An integrated sensor for pressure, temperature, and relative humidity based on MEMS technology

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is 5 mmX 5 mm. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.     

Sensor grid resource management: Model and implementation issues

This paper studies optimal sensor resource management in sensor grids. We formalize the problem using nonlinear optimization theory, which incorporates sensor resource constraint, energy, and expense budget. The paper also presents a pricing-based iterative algorithm for sensor management which balances the sensor user? QoS requirements to achieve a sensor system optimization based on the preference of the sensor service users. The paper discusses implementation issues of sensor management. Simulations reveal that the proposed sensor management algorithms can obtain better performance than a previous approach.     

Design of an absolute location and position measuring system for a mobile robot

This paper focuses on a development of a sensor system measuring locations of a vehicle to localize a mobile robot while it tracks on the track (location sensor). Also it focuses on a system configuration identifying the vehicle’s orientation and distance from the object while it is stationary at certain station (position sensor). As for the location sensor, it consists of a set of sensors with a combined guiding and counting sensor, and an address-coded sensor to localize the vehicle, while moving on the rail. For the position sensor a PSD (Position Sensitive Device) sensor with photo-switches sensor to measure the offset and orientation of the vehicle at each station is introduced. Both sensor systems are integrated with a microprocessor as a data relay to the main computer controlling the vehicle. The location sensor system is developed and its performance for a mobile robot is verified by experiments. The position measuring system is proposed and is robust to the environmental variation. Moreover, the two kinds of sensor systems guarantee a low cost application and high reliability.     

采用基于神经网络的时间序列预测器的传感器故障诊断新方法

本文提出一种采用基于神经网络的时间序列预测器的传感器故障诊断新方法。它先用神经网络对传感器输出序列建立预测模型（简称神经网络预测模型）,然后利用神经网络预测模型预测传感器输出值和传感器实际输出之差判断传感器是否发生故障。与其它方法相比,本文方法只需单一传感器输出信号即可诊断相应的传感器是否发生故障。本文通过对一控制系统中转速传感器漂移故障诊断过程阐述了这种方法。     

一体化厚膜高分子温湿度传感器的研制

一体化湿湿度传感器是采用厚膜工艺将温度传感器和湿度传感器制作在同一Ａｌ２Ｏ３陶１基片上而形成一个集成一体化的多功能传感器,湿度传感器采用性能优良的高分子聚合物湿敏电阻,温度传感器采用具有ＮＴＣ特性的ＭｎＣｏＮｉ系氧化物厚膜热敏电阻。这不仅可以将温度和湿度这两个参数同时进行测量,而且给湿度传感器的温度补偿为了极大的方便。     

锅炉管道内压力,差压测量系统的研制

】介绍了由一只静压传感器和一只差压传感器构成的复合式传感器,并且把该传感器与ＭＣＳ－５１系列单片微型计算机通过一定的接口方式相联接,对锅炉管道内压力、差压进行巡回测量、记录。微型计算机对传感器输出信号进行处理。     

Fiber optic surface topography measurement sensor and its design study

This paper presents some aspects of design approach, modeling, and experimental measurement results of a fiber optic-based surface topography measurement sensor that can measure surface roughness as well as the distance between the sensor tip and a surface and surface inclination angles. The working principle of the sensor is based on the detection of light intensity reflecting from the surface being measured. The sensor is very small and easy to operate. It can be attached to a coordinate measuring machine (CMM) to measure surface position coordinates, inclination angles, and surface roughness in a noncontact manner at one measurement setup. A theoretical model of intensity distribution and intensity detection has been established for the sensor. A three-factor and three-level experiment was designed to investigate the relationship between sensor performance and sensor design parameters. Two second-order regression models have been generated, which show that the central distance between the emitting and receiving fibers of a sensor has the strongest influence on the effective range of the sensor; whereas, the critical angle of a receiving fiber influences the sensitivity of the sensor most.     

