微机械材料杨氏模量的测量

利用蚀刻硅技术制造的微机械构件,由于特殊的制作工艺而需要对其材料的杨氏模量进行测量.这是随微机械技术的产生而提出的一个新课题.文章综述了已有的测量微机械材料杨氏模量的方法.在此基础上,提出了用声激励谐振法和瞬态激励法来测量微机械材料的杨氏模量,这两种方法具有测试装置简单、测量容易、精度高等特点.     

碳纳米管压阻微悬臂梁红外热探测器的研究

研究了压阻复合层微机械悬臂梁红外探测器的热挠曲理论模型。利用IC工艺和微机械加工技术设计制作了一种硅/铝/碳纳米管三层微机械悬臂梁红外探测器,该探测器基于硅和铝两种材料热膨胀系数的差异,存在双物质效应,不同温度下梁的挠度不同,其形变可通过梁根部的压敏电桥检测。为提高探测器的红外吸收特性,实验探索出了在微机械悬臂梁上涂敷碳纳米管吸热层的工艺方法。实验研究了具有碳纳米管薄膜吸热层的三层微机械悬臂梁红外热探测器对红外辐射的响应规律,结果表明涂敷碳纳米管吸热层使响应灵敏度提高近一倍。     

基于高速摄像的双线性振动陀螺力学特性分析

针对微机械陀螺特征尺寸小、振动频率高,其动态特性难以精确评价的问题,提出了基于高速摄像技术、显微技术与数字图像相关技术的测试方案。并用此方法测量了双线性振动陀螺的固有频率、品质因子、—阶模态振型和杨氏模量。实验数据表明,系统分辨率可达0.01 μm,不同驱动频率下所测振子响应频率误差小于0.023%。     

基于AFM的纳米梁杨氏模量和残余应力测量

针对同一工艺流程下相同杨氏模量和残余应力的双端固支梁阵列,建立了简化的杨氏模量和残余拉应力的弯曲测试模型,并将应力刚化理论应用到几何非线性有限元分析中用于上述模型的理论误差评价.提出将拉曼频移测试与原子力显微镜(AFM)弯曲测试相结合的实验方案,首先利用拉曼频移判断结构中的应力拉压性质,随后利用AFM测量梁阵列的弹性系数,最终利用MATLAB求解超定方程组的方法解得梁阵列的杨氏模量和残余应力,测试结果证明了该实验方案的可行性.     

简谐振动测试系统的设计

本文介绍了简谐振动测试系统的设计和结构组成,以及采用稳态正弦激振方法对悬臂梁动态特性进行接触式与非接触式测量的方法,给出了悬臂梁的幅频特性测量结果.实验证实了该系统的可行性.     

一种低成本测量材料杨氏模量的方法

杨氏模量是一种重要的材料参数,对结构的固有频率,刚度等有着直接的影响。材料杨氏模量测量方法一般有拉伸法、共振法等,但这些传统方法通常要用到较为昂贵的设备及传感器。为了减小测量成本,文中将压电陶瓷片作为传感元件,利用悬臂梁结构,通过测量自由振动频率,并利用力学公式反推出杨氏模量。文中分析了误差的来源,利用ANSYS软件进行结构仿真,讨论了附加的压电片对悬臂梁的影响,选取较薄的压电片以减小测量误差。实验验证了这种方法可用于杨氏模量的测量。未来可以研究使用电脑麦克风进行数据采集,代替示波器以进一步减小测量成本。     

微机械陀螺非线性特性的自由衰减振荡测量方法

针对微机械陀螺非线性特性的测量问题,研究了一种频率步进式正弦脉冲激励的自由衰减振荡测量方法。在谐振频率附近,采用步进式正弦脉冲序列作为激励信号,得到一组包含系统不同程度非线性动力学特征的自由振动响应信号。通过Hilbert变换提取自由振动信号的瞬时幅值和瞬时频率,计算得到骨架曲线簇,即可实现非线性动力学特性的实验测量。以Duffing系统为例,对不同信噪比自由振动响应信号进行了数值仿真,结果表明这种方法比FREEVIB方法具有更好的抗噪声性能。对一种环型振动微陀螺进行了实验测试,所得到的骨架曲线与传统扫频方式的测量结果一致。作为一种测试手段,这种方法同样可用于其他类型微机械谐振器动力学特性的实验测试。     

