激光跟踪仪转镜倾斜误差的标定及修正

为了提高激光跟踪仪的测量精度,分析了跟踪仪的几何结构误差,重点研究了其转镜倾斜误差的标定和修正方法。利用矢量分析和坐标转换相结合的方法建立了跟踪仪转镜倾斜误差模型,推导出了跟踪仪几何空间坐标修正公式,并基于自准直仪、多面棱体和可调反射镜建立了高精度误差标定装置。利用标定装置分析了误差标定方法,通过系统仿真研究了转镜倾斜误差对系统测角误差及最终坐标测量误差的影响。利用误差标定实验检测出的系统转镜倾斜误差约为4″,将其带入坐标修正公式,并与修正前的坐标进行了比对分析。对比结果显示,经误差修正后系统空间坐标测量误差可减小约2×10-6,验证了转镜倾斜误差标定和误差修正方法的有效性,表明利用该方法可在不改变系统硬件结构的基础上提高测量系统的测量精度。     

基于激光传感器的滚珠螺母型面测量

为了实现滚珠螺母型面的快速精确测量,提出了激光测量方法并设计测量装置。首先,基于经直角棱镜反射的点激光轴向扫描的测量原理设计了螺母滚道型面检测装置,并根据滚道的数学模型提出轴法向转换的数据处理方法。然后,对直角棱镜的平移和转角误差、激光偏移误差、激光倾斜误差建立模型进行分析。最后,设计工装对标准钢球和圆槽进行扫描,并对螺母滚道开展实际测量。结果显示,完成误差标定后,经棱镜反射的点激光扫描圆弧轮廓的测量误差在3.1μm以内,标准差在2.2μm以内。对螺母滚道的扫描图像完整有效,总体精度满足螺母滚道型面的测量要求。     

球体圆度测量中光轴偏移对测量精度影响的实验研究

为描述光学精密位移传感器测量高端轴承球体圆度过程中,光轴与轴承球体赤道面存在一定的角度时对测量结果的影响,讨论了这种装置的工作原理及可实现的测量精度,从理论上分析了有一定倾斜时测量值与实际值之间的误差,同时通过实验测量,验证了该装置在测量轴承球体时测量误差与倾斜角之间的关系。评估了利用该装置测量高端轴承球体几何量,如圆度等时的精度上限,建立了一套利用精密光学位移传感器测量轴承球体几何量及误差评定的方法。该装置及测量方法可用于生产线上的在线检测。     

3-RPS并联机构运动学标定方法的研究

针对六轴混联机床中因3-RPS并联机构结构参数误差引起的精度问题,分析了影响3-RPS并联机构几何精度的误差因素,给出了并联机构的误差模型;基于影响并联机构定平台运动精度较大的几何误差参数;建立了运动学标定模型.采用阻尼最小二乘法,经多次优化迭代实现了利用一组测量数据完成非线性超越矛盾标定方程组的求解.利用激光干涉仪完成了标定用数据的测量,通过3-RPS并联机构运动学逆解和各铰链的几何标定参数,得到动平台的实际位姿.通过对标定前后的Z轴定位精度的检测及实际零件加工试验,验证了3-RPS并联机构运动学标定模型和方法的正确性和有效性.     

自动磁通门经纬仪多参量误差补偿算法

自动磁通门经纬仪是地磁绝对观测中测量磁偏角和磁倾角的重要仪器,在测量过程中目前存在横轴与磁轴的不正交误差、磁通门传感器零点偏移误差、电机停止误差和竖轴倾斜误差。为了提高仪器测量精度,利用多体系统理论建立了磁通门传感器输出模型,并基于该模型和"四位置测量法"提出了磁偏角和磁倾角的多参量误差补偿算法。补偿算法通过传感器指向与地磁矢量正交的4个特定位置进行测量,可消除不正交误差和传感器零偏。针对测量过程中存在的电机停止误差和竖轴倾斜误差,补偿算法可进行修正。利用模拟数据进行的仿真实验表明,补偿算法可对±10′以内的电机停止误差和竖轴倾斜误差进行补偿。在台站完成的实测实验表明,补偿算法使测量误差减小到3″以内,满足仪器测量的需求。     

2UPR&2RPS型冗余驱动并联机器人的运动学标定

运动学标定能够有效提高并联机器人的运动精度.以一类2UPR&2RPS型冗余驱动并联机器人为研究对象,提出了该类装置的运动学标定方法.通过将误差闭环矢量方程分别投影到运动支链的驱动方向和约束方向建立了该机器人的几何误差模型,并分离出可补偿误差源和不可补偿误差源.基于误差映射矩阵建立了误差灵敏度指标,随后通过灵敏度分析找出了对末端误差影响较大的不可补偿误差源.利用正则化算法建立了基于激光跟踪仪末端位置测量的几何误差辨识模型.标定试验结果表明,所提出的运动学标定方法是有效的.     

