声表面波传感器结构模型与敏感特性研究

本文主要从声表面波传感器基础理论出发,首先分析了声表面波技术的发展,对声表面波传感器结构模型和工作模式特性做了必要的分析和研究,进而展开了对声表面波传感器敏感特性研究。并对仿真效果进行了扼要的总结,对声表面波技术在相关感领域的应用,本文也展开了一定的探讨。     

表面微裂纹材料分频效应的实验研究

0引言广义声表面波是指所有在固体近表面传播的声波,因其近表面传播特性,声表面波在材料的表面和近表面性质表征方面具有独特的优势[1]。一方面,由于传播媒质的弹性参数决定了材料表面传播的声表面波特性,利用声传播媒质与周围介质的相互作用关系,发展了各类声表面波传感器[2];另一方面,声表面波脉冲对材料表面和亚表面     

气敏传感器的发展

综合介绍了气敏传感器的种类及其近期的发展以及MEMS技术对气敏传感器的推动，并着重对声表面波（SAW)气敏传感器及石英微天平（QCM)气敏传感器的结构、工作原理和涂层材料作了详细的介绍。     

利用周期性板结构实现声波准直发射

0引言由于在海洋渔业、地质探测和医疗器械中的重要应用价值,声波的准直发射一直受到人们重视。随着人工声学材料的发现,利用这种新颖材料来实现声波准直发射很快引起人们的研究兴趣,如利用声子晶体带边态[1]、声子晶体表面波[2]、结构声表面波[3-4]等来实现声波的准直发射已被报导。在本文     

互易法校准压电型声发射传感器的研究与实现

声发射传感器的校准是实现声发射定量技术的前提,依据电声换能器互易原理,在计算互易常数的基础 上,建立了适用于压电型声发射传感器表面波和纵波互易的校准系统。通过设置特定的激励信号波形,依据接收 电压信号与激励电流信号之间的时间延迟,准确获取电流信号与电压信号对应的特征值,实现了声发射传感器的表面波和纵波互易校准。由于传感器的尺寸效应,传感器在高频时的表面波速度灵敏度低于纵波灵敏度,不确定度评定结果表明,声发射传感器速度灵敏度的互易法校准不确定度为1. 2 dB。     

中国科学院声学研究所超声技术中心成功研制新型声表面波电流传感器

正经过近三年的科研攻关,中国科学院声学研究所超声技术中心王文课题组将快速响应的声表面波技术与高磁敏磁致伸缩薄膜技术相结合,成功研制出高灵敏、快速响应和低迟滞误差的新型电流传感器。2018年6月底,该技术作为国家电网公司基础前瞻性研究重点项目"面向电网应用的新型传感及储能电池关键技术研究"的关键产出成果,顺利通过专家验收。王文课题组通过建立声表面波磁致伸缩效应的电流感知理论,实现了对沉积图形化磁致伸缩薄膜的新型声表面波电流传     

LiNbO3基片上表面漏声波的研究

ＬｉＮｂＯ３基片上表面漏声波的研究李永川章德（南京大学声学研究所近代声学国家重点实验室南京·２１００９３）１前言自本世纪六，七十年代以来，声表面波技术取得了很大的发展，声表面波（ＳＡＷ）器件得到了广泛的应用。时至今日尤其是高频器件（上千兆赫）在军事和...     

声发射传感器表面波灵敏度的比较法校准

声发射传感器的校准是声发射技术的重要课题,基于表面波的比较法校准是声发射传感器校准中的常用方法,其原理简单,校准效率高,适用于声发射传感器的日常校准。本文针对比较法校准,优化了校准中使用的声发射源和声场,构建了完整的声发射传感器比较法校准系统,编写了相应的校准程序,实现了传感器表面波灵敏度的校准,并具有较好的重复性和稳定性。     

LiNbO3声表面波特性及其应用

LiNbO3因其优异的压电性能和声表面波特性被广泛应用于声表面波器件中.着重介绍LiNbO3的压电性能、声表面性能及其薄膜制备技术,对通过不同制备工艺生长出的LiNbO3薄膜的质量和声表面波性能进行了比较,并简要介绍了LiNbO3在声表面波领域应用的新进展.     

