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1.
This work presents the fabrication of micro threads of pitch less than 100?μm for micro components. The micro sized threading tool having a tool nose radius less than 40?μm is manufactured by micro wire electric discharge machining (μWEDM) process. This μWEDM process overcomes the difficulties in conventional machining process for production of threading tools and helps in achieving a corner radius as small as 15?μm with specialized wire tool path strategies. This method also helps in fabrication of special micro tools from commercially available or worn-out tungsten carbide tool inserts.  相似文献   

2.

Precision and micro rotational parts are widely used in various industries, such as micro probes for medical instruments, contact pins for micro assembly applications, micro electrodes for micro Electrical discharge machining (μ-EDM) or micro Electro-chemical discharge machining (μ-ECDM). In this research, a uniform annular area layer by layer feeding strategy was proposed to fabricate high aspect ratio, small radii rotational components on a conventional Wire electrical discharge machining (WEDM) machine equipped with an auxiliary spindle. The uniform annular area layer by layer feeding strategy consisted of the roughing and finishing stages. First, the theoretical Material removal rate (MRR) and radial infeed rate for each layer were determined for the roughing stage, and the theoretical surface roughness, Rz in the finishing stage was researched. Then, a series of optimization experiments were conducted to investigate the influence of the parameters on MRR and the machined surface roughness. A group of pin electrodes were machined by applying this feed strategy with the optimized parameters, and the minimum diameter of the pin electrodes was 40 μm with an aspect-ratio of 60. Finally, micro electrodes for an injection nozzle were achieved with this novel process and a qualified injection nozzle for powder metallurgy was fabricated with the machined micro electrodes.

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3.
One of the biggest challenges for mechanical micro/nano milling is the design and fabrication of high precision and high efficiency micro milling tools. Commercially available micro milling tools are either too expensive (around several hundred US dollars) or simply made from downsizing of macro milling tools, which is sometimes not appropriate for the specific micro/nano milling requirements. So the design and fabrication of custom micro milling tools are necessary. In this paper, a micro straight edge endmill (SEE) is designed. Static and dynamic FEM analyses have been done for the SEEs with different rake angles trying to identify their stiffness and natural frequencies. By wire electrical discharge machining (WEDM), the SEEs made of polycrystalline diamond (PCD) with three different rake angles have been fabricated. The evaluation milling on tungsten carbide (WC) and silicon wafer have processed on a nano milling center. Experimental results show the SEEs have a good ability to simultaneously micro/nano milling of both the side and bottom surfaces with submicron surface roughness, and the SEE has high accuracy for large aspect ratio thin wall machining. The milling experiments on silicon wafer have successfully demonstrated that ductile mode machining was achieved and the coolant played an important role in silicon wafer milling.  相似文献   

4.
This paper investigates the technological capabilities of a hybrid micro machining process for performing wire electro-discharge grinding (WEDG). In particular, micro wire electrical discharge machining (μWEDM) is employed in combination with a rotating submergible spindle to perform WEDG. In this research, first a machining strategy for workpiece preparation is presented. Then, the effects of different machining setup parameters on the achievable surface finish after WEDG are investigated. In particular, an experimental study was conducted to identify the most statistically significant setup parameters for performing the main cut that affect the resulting surface quality. A signal-to-noise (S/N) ratio analysis was conducted to optimise the technological parameters for performing WEDG. By modifying the discharge energy for main cuts when performing WEDG surface finish comparable to that of μWEDM can be achieved. In addition, a simple and cost-effective method for on-the-machine estimation of resulting surface roughness is proposed. Especially, by applying inductive learning a surface roughness prediction model for WEDG can be generate based on data acquired by monitoring on-line the process.  相似文献   