基于嵌入TCP/IP协议的智能传感器设计

智能传感器网络化是传感器领域的一项新兴技术，它使传感器成为网络中的一个节点，现场数据通过此传感器网络节点实现无误差的数字化及网络化传输。讨论了网络化智能传感器的特点及系统组成，并介绍了一种基于嵌入TCP／IP协议的网络化智能传感器的实现技术。     

基于分时方法的高精度反射绝对式 纳米时栅位移传感器设计

本文提出了一种反射绝对式纳米时栅位移传感器的传感方法。采用反射单列式传感器作为反射绝对式传感器的精密测量部分,记为传感器A。为了实现绝对位移测量,设计了一个与传感器A相差一个周期的反射单列式传感器,记为传感器B,利用传感器A与传感器B相位作差实现绝对位移测量。采用标准印刷电路板技术制作了传感器样机,搭建了实验平台,进行了实验测试。测试结果表明,激励电极引线方式对接收电极带来干扰,从而造成一次谐波误差。为了抑制误差,提出了交叉反射结构和分时方法,交叉反射结构将感应电极与另一端的反射电极引线相连,增大激励电极和接收电极的距离,分时方法通过不同时间段对传感器A和传感器B施加激励信号,并把不工作的电极接地。实验表明该结构和方法相互配合有效的抑制了干扰,最终在400 mm范围内,补偿后实现了±300 nm的测量精度。     

Inspection method of cable-stayed bridge using magnetic flux leakage detection: principle,sensor design,and signal processing

A nondestructive testing technique based on magnetic flux leakage is presented to inspect automatically the stay cables with large diameters of a cable-stayed bridge. Using the proposed inspection method, an online nondestructive testing (NDT) modular sensor is developed. The wreath-like sensor is composed of several sensor units that embrace the cable at equal angles. Each sensor unit consists of two permanent magnets and a hall sensor to detect the magnetic flux density. The modular sensor can be installed conveniently on cables with various diameters by increasing the number of sensor units and adjusting the relative distances between adjacent sensor units. Results of the experiments performed on a man-made cable with faults prove that the proposed sensor can inspect the status signals of the inner wires of the cables. To filter the interfering signals, three processing algorithms are discussed, including the moving average method, improved detrending algorithm, and signal processing based on a digital filter. Results show that the developed NDT sensor carried by a cable inspection robot can move along the cable and monitor the state of the stay cables.     

A novel magnetostrictive static force sensor based on the giant magnetostrictive material

In order to realize static force measuring and improve the sensitivity of magnetostrictive force sensor, a novel magnetostrictive static force sensor with giant magnetostrictive material rod is presented. A Hall sensor integrated in the sensor is used to measure magnetic flux density variation under force. A special structure surrounding Hall sensor is proposed to improve the sensitivity. The design method of the giant magnetostrictive force sensor is expounded firstly. The magnetic characteristics are analyzed by FEM. A model is developed based on the coupled linear magnetomechanical constitutive equations and the experimental result shows that the model is good at reflecting the force. The optimal bias magnetic field and sensitivity are studied through experiments. The sensor sensitivity is 6.14 times higher than that of the sensor which dose not have a stainless steel ring. The paper lays a foundation for the development of magnetostrictive force sensor with giant magnetostrictive material.     

无线传感器网络节点的设计和实现

无线传感网络是当前国内外传感器技术领域的热点研究课题，本文给出了一种构建智能无线传感网络通用节点的体系结构，并运用该体系结构的设计思想完成了无线传感节点的研制。该智能无线传感节点采用的软件开发系统是专用于无线传感网络的开放源代码的操作系统TinyOS，运用该平台完成了节点的性能测试和试验。结果表明，该节点达到了设计要求，该设计思想可以提高无线传感网络节点的研制效率。     

一种六维腕力传感器动态响应的研究

十字梁腕力传感器广泛应用于机器人系统。腕力传感器的响应特性决定了传感应变片的粘贴和传感器的标定方法，也影响机器人系统的动态特性。针对十字梁六维腕力传感器的结构特点，以Lagrange方程为基础，建立六维腕力传感器的动力学模型，研究腕力传感器在力（力矩）作用下的响应特性以及传感器参数对传感器响应的影响。     