“水鸣天梯”声景观成因分析

基于周期台阶表面声阻抗理论,解释了"水鸣天梯"声景观的物理机制。首先在低频准平面波近似的情况下,利用阻抗转移公式得到了周期台阶单元表面声阻抗。数值解表明,在低频段台阶表面的声阻抗呈现纯容抗性,证实了表面波的存在。有限元软件仿真的结果与理论分析保持一致。应用表面波的性质,设计并进行了现场试验。试验数据分析表明:在台阶底部脚踏石阶或者发射脉冲声波,声波经过台阶表面作用,到达台阶顶部时只有低频部分的声能量得到了较大保留,与理论分析和模拟结果相一致,最终确定了正是周期台阶的表面波滤波效应使得脚踏声转变为悦耳的水滴声。     

一种计算声表面波在周期栅阵中传播特性的方法

Hashimoto有限元程序是日本Chiba大学研究人员从1973年开始、历时几十年用Fortran语言编写、计算声表面波在周期栅阵中传波特性的一个软件包。该程序能计算Rayleigh波、漏表面波、SH型表面波、表面横波等多种声表面波的传输特性,同时它能适用于一个周期内单根指条、两根指条和多根指条及声表面波在栅阵中斜入射的情况。该程序已在声表面波（SAW）研究人员中得到了广泛的应用。     

Miniaturized SAW filters using a flip-chip technique

This paper describes a miniature surface acoustic wave (SAW) filter, 3.2×2.5×0.9 mm³, which is applicable for radio frequency (RF) stage filters in mobile phones. The SAW filter is reduced in size by using a flip-chip assembly technique. The technique uses gold bumps on the SAW chip and gold-gold thermosonic face-down bonding. The gold bumps are formed onto the wafer by a conventional wire bonding machine using gold wire. The thermosonic face-down bonding enables the connection of gold bumps on the SAW chip, with gold metallized pads, on a ceramic package at a temperature below 200°C. This bonding ensures that the SAW chip is fixed mechanically, and connected electrically, with the package. Frequency responses of a 950-MHz flip-chip SAW filter are compared with responses of a SAW filter with a conventional package. The results of reliability tests for flip-chip SAW filters are shown     

Organic vapor sensors based on SAW resonator and organic films

The majority of investigations of SAW devices used as chemical sensors are based on delay line oscillators. However, SAW resonator oscillator offers some advantages over the SAW delay line oscillator for its higher stability. In the incipient stage of fabricating gas sensors based upon SAW resonator, taking detection of organic vapor as an example, the analysis method that combines the SAW theory with organic film technology has been adopted to give an intensive insight into the responses of two-port SAW resonator coated with LB-film and cast-film after exposure to organic vapors.     

Wireless measurement of temperature using surface acoustic waves sensors

Surface acoustic wave (SAW) devices can be used as wireless sensor elements, called SAW transponders, for measuring physical quantities such as temperature that do not need any power supply and may be accessed wirelessly. A complete wireless sensor system consists of one or more such SAW transponders and a local radar transceiver. The SAW transponder receives an RF burst in the VHF/UHF band transmitted by the radar transceiver. The reader unit performs a radar measurement of the impulse response of the SAW transponder via a high-frequency electromagnetic radio link. A temperature variation changes the SAW velocity and thereby the response pattern of the SAW device. By analyzing the time delay between backscattered pulses with different time delays we get a rough estimation of the temperature of the SAW transponder. By using this information the ambiguity of +/-2pi in the phase differences between the pulses can be eliminated, which provides an overall and unambiguous temperature resolution of +/-0.2 degrees C.     