5.
In micro electrical discharge machining (micro-EDM), the precision fabrication of cylindrical micro rods is difficult to achieve with a high processing efficiency. In order to overcome this challenge, this paper proposes a new processing method, which is denoted as twin-mirroring-wire tangential feed micro electrical discharge grinding (TMTF-WEDG). The machining principle, characteristics, and realization of the new method are firstly introduced. Then, the advantages of TMTF-WEDG in terms of machining efficiency and accuracy are demonstrated. The experimental results have shown that the machining efficiency can be increased to more than 70% in comparison with conventional tangential-feed wire electrical discharge grinding. It has also been proved that a minimum removal of material corresponding to a reduction of less than 1 μm in the diameter of a micro rod can be obtained by TMTF-WEDG. This considerably helps in improving the accuracy and repeatability of the machining process. A deviation of less than 1 μm on the diameter of a micro rod has been obtained in a length range of 800 μm. The process repeatability in machining five micro rods has been established to be below 2 μm. The proposed method is therefore of great significance for improving the machining efficiency and ensuring a high precision in the shaping process of cylindrical micro rods.  相似文献   

6.
7.
Although servo scanning 3D micro electro discharge machining (SS-3D MEDM) can achieve a high discharge ratio, the processing efficiency is still lower than expected because the discharge area at micro-electrode tip is much smaller than the area to machine. In particular, for 3D micro cavities, the processing efficiency and the machining accuracy inherently contradict each other. In this paper, an on-machine process of rough-and-finishing SS-3D MEDM is proposed with consideration that most cavity material cannot affect the dimensional accuracy. In the rough machining process, technological measures such as high discharge energy and large-diameter tool electrodes are applied to maximize processing efficiency. In the finishing machining process, a small amount of material is removed for dimensional accuracy, smooth surface, and clear edges-and-corners by changing multi-factors of machining parameters. The research is concentrated on two key techniques: rough-and-finishing border strategy and micro tool-electrode precision measurement for the process transformation from rough to finishing. Moreover, an online measurement method is proposed by the point electric contact between a micro electrode and a standard thin-rod, and the measurement accuracy was up to ±1 µm in our experimental system. Machining experiments of 3D micro cavities < 800 µm verified the proposed methods and the processes including 3D model design, rough-machining, micro-electrode measurement and fabrication, and finishing machining. The experimental results were successfully achieved as follows: the dimensional accuracy < 5 µm, surface roughness Sa0.38 µm, and the processing efficiency being improved to 2.4 times.  相似文献   

8.
Micro electro discharge machining (micro EDM) is suitable for machining micro holes on metal alloy materials, and the micro holes can be machined even to several microns by use of wire electro discharge grinding (WEDG) of micro electrodes. However, considering practicability of micro holes <Φ100 μm in batch processing, the controllable accuracy of holes’ diameter, the consistency accuracy of repeated machining and the processing efficiency are required to be systematically improved. On the basis of conventional WEDG method, a tangential feed WEDG (TF-WEDG) method combined with on-line measurement using a charge coupled device (CCD) was proposed for improving on-line machining accuracy of micro electrodes. In TF-WEDG, removal resolution of micro-electrode diameter (the minimum thickness to be removed from micro electrode) is greatly improved by feeding the electrode along the tangential direction of wire-guide arc, and the resolution is further improved by employing negative polarity machining. Taking advantage of the high removal resolution, the precise diameter of micro-electrode can be achieved by the tangential feed of electrode to a certain position after diameter feedback of on-line measurement. Furthermore, a hybrid process was presented by combining the TF-WEDG method and a self-drilled holes method to improve the machining efficiency of micro electrodes. A cyclic alternating process of micro-electrode repeated machining and micro holes’ drilling was implemented for array micro holes with high consistency accuracy. Micro-EDM experiments were carried out for verifying the proposed methods and processes, and the experimental results show that the repeated machining accuracy of micro electrodes was less than 2 μm and the consistency accuracy of array micro holes was ±1.1 μm.  相似文献   

