MEMS降阶宏模型仿真平台研究

随着MEMS系统级设计成为研究的热点,MEMS系统级CAD的开发日益重要.论文介绍了一种基于降阶宏模型MEMS系统级仿真平台,通过有限元方法提取MEMS器件几何物理数据.建立MEMS器件有限元模型.利用Krylov子空间算法缩聚自由度建立宏模型,通过系统级仿真平台对此进行系统级仿真. 整个流程通过VC++编译器调用ANSYS、嵌入封装的算法动态链接库、集成SIMULINK系统仿真器完成.并用双端固支梁实例对所有模块加以验证,仿真结果准确,计算效率较高.     

MEMS器件的计算机辅助设计方法和仿真研究

MEMS技术的进一步发展依赖于MEMS器件计算机辅助设计的发展和水平的提高。系统级仿真和多能量场耦合是MEMS器件计算机辅助设计的核心环节。提出了一种MEMS器件设计的参考方法,并对系统级仿真这一难点做了深入阐述。     

RF MEMS在微波器件中的小型化应用

文章首先阐述了微电子机械系统(MEMS)技术的基本概念、工艺流程及发展概况;其次,介绍了RF MEMS技术在射频系统中的应用及RF MEMS器件在功耗、体积、质量、性能和成本上的优势;最后重点介绍了RF MEMS技术应用,包括RF MEMS开关、移相器、谐振器和滤波器等典型微波元器件,分析其结构特征、发展现状和相对于传统器件的性能优势,在此基础上展望RF MEMS技术应用前景。     

一种可支持任意流程的MEMS设计工具

当前MEMS CAD软件中可以支持的设计流程比较固定和单一,已不能完全满足由MEMS器件种类日益增多所带来的设计新需求.论文提出了一种可支持任意流程的MEMS设计方法,并基于此建立了设计工具原型系统.该方法采用通用的系统级、器件级和工艺级的三级架构,但以网表、标准格式的实体模型和版图文件分别作为这三个级别设计数据的出入口.设计了相应的信息提取算法及程序,实现了任意两个级别之间的数据自动传递,从而可以支持在该架构下的全部六种设计流程.尤其是由系统级到器件三维实体再到工艺版图的设计流程为国际上率先实现,其从功能逐步综合到器件结构,可有效减少设计的迭代次数.设计实例表明,基于该工具可以针对不同的MEMS器件选择最优的设计路线,显著提高了MEMS的设计效率.     

基于受力分析的MEMS薄膜系统级模拟方法的研究

介绍一种MEMS系统级模拟方法.该方法直接分析运动物体的受力情况,并结合能量原理,利用受控源的反馈实现耦合作用,建立机电耦合MEMS薄膜的等效电路模型.利用该等效电路实现对薄膜动态行为的系统级模拟,并将Spice和有限元法,Saber的模拟结果进行对比,验证了该模拟方法应用于二维情况分析的有效性.     

基于SABER平台的MEMS系统级模型研究

多端口组件网络方法是一种新的系统级统一建模方法,通过该方法形成的多端口三维组建库可以实现MEMS器件的快速设计与仿真.利用该方法,在SABER仿真平台上搭建了MEMS固态引信核心子系统的系统级行为模型,并进行了一系列的仿真分析,包括小信号频域仿真,时域仿真.以及灵敏度仿真,其结果接近于有限元分析结果.采用多端口组件网络方法进行MEMS器件的设计可以满足设计要求,保证精度,提高设计效率.     

MEMS器件真空封装模型模拟

结合典型的MEMS器件真空封装工艺,应用真空物理的相关理论,建立了MEMS器件真空封装的数学物理模型,确定了其数值模拟算法。据此,对一封装示例进行了计算,获得了真空回流炉内干燥箱及密封腔体真空度的变化情况,实现了MEMS器件真空封装工艺过程的参数化建模与模拟。     

用于系统级仿真的MEMS器件宏模型研究现状

微机电系统(MEMS)的未来在于有稳定数量且不断壮大的新型产品能成功地转化为商品,这关键在于将计算机引入到MEMS设计、制造全过程。阐述了MEMS CAD的复杂性和困难。对MEMS CAD的分层设计思想作了简要介绍,着重对现有的MEMS器件宏模型的建模方法和模型的描述与其国内外研究现状与发展方向进行介绍和总结,认为宏模型研究的重点将是器件非线性特性的有效表达和建模过程自动化的计算机实现,并对今后的研究发展提出一些建议。     

