LP—MOCVD生长InGaN及InGaN／GaN量子阱的研究

利用MOCVD系统在Al2O3衬底上生长InGaN材料和InGaN/GaN量子阱结构材料，研究发现InGaN材料中In组份几乎不受TMG与TMI的流量比的影响，而只与生长温度有关，生长温度由800℃降低到740℃，In组份的从0.22增加到0.45；室温InGaN光致发光光谱（PL）峰全半高宽（FWHM）为15.5nm;InGaN/GaN量子阱区InGaN的厚度2nm，但光荧光的强度与100nm厚InGaN的体材料相当。     

在ZnO/Si衬底上ZnCdSe/ZnSe多量子阱的生长与光学特性

在经NH3等离子体氮化的Si(100)衬底上。用等离子体增强化学气相淀积(PECVD)的方法生长了ZnO缓冲层，经X射线衍射(XRD)测量，得到了单一取向的ZnO(0002)膜。在此ZnO缓冲层上利用低压金属有机化学气相淀积(LP-MOCVD)方法生长了较高质量的ZnCdSe／ZnSe量子阱。通过不同阱宽的ZnCdSe／ZnSe量子阱生长和测量，得到了多级共振拉曼峰。从发光谱中可见，在1520nm附近有很强的发光，而在未覆盖ZnO的Si衬底上直接生长的ZnCdSe／ZnSe量子阱结构，其光致发光(PL)谱未见发光。可见，在氮化的Si衬底上覆盖ZnO膜生长的ZnCdSe/ZnSe量子阱质量较好。是一种在Si衬底上生长Ⅱ-Ⅵ族化合物半导体材料的有效方法。     

生长温度对InGaN/GaN多量子阱LED光学特性的影响

利用低压MOCVD系统,在蓝宝石衬底上外延生长了InGaN/GaN多量子阱蓝紫光LED结构材料.研究了生长温度对有源层InGaN/GaN多量子阱的合金组分、结晶品质及其发光特性的影响.结果表明当生长温度从730℃升到800℃时,LED的光致发光波长从490nm移到380nm,室温下PL谱发光峰的半高全宽从133meV降到73meV,表明了量子阱结晶性的提高.高温生长时,PL谱中还观察到了GaN的蓝带发光峰,说明量子阱对载流子的限制作用有所减弱.研究表明,通过改变生长温度可以对LED发光波长及有源层InGaN的晶体质量实现良好的控制.     

生长温度对于Ge衬底上分子束外延生长的InGaAs/GaAs量子阱结构质量的影响

本文研究了斜切割（100）Ge衬底上InxGa1-xAs/GaAs量子阱结构的分子束外延生长（In组分为0.17或者0.3）。所生长的样品用原子力显微镜、光致发光光谱和高分辨率透射电子显微镜进行了测量和表征。结果发现,为了生长没有反相畴的GaAs缓冲层,必须对Ge衬底进行高温退火。在GaAs外延层和InxGa1-xAs/GaAs量子阱结构的生长过程中,生长温度是一个至关重要的参数。文中讨论了温度对于外延材料质量的影响机理。通过优化生长温度,Ge衬底上的InxGa1-xAs/GaAs量子阱结构的光致发光谱具有很高的强度、很窄的线宽,样品的表面光滑平整。这些研究表面Ge 衬底上的III-V族化合物半导体材料有很大的器件应用前景。     

GaN{11-22}半极性面上生长InGaN/GaN多量子阱的研究

利用选择性横向外延技术生长{11-22}半极性面GaN模板,并利用半极性面模板生长InGaN/GaN多量子阱结构。结果表明,生长出的GaN模板由半极性面{11-22}面和c面组成,多量子阱具有390nm和420 nm的双峰发光特性,局域阴极发光(CL)测试表明390 nm附近的发光峰来源于半极性面上的量子阱发光,而420 nm左右的发光峰源于c面量子阱发光。c面量子阱发光相对于斜面量子阱发光发生显著红移是因为在选择性横向外延生长过程中,In组分相比Ga较易从掩模区域向窗口中心区域迁移,形成了中心高In组分的c面量子阱,而半极性面上InGaN/GaN多量子阱量子限制斯塔克效应相比于极性面会减弱,此外,相同生长条件下半极性面的生长速率低于极性c面的生长速率。     