9.
This paper reports about investigations on some important aspects of surface integrity of the miniature spur gears manufactured by wire electrical discharge machining (WEDM) process. The investigations included study of variation of form errors (deviations in profile and lead) and surface roughness with discharge energy parameters, i.e., voltage and/or pulse-on time for the miniature gears. The effect of WEDM process on flank surface topography, bearing length parameters, microstructure, and microhardness for the best quality miniature gear were also studied. The manufactured miniature gears were of external spur type having 9.8 mm as outside diameter, 4.9-mm thickness, 0.7 mm as module, 12 teeth, and were made of brass. It was found that combination of low discharge energy parameters resulted in better form accuracy, surface finish, and microstructure ensuring enhanced service life and better functional characteristics of the WEDMed miniature gears. The best quality miniature gear had form errors (i.e., lead and profile deviations) as low as 5.4 μm, very little variation in the actual surface topography from the theoretical one, an average surface roughness of 1 μm, and maximum surface roughness within the entire evaluation length as 6.4 μm, showed consistent surface finish measured by other surface roughness parameters, good bearing area curve, and crack-free gear tooth surface without significant alteration in microhardness. Results of the present work demonstrate the superiority of the WEDM process over the conventional miniature gear manufacturing processes.  相似文献   

10.
This study analyzes variations in metal removal rate (MRR) and quality performance of roughness average (R a) and corner deviation (CD) depending on parameters of wire electrical discharge machining (WEDM) process in relation to the cutting of pure tungsten profiles. A hybrid method including response surface methodology (RSM) and back-propagation neural network (BPNN) integrated simulated annealing algorithm (SAA) were proposed to determine an optimal parameter setting. The results of 18 experimental runs via a Taguchi orthogonal table were utilized to train the BPNN to predict the MRR, R a, and CD properties. Simultaneously, RSM and SAA approaches were individually applied to search for an optimal setting. In addition, analysis of variance was implemented to identify significant factors for the processing parameters. Furthermore, the field-emission scanning electron microscope images show that a lot of built-edge layers were presented on the finishing surface after the WEDM process. Finally, the optimized result of BPNN with integrated SAA was compared with that obtained by an RSM approach. Comparisons of the results of the algorithms and confirmation experiments show that both RSM and BPNN/SAA methods are effective tools for the optimization of parameters in WEDM process.  相似文献   

11.
The micromilling tool is one of the key factors affecting micromilling performance. The design and fabrication of micromilling tools are still behind the increasing requirements in miniature component fabrication. How to estimate the fabrication accuracy of a newly designed micromilling tool is one of the urgent issues for micro tooling. This paper introduces an accuracy analysis method in the fabrication of micromilling tools by wire electrical discharge machining (WEDM) process. Taking two typical micro ball end mills into consideration, the micro tool fabrication process is kinematically modeled and analyzed. Analytical results show that the final fabrication accuracy has a close relationship with the designed micro tool geometry. The fabrication procedures can be arranged based on the kinematical analysis, and the final fabrication accuracy also is affected by it. The radius errors of the fabricated micro ball end mill prototype are within ±2μm, which is higher than that of commercially available similar ones. It verifies the proposed accuracy analysis method.  相似文献   

12.
A review of focused ion beam sputtering   总被引:1,自引:0,他引:1  
This paper reviews the applications of focused ion beam (FIB) sputtering for micro/nano fabrication. Basic principles of FIB were briefly discussed, and then empirical and fundamental models for sputtering yield, material removal rate, and surface roughness were presented and compared. The empirical models were more useful for application compared to fundamental models. Fabrication of various micro and nano structures was discussed. Trimmed atomic force microscope (AFM) tips were tested in measurement and imaging of high aspect ratio nanopillars where higher accuracy and clarity were observed. Micromilling tool fabricated using FIB sputtering was used to machine microchannels. Slicing and dwell time control approaches on FIB sputtering were presented for the fabrication of three dimensional microcavities. The first approach is preferred for practical applications. The maximum aspect ratio of 13:1 of the microstructures was achieved. The minimum size of the nanopore was in the range of 2–10 μm. Cavities of microgear of 70 μm outside diameter were sputtered with submicrometer accuracy and 2–5 nm average surface roughness. The microcavities were then filled with polymer in a subsequent micromodling process. The replicated microcomponents were inspected with scanning electron microscope where faithful duplication of accuracy and surface texture of the cavity was observed.  相似文献   