基于IP库的MEMS设计系统

针对MEMS设计系统中机械性能仿真不足、设计与加工脱节、缺少工艺验证等问题,借鉴了IC设计可重用思想,引入了具有知识产权的功能模块--IP的概念,提出了基于IP库的MEMS设计方法.该方法是Top-Down和Bottom-Up设计相结合的方法,其核心是MEMS IP库,关键技术包括IP库、虚拟工艺、虚拟运行等,分别对应IP管理、工艺级仿真系统以及器件行为级仿真系统.最后以电容式微加速度计设计为例,对双梁、四梁、疏齿等6种不同的结构分别进行了设计仿真、流水加工,封装和测试的过程,完成了器件从设计到成品的整个流程,验证了本文提出的设计方法和设计系统的有效性和正确性.     

发展中的RF MEMS开关技术

从驱动方式和机械结构的角度介绍了不同的RF MEMS开关类型,分析了各类MEMS开关的性能及优缺点,分析了MEMS开关在制作和发展中面临的牺牲层技术、封装技术、可靠性问题等关键技术和问题,介绍了MEMS开关的发展现状及其在组件级和系统级的应用,以及对MEMS开关技术的展望。     

叉指式加速度计的一种仿真法分析

微电子机械系统的快速发展对其建模仿真也提出了较高要求。首先介绍了一种微电子机械系统原理级描述仿真方法,它基于成熟的微机械元件库,提供微器件的原理级描述,使得仿真更简单、更高效,但目前其适用范围有限。然后介绍了用这种方法分析叉指式微电容加速度计的结果。     

Structural modelling and integrative analysis of microelectromechanical systems product using graph theoretic approach

Micro-electromechanical systems (MEMS) as an enabling technology is seen to play a more and more important role for the main stream of industry of the future by broadening its applications to information, communications and bio technologies. Development of MEMS devices, however, still relies on knowledge and experience of MEMS experts due to the design and fabrication process complexity. It is difficult to understand the trade-offs inherent in the system and achieve an optimal structure without any MEMS-related insight. An attempt is made to develop an integrated systems model for the complete structure of the MEMS product system in terms of its constituents and interactions between the constituents. The hierarchical tree structures of the MEMS system and its subsystems are presented up to component level. For characterization, analysis and identification of MEMS product system, three different mathematical models say graph theoretic model, matrix model and permanent model are presented. These models are associated with graph theory, matrix method and variable permanent function by considering the various subsystems, subsubsystems up to component level, their connectivity and interdependency of the MEMS product system. The developed methodology is explained with an example. The proposed modeling and analysis is extendable to the subsystems and the component level. An overall structural analysis can be carried out by following a ‘top-down’ approach or ‘bottom-up’ approach. Understanding of MEMS product structure will help in the improvement of performance, cost, design time, and so on.     

梳齿谐振器宏模型的系统级应用

宏模型的获取是由Krylov子空间投影法结合器件级有限元分析的宏建模方法来实现,利用此模型和基于可重用IP设计思想的系统级组件建模方法建立由VHDL-AMS语言描述的梳齿谐振器系统级模型,在华大VDE仿真平台上搭建出了梳齿谐振器的系统模型,并进行一系列的仿真,包括时域阶跃、交流电压信号仿真和频域交流小信号仿真,仿真结果与商用仿真工具ANSYS仿真结果保持良好的一致.     

基于Modelica的MEMS系统级多领域建模与仿真

分析了现有的MEMS系统级建模与仿真方法,讨论了运用Modelica语言进行面向对象的非因果关系建模方法,建立了基于Modelica的电容式微型静电致动器系统级模型,仿真结果证明了Modelica用于MEMS系统级多领域仿真的可行性.     

