共查询到16条相似文献,搜索用时 328 毫秒
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为了满足高温环境下的压力测量需求,研制了一种基于CO2激光焊接的高温F-P光纤压力传感器。介绍了MEMS压力敏感结构的制作过程,研究了传感器各组件之间的焊接工艺,实现了高温F-P光纤压力传感器的无胶化封装。在此基础上,对传感器的温度特性和高温压力性能进行了研究。结果表明,采用CO2激光焊接封装的传感器可靠性高,在高温下信号传输正常,未出现光谱能量衰减现象。在300 ℃高温下,传感器在0~2.5 MPa范围内的测量误差小于0.2 %FS,能够实现高温压力的准确测量。但温度对传感器的影响不可忽略,在实际应用过程中需对传感器进行温度补偿。 相似文献
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本文提出了一种新型测量应变的空芯光子晶体光纤(HCPCF)法布里-珀罗(F-P)干涉传感器,HCPCF的一端与单模光纤熔接形成反射面1,另一端在熔接机内通过电极放电使端面完全塌陷形成反射面2,构成以HCPCF为腔体的新型F-P干涉传感器。实验结果表明,腔长2mm的传感器在室温下的应变灵敏度为3.1nm/με,线性度为0.9992,极限腔长改变量为3827.3nm。温度在0~150℃的温度变化范围内,腔长的改变量约为0.17μm。理论和实验结果表明该新型传感器具有制作工艺简单、应变灵敏度高、温度灵敏度低和没有迟滞现象等优点。 相似文献
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基于端面镀膜的Fabry-Perot光纤传感器研究 总被引:6,自引:2,他引:4
应用模式耦合理论计算了外腔式Fabry-Perot(F-P)干涉型光纤传感器的输出光强与F-P腔长的关系。对组成F-P腔的光纤端面进行了磨平抛光及镀多层电介质膜处理,使光纤端面反射率为70%,从而提高了传感器的抗干扰能力,简化了探测系统。将该传感器与电阻就变片作对比测量实验,其结果完全一致。 相似文献
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《中国计量学院学报》2015,(3):300-304
提出了一种利用光纤Fabry-Perot(F-P)干涉结构的微位移传感器,该F-P干涉结构是由双倾斜光纤光栅(tilted fiber Bragg grating,TFBG)沿轴向错开一定距离构成空气腔形成的.入射光经双TFBG及其高反射端面往返传播,从而构成F-P干涉结构.光纤沿纵(z轴)向移动时,F-P腔的腔长发生变化,致使干涉光谱的自由光谱范围随之产生变化.实验验证,该传感器在0~115μm的测量范围内获得了高达0.475nm/μm的灵敏度,较之前提出的光纤光栅型传感器灵敏度提高了近3倍. 相似文献
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膜片式F-P腔光纤压力传感器是基于法布里-珀罗干涉原理,采用微电子机械系统(MEMS)技术加工而成。在实际应用中,不同的测试环境对传感器灵敏度的要求各不相同,如果针对不同灵敏度,分别采用MEMS工艺批量化生产,则会造成生产成本过高,经济化效益降低。本文利用湿法腐蚀的方法对传感器进行膜片减薄试验,在一定范围内提高了传感器的压力灵敏度,从而满足了不同的测试需求。膜片减薄后,传感器的灵敏度可达34.2 nm/kPa,压力标定曲线的线性度为0.9997,传感器的非线性误差为0.05%,能够实现0~120 kPa(绝压)范围内压力的准确测量。 相似文献
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针对提高光纤光栅折射率传感器抗干扰能力以及增加反射率的需求,本文提出了一种基于Fabry-Perot腔的保偏微结构光纤(PM-MOF)布拉格光栅折射率传感器.根据传榆矩阵法和有限元方法,分析了微结构光纤光栅F-P腔中被测物折射率与F-P腔反射谱中两个偏振模谐振波长差的关系,在此基础上讨论了中心孔直径、F-P腔长度等参数对传输特性的影响.研究结果表明,随着空气孔中填充物折射率的增加,保偏微结构光纤光栅F-P腔的两个偏振态的谐振波长差将逐渐减小;F-P腔的干涉作用使反射率较单个光栅有很大提高,便于长距离传输和实时解调;两个偏振模对外界干扰具有相似的响应,因此该传感器具有更强的抗干扰能力.本文研究结果为保偏微结构光纤光栅在折射率传感器及其生物传感器方面的应用提供了理论依据. 相似文献
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F-P式光纤压力传感器因其独有的优点广泛应用于军事、民用领域。由于自身结构的关系,F-P式光纤压力传感器的性能受温度影响较大。本文通过对中空F-P式光纤压力传感器制作过程中相关参数的设计计算,对如何实现传感器自身的温度补偿设计进行了探索性研究。 相似文献
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通过对压力传感器循环寿命试验前后动态特性的测试和分析,用实验方法研究了压力传感器动态特性变化。结果表明,循环寿命试验前后,压力传感器的静态特性基本保持不变,而动态特性却发生了较大变化。因此,对用于动态压力测试的传感器进行定期动态特性校准非常必要;对用于高频、高周次动态压力测试的传感器,在实际使用前进行循环老化试验可以提高动态压力测量结果的准确性。 相似文献
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《IEEE sensors journal》2008,8(11):1879-1883
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石墨烯具有优异的机械、电学与光学等传感特性,有希望成为下一代可穿戴电子设备的功能敏感材料。石墨烯膜Fabry-Perot(F-P)声压传感器具有高灵敏度、小型化和抗电磁干扰等优点,但会受到温度漂移的影响。温度对传感器的影响主要体现在F-P腔长变化,引起工作点漂移,导致传感器光学灵敏度发生变化,以及改变石墨烯膜预应力。本文制备了石墨烯膜光纤F-P声压传感器探头,通过声压测试表明,温度改变了悬浮石墨烯膜的机械力学特性,在1 kHz处使其机械灵敏度由1.80 nm/Pa提高至2.44 nm/Pa。 相似文献
