氮化铝Lamb波谐振器的能量损耗分析研究

本文介绍了工作频率为400 MHz和2 GHz氮化铝Lamb波谐振器的结构设计、微纳制造及测试表征，研究了锚点损耗和声子间相互作用损耗对Lamb波谐振器品质因数（Q值）的影响，并分析了不同工作频率的Lamb波谐振器的主要能量损耗来源.研究发现：对于低频谐振器，锚点损耗为其主要能量损耗来源，因此减小支撑轴宽度可减少通过支撑轴泄漏至衬底的能量，进而提高Q值；对于高频谐振器，声子间相互作用损耗为其主要能量损耗来源，因此相比于金（Au），采用铝（Al）作为叉指电极（IDT）材料的谐振器具有更高Q值.针对Lamb波谐振器的结构特点，设计了一套基于七步光刻工艺的微纳制程，成功制备了具有微型化释放腔体的Lamb波谐振器，并具备优异的性能.测试结果表明，工作频率为400 MHz和2 GHz的Al-IDT谐振器的串联品质因数（Qs）分别达到2 590和1 192.     

利用微运动分析仪研究MEMS器件的运动特性

介绍了一种计算机控制的微运动分析仪（MMA）,用来研究微机电系统（MEMS）中可动部件的运动特性。它采用了2种光学无损测量方法：计算机微视觉方法用于面内运动测量;相移干涉方法用于离面运动测量。这个高度集成的系统包括了高性能成像系统、驱动电路、数据采集和分析软件。MMA利用频闪照明方法冻结器件的快速运动,可以测量1Hz～10MHz频率的三维运动特性,达到了nm级分辨力。通过研究一个微加工多晶硅微谐振器的运动特性来说明MMA的强大功能。     

基于MIM亚波长结构的微环谐振器性质研究

文中设计了一种基于MIM结构的亚波长表面等离子体激元微环谐振器,利用时域有限差分（FDTD）方法分析了其滤波特性,并且针对1．31谐振输出波长处对谐振器进行了性能分析。结果表明这种亚波长结构的微环谐振器与现有的传统介质谐振环器件相比具有很大的优势,更加有利于集成光路的应用。     

横向振动微谐振器的仿真分析

通过ANSYS有限元仿真软件对横向振动微谐振器进行静态、模态和谐响应仿真分析。在静态和模态分析中,得到水平方向最大静位移和谐振频率等重要性能参数以及不同的折叠悬臂梁结构参数对它们的影响。在谐响应仿真分析中得到微谐振器的幅频响应特性,从而导出微谐振器的品质因子Q值。     

用于通信领域中的MEMS器件

微电子机械系统（ＭＥＭＳ）技术在未来的通信领域中有着广泛的应用前景，本文介绍了若干个用于通信线路中的ＭＥＭＳ器件，如微电容器，微电感器，微谐振器，微滤波器，微开关等的典型结构形式及其主要性能。     

一种体声波滤波器仿真设计分析

文中着重阐述了基于微机电系统（Micro-Electro-Mechanical Systems，MEMS）技术制造的薄膜体声波谐振器／滤波器，简述了它的结构及原理，分析了其主要特征参数和设计方法，并设计了中心频率为2．4GHz，带宽为100MHz的带通滤波器，展示了薄膜体声波谐振器／滤波器的突出性能，为通信MEMS技术的微型化发展提供了更广阔的道路。     

软件无线电中RF-MEMS元件

本文分析了软件无线电系统中的MEMS(Micro-Electric-Machine-Systems)解决方案、及其可应用于软件无线电系统中的MEMS器件,主要有对称锥形弯曲缝隙微带天线、用于G波段的微尺度宽频天线、微机械自适应帖片天线、高Q值、双频段MEMS开关、薄膜体声波谐振器、腔结构微机械谐振器、分布式MEMS传输线微机械滤波器等典型的MEMS器件,这些器件克服了普通射频器件体积大,功耗高等缺点,有望在软件无线电系统中得到应用。最后,对MEMS器件在软件无线电系统中的应用做了展望。     

单基三电极石英晶体谐振器频率-温度特性研究

设计了一种新型的单基三电极石英晶体谐振器，并在大气环境条件下测试分析了这种谐振器的频率-温度特性，验证了其频率-温度特性与已有的单基单电极谐振器的频率-温度特性基本一致，曲线为三次曲线。在相同激励及环境条件下，在同一基片上设置多对电极时，各对电极构成的谐振器的频率-温度特性基本相同。根据这种相似特点，将同一基片上不同电极对应的谐振器的振动频率进行差频补偿，可有效地抑制温度对谐振器振动频率的影响。这种谐振器所采用的差频补偿方法可为石英谐振器相关特性的进一步开发利用提供依据。研究了这种结构的石英晶体谐振器的晶片表面处理（是否抛光）及边沿形状（是否倒边）对其频率-温度特性的影响。实验结果表明，对单基多电极石英晶体谐振器的晶片表面进行抛光并对边沿进行倒边处理后，谐振器的稳定性得到了有效的改善，性能得到了优化。     

硅微谐振器的光激励

本文对硅悬臂梁谐振子的光激励进行了研究，从理论计算和实验两方面分析了悬臂梁谐振器的光激励特性。获得了谐振器响应的幅频特性曲线和激励光斑位置与谐振器输出关系的曲线。本文的结果为全光型微机械谐振器的研究提供了理论依据。     

梳状微谐振器的简单器件综合。

介绍了MEMS器件中微谐振器的简单综合方法:在给出一要求的频率值和明确设计变量与设计约束的条件下,提出一组规范尺寸,并用一种有效面积的综合方法,得到相应的微谐振器器件拓扑结构图,以及一组优化且实际有效的拓扑参数,实现微谐振器的简单器件综合。并用ANSYS软件进行了返回验证,结果误差均很小,符合设计要求。     

Millimetre-wave second-harmonic Gunn-diode oscillator with magnetic tuning

A second-harmonic Gunn-diode oscillator with a rectangular waveguide resonator for the fundamental frequency has been designed and tested in the SO GHz frequency range. A longitudinally magnetized ferrite slab, placed in the resonator, makes possible a frequency decrease of 0 to 250 MHz when a static magnetic field of 0 to 220 Oe is applied.     

