退火工艺对磁控溅射生长的Pt薄膜微观结构及电性能的影响

铂(Pt)是温度传感器常见的敏感材料。为了改善退火工艺提高Pt薄膜的电学特性,采用射频磁控溅射法在蓝宝石衬底上制备了以钽(Ta)为粘附层的Pt敏感薄膜,研究了不同退火温度、退火气氛和退火时间下的Pt薄膜结构以及电学性能方面的差异。结果表明:退火增强了薄膜的结晶化且使晶粒发生长大,从而有效降低了薄膜的电阻率。但过度退火,如退火温度超过1 000℃或过长的退火时间,会导致粘附层中的Ta元素向Pt薄膜中过度扩散,从而增加Pt薄膜的电阻率。在高纯N_2(99.999%)、超纯N_2(99.999 9%)及空气三种气氛中退火,结果发现在空气中退火的Pt薄膜电阻率最小,原因是空气中的氧元素在高温下穿过Pt薄膜扩散至Ta粘附层,形成了稳定的Ta_2O_5相,Ta元素向Pt薄膜的扩散减少。退火还提升了薄膜电阻随温度变化的线性度及其电阻温度系数(TCR),在空气中900℃退火1 h,Pt薄膜的TCR达到3.909×10~(-3)/℃,接近于块状Pt材料的值。此结果对提高Pt薄膜温度传感器的灵敏度具有重要意义。     

SnO_2和SnO_2-Ag薄膜的电学特性

用磁控溅射法在集成了铂加热电极的Si基膜片型微结构单元上制备了SnO2 和SnO2 Ag敏感薄膜。用温度调制方式和锯齿波加热方式研究了薄膜的电学特性 ,讨论了银催化剂、湿度及氧分压对SnO2 电学特性的影响。从温度调制方式下测得的电阻 温度曲线可以区分由热激发过程和由表面反应过程引起的膜电阻变化。这种方法为研究气敏薄膜表面反应过程和气敏响应机理开辟了新的途径。     

SnO2和SnO2—Ag薄膜的电学特性

用磁控溅射法在集成了铂加热电极的Si基膜片型微结构单元上制备了SnO2和SnO2-Ag敏感薄膜。用温度调制方式和锯齿波加热方式研究了薄膜的电学特性，讨论了银催化、温度及氧分压对SnO2电学特性的影响。从温度调制方式下测得的电阻-温度曲线可以区分由热激发过程和由表面反应过程引起的膜电阻变化。这种方法为研究气敏薄膜表面反应过程和气敏响应机理开辟了新的途径。     

新加坡医用纳米薄膜问世

新加坡科研人员最近利用纳米技术,成功研制出一种有助于患者伤口愈合的透明薄膜。据报道,新加坡生物工程和纳米技术研究院研制出的这种特殊薄膜,不仅能促进伤口附近细胞生长,加快伤口愈合,而且还能使患者看见伤口愈合情况。这种薄膜对温度极为敏感,伤口愈合后,患者只需用冰袋或冷水降温,就会很容易撕下薄膜,而且不会损害刚刚愈合的伤口。目前,新加坡已就此申请专利,估计产品会在一两年后面市。新加坡医用纳米薄膜问世$新华社     

纳米TiO2薄膜微阵列电极的制备与紫外光电阻特性表征

采用溶胶凝胶法在叉指型微阵列电极表面制备了TiO2纳米薄膜，并对薄膜形貌、厚度以及溶胶粒子尺寸进行了表征，研究了温度、紫外光照对纳米TiO2薄膜微阵列电极的电阻的影响。结果表明，溶胶粒子平均粒径在9nm，单次提拉制备的TiO2纳米薄膜膜厚为120nm，两次提拉薄膜厚度200nm，纳米TiO2薄膜微阵列电极电阻呈现半导体特性，大气环境中，紫外光照下纳米薄膜微电极的低温电阻较无光照时明显减小，表现出紫外光敏感特性。随着温度的升高，紫外光照下的电阻与无光照时电阻差值逐步减小，表明温度对纳米薄膜电阻有更大的影响。     

用于室温红外探测器热敏材料的PECVD掺硼a-Si薄膜的研究

采用PECVD法制备用于室温红外探测器中热敏感材料的掺硼a-Si薄膜。通过系统地研究气体流量、射频功率与衬底温度等制备工艺条件与薄膜的电导率、含氢量和电阻温度特性的相关性,得到了最佳的工艺条件,并利用其制备出了探测灵敏度高达2.17×108cmHz1/2W-1的a-Si室温红外探测器。     