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A temperature sensor with high sensitivity based on the birefringence induced Vernier effect in a symmetrical metal-cladding waveguide (SMCW) structure is theoretically proposed. Due to the guiding layer of SMCW is extended to a sub-millimeter scale, the excited ultra-high order modes is highly sensitive to the variation of thermally modulated refractive index (RI) and the obtained comb-like resonance reflectivity spectrum shifts accordingly as changing the ambient temperature. There is a little difference between the RI of the ordinary light and the extraordinary light of the filled nematic liquid crystal (LC), the resulted slight different free spectral range of two orthogonal polarizations makes their superposition of reflectivity spectrum metamorphose into a period envelope with multiple sub-peaks. The dips in the fitting upper envelope possesses a much enhanced temperature dependent spectrum shift which can be measured by a low-cost integrated-type micro-spectrometer. Such a sensor has no reference resonant cavity and its sensing range can be easily controlled by filling with different kinds of LC. 相似文献
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Gun-Hee Lee Jin-Kwan Park Junyoung Byun Jun Chang Yang Se Young Kwon Chobi Kim Chorom Jang Joo Yong Sim Jong-Gwan Yook Steve Park 《Advanced materials (Deerfield Beach, Fla.)》2020,32(8):1906269
Inspired by the human somatosensory system, pressure applied to multiple pressure sensors is received in parallel and combined into a representative signal pattern, which is subsequently processed using machine learning. The pressure signals are combined using a wireless system, where each sensor is assigned a specific resonant frequency on the reflection coefficient (S11) spectrum, and the applied pressure changes the magnitude of the S11 pole with minimal frequency shift. This allows the differentiation and identification of the pressure applied to each sensor. The pressure sensor consists of polypyrrole-coated microstructured poly(dimethylsiloxane) placed on top of electrodes, operating as a capacitive sensor. The high dielectric constant of polypyrrole enables relatively high pressure-sensing performance. The coils are vertically stacked to enable the reader to receive the signals from all of the sensors simultaneously at a single location, analogous to the junction between neighboring primary neurons to a secondary neuron. Here, the stacking order is important to minimize the interference between the coils. Furthermore, convolutional neural network (CNN)-based machine learning is utilized to predict the applied pressure of each sensor from unforeseen S11 spectra. With increasing training, the prediction accuracy improves (with mean squared error of 0.12), analogous to humans' cognitive learning ability. 相似文献