All-fiber compound ring resonator with a ring filter

The new all-fiber compound ring resonator has two rings: a primary one that serves as a resonator, and a secondary one that serves as a filter. The main contribution of this resonator is to increase the free spectral range by choosing the fiber lengths in the compound ring cavity. This resonator with a large free spectral range can be readily used as a doped fiber laser. The optimum resonant conditions of the resonator are discussed by using an equivalent model and by the transfer matrix method. The frequency responses of the output and of the circulating intensities are given. Mode suppression by the vernier effect is demonstrated. Comparison with a fiber Fox-Smith resonator is also presented     

GMM和SAW谐振器复合磁传感器设计与分析

提出了一种新的超磁致伸缩材料(GMM)和声表面波(SAW)谐振器构成的复合磁传感器,将磁场中GMM的应力应变传递到SAW谐振器上,改变其谐振频率,检测谐振频率进行磁场测量。推导了复合磁传感器在磁场中的频率响应及磁场-频率偏移量关系,并对传感器的静态特性进行了测试。分析表明该传感器为低通系统,截止频率约为14.34Hz。实验验证了复合传感器的最高静态灵敏度可达到190Hz/Oe。     

COIL调腔光静态波前的GS方法测量

本文利用ＧＳ方法对ＣＯＩＬ谐 振腔调控光的波前进行了测量。并利用Ｚｅｒｎｉｋ多项式对其进行了像差分析，给出了波前误差的均方根值。     

Analysis of a racetrack microring resonator with MMI coupler

The static spectral characteristic response of a ring resonator in the form of racetrack with a multimode interference (MMI) coupler has been numerically simulated and investigated. The generalized multimode transmission matrix of the MMI has been evaluated with beam-propagation method simulation and furthermore, the effect of the excitation of higher order modes in the ring resonator on the device-transmission characteristic has been analyzed.     

Design of Compact Tri-Band Bandpass Filters Using Assembled Resonators

A novel approach for designing tri-band bandpass filters with independently controllable center frequencies and improved stopband rejection characteristic is presented in this paper. The assembled resonator constructed by a stepped impedance resonator and a common half-wavelength resonator is employed to obtain tri-band response. The stepped impedance resonator is designed to operate at the first and third passbands and the other resonator is designed to operate at the second passband. Two kinds of filter configurations with cascaded and pseudointerdigital formats are proposed. Based on lossless lumped-element equivalent circuit, it is found that both filter structures can introduce transmission zeros between passbands. To verify the proposed approach, two filters are designed and fabricated, the measured results exhibit tri-band bandpass responses with high selectivity.     

Bandpass filter with an ultra-wide stopband designed on miniaturized coaxial resonators

Characteristics of a new miniaturized coaxial resonator are theoretically investigated. It is shown that the first resonant frequency of the resonator can be significantly lowered relative to the second one and the resonator dimensions can be considerably decreased as compared to those of a traditional dielectric-filled quarter-wavelength coaxial resonator. Based on the investigated resonator, a fourth-order bandpass filter has been designed and fabricated. The filter stopband at a level of no worse than ?90 dB extends to the frequency that exceeds the passband center frequency by a factor of 47. Calculated frequency responses are in good agreement with those measured on the fabricated filter prototypes.     

Dual-Mode Microstrip Open-Loop Resonators and Filters

A miniature dual-mode microstrip open-loop resonator is proposed. Distinct characteristics of this new type of dual-mode resonator are investigated using full-wave electromagnetic simulations. It is shown that the two operating modes, i.e., the even and odd modes, within a single dual-mode resonator of this type do not couple. It is also found that there is a finite-frequency transmission zero inherently associated with the even mode. Two two-pole filters using this type of dual-mode resonator are demonstrated with opposite asymmetric responses, which result from different locations of the transmission zero. Higher order filters of this type are also investigated. Both simulated and measured results are presented.     

Realisation of improved spurious responses and attenuation pole in stopband by microstrip resonator

Resonant characteristics of a microstrip resonator loaded with dielectric rods below a strip conductor are investigated by a finite-difference time-domain method. A tapped resonator employing the proposed method is capable of realising the improved spurious responses together with an attenuation pole in the stopband, and of reducing the resonator's length.     

Investigation of quasi-elliptic hairpin dual-mode filters under different perturbations

This article presents a dual-mode resonator developed from a hairpin resonator with a reactive perturbation tapped at the mid-point. The dual-mode resonance characteristics are investigated intensive under both inductive and capacitive perturbations. Using this resonator, a method of synthesising the filter is also developed to determine the circuit layout directly according to the specified filter characteristics. Moreover, to improve the filter's performance, cross-coupling technique to realise quasi-elliptic responses is also discussed for both types of perturbations. Finally, two quasi-elliptic dual-mode filters were designed, fabricated and measured to verify the proposed theory.