Development of binder-free CMG abrasive pellet and finishing performance on mono-crystal sapphire

Chemo-mechanical-grinding (CMG) is a fixed abrasive process by integrating chemical reaction and mechanical grinding for sapphire wafer finishing, and shows advantages in surface integrity, geometric controllability and waste disposal. However, the material removal rate (MRR) obtained by the traditional CMG wheel is not high enough to meet the requirement from the mass production of sapphire wafers. As a potential solution, a new CMG wheel with extremely high abrasive concentration has been proposed. This paper targets on developing of binder-free abrasive pellets (BAP) with 100 wt% abrasive as well as investigating the performance of BAP in sapphire wafer finishing. The results of CMG experiment reveal that the MRR and surface roughness (Ra) of sapphire wafer finished by BAP constructed CMG wheel are able to reach 1.311 μm/h and 0.993 nm respectively. The characterization by Raman microscope indicates that the finished sapphire wafer also owns excellent subsurface integrity.     

Forming limit diagram of aluminum/copper bi-layered tubes by bulge test

Chemo-mechanical-grinding (CMG) is a hybrid process which integrates chemical reaction and mechanical grinding between abrasives and workpiece into one process. It has been successfully applied into manufacturing process of silicon wafers where both geometric accuracy and surface quality are required. This paper aims to study the potential of CMG process in manufacturing process of single crystal sapphire wafers. The basic material removal mechanism in terms of chemical effect and mechanical effect in CMG process has been analysed based on experiment results of two different kinds of CMG wheels. The experiment results suggest that chromium oxide (Cr₂O₃) performs better than silica (SiO₂) in both material removal rate (MRR) and surface quality. It also reveals that, no matter under dry condition or wet condition, CMG is with potential to achieve excellent surface quality and impressive geometric accuracy of sapphire wafer. Meanwhile, test result by Raman spectrum shows that, by using Cr₂O₃ as abrasive, the sub-surface damage of sapphire wafer is hardly to be detected. Transmission electron microscopy (TEM) tells that the sub-surface damage, about less than 50 nm, might remain on the top surface if chemical effect is not sufficient enough to meet the balance with mechanical effect in CMG process.     

基于固结磨粒的单晶蓝宝石自旋转磨削加工方法

利用固结磨粒自旋转磨削加工方法，通过金刚石磨削和化学机械磨削实现了蓝宝石晶片的高效、高质量平坦化加工。采用不同磨粒粒径的金刚石砂轮实现了蓝宝石晶片较高的材料去除率或较好的表面质量。开发了高磨粒浓度Cr2O3砂轮，采用化学机械磨削对金刚石磨削后的蓝宝石晶片进行平坦化加工。实验结果表明，化学机械磨削能够去除金刚石磨削的表面和亚表面缺陷，最终获得表面粗糙度Ra＜1 nm、无/微损伤的蓝宝石晶片。通过理论分析单颗金刚石磨粒的磨削力，发现磨粒粒径是影响材料去除率和表面质量的主要影响因素。通过XPS分析证明了Cr2O3和蓝宝石之间的固相反应过程。     

硅片低损伤磨削砂轮及其磨削性能

针对传统金刚石砂轮磨削硅片存在的表面/亚表面损伤问题,研制了一种用于硅片化学机械磨削加工的新型常温固化结合剂软磨料砂轮。根据化学机械磨削加工原理和单晶硅的材料特性,设计的软磨料砂轮以氧化铈为磨料,二氧化硅为添加剂,氯氧镁为结合剂。研究了软磨料砂轮的制备工艺,分析了软磨料砂轮的微观组织结构和成分。通过测量加工硅片的表面粗糙度、表面微观形貌和表面/亚表面损伤,进一步研究了软磨料砂轮的磨削性能。最后,与同粒度金刚石砂轮磨削和化学机械抛光(CMP)加工的硅片进行了对比分析。结果表明,采用软磨料砂轮磨削的硅片其表面粗糙度Ra1nm,亚表面损伤仅为深度30nm的非晶层,远好于金刚石砂轮磨削硅片,接近于CMP的加工水平,实现了硅片的低损伤磨削加工。     

Wear behavior and mechanism of single-layer brazed CBN abrasive wheels during creep-feed grinding cast nickel-based superalloy