GaAlAs/GaAs量子阱材料的光荧光谱研究

分子束外延生长GaAlAs/GaAs量子阱材料时,适当的衬底温度和Ⅴ/Ⅲ束流比是改善AlGaAs材料生长质量的重要因素。对GaAs、GaAlAs材料的生长条件进行优化,获得了高质量的量子阱材料,有源层分别为8nm、10nm、12nm时,10K下的PL谱半峰宽(FWHM)分别为6.42meV、6.28meV、6.28meV。     

GaAs多量子阱超晶格表面激光光伏效应

由于MOCVD、MBE等半导体材料生长技术飞跃发展,半导体多量子阱和超晶格的制备、研究和应用越来越引起广泛重视。GaAs多量子阱超晶格是较为成熟的一种结构。本文初次报道GaAs多量子阱超晶格表面激光辐照感生的光伏效应研究结果。实验样品是在〈001〉晶向半绝缘GaAs衬底上,MBE生长1.5μm n~+-GaAs缓冲层后,交替地周期生长两种阱宽和垒宽,不同周期数的掺硅GaAs层,构成GaAs多量子阱超晶格结构。激     

MOCVD生长1.06μm波段InGaAs/GaAs单量子阱材料的发光特性研究

利用金属有机化学气相沉积(MOCVD)技术,在不同偏向角的GaAs衬底上生长了InGaAs/GaAs单量子阱外延结构。通过对样品室温光致发光(PL)谱测试结果的分析,讨论了衬底偏向角、量子阱层生长温度以及V/III比对外延片发光波长、发光强度及PL谱半峰全宽(FWHM)的影响。发现在相同生长条件下,对于InGaAs/GaAs应变量子阱结构,在GaAs(100)偏111A晶向较小偏向角的衬底上生长的样品PL谱发光强度较大,半峰全宽较窄;量子阱层低温生长的样品发光强度更强;增大量子阱层V/III比可以提高样品的发光强度,同时PL谱峰值波长出现红移。     

1.31μm垂直腔面发射激光器材料生长及其物理特性

采用气态源分子束外延(GSMBE)技术在InP衬底上生长发光波长为1.31μm的InAsP/InGaAsP应变补偿多量子阱和在GaAs衬底上生长GaAs/AlGaAs分布布拉格反射镜(DBR),并用直接键合技术将生长在InP基上的InAsP/InGaAsP应变补偿多量子阱结构组装到GaAs衬底上生长的DBR结构上,对其微结构和发光等特性进行了比较系统的研究.发现500～620℃的高温键合过程和后续的剥离工艺不仅没有引起量子阱发光效率的降低,反而由于键合过程中的退火改进了晶体质量,大大提高了量子阱的发光强度,其中620℃退火处理后的光致发光强度是原生样品的3倍.     

1.31μm垂直腔面发射激光器材料生长及其物理特性

采用气态源分子束外延(GSMBE)技术在InP衬底上生长发光波长为1.31μm的InAsP/InGaAsP应变补偿多量子阱和在GaAs衬底上生长GaAs/AlGaAs分布布拉格反射镜(DBR),并用直接键合技术将生长在InP基上的InAsP/InGaAsP应变补偿多量子阱结构组装到GaAs衬底上生长的DBR结构上,对其微结构和发光等特性进行了比较系统的研究.发现500～620℃的高温键合过程和后续的剥离工艺不仅没有引起量子阱发光效率的降低,反而由于键合过程中的退火改进了晶体质量,大大提高了量子阱的发光强度,其中620℃退火处理后的光致发光强度是原生样品的3倍.     

Growth optimization and optical properties of GaAs-(Ga,Al)As quantum well structures on UV-ozone prepared nominal (111)B GaAs surfaces

GaAs and (Ga,Al)As---GaAs quantum well (QW) structures have been grown by molecular beam epitaxy on nominal (111)B oriented GaAs substrates. The substrate preparation technique involving UV-ozone oxidation was observed to lead to a rough surface after oxide desorption. Mirror-like layer surfaces have nevertheless been achieved by applying a careful procedure during the first stages of growth in order to recover surface flatness. New evidence of planarization is presented, based on the frequency analysis of reflection high-energy electron diffraction (RHEED) intensity oscillations during growth. QWs grown at a moderate substrate temperature (about 610°C) have been obtained with sharp excitonic transitions whose photoluminescence (PL) emission linewidths are comparable to those obtained on misoriented (111)B substrates. In contrast, the use of higher substrate temperatures was found to provide rougher interfaces due to GaAs sublimation during growth interruption at each interface, as revealed by continuous wave and time-resolved PL measurements.     