基于弯曲法的AFM微悬臂梁弹性常数标定技术

原子力显微镜(atomic force microscopy,AFM)在微纳米尺度力学测量领域有着广泛应用,其微悬臂梁探针的弹性常数是直接影响测量结果准确性的关键因素之一.弯曲法是标定微悬臂梁弹性常数的一类重要方法,基于弯曲标定原理提出了一种新的技术实现方案,并研制了相应的标定系统.借助精密运动定位台使微悬臂梁接触超精密天平并产生弯曲,分别以天平和光杠杆机构同步测得接触力和梁的弯曲量,再根据胡克定律直接算得弹性常数.利用所研制的系统对多种型号的微悬臂梁进行了标定,实验结果表明该系统具有良好的准确性和重复性,测量相对标准差小于5％.     

简谐振动测试系统的设计

本文介绍了简谐振动测试系统的设计和结构组成,以及采用稳态正弦激振方法对悬臂梁动态特性进行接触式与非接触式测量的方法,给出了臂梁的幅频特性测量结果。实验证实了该系统的可行性。     

基于静电力的可溯源微悬臂梁刚度标定方法

许多研究机构都建立了微纳力值测量系统,并达到了非常高的测量精度。但是,对微纳力值的传递却很少研究。采用无源悬臂梁作为微纳力值传递标准,提出基于静电力原理的"类参考梁法"悬臂梁刚度测量方法。该方法可准确且便捷地测量悬臂梁刚度,并将其溯源至长度、电压、电容等国际单位(SI)。应用类参考梁法,对刚度范围在1.45~91 N/m的悬臂梁刚度进行测试,相对方差均小于0.6%,结果表明,类参考梁法具有很好的稳定性。许多因素将影响测量结果,对导致测量误差的因素进行逐一分析。类参考梁法悬臂梁刚度测量合成不确定度低于5%,表明该方法具有可行性。类参考梁法有效改善了悬臂梁刚度测试的不确定度,在AFM高精度微纳力值测量中具有重要的意义。     

S型折叠式微悬臂梁刚度计算

针对目前没有成熟的设计计算S型折叠式悬臂梁刚度公式的问题,本文利用能量法和胡克定律推导了S型折叠悬臂梁x向、y向和z向的刚度计算公式。推导过程中发现对于复杂的微悬臂梁结构,其转角处的弯矩对最终结果影响较大,不可忽略。在ANSYS中对S型折叠悬臂梁建模,应用有限元法计算了S型悬臂梁的刚度,并和理论公式进行了对比。与有限元法对比显示,公式计算值的相对误差分别为0.67%、1.09%和2.95%,均小于3%。应用图像测位移法对S型悬臂梁进行了x、y向的拉伸实验,实验显示得到的实验值和理论值吻合,表明本文推导的 S型悬臂梁的刚度计算公式合理,能够为该类型悬臂梁的设计和计算提供理论依据。     

Study of the tip mass and interaction force effects on the frequency response and mode shapes of the AFM cantilever

The vibrational characteristics of an atomic force microscope (AFM) cantilever beam play a key role in dynamic mode of the atomic force microscope. As the oscillating AFM cantilever tip approaches the sample, the tip–sample interaction force influences the cantilever dynamics. In this paper, we present a detailed theoretical analysis of the frequency response and mode shape behavior of a cantilever beam in the dynamic mode subject to changes in the tip mass and the interaction regime between the AFM cantilever system and the sample. We consider a distributed parameter model for AFM and use Euler–Bernoulli method to derive an expression for AFM characteristics equation contains tip mass and interaction force terms. We study the frequency response of AFM cantilever under variations of interaction force between AFM tip and sample. Also, we investigate the effect of tip mass on the frequency response and also the quality factor and spring constant of each eigenmodes of AFM micro-cantilever. In addition, the mode shape analysis of AFM cantilever under variations of tip mass and interaction force is investigated. This will incorporate the presentation of explicit analytical expressions and numerical analysis. The results show that by considering the tip mass, the resonance frequencies of the cantilever are decreased. Also, the tip mass has a significant effect on the mode shape of the higher eigenmodes of the AFM cantilever. Moreover, tip mass affects the quality factor and spring constant of each modes.     

3D mechanical measurements with an atomic force microscope on 1D structures

We have developed a simple method to characterize the mechanical properties of three dimensional nanostructures, such as nanorods standing up from a substrate. With an atomic force microscope the cantilever probe is used to deflect a horizontally aligned nanorod at different positions along the nanorod, using the apex of the cantilever itself rather than the tip normally used for probing surfaces. This enables accurate determination of nanostructures' spring constant. From these measurements, Young's modulus is found on many individual nanorods with different geometrical and material structures in a short time. Based on this method Young's modulus of carbon nanofibers and epitaxial grown III-V nanowires has been determined.     