An extraction-based verification methodology for MEMS

Micromachining techniques are being increasingly used to develop miniaturized sensor and actuator systems. These system designs tend to be captured as layout, requiring extraction of the equivalent microelectromechanical circuit as a necessary step for design verification. This paper presents an extraction methodology to (re-)construct a circuit schematic representation from the layout, enabling the designer to use microelectromechanical circuit simulators to verify the functional behavior of the layout. This methodology uses a canonical representation of the given layout on which feature-based and graph-based recognition algorithms are applied to generate the equivalent extracted schematic. Extraction can be performed to either the atomic level or the functional level representation of the reconstructed circuit. The choice of level in hierarchy is governed by the trade off between simulation time and simulation accuracy of the extracted circuit. The combination of the MEMS layout extraction and lumped-parameter circuit simulation provides MEMS designers with VLSI-like tools enabling faster design cycles, and improved design productivity     

Accurate Simulation of RF MEMS VCO performance including phase noise

A new coupled circuit and electrostatic/mechanical simulator (COSMO) is presented for the design of low phase noise radio frequency (RF) microelectromechanical systems (MEMS) voltage-controlled oscillators (VCOs). The numerical solution of device level equations is used to accurately compute the capacitance of a MEMS capacitor. This coupled with a circuit simulator facilitates the simulation of circuits incorporating MEMS capacitors. In addition, the noise from the MEMS capacitor is combined with a nonlinear circuit-level noise analysis to determine the phase noise of RF MEMS VCO. Simulations of two different MEMS VCO architectures show good agreement with experimentally observed behavior.     

Study on localized induction heating for wafer level packaging

Micro-electro-mechanical systems(MEMS)are being developed as a new multi-disciplinary technology,which will undoubtedly have a revolutionary impact on the future of human life.However,with the development of MEMS technology,the packaging has become the main technical obstacle to the commercialization of MEMS.An approach to MEMS packaging by high-frequency electromagnetic induction heating at wafer level is presented in terms of numerical simulation and experimental study.The structure of inductor is firstly...     

用于硅基氮化镓可调微镜的静电梳齿型微驱动器设计

提出并设计了一种用于硅基氮化镓(GaN)可调微镜的静电梳齿型微驱动器.利用有限元软件建立了该器件的几何结构模型,对器件的结构进行了仿真优化.此外,采用微机电系统(MEMS)加工工艺,制作出了用于硅基氮化镓可调微镜的梳齿型微驱动器,并对其驱动特性进行测试.测试结果表明:所制作的微驱动器的位移随着电压的变化呈二次方关系,与仿真结果基本一致.当加载驱动电压为200 V时,微驱动器的驱动位移可达到1.08 μm.     

A UML-based object-oriented approach for design and simulation of a drug delivery system

Given complexity of the design and manufacturing processes of microelectromechanical system (MEMS) products, we present a unified modeling language (UML) based design approach for multi-domain products or systems like MEMS to designing and evaluating possible solutions at the early design stage to shorten their development time. Specifically, the proposed approach is used to model and analyze a novel drug delivery system combining MEMS devices and integrated circuit (IC) units. This drug delivery system aims to be used for safer and more effective therapy of the diabetics. Two design models about the whole drug delivery system and its micropump subsystem are established using UML diagrams; in particular a composition diagram with components and ports describes the topology of the system. Through design and simulation on the micropump subsystem, it is found that the variations of geometrical dimension and excitation voltage affect the characterization of the micropump. The simulation results demonstrate and validate the proposed approach, and can be used as a significant reference for the designer to design the optimal micropump.     

基于Petri网的MEMS柔性设计建模方法

微机电系统设计具有微尺度效应和多物理场耦合的特点,而现有的面向产品宏观结构的CAD系统难以满足微米尺度设计需求,为此提出一种基于Petri网的MEMS柔性设计建模方法.在分析MEMS设计特点、框架和流程的基础上,对已有设计系统进行抽象化和精细化,获得高内聚低耦合的设计模块,并将Petri网与设计系统各模块相互关联,建立了基于Petri网的MEMS柔性设计建模框架;然后通过添加前置库所和带权有向弧调节库所最大/最小标识数,控制设计流的总数;再添加控制库所形成控制回路,使并发变迁有序执行,消解并行设计冲突;最后用Petri网的状态空间求解结果控制各模块运行,满足复杂设计流的多元关系.以ACIS为几何造型内核开发了自主原型系统,以电容式三维硅微梳齿驱动器设计为例进行应用验证,结果表明,文中方法将现有MEMS设计从自顶向下和自底向上及其混合拓展到基于Petri网的柔性设计建模,使产品设计不局限于固定的设计流程,对于提高MEMS设计效率和质量具有重要意义.