Super-flat (411)A interfaces and uniformly corrugated (775)B interfaces in GaAs/AlGaAs and InGaAs/InAlAs heterostructures grown by molecular beam epitaxy

Extremely flat interfaces, i.e. effectively atomically flat interfaces over a wafer-size area were realized in GaAs/AlGaAs quantum wells (QWs) grown on (411)A GaAs substrates by molecular beam epitaxy (MBE). These flat interfaces are called as “(411)A super-flat interfaces”. Besides in GaAs/AlGaAs QWs, the (411)A super-flat interfaces were formed in pseudomorphic InGaAs/AlGaAs QWs on GaAs substrates and in pseudomorphic and lattice-matched InGaAs/InAlAs QWs on InP substrates. GaAs/AlGaAs resonant tunneling diodes and InGaAs/InAlAs HEMT structures with the (411)A super-flat interfaces were confirmed to exhibit improved characteristics, indicating high potential of applications of the (411)A super-flat interfaces. High density, high uniformity and good optical quality were achieved in (775)B GaAs/(GaAs)_m(AlAs)_n quantum wires (QWRs) self-organized in a GaAs/(GaAs)_m(AlAs)_n QW grown on (775)B GaAs substrates by MBE. The QWRs were successfully applied to QWR lasers, which oscillated at room temperature for the first time as QWR lasers with a self-organized QWR structure in its active region. These results suggest that MBE growth on high index crystal plane such as (411)A or (775)B is very promising for developing novel semiconductor materials for future electron devices.     

Super-flat interfaces in In0.53Ga0.47As/In0.52Al0.48As quantum wells grown on (411)A InP substrates by molecular beam epitaxy

Effectively atomically flat interfaces over a macroscopic area (“(411)A super-flat interfaces”) were successfully achieved in In_0.53Ga_0.47As/In_0.52Al_0.48As quantum wells (QWs) grown on (411)A InP substrates by molecular beam epitaxy (MBE) at a substrate temperature of 570°C and V/III=6. Surface morphology of the In_0.53Ga_0.47As/In_0.52Al_0.48As QWs was smooth and featureless, while a rough surface of those simultaneously grown on a (100) InP substrate was observed. Photoluminescence (PL) linewidths at 4.2 K from the (411)A QWs with well width of 0.6–12 nm were 20–30 % narrower than those grown on a (100) InP substrate and also they are almost as narrow as each of split PL peaks for those of growth-interrupted QWs on a (100) InP substrate. In the case of the (411)A QWs, only one PL peak with very narrow linewidth was observed from each QW over a large distance (7 mm) on a wafer.     

High quality GaAs/AlGaAs quantum wells grown on (111)A substrates by metalorganic vapor phase epitaxy

Growth of GaAs and AlGaAs epitaxial layers on both (111)A and (111)13 faces of GaAs substrates was studied by the atmospheric metalorganic vapor phase epitaxy (MOVPE) technique. We show that GaAs and AlGaAs layers with excellent surface quality can be grown at relatively low temperatures and V/III ratios (600°C, 15) on the (111)A face, whereas for layers on the (111)13 face a higher growth temperature (720°C) was required. GaAs/AlGaAs quantum well (QW) structures were successfully grown for the first time on the (111)A GaAs face by the MOVPE technique. The effects of various growth conditions on the surface morphology of the epilayers were studied. For the (111)A surface a wide growth window with temperatures in the range 600°-660°C and V/III ratios varying from 15 to 45 was established for obtaining excellent surface morphology. The properties of the QWs were investigated by high resolution X-ray diffractometry, photoluminenscence and photoreflectance measurements. These measurements indicate that the QWs are of very high structural and optical quality.     

应变InGaAs/GaAs量子阱MOCVD生长优化及其在980 nm半导体激光器中的应用

使用低压MOCVD生长应变InGaAs/GaAs 980 nm量子阱.研究了生长温度、生长速度对量子阱光致发光谱(PL)的影响.并将优化后的量子阱生长条件应用于980 nm半导体激光器的研制中,获得了直流工作下,阈值电流为19 mA,未镀膜斜率效率为0.6 W/A,输出功率在100 mW的器件.     