Wear behavior and mechanism of single-layer brazed CBN abrasive wheels during creep-feed grinding nickel-based superalloy K424 was investigated. Grinding force and temperature acting on the abrasive wheels were measured. Optical microscopy and scanning electron microscopy were utilized to detect grain protrusion and wheel wear morphology. The normal distribution of the protrusion height of the brazed CBN grains on the wheel surface was determined. The results show that, though the grinding zone temperature is merely about 180°C during creep-feed grinding nickel-based superalloy, the grinding heat still has an important effect on the grain wear owing to the high temperature of the individual grain up to 500–600°C. Wear patterns of brazed wheels are composed of mild wear (attritious wear and grain micro-fracture) and severe wear (grain macro-fracture, erosion of the bonding layer). Strong joining of brazed CBN grains and Ag–Cu–Ti bonding layer improves significantly the resistance to grain pullout.     

Research on chemo-mechanical grinding of large size quartz glass substrate

Finishing process of quartz glass substrate is meeting great challenges to fulfill the requirements of photomask for photolithography applications. For the final finishing of the substrate surface, chemical mechanical polishing (CMP) is often utilized. Those free abrasive processes are able to offer a great surface roughness, but sacrifice profile accuracy. On the other hand, the fixed abrasive process or grinding is known as a promising solution to improve accuracy of profile geometry, but always introduces damaged layer. Chemo-mechanical grinding (CMG) is potentially emerging defect-free machining process which combines the advantages of fixed abrasive machining and CMP. In order to simultaneously achieve high surface quality and high profile accuracy, CMG process has been applied into machining of large size quartz glass substrates for photomask use. Reported in this paper are CMG performances in finishing of quartz glass substrates including material removal rate (MRR), surface roughness, flatness and optical characteristics.     

碳化硼研磨后蓝宝石晶体的亚表面损伤

介绍了蓝宝石材料的亚表面损伤形成机制。考虑碳化硼磨料可产生较小亚表面损伤的优点,本文基于游离磨料研磨方式,研究了不同粒度碳化硼磨料研磨后蓝宝石晶体的亚表面损伤。利用KOH化学腐蚀处理技术,对研磨后的样品进行了刻蚀;通过特定的腐蚀坑图像间接反映了蓝宝石晶体的亚表面损伤形貌特征,获得了W20、W10和W5碳化硼磨料产生的亚表面损伤深度,得到了在不同刻蚀时间下蓝宝石亚表面损伤形貌、表面粗糙度和刻蚀速率。研究结果显示:游离碳化硼磨料研磨造成的蓝宝石晶体的亚表面损伤密度相当显著,但损伤深度并不大,其随磨料粒度的增大而增大,W20、W10和W5粒度的磨料研磨后产生的亚表面损伤深度分别为7.4,4.1和2.9μm,约为磨料粒度的1/2。得到的结果表明采用碳化硼磨料研磨有利于获得低亚表面损伤的蓝宝石晶片,而采用由大到小的磨料逐次研磨可以快速获得低亚表面损伤的蓝宝石晶片。     

High Temperature Tribological Characteristics of Fe–Mo-based Self-Lubricating Composites

Fe–Mo-based self-lubricating composites were prepared by a powder metallurgical hot-pressing method. The tribological properties of Fe–Mo-based composites with varied CaF₂ contents at high temperature were evaluated, and the effect of glaze films on the friction and wear characteristics of composites were analyzed. The results show that the introduction of CaF₂ into Fe–Mo alloys improved the mechanical properties, and the best tribological properties of Fe–Mo–CaF₂ composites were achieved at the CaF₂ content of 8 wt% at both room temperature and 600 °C. The worn surface of Fe–Mo–CaF₂ composite at 600 °C is characterized to plastic deformation and slight scuffing, and the improved tribological properties are attributed to the formation of lubricious glaze film that composed of high-temperature lubricants CaMoO₄ and CaF₂ on the worn surface of the composites.     

