六自由度微动工作台柔性铰链设计

主要介绍了用于六自由度微动工作台的柔性铰链即双向柔性铰链和万向柔性铰链的设计过程，根据微动台中柔性铰链的设计要求，分析了微动台运动时驱动力与铰链变形的关系，确定了满足驱动力条件的柔性铰链刚度范围，并结合柔性铰链强度条件、工作台动态特性以及柔性铰链转角刚度与结构尺寸的关系，进一步确定柔性铰链的刚度和结构尺寸，合理设计柔性铰链．另外，通过有限元分析软件分析了柔性铰链最大受力时的应力分布情况．对柔性铰链的强度进行了校核，进一步保证了柔性铰链设计的正确性．     

一维大行程高分辨率纳米定位平台的设计与性能测试

设计了一种大行程、高分辨率的一维纳米定位平台,并进行了性能测试．该平台采用差动杠杆原理和柔性铰链,运用两个压电陶瓷叠堆致动器驱动．对柔性铰链平台建模,通过材料力学及结构振动微分方程等相关知识,对柔性铰链微动平台的刚度、输入反作用力、放大倍数等参数进行了分析,得到平台结构参数对平台性能的影响,并结合有限元分析软件,确定了微动工作台参数;最后建立了实验系统,对微驱动定位系统的输出行程、分辨率性能进行了测试．实验结果表明,所设计的微驱动定位系统的行程达到240μm,分辨率达到10nm,外形尺寸80mm×60mm×20mm．可用于大行程高分辨率微动定位．     

一种新型三维微位移工作台的设计和分析

为了解决微位移工作台的三维耦合问题,设计了一种驱动器固定的三维无耦合微位移工作台.本文介绍了它的结构和工作原理,通过有限元分析计算和样机实测验证,分别在X方向,X、Y方向和X、Y、Z方向施加载荷时,三维微位移工作台在X方向的位移不变,解决了三维空间运动耦合问题;分别在X、Y、Z方向施加不同载荷时,得到了工作台X、Y、Z方向的刚度,验证了工作台的位移、最大等效应力与载荷成正比.样机实测结果与有限元计算结果相吻合,工作台符合设计要求.     

二维工作台角度误差实时补偿研究

为减小二维工作台在运动过程中俯仰角、偏摆角对其定位、测量及加工精度的影响,提出一种实时补偿二维工作台角度误差的方法。将激光测量系统作为角度反馈装置,基于压电陶瓷致动器和柔性铰链设计出的六自由度微动工作台作为补偿机构,通过软件控制微动台中压电陶瓷的输入电压,达到补偿工作台角度误差的目的。实验结果表明:二维工作台在50 mm的运动范围内,角度误差实时补偿后,向X方向运动的角度基本可以控制在±3″内,向Y方向运动的角度基本可以控制在±2″内。该方法能够实现对二维工作台角度误差的实时补偿,对提高工作台的定位精度有参考价值。     

三自由度θ_Xθ_YZ柔性机构的柔度分析与计算

针对目前具有三自由度X YθθZ变形特点的柔性机构缺少定量理论分析的情况,以基于直角柔性铰链的三自由度X YθθZ柔性机构为对象,提出了一种整体柔度公式的分析建模方法,推导出整体柔度矩阵中各柔度单元的闭环解析公式,并利用有限元和实验的方法对柔度公式进行校验。结果表明,有限元法和实验方法与闭环解析式结果基本一致。借助于闭环解析公式,分析了柔性铰链结构参数对机构柔度性能的影响关系。整体柔度公式为三自由度X YθθZ柔性机构的设计与分析提供了有效准确的理论方法,对柔性机构在微纳制造装备等工程中应用具有较大的实际意义。     

两种典型柔性铰链导向机构的稳定性分析

为了分析两种柔性铰链导向机构的稳定性以及柔性铰链参数对导向机构稳定性的影响,本文结合卡氏位移定理和能量法,分别推导了柔性铰链导向机构在运动方向、垂直于运动方向和绕z轴转动方向的刚度计算公式,并应用推导公式对两种导向机构3个方向上刚度进行实例对比,分别计算其3个方向上的谐振频率,并根据谐振频率分析稳定性.最后改变柔性铰链的参数,用MATLAB分析其对导向机构稳定性的影响.结果表明,刚度推导公式的有限元验证和理论计算结果误差在1.10%~13.79%,证明了推导公式的正确性;同时,谐振频率的理论计算数据对比表明双平行四杆导向机构具有更好的稳定性,MATLAB分析得出铰链的切口半径r对微动平台的稳定性和承载能力影响程度最大.谐振频率的对比分析和柔性铰链参数对稳定性的影响分析为微动平台设计时导向机构的选取提供了参考.     