三维激光球杆仪的系统误差分析与补偿

三维激光球杆仪是自研发的一种被动式激光跟踪仪,为了提高其测量精度,该文系统地分析了其主要误差源及补偿方法。首先,通过误差源分析,基于多体系统误差建模理论对仪器进行精度建模;其次,针对误差补偿模型,提出了简单有效的模型参数测量方法,即多齿分度台和光电自准直仪标定二维转台两测角误差,正倒镜法测量两旋转轴的不相交度,精密三轴机床测量轴系不垂直度误差;最后,完成精度补偿验证。实验结果表明,在有效测量范围内,补偿后的垂直度误差从120μm减小到28μm,X轴定位误差从20μm减小到8μm,Z轴定位误差从60μm减小到25μm。研究表明该补偿方法在不改变硬件结构的基础上能有效提高仪器的精度。     

大距离孔系同轴度测量装置专用校准系统研究

针对大距离孔系同轴度测量装置精度校准的问题,对同轴度误差来源、多孔系工件同轴度测量方法、误差计算模型方面进行了研究,对孔系同轴度测量装置校准系统的原理与组成进行了归纳,建立了校准系统的结构与控制模型,提出了一种专用校准方法,通过提供一组轴线位置变动量已知的标准孔系模拟装置,将同轴度测量装置测得值与标准值相比较,以此得出了被校准装置的测量误差。该校准系统由自行设计的三维精密运动平台与标准环规组成,采用光栅尺作为系统定位元件,采用TMS320F2812作为系统的主控芯片,并提出了基于最小二乘原理的同轴度最小区域算法。研究结果表明:该校准系统分辨率达到1μm,系统不确定度达到8.12μm,能够快速、有效地校准大距离孔系同轴度测量装置的精度误差。     

面向电容式传感器线性度标定的柔性微动机构设计

针对光学精密工程中位移检测问题,研制了一种电容式位移传感器线性度标定装置。阐明了标定装置的组成和标定方法的原理,该装置采用运动轴、测量轴和传感轴三轴共线的设计方案,从测量原理上降低了阿贝误差。基于伪刚体模型和拉格朗日方程建立了机构位移、刚度、强度和固有频率的理论模型,为机构优化设计提供理论依据。计算和仿真结果表明理论模型和有限元分析误差分别为3.764%、3.908%、14.842%和2.666%。试验结果表明行程测试值与理论值、有限元计算值的误差分别为9.254%和13.524%,刚度测试值与理论值、有限元计算值的误差分别为8.472%和11.914%。标定后传感器测试线性度由0.057 48%提高至0.004 39%,测试精度改善明显,能够满足光学精密位移测试需求。表明所搭建的标定装置有效,且建立的机构理论模型和分析方法可信。     

滚珠滑块型面测量的误差分析及试验验证

为了实现滚珠滑块型面的快速准确测量,基于点激光扫描原理设计了滑块型面检测装置,并依此建立了滚道倾斜扫描模型。然后对传感器的安装误差进行仿真分析,提出标准圆棒的误差标定补偿方法;同时建立光线的倾斜照射模型,结合求解照射圆柱的倾斜角的方法,分析不同情况下光线的倾斜照射误差。随后,设计工装对圆棒外轮廓半径进行测量,结果表明传感器安装误差补偿后的测量精度明显提高,点激光在一定角度下倾斜照射精度为3.5μm,标准差在1.2μm以内,结合滑块滚道的实际测量图像,验证本测量方案具有可行性。     

The detection of rotary axis of NC machine tool based on multi-station and time-sharing measurement

At present, the detection of rotary axis is a difficult problem in the errors measurement of NC machine tool. In the paper, a method with laser tracker on the basis of multi-station and time-sharing measurement principle is proposed, and this method can rapidly and accurately detect the rotary axis. Taking the turntable measurement for example, the motion of turntable is measured by laser tracker at different base stations. The redundant equations can be established based on the large amount of measured data concerning the distance or distance variation between measuring point and base station. The coordinates of each measuring point during turntable rotation can be accurately determined by solving the equations with least square method. Then according to the error model of rotary axis, the motion error equations of each measuring point can be established, and each error of turntable can be identified. The algorithm of multi-station and time-sharing measurement is derived, and the error separation algorithm is also deduced and proved feasible by simulations. Results of experiment show that a laser tracker completes the accuracy detection of the turntable of gear grinding machine within 3 h, and each error of the turntable are identified. The simulations and experiments have verified the feasibility and accuracy of this method, and the method can satisfy the rapid and accurate detecting requirements for rotary axis of multi-axis NC machine tool.     

