直线度误差组合分离方法及其误差分析

在分析了精密和超精密加工技术的发展对直线度误差分离技术所提出的新要求的基础上,介绍了为满足这些要求而发展的时域逐次两点法、三点法、精密逐次三点法、广义两点法以及频域方法,从数据融合和信息提取角度解释了方法的发展趋势,并提出了n阶误差分离模型。同时结合对这些方法的误差分析,提出了一种三次数据融合的时域直线度误差组合分离方法。这种方法以两点法为主,结合了广义两点法和时域三点法,使用三点法分离出的摆角补偿两点法的分离结果,使用广义两点法提供各组两点法分离结果之间的相对位置关系。提高了测量精度,对传感器的初始对准没有严格要求,避免了传感器初始对准误差的非线性累积和两点法中的摆角误差,可以满足超精密直线度测量的要求。     

圆度、直线度误差分离方法之比较

分析了圆度误差分离技术和直线度误差分离技术的异同点，通过实验算例，进一步验证了精确的频域三点法直线误差分离技术的理论正确性。     

高精度零件直线度采取误差分离技术的测量

高精度零件的直线度测量（例如理石平尺、精密导轨等）,其测量误差可通过两次测量,利用误差分离的方法消除测量基准的误差影响,本文通过直线度检查仪对理石平尺的测量实例来探讨一下如何进行误差分离法检测直线度,以及平尺两平面的平行度。本文将以平尺的测量为例介绍如何利用误差分离技术测量高精度零件的直线度方法探讨。     

基于频域--时域的机床直行部件运动误差在线测量

提出了以频域三点法求得的直线度误差为递推叠代初值的精确时域两点法测量机床直行部件运动误差的新方法。频域三点法所使用的测量数据是通过把传感器拾取的原始数据做对称延拓预处理后得到的，这样就可以避免经典频域三点法测量直线度误差时，由于直线度误差的非周期性、非封闭性以及端点不连续而引起的高阶谐波分量失真边缘效应。同时，利用现代控制理论分析了经典频域三点法的谐波抑制特性。并通过实验验证了该方法的正确性。     

使用短基准的超精密长导轨直线度误差测量方法

在超精密加工与检测技术中,高精度长导轨直线度误差的测量与补偿技术一直是一个研究重点。在系统研究现有各种导轨直线度误差测量方法的基础上,提出一种使用短基准的导轨直线度误差测量方法,将长导轨直线度误差的测量问题分解为具有一定重叠区域的数段较短导轨直线度误差的测量问题。直接利用超精密直线度物理基准测量各段导轨直线度误差,通过将各段导轨直线度误差拼接起来,重构出长导轨的直线度误差。利用空间坐标变换关系建立基于最小二乘法的直线度误差测量算法,以及相对机械运动误差对测量结果影响的数学模型,分析研究重叠区域二次采样点的匹配误差,以及测量误差、采样频率等因素对重叠区域长度选择的影响规律。对长550 mm的气浮导轨进行实际测量试验,仿真与测量试验表明上述方法简单实用,可操作性强。     

噪声环境下直线度误差分离的最小均方误差方法

研究了噪声环境下直线度误差分离的最小均方误差方法。相对于常用的直线度误差分离中的最小二乘方法,最小均方误差解可更好抑制测量噪声对误差分离结果的影响。同时结合最小均方误差解和最小二乘解,本文还给出一种更好抑制噪声影响的最小范数混合解。     

基于误差分离技术的圆度误差在位测量

总结了现有用于在位圆度误差测量的误差分离技术,并对经典频域三点法、时域三点法、频域三点法的近似实现方法和频域三点法的改进实现方法的测量特点进行了评述。针对球度误差没有实现在位测量的问题,将圆度误差分离技术引伸到球度误差分离技术,并在理论上进行了探讨。     

基于误差分离技术的圆度误差在位测量

总结了现有用于在位圆度误差测量的误差分离技术,并对经典频域三点法、时域三点法、频域三点法的近似实现方法和频域三点法的改进实现方法的测量特点进行了评述.针对球度误差没有实现在位测量的问题,将圆度误差分离技术引伸到球度误差分离技术,并在理论上进行了探讨.     

时域二点法和三点法直线度EST的误差分析

时域二点法和三点法直线度ＥＳＴ的误差分析＊张镭张玉（东北大学沈阳１１０００６）０引言自八十年代初,日本学者田中等人首次将误差分离技术（ＥＳＴ）引入直线度误差测量中以来〔１、２〕,该项研究已成为国内外学者的重要前沿课题。尤其是时域ＥＳＴ避免了频域法所必...     