用于双探针原子力显微镜的定位平台的设计及实验验证

针对双探针原子力显微镜的需求,设计了一种提供精确位移的大行程定位平台。采用柔性铰链和压电陶瓷致动器分别作为定位平台的导向机构和驱动机构。在 X、Y和Z轴运动方向通过并联机构实现独立位移。对定位平台进行数学建模,分析和计算定位平台的工作刚度和固有频率,并进行了有限元仿真分析。以电容传感器作为位移测量单元构建了定位平台实验装置,并进行了实验验证。实验结果表明:定位平台在X与Y轴方向上拥有 110μm 的行程,分辨率为5nm,在Z轴方向上拥有45μm的行程,分辨率为5nm。     

正割曲线形柔性铰链的计算与分析

提出了一种新型的单轴柔性较链结构型式——正割曲线形柔性铰链。以力学卡氏第二定理为理论基础,通过引入中间参数,推导出正割曲线形柔性铰链柔度和转动精度的闭环解析公式,在此基础上,分析了正割曲线形柔性铰链的应力状态。利用有限元方法对柔性铰链的柔度和转动精度公式进行校验,结果表明:有限元分析结果与闭环解析公式结果基本一致。并分析了正割曲线形柔性铰链结构参数对其柔度的影响关系,为柔性铰链的工程设计提供了重要的理论依据。     

基于二级杠杆机构的二自由度微定位平台设计与分析

针对由压电陶瓷驱动的微定位平台工作行程不足的问题，设计了一种基于二级杠杆机构的二自由度微定位平台。考虑到不同柔性铰链的物理特性，通过差异化的铰链组合方式来优化新型二自由度微定位平台的性能，使其具有较快响应速度和大范围输出位移。基于拉格朗日定理，构建了新型二自由度微定位平台的刚度模型，并推导了其固有频率的解析表达式。有限元仿真结果表明，该二自由度微定位平台刚度模型的误差较小，验证了刚度建模方法的准确性和可靠性。研究结果可为柔性精密微定位平台的构型设计和建模分析提供一定的理论指导。     

抗压内LET柔性铰链的建模及分析

针对内LET(Lamina emergent torsion)柔性铰链存在轴向刚度低这一问题,基于倒置原则提出了一种抗压内LET柔性铰链.首先,综合考虑各柔顺片段的变形特点,设计了抗压内LET柔性铰链的结构;其次,利用等效弹簧刚度模型推导了该铰链的弯曲等效刚度及抗压等效刚度,并用有限元分析实例验证了2种理论计算模型的正确性;最后,将内LET柔性铰链和抗压内LET柔性铰链弯曲变形及压缩变形的有限元仿真结果进行比较.结果表明,在外形尺寸一致的情况下抗压内LET柔性铰链的弯曲刚度是内LET柔性铰链的1.195倍,而抗压刚度却是其24.532~28.141倍.在弯曲刚度无明显变化的前提下,抗压内LET柔性铰链的抗压刚度大幅提升,该铰链的结构设计完全符合预期要求.     