Effects of boron incorporation on the strain and photoluminescence properties of GaAsSb/GaAs quantum wells

Boron-containing GaAsSb/GaAs quantum wells (QWs) with different antimony (Sb) mole fractions were grown by low-pressure metal–organic chemical vapor deposition for the first time. The effects of boron incorporation on the performance of GaAsSb/GaAs QWs are discussed. For samples with low compressive strain, injection of triethylboron can enhance the Sb content and increase the compressive strain, although boron incorporation can lead to a reduction in strain. This effect was less for strained GaAsSb/GaAs QWs, so the compressive strain of these QWs did not vary. Room-temperature photoluminescence emission at 1116 nm with a full-width at half-maximum (FWHM) value of 56 meV was obtained for strained BGaAsSb/GaAs QWs.     

Characterization of GaNxAs1-x Alloy Grown on GaAs by Molecular Beam Epitaxy

The GaNxAs1-x alloy has been investigated which is grown on GaAs (100) substrate by molecular beam epitaxy with a DC-plasma nitrogen source. The samples are characterized by high resolution X-ray diffraction (HRXRD) and low temperature photoluminescence (PL) measurements. Both HRXRD and PL measurements demonstrate that the crystalline and optical qualities of GaNxAs1-x alloy degrade rapidly with the increase of N composition. The nitrogen composition of 4.5 % can be obtained in GaNxAs1-x/GaAs quantum well by optimizing growth conditions,through which a photoluminescence peak of 1201nm is observed at a low temperature (10 K). The dependence of GaNxAs1-x band gap energy on the nitrogen composition in this investigation corresponds very well with that of the theoretical one based on the dielectric model when considering the effect of the strain. At the same time,we also demonstrate that the bowing parameter of GaNxAs1-x alloy is composition dependent.     

Characterization of GaNxAs1-x Alloy Grown on GaAs by Molecular Beam Epitaxy

Ga Nx As1 - x,the combination of small amount of nitrogen and Ga As,has beenexperimentally observed with the band gaps several hundreds me V lower than that ofGa As[1～ 4] .The alloy has attracted considerable attention in the applicat...     

离子损伤对等离子体辅助分子束外延生长的GaNAs／GaAs和GaInNAs／GaAs量子阱的影响

研究了离子损伤对等离子体辅助分子束外延生长的GaNAs／GaAs和GaInNAs／GaAs量子阱的影响．研究表明离子损伤是影响GaNAs和GaInNAs量子阱质量的关键因素．去离子磁场能有效地去除了等离子体活化产生的氮离子．对于使用去离子磁场生长的GaNAs和GaInNAs量子阱样品,X射线衍射测量和PL谱测量都表明样品的质量被显著地提高．GaInAs量子阱的PL强度已经提高到可以和同样条件下生长的GaInAs量子阱相比较．研究也表明使用的磁场强度越强,样品的光学质量提高越明显．     

Optical investigation of the relaxation process in InGaAs/GaAs single strained quantum wells grown on (001) and (111)B GaAs substrates

Molecular Beam Epitaxy (MBE) growth of a series of Single Strained Quantum Wells (SSQWs) of InGaAs/GaAs with indium content ranging from 10% to 35% and 100 Å well thickness was performed on (001) and (111)B GaAs substrates under optimized growth conditions for simultaneous growth. The Critical Layer Thickness (CLT) of the heterostructures grown on both substrates was comparatively studied by low temperature Photoluminescence (PL). Relaxation is readily observed in the structures grown on (001) GaAs for 24% In-content. This value is in close agreement with both a calculation of the excess strain associated with the two Matthews and Blakeslee strain relieving dislocation mechanisms and the onset of three-dimensional growth. By contrast, heterostructures grown on (111)B GaAs remain pseudomorphic for In-contents above 25%. A maximum PL peak wavelength of 1.1 microns at room temperature has been reached under the growth conditions used. This would correspond to an In-content around 31%. The study shows that (111)B is a preferable choice of substrate orientation for the growth of InGaAs/GaAs heterostructures for optoelectronic applications at wavelengths beyond 1 μm.