激光跟踪仪测角误差补偿

由于激光跟踪仪的角度测量精度直接影响仪器的测量精度,本文提出了用自准直仪结合多面棱体对跟踪仪金属圆光栅测角误差进行离散标定的方法。研究了基于谐波分析的误差补偿方法,取金属柱面圆光栅测角误差中幅值较大且相位基本不变的谐波分量建立了补偿模型,避免了最小二乘法不收敛的问题。分析了标定测角误差的不确定度,结果显示：水平测角精度补偿前后分别为1.60"和0.90",俯仰测角精度补偿前后分别为4.89"和0.91",精度分别提高了44%和81%,从角秒级提高到了亚角秒级。结果表明,提出的方法可为激光跟踪仪水平和俯仰轴系提供测角误差补偿,对类似测角系统的误差补偿也有参考价值。     

Geometric error measurement and compensation for the rotary table of five-axis machine tool with double ballbar

This paper proposes a novel measuring method for geometric error identification of the rotary table on five-axis machine tools by using double ballbar (DBB) as the measuring instrument. This measuring method greatly simplifies the measurement setup, for only a DBB system and a height-adjustable fixture are needed to evaluate simultaneously five errors including one axial error, two radial errors, and two tilt errors caused by the rotary table. Two DBB-measuring paths are designed in different horizontal planes so as to decouple the linear and angular errors. The theoretical measuring patterns caused by different errors are simulated on the basis of the error model. Finally, the proposed method is applied to a vertical five-axis machining center for error measurement and compensation. The experimental results show that this measuring method is quite convenient and effective to identify geometric errors caused by the rotary table on five-axis machine tools.     

A general strategy for geometric error identification of multi-axis machine tools based on point measurement

Geometric error component identification is needed to realize the geometric error compensation which can significantly enhance the accuracy of multi-axis machine tools. Laser tracker has been applied to geometric error identification of machine tools increasingly due to its high capability in 3D metrology. A general method, based on point measurement using a laser tracker is developed for identifying the geometric error components of multi-axis machine tools in this study. By using this method, all the component errors and location errors of each axis (including the linear axis and rotary axis) of the multi-axis machine tools can be measured. Three pre-described targets are fixed on the stage of the under-test axis which moves step by step. The coordinates of the three targets at every step are determined by a laser tracker based on the sequential multilateration method. The volumetric errors of these three target points at each step can be obtained by comparing the measured values of the target points’ coordinates with the ideal values. Then, nine equations can be established by inversely applying the geometric error model of the axis under test, which can explicitly describe the relationship between the geometric error components and volumetric error components, and then the component errors of this axis can be obtained by solving these equations. The location errors of the axis under test can be determined through the curve fitting. In brief, all the geometric error components of a single axis of multi-axis machine tools can be measured by the proposed method. The validity of the proposed method is verified through a series of experiments, and the experimental results indicate that the proposed method is capable of identifying all the geometric error components of multi-axis machine tools of arbitrary configuration.     

Three-point method for measuring the geometric error components of linear and rotary axes based on sequential multilateration

The linear and rotary axes are fundamental parts of multi-axis machine tools. The geometric error components of the axes must be measured for motion error compensation to improve the accuracy of the machine tools. In this paper, a simple method named the three-point method is proposed to measure the geometric error of the linear and rotary axes of the machine tools using a laser tracker. A sequential multilateration method, where uncertainty is verified through simulation, is applied to measure the 3D coordinates. Three non-collinear points fixed on the stage of each axis are selected. The coordinates of these points are simultaneously measured using a laser tracker to obtain their volumetric errors by comparing these coordinates with ideal values. Numerous equations can be established using the geometric error models of each axis. The geometric error components can be obtained by solving these equations. The validity of the proposed method is verified through a series of experiments. The results indicate that the proposed method can measure the geometric error of the axes to compensate for the errors in multi-axis machine tools.     