一种新的拉线式位移传感器的设计及其应用

研究了一种新的拉线式位移传感器的设计及其应用。简要分析了传统拉线式位移传感器的工作原理及其不足,针对此从结构上对这种传感器进行了优化设计,并从性能上对所设计的传感器进行了分析。实验证明所设计的传感器测量精度高、耐磨性好、具有良好的研究和应用价值。     

双Fabry-Perot干涉腔型光纤声发射传感器

设计了一种新型的双Fabry-Perot腔光纤传感器用于材料损伤引起的声发射信号检测。基于低细度Fabry-Perot腔多光束干涉原理,建立了光纤Fabry-Perot传感器检测声发射信号的数学模型。分析双Fabry-Perot腔正交点稳定工作机制,设计并制作了具有双Fabry-Perot腔结构的光纤声发射传感器来保持传感器正交点的稳定性。通过模拟AE信号检测与热应力干扰实验对设计的传感器进行了实验验证。实验一通过冲击振动与折断铅笔芯产生两类模拟声发射信号,使用商用的压电传感器和光纤传感器进行对比实验,结果表明光纤传感器能够成功检测到两类模拟声发射信号,灵敏度为12.9nm,带宽达到30kHz。实验二对传感器进行工作点稳定测试,结果表明双F-P腔的控制机制能够保证传感器工作在正交点,解决了传感器输出信号衰减的问题。     

采用流场分析提高涡轮流量传感器性能的研究

以10 mm口径液体涡轮流量传感器为研究对象,经过对传感器内部流场进行分析,提出通过减小靠近叶片顶端的叶片受力面积,提高传感器测量性能的方法。从对特性曲线的分析出发,结合传感器数学模型,提出了一种利用不同流量点的仪表系数平方差Δ(K~2)评价传感器性能的方法。在此基础上,结合CFD仿真和传感器样机实验测试,研究了不同叶轮叶片形状参数对传感器性能的影响。实验结果表明:改变叶轮叶片形状能有效提高传感器的测量性能,切角参数为0.25时,传感器性能最优;此方法同样适用于其他口径涡轮流量传感器结构的优化。     

基于柴油发动机国六排放应用的氮氧化物传感器碳颗粒堵塞问题研究

针对目前国六柴油发动机应用的氮氧化物传感器被碳颗粒堵塞的问题进行了分析与讨论.为验证影响传感器积碳堵塞的内部和外部条件,采用了发动机台架和整车路试试验方法.通过总时长100 h以上的巴黎循环试验,测试分析了市面上两家主流供应商提供的氮氧化物传感器对于积碳堵塞的鲁棒性差异.试验结果表明:供应商1和供应商2氮氧化物传感器的...     

圆容栅传感器原理及其误差分析

圆容栅是在传统容栅技术基础上发展起来的新型传感器技术。圆容栅传感器是一种角行程传感器 ,与直行程容栅比较 ,不仅其测量范围增大 ,而且抗干扰能力也显著增强     

一种用于MEMS样品测试的六轴微力传感器

本文研制了一种用于MEMS样品测试的六轴微力传感器。首先采用有限元法对特定结构的传感器进行了静力学分析 ,确定了其布片方案 ;然后通过软件实现对传感器输出进行六轴力 /力矩的解耦 ,这大大简化了后置解耦电路的设计并降低了成本 ;最后本文给出了六轴微力传感器的标定曲线 ,证明其可用于MEMS做样品力学特性测试。     

基于三轴加速度计的多维力传感器静态自校正

提出了一种多维力传感器的静态自校正方法.将三轴加速度计静态应用,可以测得其敏感轴与重力加速度的相对夹角.将多维力传感器中集成三轴加速度计,在校正过程中,旋转施加着标准砝码的多维力传感器,测量力传感器的输出,同时通过三轴加速度计测量力传感器的旋转角度姿态,计算得到砝码重力施加在传感器E的力向量,最终自动地得到多维力传感器的校止矩阵.实验结果表明,该方法显著地提高了校正效率,但与通常的标定台校正方法相比,较正精度略低.