An accurate laminated element for piezoelectric smart beams including peel stress

This paper presents a laminated element for piezoelectric (PZT) smart beams in taking into account peel stresses. In the finite element analysis (FEA) formulation, a coupled electrical and mechanical beam element is used to model PZT patches, and a conventional structural element is used to model a host beam. A continuous adhesive element with shear and peel stiffness is derived to form a PZT laminated element. For a smart beam with a partially bonded PZT patch or distributed PZTs, the laminated element is applied to an area of the host beam with PZTs and the conventional element is used in the host beam where no PZT is bonded. A novel PZT laminated element is firstly derived based on the Timoshenko beam theory, in which the FEA formulation based on the Euler-Bernoulli beam theory can be considered as its special case. FEA numerical results of static and dynamic analyses based on the Euler-Bernoulli beam theory are compared with the exact static and dynamic solutions to validate the present FEA formulation. The present FEA framework based on the Timoshenko beam theory is then used to investigate the effects of PZT debondings on static behaviors and dynamic responses, and an original and effective procedure for detecting debondings in PZT actuators or sensors is proposed.The authors are grateful to the support of the Australian Research Council through a Large Grant Scheme (Grant No. A10009074).     

机械结构静动态性能协同分析方法研究

 分析了结构静动态性能有限元分析模型之问存在的内在共享关系，提出了静动态性能的协同分析策略．鉴于共享信息的复杂性，应用工作流管理技术对协同分析过程进行自动规划和管理，有效地提高了分析效率．提出的方法成功地应用于液压挖掘机工作装置的结构静动态性能分析，验证了该方法的合理性和有效性．     

Modeling automotive gas-exchange solenoid valve actuators

We develop a finite-element analysis (FEA) model to describe transient and static operation of gas-exchange valves. Such valves, directly controlled by solenoids, are a promising method for enhancing automotive engine efficiency. The FEA model is validated by experimental testing on an actual automotive prototype valve. We show that a nonlinear lumped-parameter model that uses FEA results also closely matches experimental data. The lumped-parameter model is suitable for optimization of design and can be readily used for closed-loop simulation. We present a simplified lumped-parameter model to facilitate controller design. Finally, we compare a dynamic open-loop simulation with experimental results.     

Size-dependent behaviour of electrically actuated microcantilever-based MEMS

In this paper, the nonlinear size-dependent static and dynamic behaviours of a microelectromechanical system under an electric excitation are investigated. A microcantilever is considered for the modelling of the deformable electrode of the MEMS. The governing equation of motion is derived based on the modified couple stress theory (MCST), a non-classical model capable of capturing small-size effects. With the aid of a high-dimensional Galerkin scheme, the nonlinear partial differential equation governing the motion of the deformable electrode is converted into a reduced-order model of the system. Then, the pseudo-arclength continuation technique is used to solve the governing equations. In order to investigate the static behaviour and static pull-in instabilities, the system is excited only by the electrostatic actuation (i.e., a DC voltage). The results obtained for the static pull-in instability predicted by both the classical theory and MCST are compared. In the second stage of analysis, the nonlinear dynamic behaviour of the deformable electrode due to the AC harmonic actuation is investigated around the deflected configuration, incorporating size dependence.     

Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning

The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated XY nanopositioning stage are presented in this paper. The main goal of the design is to combine the ability to scan over a relatively large range (25times25 mum) with high scanning speed. Consequently, the stage is designed to have its first dominant mode at 2.7 kHz. Cross-coupling between the two axes is kept to -35 dB, low enough to utilize single-input--single-output control strategies for tracking. Finite-element analysis (FEA) is used during the design process to analyze the mechanical resonance frequencies, travel range, and cross-coupling between the X- and Y-axes of the stage. Nonlinearities such as hysteresis are present in such stages. These effects, which exist due to the use of piezoelectric stacks for actuation, are minimized using charge actuation. The integral resonant control method is applied in conjunction with feedforward inversion technique to achieve high-speed and accurate scanning performances, up to 400 Hz.     