Influence of Poisson's ratio variation on lateral spring constant of atomic force microscopy cantilevers

Atomic force microscopy (AFM) can be used to measure the surface morphologies and the mechanical properties of nanostructures. The force acting on the AFM cantilever can be obtained by multiplying the spring constant of AFM cantilever and the corresponding deformation. To improve the accuracy of force experiments, the spring constant of AFM cantilever must be calibrated carefully. Many methods, such as theoretical equations, the finite element method, and the use of reference cantilever, were reported to obtain the spring constant of AFM cantilevers. For the cantilever made of single crystal, the Poisson's ratio varies with different cantilever-crystal angles. In this paper, the influences of Poisson's ratio variation on the lateral spring constant and axial spring constant of rectangular and V-shaped AFM cantilevers, with different tilt angles and normal forces, were investigated by the finite element analysis. When the cantilever's tilt angle is 20 degrees and the Poisson's ratio varies from 0.02 to 0.4, the finite element results show that the lateral spring constants decrease 11.75% for the rectangular cantilever with 1muN landing force and decrease 18.60% for the V-shaped cantilever with 50nN landing force, respectively. The influence of Poisson's ratio variation on axial spring constant is less than 3% for both rectangular and V-shaped cantilevers. As the tilt angle increases, the axial spring constants for rectangular and V-shaped cantilevers decrease substantially. The results obtained can be used to improve the accuracy of the lateral force measurement when using atomic force microscopy.     

Highly sensitive polymer-based cantilever-sensors for DNA detection

We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers.     

Calibration of AFM cantilever spring constants

In this paper we present two simple, reliable and readily applicable methods for calibrating cantilevers and measuring the thickness of thin gold films. The spring constant calibration requires knowledge of the Young's modulus, density of the cantilever and resonant frequency. The thickness of thin gold layers was determined by measuring changes in the resonant frequency and Q-factor of beam shaped AFM cantilevers before and after coating.The techniques for measuring the spring constant and thin film thickness provide accuracy on the order of 10-15%.     

A more comprehensive modeling of atomic force microscope cantilever

This paper focuses on the development of a complete model of an atomic force microscope (AFM) micro-cantilever beam, based on considering the effects of four major factors in modeling the cantilever. They are: rotary inertia and shear deformation of the beam and mass and rotary inertia of the tip. A method based on distributed-parameter modeling approach is proposed to solve the governing equations. The comparisons generally show a very good agreement between the present results and the results of other investigators. As expected, rotary inertia and shear deformation of the beam decrease resonance frequency especially at high ratio of cantilever thickness to its length, and it is relatively more pronounced for higher-order frequencies, than lower ones. Mass and rotary inertia of the tip have similar effects when the mass-ratio of the tip to the cantilever is high. Moreover, the influence of each of these four factors, thickness of the cantilever, density of the tip and inclination of the cantilever on the resonance frequencies has been investigated, separately. It is felt that this work might help the engineers in reducing AFM micro-cantilever design time, by providing insight into the effects of various parameters with the micro-cantilever.     

宏微混合驱动的3-RPR并联机构虚拟样机研究

为解决大行程运动系统的高精度定位问题,结合液压伺服技术与压电技术独特的优点并应用到并联机构中,提出了一种基于电液-压电混合伺服驱动的3-RPR并联机构,并基于接口的多领域协同仿真方法研究其虚拟样机。其中,采用ADAMS软件建立其机械模块、采用AMESim软件建立其液压系统及压电驱动系统模块、采用MATLAB软件建立其控制模块。通过联合仿真,分析了其动态特性,为实际物理样机设计和参数优化提供理论依据。     

裂纹悬臂梁的扭转弹簧模型及其实验验证

将含裂纹悬臂梁转化为由扭转弹簧联接两段弹性梁构成的连接体,得到理论计算含裂纹梁振动频率的特征方程。确立了求解裂纹梁固有频率的数值计算流程．计算得到了裂纹深度和位置变化时裂纹悬臂梁振动固有频率的变化规律。进行了裂纹悬臂梁的弯曲振动台架实验,验证了本文提出的扭转弹簧模型及固有频率数值计算方法的有效性。