SO I 单晶硅压力传感器模拟计算与优化设计

利用有限元分析方法，借助ANSYS软件，对SOI单晶硅压力传感器进行一系列的分析和计算机模拟，探讨了传感器应变膜在固定宽度或固定面积条件下，宽长比对理论输出的影响，以及应变膜厚度对理论输出的影响，给出了设计应变膜的优化方案；并对根据模拟结果首次制作的SOI单晶硅压力传感器进行了测量，结果与理论值符合得较好。     

微机械轮式角振动陀螺气体阻尼特性研究

轮式角振动陀螺气体阻尼效应是影响其动态特性的主要因素。在充分研究轮式角振动陀螺结构特征的基础上,创建了角振动陀螺驱动模态滑膜阻尼数学解析模型,并给出了改进解析模型。利用有限差分算法求解极坐标系下雷诺方程,建立了敏感模态压膜阻尼简化分析模型。在5 Pa到105 Pa压强范围内,进行了简化分析模型计算,同时对计算结果进行了与ANSYS 仿真结果的比对。理论模型计算与仿真结果表明,敏感模态压膜阻尼是轮式角振动陀螺气体阻尼的主要产生机制。进而,从结构设计和控制电路的角度,给出了减小气体阻尼效应的有效方法。     

基于动态规划算法的人脸比对

动态规划算法可以有效地用来进行序列的比对,能够给出序列之间的最优比对结果,论文将其用在人脸识别的一些关键特征的比对方面,给出了人脸之间相似程度的一种度量,同时给出了具体的算法,可以有效地应用于人脸的比对和其它进一步的人脸识别中的应用。     

厚膜压力传感器温度补偿与调理方法研究

考虑到以往厚膜传感器压敏元件和补偿电路的一致性较差、稳定性不够理想的问题,设计了一种优化的厚膜压力传感器片内平面化结构,其可提高传感器温度补偿效果;分析了信号调理电路的合理布局,元件的科学分布对减小误差,提高抗干扰能力的有效性,并给出了实验数据,通过其证明了设想的正确性。     

微压传感器研制中的几个技术问题

本文给出了采用硅各向异性腐蚀的阳极氧化自动终止技术研制微压方膜、圆膜硅杯的技术方案,讨论了器件表面SiO_2与Al膜厚对微压传感器零位温漂的影响规律及其应采取的工艺措施。     

厚膜压力传感器的温度补偿与调理方法研究

考虑到以往厚膜传感器压敏元件和补偿电路的一致性较差、稳定性不够理想的问题,设计了一种优化的厚膜压力传感器片内平面化结构,其可提高传感器温度补偿效果;分析了信号调理电路的合理布局,元件的科学分布对减小误差,提高抗干扰能力的有效性,并给出了实验数据,通过其证明了设想的正确性.     

中远红外光学薄膜膜层厚度监控的误差分析与监控装置的改进

本文主要阐述了光电极值法的基本原理和反射式膜厚控制装置的误差分析，并且对改进后的膜厚控制装置的实验结果进行了分析和讨论。     

二氧化硅薄膜材料热传导尺寸效应的实验研究

对微米SiO2薄膜材料沿膜面方向热传导尺寸效应进行了实验研究。结果表明,膜厚从微米数量级的尺寸开始,其传热的热导率就已开始体现出鲜明的膜厚尺寸依赖特性(即sizeeffect),经由微观能量输运理论分析后,得到了实验与理论相吻合的结果。     

一种基于蚁群算法的生物序列并行比对方法

生物序列比对是生物信息领域的重要课题,比对结果的合理性和正确性关系到基于比对结果研究的正确性。在保证正确性的前提下利用并行计算充分挖掘计算潜力对提高比对效率有重要意义。针对双序列的全局比对问题,提出了基于蚁群算法的双序列比对并行化方案。对耗时最多的搜索比对路径和信息素更新两个步骤给出了基于共享内存模型的并行化方法。"天河二号"上OpenMP实验结果表明,8线程并行情况下,加速比可达5.03,且序列越长性能越高。     

PZT厚膜的电射流沉积研究

制备了锆钛酸铅( PZT)悬浮液,采用电射流沉积( EJD)技术,在硅衬底上沉积了PZT厚膜.研究了电射流沉积高度、流量及悬浮液混合条件对厚膜致密性的影响.结果表明:降低电射流沉积高度和流量有助于提高沉积PZT厚膜致密性;采用球磨方法充分混合PZT悬浮液,沉积的PZT厚膜致密性明显提高.采用优化的电射流沉积参数和球磨20 h的PZT悬浮液,制备了10μm无裂纹PZT厚膜,其压电常数d33为67 pC·N-1 ,相对介电常数εr 为255.     

高稳定薄膜电阻技术及其应用

首先对有关薄膜电阻的理论作了一定的探讨,得出薄膜电阻随电阻率的增加,其温度系数将会减小;在一定厚度范围内薄膜厚度减小,其温度系数减小;适当的成膜工艺能控制和改善电阻的温度系数的结论。给出了制备薄膜电阻的试验方法(调整薄膜的淀积条件以获得高质量的薄膜,再通过热处理激活)及试验结果,对影响电阻特性及稳定性的一些条件进行了讨论,并探讨了高稳定薄膜电阻技术在集成电路中的应用前景。该工艺现已在双极和MOS电路中得到了很好的应用,拥有更快、更好的发展前景。     

Interference colours of soap bubbles

In this article, we present a new versatile method for calculating the interference colour of any configuration of thin, optically isotropic, dielectric films. This method is free from common weakness of previous methods, namely the poor accuracy for large angles of incidence of light. This method gives full control over the accuracy and speed of computations, and allows for adjustments of the parameters according to the physical and chemical properties of the film, in order to present the optimal results. We also present a formula to model the thickness of thin films made up of liquids, such as soap bubbles.     