On the nonlinear dynamics of a piezoelectrically tuned micro-resonator based on non-classical elasticity theories

Size dependent static and dynamic behavior of a fully clamped micro beam under electrostatic and piezoelectric actuations is investigated. The microbeam is modeled under the assumptions of Euler–Bernoulli beam theory. Viscous damping and nonlinearities due to electrostatic actuation and mid-plane stretching are considered. Residual stress and fringing field effect are taken into account as well. Governing equation of motion is derived using Hamilton’s principle along with the strain gradient theory (SGT), which is a non-classical continuum theory capable of taking size effect of elastic materials into account. Reduced order model of the partial differential equations of the system is obtained using Galerkin method. Static deflection, pull-in voltage and the primary resonance of the microbeam are examined and the effect of piezoelectric voltage and its polarization on the size dependent static and dynamic response is studied. It is found that the piezoelectric voltage can effectively change the flexural rigidity of the system which in turn affects the pull-in instability regime. The effect of material length scale parameter is examined by comparing the results of the SGT with the modified couple stress (MCST) and classical theory (CT), both of which are special cases of the former. Comparison demonstrates that the CT underestimates the stiffness and consequently the pull-in voltage and overestimates the amplitude of periodic solutions. The difference between the results of classical and non-classical theories becomes more and more as the dimensions of the system gets close to the length scale parameter. Non-classical theories predict more realistic behaviors for the micro system. The results of this paper can be used in designing microbeam based MEMS devices.     

压电式二维微定位平台的率相关迟滞建模

为了描述压电式多维微定位平台的率相关迟滞非线性特性,提出了一种基于Hammerstein模型的建模方法。以一种二维微定位平台为对象,平台动态模型是由静态迟滞非线性部分和一个线性动态系统部分串联组成。静态非线性部分由改进的Prandtl-Ishlinskii模型描述,线性动态系统部分由外因输入自回归模型(ARX)模型描述,并给出了模型参数辨识方法。为了验证所建立的Hammerstein模型有效性,搭建了实验平台进行实验验证。实验结果表明,对平台施加不同频率电压信号,由Hammerstein模型得到的预测位移和实测位移相对误差范围为1%~5%,预测位移与实测位移接近,说明所建立的模型能精确描述微定位平台的率相关迟滞特性。     

橡胶隔振器设计开发研究

提出以有限元方法为基础的橡胶隔振器设计开发流程,并以某船用柴油机隔振器为对象,详细阐述了开发设计过程。介绍橡胶有限元的基本理论,通过有限元计算分析该橡胶隔振器的结构,预估橡胶材料的硬度,并根据设计目标对其结构进行一定的修改。通过加工试制及试验测试,所得结果与有限元计算结果吻合较好。     

Design of Cellular Composite Sandwich Panels for Maximum Blast Resistance Via Energy Absorption

This paper presents a design methodology for optimizing the energy absorption under blast loads of cellular composite sandwich panels. A combination of dynamic finite element analysis (FEA) and simplified analytical modeling techniques are used. The analytical modeling calculates both the loading effects and structural response resulting from user-input charge sizes and standoff distances and offers the advantage of expediting iterative design processes. The FEA and the analytical model results are compared and contrasted then used to compare the energy response of various cellular composite sandwich panels under blast loads, where various core shapes and dimensions are the focus. As a result, it is concluded that the optimum shape consists of vertically-oriented webs while the optimum dimensions can be generally described as those which cause the most inelasticity without failure of the webs. These dimensions are also specifically quantified for select situations. This guidance is employed, along with the analytical method developed by the authors and considerations of the influences of material properties, to suggest a general design procedure that is a simple yet sufficiently accurate method for design. The suggested design approach is also demonstrated through a design example.     

Buckling failure analysis of all-terrain crane telescopic boom section

In this research work, a nonlinear structure analysis by the finite element analysis (FEA) was carried out to investigate the failure reason of an all-terrain crane telescopic boom. An overall simplified model consisting of telescopic boom and luffing jib was established by beam element, and analyzed using geometric nonlinear static method. A local detailed model consisting of the 4th and 5th telescopic boom section (TBS) was established by shell and solid element, and analyzed using geometric nonlinear and contact nonlinear static method. The result of the overall simplified model FEA indicated that the boom strength met the design criteria, and the 5th TBS of local detailed model occurred stress wrinkle.Structure experiment was designed based on the boom load characteristics in accident and analyzed using nonlinear static method and explicit dynamic method; the connection of load, boom buckling failure and stress wrinkle was studied. The result indicated that the accident was caused by elastic buckling. When the telescopic boom stress state changed from continuous state to wrinkle state, the buckling occurred. So the critical buckling state characteristic was stress wrinkle.