Investigation on Tribological Behavior of Advanced High Strength Steels: Influence of Hot Stamping Process Parameters

In order to investigate the friction and wear behavior of high strength steel in hot stamping process, a hot strip drawing tribo-simulator is developed and the friction coefficient, which is an important parameter in the finite element modeling, is measured. The results have shown that the friction coefficient remains almost unchanged until temperature reaches 500 °C. It then increases sharply as temperature is increased from 500 to 600 °C. It has also been shown that the friction coefficient decreases as the drawing speed increases. The change in the dominate wear mechanism as the temperature and the drawing speed increases has been identified from SEM analyses of the worn surface. The dominate wear mechanism is the groove cutting at temperatures between room temperature and 500 °C, which changes to the adhesive wear at temperatures above 500 °C. The main wear mechanism is the adhesive wear at 25 mm/s, which changes to the slight groove cutting at 75 mm/s.     

石英玻璃的化学机械磨削加工

为了实现石英玻璃基板的高效、高质量加工,进一步改善光掩模设备的性能,进行了石英玻璃化学机械磨削(CMG)加工技术的研究。通过在磨削过程中主动增强磨粒、结合剂以及磨削液与工件的化学反应,并使化学反应与机械去除作用形成动态平衡,从而消除因材料脆性去除而造成的表面损伤等,实现了大口径玻璃工件的高表面质量、高形状精度的加工。针对石英玻璃CMG加工的特点,开发了CMG专用砂轮及磨削液,利用正交实验法优化了石英玻璃CMG加工工艺参数,分析了CMG加工过程中磨削压力、砂轮转速、磨削液流量、pH值等因素对加工表面粗糙度及加工效率的影响,并利用优化后的工艺参数加工得到了Ra为0.795nm的石英玻璃表面。加工后基板的光学性能和化学机械抛光(CMP)加工基板的光学性能相同,能够满足光掩模设备的性能需求。     

Effect of Mixed Rare Earth Fluorides on the Mechanical and Tribological Characteristics of Ni-Based Alloy

In this paper, Ni-based alloys with different addition amounts of mixed rare earth fluoride were prepared using a P/M method in an intermediate frequency inductive furnace. The effect of mixed rare earth fluoride (30.9 wt.% LaF₃ and 69.1 wt.% DyF₃ in composition) additions on the mechanical strength of the alloy was investigated and compared with that of a CeF₃ addition. The findings indicated that by adding 3 wt.% mixed rare earth fluorides the improved toughness can be obtained. By adding 3 wt.% and 5 wt.% of mixed rare earth fluorides the compressive strength at 700°C were increased. The friction and wear behavior of the composite sliding against a high temperature self-lubricating composite at room temperature and 600°C in air were investigated on a pin-on-disk tribometer. The composites showed better tribological performances at 600°C than at room temperature.     

Studies on wear behavior of nano-intermetallic reinforced Al-base amorphous/nanocrystalline matrix in situ composite

Resistance to wear is an important factor in design and selection of structural components in relative motion against a mating surface. The present work deals with studies on fretting wear behavior of in situ nano-Al₃Ti reinforced Al–Ti–Si amorphous/nanocrystalline matrix composite, processed by high pressure (8 GPa) sintering at room temperature, 350, 400 or 450 °C. The wear experiments were carried out in gross slip fretting regime to investigate the performance of this composite against Al₂O₃ at ambient temperature (22–25 °C) and humidity (50–55%). The highest resistance to fretting wear has been observed in the composites sintered at 400 °C. The fretting wear involves oxidation of Al₃Ti particles in the composite. A continuous, smooth and protective tribolayer is formed on the worn surface of the composite sintered at 400 °C, while fragmentation and spallation leads to a rougher surface and greater wear in the composite sintered at 450 °C.     

Microstructural and mechanical properties of nanometric magnesium oxide particulate-reinforced aluminum matrix composites produced by powder metallurgy method

In this research, aluminum alloy (A356.1) matrix composites reinforced with 1.5, 2.5 and 5 Vol.% nanoscale MgO particles were fabricated via powder metallurgy method. Pure atomized aluminum powder with an average particle size of 1μm and MgO particulate with an average particle size between 60 to 80 nm were used. The specimens were pressed by Cold Isostatic Press machine (CIP), and were subsequently sintered at various sintering temperatures, viz. 575, 600 and 625°C. Optimum amount of reinforcement and sintering temperature were determined by evaluating the density, microstructure and mechanical properties of composites. The composites were characterized by scanning electron microscopy (SEM) and X-ray diffraction (XRD). Hardness and compression tests were carried out in order to identify mechanical properties. Reinforcing the Al matrix alloy with MgO particles improved the hardness and compressive strength of the alloy to a maximum value of 44 BHN and 288 MPa, respectively. The most improved compressive strength was obtained with the specimen including 2.5% of MgO sintered at 625°C. According to the experiments, a sintering temperature of 625°C showed better results than other temperatures. A good distribution of the dispersed MgO particulates in the matrix alloy was achieved.     