13.
In this paper, the effects and the optimization of machining parameters on surface roughness and roundness in the turning wire electrical discharge machining (TWEDM) process are investigated. In the TWEDM process, a new machining parameter, such as rotational speed, is introduced, which changes the normal machining conditions in conventional wire electrical discharge machining (WEDM). By the Taguchi method, a complete realization of the process parameters and their effects were achieved. The Taguchi method has not been used in TWEDM by other researchers. The surface roughness and roundness were measured to verify the process. In addition, the open-circuit voltage, pulse-off time, open arc voltage, and the inter-electrode gap size, which are replaced by power, time-off, voltage, and servo, respectively, and also wire tension, wire speed, and rotational speed were chosen for evaluation by the Taguchi method. An L18 (21?×?37) Taguchi standard orthogonal array was chosen for the design of experiments. The level of importance of the machining parameters on the surface roughness and roundness was determined by using analysis of variance (ANOVA). The optimum machining parameters combination was obtained by using the analysis of signal-to-noise (S/N) ratios. The variation of surface roughness and roundness with machining parameters was mathematically modeled by using the regression analysis method. Finally, experimentation was carried out to identify the effectiveness of the proposed method. The presented model is also verified by a set of verification tests.  相似文献   

14.
Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials.In 3D SSMEDM process,the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap,instead of the traditional methods that depend on experiential models or intermittent compensation.However,the effects of process parameters on 3D SSMEDM have not been reported up until now.In this study,the emphasis is laid on the effects of pulse duration,peak current,machining polarity,track style,track overlap,and scanning velocity on the 3D SSMEDM performances of machining efficiency,processing status,and surface accuracy.A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon.The experimental results were obtained as follows.Peak current plays a main role in machining efficiency and surface accuracy.Pulse duration affects obviously the stability of discharge state.The material removal rate of cathode processing is about 3/5 of that of anode processing.Compared with direction-parallel path,contour-parallel path is better in counteracting the lateral wear of tool electrode end.Scanning velocity should be selected moderately to avoid electric arc and short.Track overlap should be slightly less than the radius of tool electrode.In addition,a typical 3D micro structure of eye shape was machined based on the optimized process parameters.These results are beneficial to improve machining stability,accuracy,and efficiency in 3D SSMEDM.  相似文献   

15.
This paper investigated the influence of three micro electrodischarge milling process parameters, which were feed rate, capacitance, and voltage. The response variables were average surface roughness (R a ), maximum peak-to-valley roughness height (R y ), tool wear ratio (TWR), and material removal rate (MRR). Statistical models of these output responses were developed using three-level full factorial design of experiment. The developed models were used for multiple-response optimization by desirability function approach to obtain minimum R a , R y , TWR, and maximum MRR. Maximum desirability was found to be 88%. The optimized values of R a , R y , TWR, and MRR were 0.04, 0.34 μm, 0.044, and 0.08 mg min?1, respectively for 4.79 μm s?1 feed rate, 0.1 nF capacitance, and 80 V voltage. Optimized machining parameters were used in verification experiments, where the responses were found very close to the predicted values.  相似文献   

16.
In the present research, wire electrical discharge machining (WEDM) of γ titanium aluminide is studied. Selection of optimum machining parameter combinations for obtaining higher cutting efficiency and accuracy is a challenging task in WEDM due to the presence of a large number of process variables and complicated stochastic process mechanisms. In general, no perfect combination exists that can simultaneously result in both the best cutting speed and the best surface finish quality. This paper presents an attempt to develop an appropriate machining strategy for a maximum process criteria yield. A feed-forward back-propagation neural network is developed to model the machining process. The three most important parameters – cutting speed, surface roughness and wire offset – have been considered as measures of the process performance. The model is capable of predicting the response parameters as a function of six different control parameters, i.e. pulse on time, pulse off time, peak current, wire tension, dielectric flow rate and servo reference voltage. Experimental results demonstrate that the machining model is suitable and the optimisation strategy satisfies practical requirements.  相似文献   