频率和温度对陶瓷湿敏元件感湿特性的影响

研究了工作频率和温度对TiO₂－K₂O－LiZnVO₄陶瓷薄膜湿敏元件感湿特性的影响．结果表明：在低湿区,元件的阻抗随频率增大、温度升高而减小,感湿灵敏度随频率增大、温度降低而显著减小,感湿特性曲线出现平台;在高湿区,频率和温度对元件感湿特性的影响可以忽略,感湿特性曲线线性良好．分析了陶瓷薄膜的极化现象,发现极化现象导致薄膜的微观电容在低温低湿时对湿度变化不敏感．据此解释了极化现象引起频率和温度对元件感湿特性影响的内在机理．     

温度传感功能薄膜技术

随着科学技术的不断进步,人们对温度信息获取的手段提出了新的要求,对温度传感器超小型化的要求越来越迫切,薄膜传感器的出现满足这一要求。薄膜温度传感器由于其优异的性能,在工业生产中越来越得到广泛应用。本文介绍了薄膜温度传感器的特点、种类、应用、测温机理、膜系及其主要制备工艺等,并探讨了薄膜热敏电阻、薄膜热电偶的标定方法,最后论述了温度传感功能薄膜的国内外发展现状及其目前需要解决的关键技术。     

聚乙烯醇/改性纳米纤维素晶体纳米复合薄膜的制备及性能

先用丁二酸酐对纳米纤维素晶体(NCC)进行表面羧基化改性,然后将改性NCC添加到聚乙烯醇(PVA)基体中制备PVA/改性NCC纳米复合薄膜,并进一步热处理制得交联PVA/改性NCC纳米复合薄膜。通过热重分析、差热分析、吸水实验和拉伸实验考察了改性NCC的添加量对薄膜性能的影响,以及加热交联对薄膜性能的影响。结果表明,与纯PVA薄膜相比,添加改性NCC后,薄膜的起始分解温度升高、结晶峰向高温方向移动,吸水率基本不变,力学性能对环境湿度敏感;热处理交联后,薄膜的起始分解温度继续升高、结晶峰也向高温方向移动,吸水率显著降低,力学性能不随环境湿度变化。     

WO3薄膜的显色性和敏感性研究

本文利用反应离子束溅射技术制备WO_3薄膜,在衬底温度为室温时,溅射制备的薄膜经电子束(?)时,说明它是无定形的。在电化学过程中,氢离子注入WO_3薄膜,使薄膜显示出蓝色,薄膜的电阻率随之降低.这种显色性和敏感性使WO_3薄膜在显示器件和pH值敏感器件中得到应用。     

Engineering the Charge Transport of Ag Nanocrystals for Highly Accurate,Wearable Temperature Sensors through All‐Solution Processes

All‐nanocrystal (NC)‐based and all‐solution‐processed wearable resistance temperature detectors (RTDs) are introduced. The charge transport mechanisms of Ag NC thin films are engineered through various ligand treatments to design high performance RTDs. Highly conductive Ag NC thin films exhibiting metallic transport behavior with high positive temperature coefficients of resistance (TCRs) are achieved through tetrabutylammonium bromide treatment. Ag NC thin films showing hopping transport with high negative TCRs are created through organic ligand treatment. All‐solution‐based, one‐step photolithography techniques that integrate two distinct opposite‐sign TCR Ag NC thin films into an ultrathin single device are developed to decouple the mechanical effects such as human motion. The unconventional materials design and strategy enables highly accurate, sensitive, wearable and motion‐free RTDs, demonstrated by experiments on moving or curved objects such as human skin, and simulation results based on charge transport analysis. This strategy provides a low cost and simple method to design wearable multifunctional sensors with high sensitivity which could be utilized in various fields such as biointegrated sensors or electronic skin.     

数控机床热误差建模中的温度传感器优化研究

介绍了温度传感器的选择方法,讨论了温度传感器的布置原则,对国内外常用的几种温度传感器的优化布置方法进行了比较分析,对今后进一步的研究趋势做出了展望.     