Tempering temperature effects on abrasive wear of mottled cast iron

The effects of different tempering temperatures (300–600 °C) on abrasive wear resistance of mottled cast iron were studied. Abrasive wear tests were carried out using the rubber-wheel test on quartz sand and the pin test on Al₂O₃ abrasive cloths. The retained austenite content of the matrix was determined by X-ray diffraction. The wear surface of the specimens was examined by scanning electron microscopy for identifying the wear micromechanism. Bulk hardness and matrix hardness before and after the tests were measured. The results showed that in the two-body (pin-on-disc test) system, the main wear mechanism was microcutting and high matrix hardening was presented. The wear rates presented higher correlation with the retained austenite than with the bulk and matrix hardness. In the three-body system (sand–rubber wheel), the wear surfaces presented indentations due to abrasive rolling. The wear rates had better correlation with both the bulk and matrix hardness (before and after the wear test) than with the retained austenite content. There are two groups of results, high and low wear rates corresponding to each tribosystem, two-body abrasive wear and three-body abrasive wear, respectively.     

The Effect of Hot Extrusion on Mechanical and Tribological Behavior of Ag-Cu/MoS2 Composites

Silver–copper/molybdenum disulfide (Ag-Cu/MoS₂) composites, prepared by powder metallurgy and hot press sintering, were extruded at a temperature of 680°C with extrusion ratios of 10 and 70. Mechanical tests and tribotests were carried on both the hot-pressed and hot-extruded composites. The tribological properties of the composites against a silver coin disc were investigated on a pin-on-disc tester with normal load and sliding speed of 5 N and 0.27 m/s, respectively. The microstructure, wear morphology, and cross section of the worn subsurface were observed by scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS) analyses were performed on the worn surfaces of Ag-Cu/MoS₂ composites. The results indicated that the distribution of the MoS₂ particles in the composites was improved and the interfacial strength of Ag/MoS₂ was enhanced during the process of hot extrusion. The hardness, bending strength, and wear resistance of hot-extruded composites increased remarkably due to the presence of the continuous matrix skeleton and the stronger interfacial bonding of Ag/MoS₂. XPS revealed that a chemical reaction had occurred at the worn surface due to the friction heat. Although the dominant wear mechanism was fatigue wear for both the hot-pressed and hot-extruded composites, finer debris and a lower wear rate were observed in hot-extruded composites due to the fact that the nucleation and growth of cracks in the worn subsurface were restrained in the process of tribotest.     

铌酸锂晶体的研磨亚表面损伤深度

针对光学材料研磨过程引入的亚表面损伤层(SSD)深度对工件的抛光工序效率和表面质量的影响,探索了光学材料在研磨过程中的亚表面损伤规律。采用角度抛光的方法测量了软脆材料铌酸锂(LN)晶体的损伤层深度,分析了研磨方式、磨粒粒径和研磨压力对工件亚表面损伤层的影响规律。结果表明:研磨方式对损伤缺陷的影响最为显著,相同研磨条件下游离磨料研磨后的损伤层深度约为固结磨料研磨的3~4倍,游离磨料研磨后工件亚表面存在多处圆弧形裂纹,固结磨料研磨后主要显现细小裂纹和"人"字型裂纹;当磨粒粒径从W28下降到W14后,游离研磨的亚表面损伤层深度下降至原来的45%,而固结研磨的损伤层深度下降至30%;另外,研磨压力的降低有利于减小工件的亚表面损伤。该研究对LN晶体研磨方式及研磨工艺的选择具有指导意义。     

Non-contact temperature measurement of silicon wafers based on the combined use of transmittance and radiance