17.
Industrial applications of the micro milling process require sufficient experimental data from various micro tools. Research has been carried out on micro milling of various engineering materials in the past two decades. However, there is no report in the literature on micro milling of graphite. This paper presents an experimental investigation on micro machinability of micro milling of moulded fine-grained graphite. Full immersion slot milling was conducted using diamond-coated, TiAlN-coated and uncoated tungsten carbide micro end mills with a uniform tool diameter of 0.5 mm. The experiments were carried out on a standard industrial precision machining centre with a high-speed micro machining spindle. Design of experiments (DoE) techniques were applied to design and analysis of the machining process. Surface roughness, surface topography and burrs formation under varying machining conditions were characterized using white light interferometry, SEM and a precision surface profiler. Influence of variation of cutting parameters including cutting speeds, feedrate and axial depth of cut on surface roughness and surface damage was analysed using ANOVA method. The experimental results show that feedrate has the most significant influence on surface roughness for all types of tools, and diamond tools are not sensitive to cutting speed and depth of cut. Surface damage and burrs analysis show that the primary material removal mode is still brittle fracture or partial ductile in the experimental cutting conditions. 3D intricate micro EDM electrodes were fabricated with good dimensional accuracy and surface finishes using optimized machining conditions to demonstrate that micro milling is an ideal process for graphite machining.  相似文献   

18.
In this study, the performance of Si wafer machining by employing the die-sinking microelectrical discharge machining technique is reported. Specifically, the machining performance was examined on both high- (1–10 Ω cm) and low-resistivity (0.001–0.005 Ω cm) Si wafers by means of using a range of discharge energies. In this regard, the machining time, material removal rate, surface quality, surface roughness, and material mapping, which are categorized among the important properties in micromachining, have been investigated. In order to analyze the surface properties and to perform the elemental analysis, the scanning electron microscope and energy-dispersive X-ray spectroscopy were used. In contrast, the 3D surface profiler was used to evaluate the roughness of machined surface. The results of this experimental study revealed that the electrical resistivity and discharge energy parameter of microelectrical discharge machining had a great influence on the Si wafer machining performances. The observations in this study indicated a decrease in machining time, high material removal rate, and high surface roughness with an increased discharge energy values. Overall, it was learnt that the minimum amount of energy required to machine Si wafer was 5 μJ for both low and high-resistivity Si. In addition, the highest material removal of 5.842 × 10?5 mm3/s was observed for low-resistivity Si. On the contrary, the best surface roughness, R a, of 0.6203 μm was achieved for high-resistivity Si and it also pointed to a higher carbon percentage after the machining process.  相似文献   

19.
In this investigation, the effect of wire electrical discharge machining (WEDM) parameters such as pulse-on time (T ON), pulse-off time (T OFF), gap voltage (V) and wire feed (F) on material removal rate (MRR) and surface roughness (R a) in metal matrix composites (MMCs) consisting of aluminium alloy (Al6063) and silicon carbide (SiCp) is discussed. The Al6063 is reinforced with SiCp in the form of particles with 5%, 10% and 15% volume fractions. The experiments are carried out as per design of experiments approach using L9 orthogonal array. The results were analysed using analysis of variance and response graphs. The results are also compared with the results obtained for unreinforced Al6063. From this study, it is found that different combinations of WEDM process parameters are required to achieve higher MRR and lower R a for Al6063 and composites. Generally, it is found that the increase in volume percentage of SiC resulted in decreased MRR and increased R a. Regression equations are developed based on the experimental data for the prediction of output parameters for Al6063 and composites. The results from this study will be useful for manufacturing engineers to select appropriate WEDM process parameters to machine MMCs of Al6063 reinforced with SiCp at various proportions.  相似文献   

20.
This article describes the experimental investigation related to creation of holes in aerospace titanium alloy workpiece using static electrode machining and electrical discharge drilling (EDD) process. Special attachment for holding and rotating the tool electrode was developed and installed on electrical discharge machining (EDM) machine by replacing the original conventional tool holder provided on die sinking EDM. The effect of input parameters such as gap current, pulse on-time, duty factor and RPM of tool electrode on output parameters for average hole circularity (Ca) and average surface roughness (Ra) have been studied. It is observed that the effect of rotating electrode machining has considerable influence on the output parameters over stationary electrode machining. The micro-graphs and photographs of few selected samples were taken by SEM and metallurgical microscope, which also commensurate with the findings of the study.  相似文献   

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