厚度对其性能的影响进行了研究。结果表明, 沉积气氛中引入H2能有效降低GZO薄膜的电阻率而提高其透光率, 在H2流量为20 sccm时GZO薄膜具有最佳性能。随着Cu厚度的增加, GZO/Cu/GZO多层结构薄膜的电阻率和平均透过率显著下降。在H2/Ar混合气氛下制备的氢化GZO/Cu/GZO多层结构薄膜的电阻率普遍低于Ar气氛下制备的GZO/Cu/GZO多层结构薄膜, 但其透光率却随Cu层厚度的增加而显著降低。另外, 薄膜的禁带宽度随H2流量的增加而增加, 随Cu层厚度的增加而减小。 相似文献
16.
薄膜厚度的测量在芯片制造和集成电路等领域中发挥着重要作用。椭偏法具备高测量精度的优点,利用宽谱测量方式可得到全光谱的椭偏参数,实现纳米级薄膜的厚度测量。为解决半导体领域常见的透明硅基底上薄膜厚度测量的问题并消除硅层的叠加信号,本文通过偏振分离式光谱干涉椭偏系统,搭建马赫曾德实验光路,实现了近红外波段硅基底上膜厚的测量,以100 nm厚度的二氧化硅薄膜为样品,实现了纳米级的测量精度。本文所提出的测量方法适用于透明或非透明基底的薄膜厚度测量,避免了检测过程的矫正步骤或光源更换,可应用于化学气相沉积、分子束外延等薄膜制备工艺和技术的成品的高精度检测。 相似文献
17.
多层薄膜-基底结构在工业领域有广泛应用,其中薄膜的厚度与弹性参数等特性对结构与器件性能有显著影响。但对多层薄膜材料参数进行无损定征较为困难。考虑界面波对界面附近材料特性敏感的特点,以及分层薄膜导致液固界面Scholte波频散与分层材料速度分布密切相关等因素,文章首先利用全局矩阵理论分析了分层结构中的声传播,并给出界面上脉冲激励的声压表达式,据此对水浸双层薄膜-基底三层结构材料声速呈正梯度、负梯度、随机分布三种结构中液固界面Scholte波的频散曲线进行数值计算。进一步详细计算了法向脉冲线源激发的界面波瞬态信号随薄膜厚度的变化。结果显示,三种结构中两层薄膜厚度均对液-固界面波频散特性有显著影响,同时不同膜厚对不同频段的Scholte波的“捕获”作用(频率选择性)十分明显。该结果为进一步利用Scholte波频散特性进行多层薄膜厚度定征提供了理论依据。 相似文献
18.
Enhanced effect of vacuum-deposited SiO2 overlayer on photo-induced hydrophilicity of TiO2 film 总被引:3,自引:0,他引:3
K. Miyashita S. Kuroda T. Ubukata T. Ozawa H. Kubota 《Journal of Materials Science》2001,36(16):3877-3884
Photo-induced hydrophilicity of SiO2/TiO2 multilayer film prepared by using the vacuum deposition method was investigated by means of water contact angle measurement. Using black light irradiation of the films centering at a wavelength of 365 nm, an extreme photo-induced hydrophilicity was achieved when the TiO2 film was covered by SiO2 overlayer ranging from 10 to 20 nm in thickness. These multilayer films exhibited much more extreme hydrophilicity than the TiO2 film without SiO2 overlayer. The surface analyses revealed that the enhanced photo-induced hydrophilic surface of the multilayer films exhibited an improved photo-catalytic activity towards decomposition of organic substances on their surfaces. It was found that significant growth of the SiOH group occurred in the uppermost surface of the SiO2 overlayer of the multilayer films through the depth profile measurement of TOF-SIMS. This result suggests that the photo-generated reactive species such as hole created in the TiO2 film may transmit the SiO2 layer to reach the surface. The enhanced photo-induced hydrophilicity of the films can be explained by a synergetic effect of the improved photo-catalytic activity of the multilayer film and the stable hydrophilicity of SiO2 itself. 相似文献