Herstellung und Untersuchung aufgedampfter Funktionsschichten zum Einsatz in modularen Mikrosensoren

Fabrication and characterization of functional layers evaporated for the application in modular micro sensors A new concept aims at the development of genetically intelligent (“gentelligent^TM”)devices, which bequeath production or application data to their next generation. To support such an approach, it is necessary to gather various data from the device. To do so, afamily of modular sensors is under development, which is capable of measuring strain, force, magnetic properties, and temperature. Such micro sensor sconsist of structural and functional patterned thin films. A technology particularly well suited for such thin films is the vacuum deposition. This process allows to deposit rather different materials for conductors, insulators, and alloys for creating functional films. This work describes the technology development for fabricating temperature sensitive metallic functional films of Cu and Pt by means of electron beam evaporation and of an insulating SiO₂ film by means of thermal evaporation. The latter film is deposited by evaporating SiO and its thermal oxidation to SiO₂.     

Organic FETs: Functional Organic Field‐Effect Transistors (Adv. Mater. 40/2010)

Functional organic field‐effect transistors (OFETs) have attracted increasing attention in the past few years due to their wide variety of potential applications. Research on functional OFETs underpins future advances in organic electronics. In this review, different types of functional OFETs including organic phototransistors, organic memory FETs, organic light emitting FETs, sensors based on OFETs and other functional OFETs are introduced. In order to provide a comprehensive overview of this field, the history, current status of research, main challenges and prospects for functional OFETs are all discussed     

Functional Organic Field‐Effect Transistors

Functional organic field‐effect transistors (OFETs) have attracted increasing attention in the past few years due to their wide variety of potential applications. Research on functional OFETs underpins future advances in organic electronics. In this review, different types of functional OFETs including organic phototransistors, organic memory FETs, organic light emitting FETs, sensors based on OFETs and other functional OFETs are introduced. In order to provide a comprehensive overview of this field, the history, current status of research, main challenges and prospects for functional OFETs are all discussed     

国外低温温度传感器的研制现状

温度测量是低温研究部门的一个普遍项目。对近年来一些国家（特别是发达国家）的低温温度传感器研制、应用情况做了介绍，并分析了今后温度传感器的发展趋势，以及我国与国外存在的主要差距。     

A novel integrated acoustic gas and temperature sensor

Acoustic temperature sensors have the advantages of a high-resolution frequency output and ease of integration with other acoustic sensors but require hermetic packaging to prevent sensor contamination. Surface-skimming bulk-wave (SSBW) devices have been found to be much less sensitive to surface contamination than other acoustic devices, and although their temperature response has been studied extensively, they have not been studied specifically as temperature sensors. Surface acoustic wave (SAW) based chemical sensors requiring temperature measurement or control are susceptible to temperature measurement error because the temperature cannot be measured in the same location as the chemical sensor. The objectives of this work were to examine the temperature characteristics and performance of a SSBW temperature sensor when integrated with a SAW condensation and humidity sensor in a novel design. The SSBW temperature sensor had over an order of magnitude less sensitivity to condensation and water uptake in certain polyimide films than an integrated SAW gas sensor indicating that this design is practical for sensing films in the delay path where film thickness is carefully considered.     

碳纳米管及其掺杂氧化物半导体气敏传感器

碳纳米管气敏传感器以其工作温度低和最低检出限较低等优点而备受关注,而碳纳米管掺杂氧化物半导体气敏传感器兼备了氧化物半导体气敏传感器和碳纳米管气敏传感器二者的优点,具有灵敏度较高、最低检出限低和工作温度低等特性。综述了这两类传感器的研究进展,介绍了其气敏机理,并对相应存在的问题及今后的发展趋势进行了概述。     

分布式光纤温度传感器新测温原理的研究

介绍了分布式光纤温度传感器的工作原理和应用状况,分析了光纤中放大的自发拉曼散射现象及其时域特性.提出了一种基于光纤中放大的自发拉曼散射光脉冲信号温度效应的新温度测量原理,并将其应用于分布式光纤传感器系统,进而讨论了基于新测温原理的实验现象和实验数据.     

RF sputtered ZnO-ITO films for high temperature CO sensors

In this work is reported the development of ceramic sensors based on ZnO-doped ITO thin films for engine diagnostics able to withstand the harsh environments associated with exhausts. ZnO-ITO films were deposited by RF-sputtering and have been employed in the development of thin films-based carbon monoxide resistive sensors operating at high temperature (500 °C). ZnO-ITO films, with different Zn/In ratio and thickness around 3 µm., have been deposited by changing the power on the targets. The effects of both the working temperature and the ZnO loading on the sensors performances were investigated. Undoped ITO film has shown negligible response to CO, whereas ZnO-ITO films were found to be sensitive at the required working temperatures. The reported results show how the ZnO-ITO devices under study can be promising sensors for CO monitoring in real exhausts of car engines.