SAW velocity measurement of crystals and thin films by the phasevelocity scanning of interference fringes

We present principle and application of a novel noncontact velocity measurement of surface acoustic waves (SAW) on crystals and thin films using laser interference fringes scanned at the phase velocity of SAW. The scanning interference fringes (SIF) are produced by intersecting two laser beams with a frequency difference. The SAW velocity within the laser beam spot is measured as the ratio of observed SAW frequency and predetermined wave number of the SIF. The frequency measurement can be quite precise because of a large number of generated SAW carriers and amplitude enhancement effect. The SAW velocity measurement is free from the water loading effect accompanying the leaky SAW measurements. This principle was successfully applied to evaluate Si ₃N₄ and SiO₂ films deposited on Si (001) surface     

Theory and application of passive SAW radio transponders as sensors

Surface acoustic wave (SAW) radio transponders make it possible to read identification codes or measurement values from a remote location. The decisive advantage of these SAW transponders lies in their passive operation (i.e., no power-supply), and in the possibility of wireless installation at particularly inaccessible locations. The passive SAW transponders are maintenance free. Identification marks respond to an interrogation signal with their nonchanging identification pattern. In wireless SAW sensors the physical or chemical properties to be detected change the propagation characteristics of the SAW. SAW radio transponders are advantageously placed on moving or rotating parts and in hazardous environments such as contaminated or high voltage areas. They also can be used for contactless measurements in high vacuum process chambers, under concrete, extreme heat, or strong radioactive radiation, where the use of conventional sensors is complicated, dangerous, or expensive. In this paper we discuss the principles of wireless passive SAW transponders and present a radio frequency interrogation unit and several passive radio SAW sensors developed for noncontact measurements of temperatures, pressures, torques, and currents.     

Surface-acoustic-wave directional coupler for apodization of integrated acoustooptic filters

A SAW waveguide directional coupler that was used to provide a raised-cosine apodization of the SAW beam intensity, in order to achieve sidelobe suppression of an integrated acoustooptic filter, is demonstrated. The SAW guide coupler consisted of two closely spaced, evanescently coupled parallel acoustic waveguides. A single guided SAW mode was excited by a miniature transducer imbedded in a 100-mum-wide waveguide, and in excess of 99% of the SAW energy was transferred from the original waveguide to the coupled guide, and back, across a gap of 20 mum. The coupling length (for complete crossover) was 9.8 mm and depended exponentially on gap, as expected. This SAW coupler resulted in 10-dB sidelobe suppression compared to an unapodized acoustooptic filter.     

Differential phase shift keying direct sequence spread spectrum single SAW based correlator receiver

This paper presents the design and measurement of a SAW device to be used in a correlator receiver for a differential phase shift keying direct sequence spread spectrum (DPSK/DSSS) system. The DPSK modulation format allows noncoherent data demodulation while the SAW device correlator acts as the despreading operator. In a conventional DPSK receiver, the received signal is normally split into a lower and upper path. One of the paths contains a correlator, and the other path contains a one data bit delay element and another correlator. The outputs of both paths are then fed to a noncoherent data demodulator. The device presented in this paper combines both the delay element and the two correlators in a single SAW device; therefore, a better temperature tracking mechanism, simplicity, as well as the elimination of the broadband SAW delay line are achieved. The SAW structure contains a broadband SAW transducer, and two serially coded pseudo noise (PN) DPSK filters. The SAW based correlator was built on lithium tantalate. The center frequency was set to 150 MHz, with a 63 chip PN spreading code and a data rate of 300 Kbps. Experimental measurements of the SAW device autocorrelation results are presented.     

Chemical sensor based on surface acoustic wave resonator using Langmuir-Blodgett film

A one-port surface acoustic wave (SAW) resonators incorporating Langmuir-Blodgett (LB) films has been investigated. SAW sensors are one potential applications of SAW devices. Most of the work reported on SAW sensor concerns delay lines. In this paper we characterize the mass loading effects of one-port resonators by depositing successive monolayers of LB films onto the surface. A 90 MHz SAW gas-phase sensor has been fabricated on an ST cut quartz substrate, and one-port resonator configurations have been used as the sensing element. Ultra thin monolayers of arachidic acid and arachidic acid ethyl ester have been deposited using the LB method. The resonant frequencies and the Q values have been measured as sensor response. Experimental results show that the Q values and the resonant frequencies of the one-port SAW resonator vary with film mass loading on the SAW device surface.     

声表面波压力遥测传感器的理论与设计

介绍了一种遥测声表面波压力传感器的原理与设计，其核心敏感部件是由声表面波谐振器组成的振荡器，文中给出了主要的测试结果。