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

The micro-Raman method is a noncontact and nondestructive method for thin film thermal conductivity measurements. To apply the micro-Raman method, however, the thickness of the film must be at least tens of micrometers. An analytical heat transfer model is presented in this work to extend the micro-Raman measurement method to measure the thermal conductivity of thin films with submicrometer- or nanometer-scale thickness. The model describes the heat transfer process in the thin film and substrate considering the effects of thin film thickness, interface thermal resistance, thermal conductivity of the thin film and substrate. From this heat transfer model, an analytical expression for the thermal conductivity of the thin film is derived. Experiments were successfully performed to measure the thermal conductivity of 200, 300 and 500 nm thickness silicon dioxide films using the extended micro-Raman measurement method, with results confirming the accuracy and validity of the extended model.     

用于薄液膜检测的同轴环盘电导传感器优化设计

液膜厚度是研究环状流液膜演化发展的重要参数,基于环状流薄液膜厚度范围,设计了基于电导法的非侵入式同轴环盘液膜测量传感器。通过有限元分析,对同轴环盘液膜测量传感器电极结构参数进行了优化设计,确定了传感器结构参数最优选择。实验表明：传感器在50μm~200μm的液膜厚度范围内具有很高的灵敏度,液膜厚度的测量误差在±3.7％以内。     

同位素薄膜厚度在线测量系统

针对宽幅薄膜厚度实时测量的难点,设计了同位素薄膜厚度在线系统;提出了两点法来确定系统工作曲线,两点法减少了确定工作曲线的试验工作量,提高了工作曲线适应不同测量条件的能力;在分析了测量中出现的各种误差的基础上,讨论了针对各种误差的校正方法,采用了脉冲定时计数的方法测量信号频率,有效地提高了测量精度,具有广泛的应用价值;该系统在测量薄膜厚度时取得了良好的测量结果,并已经有产品进入市场。     

Lab Windows/CVI软件在动态测试中的应用

简述了 L ab Windows/ CVI虚拟仪器软件开发平台 ,重点介绍了利用该软件编写测试程序的一般方法 ,并将其应用于弹丸冲击波超压的测试。     

Modelling of annular flow through pipes and T-junctions

This paper describes a computational model for the prediction of isothermal annular two-phase flow in vertical and horizontal intersecting pipes and presents the results of its application to predict phase separation in a horizontal T-junction. The method is based on computational fluid dynamics techniques (CFD) to compute the dispersed core flow simultaneously with the flow of the liquid film along the walls. The core is represented as a dispersed two-phase mixture in which the droplets are tracked using a Lagrangian technique; the wall liquid film is modelled as a thin boundary layer. Full account is made of the interaction between the wall-film and the droplet flow in the core through mass and momentum transfer mechanisms. The method has already been validated against experimental data for fully developed annular flow in vertical and horizontal pipes; there, the predicted film thickness was found to be in satisfactory agreement with data obtained from the literature. The method is now applied to the phenomenon of phase separation occurring in T-junctions where it is found that the predictions for phase split agree quite well with measurements from an independent experiment for a range of phase split ratios. The predictions for wall-film thickness also exhibit similar trends to the data but do not quite match the locations where wall-film thickness peaks occur.     

Ellipsometric measurement accuracy of ultrathin lubricant thickness on magnetic head slider

The quantitative analysis of lubricant transferred from disk to slider is important in understanding the interaction in head-disk interface and designing a stable head-disk system. When applying ellipsometric technology to determine the lubricant thickness on slider, the measurement accuracy is of concern due to the location-to-location variations of slider optical constants. This paper carried out a systematic and quantitative study on how the variations of slider optical constants affect the measurement accuracy of lubricant thickness. In this study, the distribution of slider optical constant was obtained; a differential method was used to calculate the uncertainty in lubricant thickness and the calculated results were experimentally verified. The results show that for the state-of-art sliders, the uncertainty in lubricant thickness is about 20?% for below 2?nm thicknesses and less than 15?% for around 3?nm thicknesses when measured at 632.8?nm wavelength. The results of this study might be also useful for the other optical instruments used to determine the amount of the transferred lubricant.     

Pre‐tilt angle and cell‐gap measurement of vertically aligned non‐twisted liquid‐crystal displays

Abstract— A measurement method for the determination of the cell parameters of vertically aligned nematic LCOS devices has been developed. It provides the values for the pre‐tilt angle and the cell thickness in a reliable way, without the need for spectroscopic instruments. The method uses oblique incidence to separate the determination of pre‐tilt angle and cell thickness from each other and thus enhance the measurement accuracy. As a bonus, the measurement system consists only of simple optical components and does not need costly instruments.     

基于电-声联合的液膜厚度测量方法研究

为了拓宽液膜厚度的测量范围,提出了一种联合应用电阻法与超声渡越时间法的液膜厚度测量新方法。设计了新型的电-声复合传感器,建立了用于优化传感器电极结构参数的数值模型,以灵敏度和线性度为优化目标确定了最优电极参数,通过开展液膜厚度测量实验验证了联合测量方法的有效性。研究结果表明：同轴金属电极适合于测量较薄液膜,在2.4mm~4.4mm厚度范围内的相对误差为-4.93%至5.35%;超声探头更适用于测量较厚液膜,在3.4mm~10.0mm厚度范围内的相对误差为-3.68%至2.20%。通过联合应用电阻法和超声法可以拓展两种方法各自的测量范围并且提高测量结果的可靠性。所提出的电学-声学联合测量方法具有测量范围宽、非侵入、响应快、精度和灵敏度高、安全性好等优点,能够广泛适用于工业生产和实验室研究等场合。