We propose a non-contact temperature measurement method that combines the temperature dependence of transmittance below 600 °C and radiation thermometry above 600 °C. The combined method uses a polarization technique and the Brewster angle between air and a dielectric film such as SiO₂ or Si₃N₄ grown on silicon wafers. A prominent feature of this method is that both measurements of transmittance and radiance are performed with the same geometrical arrangement.For a semitransparent wafer, the measurement of p-polarized transmittance at the wavelengths of 1.1, 1.2 and 1.3 μm enables temperature measurement in the range from room temperature to 600 °C. For an opaque wafer above 600 °C, the p-polarized radiation thermometry at the wavelength of 4.5 μm allows the temperature measurement without the emissivity problem. The combined method with the use of transmittance and radiance is valid in the entire temperature range irrespective of variations of film thickness and resistivity.     

Wear reducing effects and temperature dependence of tribolayer formation in harsh environment

Certain materials show a tribolayer formation especially at enhanced temperatures in abrasive environment, building a wear protection layer with the abrasive on the surface. Three materials with different microstructures were tested in three-body abrasive and impact/abrasive environments at temperatures up to 700 °C to investigate tribolayer formation. Optical and electron microscopical methods were used for wear qualification. Furthermore, hot hardness tests were performed up to 700 °C to investigate the influence of hardness drop on tribolayer formation.It was shown that no significant tribolayer formation occurs on grey cast iron, whereas other materials form tribolayers. Generally, tribolayer formation increases with increasing testing temperature, especially for austenitic and ferritic materials. This entails a self-protecting effect and thus superior wear resistance in abrasive environment.     

Effect of Heat Treatment Temperature on Microstructure and Mechanical and Tribological Properties of Cold Sprayed Ti-6Al-4V Coatings

In this study, Ti-6Al-4V (Ti-64) coatings were prepared on commercial Ti-64 substrates via a high-pressure cold spray process. The coatings were heat treated at different temperatures of 400–1000°C to investigate the effect of heat treatment temperature on their microstructure and mechanical and tribological properties. The increased heat treatment temperature from 400 to 600°C promoted diffusion between sprayed Ti-64 particles. Recrystallization of the sprayed particles was found at the heat treatment temperature of 800°C and grain growth was found in the microstructure of the coating heat treated at 1000°C. The highest and lowest hardnesses of the heat-treated coatings were found at heat treatment temperatures of 400 and 800°C, respectively. Therefore, the lowest and highest specific wear rates of the coatings were consistently found at 400 and 800°C due to their highest and lowest abrasive wear resistances associated with their highest and lowest surface hardnesses, respectively. The coating heat treated at 400°C showed the highest surface hardness of 470.1 Hv and lowest specific wear rate of 69.6 × 10^?14 m³/Nm. It could be concluded that the microstructure and mechanical and tribological properties of the Ti-64 coatings were significantly influenced by heat treatment temperature.     

Effect of temperature on the magnetic abrasive finishing process of Mg alloy bars

Experiments were conducted to evaluate the effect of temperature during magnetic abrasive finishing of Mg alloy bars. A magnetic abrasive finishing process is an unconventional finishing technique that has been used to achieve high-quality surfaces with dimensional accuracy. In this study, a Mg alloy bar, which is widely used in automobiles, aircraft, IT, and the defense industry, was chosen as a cylindrical workpiece. The workpiece was then finished with a magnetic abrasive finishing process at three different temperatures, i.e., a cryogenic temperature, room temperature, and high temperature. In the cryogenic temperature condition, liquid nitrogen and argon gas were used as the cryogenic cooling gases in the finishing process; the results from this treatment were compared with those obtained at room temperature and high temperature conditions. At the room temperature condition, the finishing process of the cylindrical workpiece was performed at 24 °C. To carry out the high temperature condition, a hot air dryer was used to maintain a finishing temperature of 112 °C. The experimental results show that the room and cryogenic temperatures could yield excellent performance in terms of the surface roughness. However, in terms of the removal weight and change in diameter, the high temperature condition was found to be superior. In the present research, the improvements of the surface roughness (Ra) at room temperature (24 °C) and cryogenic temperature (-120 °C) conditions were 84.21 % and 55 %, respectively.