精密配合孔轴线直线度误差评定

小尺寸的精密配合孔轴线直线度误差的测量和数据处理一直以来都没有一种可靠和简便的方法。提出的基于MATLAB坐标法测量孔轴线直线度误差的测量设计,很好地解决了这一难题。通过实证研究,证明了该方法在精密配合孔轴线直线度误差测量上的优越性。     

传感器调零误差对直线误差分离的影响规律及其确定方法分析

分析了多点法直线 EST中传感器初始调零误差对直线误差分离结果的影响 ,指出不同方法的影响规律不同 :时域三点法中调零误差使直线形状误差按抛物线规律呈非线性增大 ,对直线误差评定产生很大影响 ;时域二点法中调零误差使直线形状误差线性增大 ,但对评定无影响 ;频域三点法的直线误差则不受调零误差的影响。提出了通过构造软基准来确定调零误差的两种方法 :时域频域结合法和对称反转配置法 ,可以克服常规方法的局限性     

A new 2D error separation technique for performance tests of CNC machine tools

The error separation technique is widely adopted for many machine tool performance tests. The most common applications include roughness measurement, straightness measurement and spindle measurement. In this paper, two error-separation technologies, the straightness reversal technique and the semi-reversal technique, are developed. The straightness reversal technique can be adopted for the straightness measurement of a linear axis. The semi-reversal technique can be adopted for setting error separation in a contouring test and in the spindle error measurement. In this paper, mathematical models have been developed. In order to verify the possibility of the semi-reversal technique, related experimental work has been carried out.     

精确的频域三点法直线误差分离技术

在经典频域三点法的基础上,提出了一种新的精确频域三点法直线误差分离技术,可以分离出更为精确的直线形状误差和直行误差运动。该方法通过构造周期函数,满足了频域法中进行Fourier变换的周期性条件,从而克服了经典频域三点法中直线形状误差的非封闭性、非周期性以及端点的不连续而引起的高阶谐波分量失真等边缘效应。实测结果验证了该方法的有效性。     

机床直行部件运动误差的在线测量

提出了采用精确时域两点法测量机床直行部件运动误差的新方法。该方法可以克服利用经典频域三点法测量直行部件运动误差时,由于误差的非周期性、非封闭性以及端点不连续而引起的高阶谐波分量失真等边缘效应。另外,该方法既可以得到机床直行部件的运动误差,又可以得到在该机床上加工零件的直线度形状误差,这些测量信息都有助于诊断机床的误差源,以提高机床的加工精度。     

Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage

This paper describes the measurement of straightness error motions (vertical straightness and horizontal straightness) and rotational error motions (pitch, yaw and roll) of a commercial precision linear air-bearing stage actuated by a linear motor. Each of the error motions was measured by two different methods for assurance of reliability. The stage was placed in the XY-plane and moved along the X-direction. The pitch error and yaw error, which were measured by an autocollimator and the angle measurement kit of a laser interferometer, were about 8.7 and 1.6 arc-s, respectively, over a travel of 150 mm with a moving speed of 10 mm/s. The roll error was measured by the autocollimator through scanning a flat mirror along the X-direction. The second method for roll error measurement was to scan two capacitance-type displacement probes along the flat surface placed in the XZ-plane. The two probes with their sensing axes in the Y-direction were aligned with a certain spacing along the Z-axis. The roll error can be obtained by dividing the difference of the outputs of the two probes by the spacing between the two probes. The roll error was measured to be approximately 11.8 arc-s over the 150 mm travel. The horizontal straightness error and the vertical straightness error (Y- and Z-straightness errors) were measured by using the straightness measurement kit of the laser interferometer. The second method for straightness measurement was to scan the flat surface with a capacitance-type displacement probe. The horizontal and vertical straightness errors of the stage over the 150 mm travel were measured to be approximately 207 and 660 nm, respectively.     

A novel Fourier-Eight-Sensor (F8S) method for separating straightness,yawing and rolling motion errors of a linear slide

A novel method called the Fourier-Eight-Sensor (F8S) method is proposed for the separation of the straightness, yawing and rolling motion errors as well as the profiles of a linear slide. Eight distance sensors are positioned on a vertical stage in two lines parallel to the target profiles with five sensors in the lower row and the other three in the upper row. The outputs of the sensors are fused together at different times to eliminate the dependence of motion errors. The method adopts a two-stage approach. First, the profile faced by the lower row sensors is represented by Fourier series the coefficients of which are obtained by matrix inversion. Then, another Fourier series is used to represent the difference between the two target profiles. By fusing the outputs of the three sensors in the upper row and their corresponding counterparts in the lower row, the coefficients of the Fourier series are determined by the Fourier series based error separation technique. In this way, different error components can be successfully separated from the sensor outputs. The effectiveness of the method is validated by simulation and experiment.     

三平行传感器式频域法误差分离技术--在线测量圆度误差的新方法

提出了一种能临床测量与分离工件圆度误差和主轴系统回转误差的新方法——三平行传感器式频域法：三个位移传感器呈平行布置，其中一个传感器的测量轴线通过被测对象中心，其优点是测试系统易于安装与调整。给出了该方法的读数方程和权函数表达式以及应用频域法分离求解的途径。提出了避免其谐波抑制的措施。实测结果与经典的三点法的测量结果作了比对，表明该方法简便、正确、有效。