转台误差对数字天顶仪轴系误差的影响

针对数字天顶仪在定位过程中存在的的轴系偏差,研究了如何对光轴与旋转轴、旋转轴与垂直轴之间的角度偏差进行补偿的方法。为了高精度地解算出测站点位置垂直轴的天文坐标,采用对称位置的两幅星图直接解算旋转轴的坐标,从而避免了光轴与旋转轴之间的补偿。采用双轴倾角仪测量倾角,并对旋转轴进行倾角补偿得出垂直轴的位置坐标。考虑进行轴系补偿时,转台误差会对旋转轴坐标和倾角补偿造成影响,分别研究了转台误差对于旋转轴以及倾角补偿的影响,并得出了转台误差的范围。实验结果表明:当测站点纬度的绝对值小于或等于88.3°时,转台误差必须小于或等于35″;当测站点纬度的绝对值大于88.3°时,转台误差值要小于|1 166.8cosδ|″。在对称位置解算测站点位置坐标时,必须提高转台的精度,以减小转台误差对于定位精度的影响。     

同轴度同步旋转测量的空间投影解析

研究了国际上同轴度准直测量的专利发展状况。在这些专利材料研究的基础上,对2轴三维空间准直测量建立数学模型,用三维空间的思想来描述一个运动的准直激光在一个同步旋转轴的垂直二维平面位置测量装置上的投影,解决同轴度测量空间解析问题。通过试验检测同轴测量空间坐标的位置变化。原来的激光光斑在从动轴垂直平面中为椭圆曲线,在位置检测器件坐标中曲线也发生了改变,并且展示了角偏差变化和轴心的位置变化对曲线的影响。     

Algorithm for detecting volumetric geometric accuracy of NC machine tool by laser tracker

Quick and accurate detecting the error of NC machine tool and performing the error compensation are important to improve the machining accuracy of NC machine tool.Currently,there are many methods for detecting the geometric accuracy of NC machine tool.However,these methods have deficiencies in detection efficiency and accuracy as well as in versatility.In the paper,a method with laser tracker based on the multi-station and time-sharing measurement principle is proposed,and this method can rapidly and accurately detect the geometric accuracy of NC machine tool.The machine tool is controlled to move in the preset path in a 3D space or 2D plane,and a laser tracker is used to measure the same motion trajectory of the machine tool successively at different base stations.The original algorithm for multi-station and time-sharing measurement is improved.The space coordinates of the measuring point obtained by the laser tracker are taken as parameter values,and the initial position of each base point can be determined.The redundant equation concerning the base point calibration can be established by the distance information of the laser tracker,and the position of each base point is further determined by solving the equation with least squares method,then the space coordinates of each measuring point can be calibrated.The singular matrix does not occur in calculation with the improved algorithm,which overcomes the limitations of the original algorithm,that the motion trajectory of machine tool is in a 3D space and there exits height difference between the base stations.Adopting the improved algorithm can expand the application of multi-station and time-sharing measurement,and can meet the quick and accurate detecting requirements for different types of NC machine tool.     

激光跟踪测量系统跟踪转镜的误差分析

激光跟踪测量系统是目前最新型的便携式空间大尺寸坐标测量系统,可对空间运动目标进行跟踪并实时测量其三维空间坐标,具有精度高、范围大、实时快速等特点。然而,激光跟踪测量系统中跟踪转镜的几何误差严重影响了其测量精度;所以激光跟踪测量系统在使用前必须对其进行建模和误差分析。在全面研究了激光跟踪测量系统结构和工作原理的基础上,建立了系统运动学模型和跟踪转镜中心偏移数学模型。详细分析了系统测量中基点位置变动误差、转镜跟踪目标反射器跟踪误差和转镜反射面与激光束不垂直误差等。结果表明跟踪转镜中心偏移、回转轴不对称、基点位置变动、光束反射点与基点不重合是导致测量误差的主要原因。因此,在跟踪转镜结构设计中,为保证激光束反射点与基点位置重合及转镜旋转跟踪目标反射器时基点空间位置保持不变,应尽量减少跟踪转镜旋转点与镜面之间的距离。     

五轴数控机床工作台的几何误差测量

针对回转轴误差的定义,最终确立以基于最小二乘圆法,对回转工作台几何误差的测量方案.并以HS664RT五轴联动立式加工中心作为研究实例,完成数控回转工作台的几何误差测量实验.用Matlab建立了求解标准球安装误差的算法,并对回转工作台几何误差进行了辨识建模.