High-power single-mode antiresonant reflecting optical waveguide-type vertical-cavity surface-emitting lasers

Antiresonant reflecting optical waveguide (ARROW) techniques are employed in vertical cavity surface emitting lasers (VCSELs) to achieve high-power single-mode emission. Using the effective-index method and fiber mode approximation, the cold-cavity lateral modal behavior for the circular shaped ARROW VCSEL demonstrates significant reduction of radiation loss from that of a single antiguide, while maintaining strong discrimination against high-order modes. The circular-waveguide is created by selective chemical etching and two-step metal-organic chemical vapor deposition growth, with proton implantation used to confine the current injection to the low-index core region. A single-mode CW power of 7.1 mW has been achieved from an 8 /spl mu/m diameter ARROW device (index step /spl Delta/n = 0.05, emission at /spl lambda//sub 0/ = 980 nm) with a far-field FWHM of 10/spl deg/. Larger aperture (12 /spl mu/m) devices exhibit multimode operation at lower drive currents with a maximum single-mode continuous-wave output power of 4.3 mW.     

Design and fabrication of temperature-insensitive InGaP-InGaAlP resonant-cavity light-emitting diodes

Visible InGaP-InGaAlP resonant-cavity light-emitting diodes with low-temperature sensitivity output characteristics were demonstrated. By means of widening the resonant cavity to a thickness of three wavelength (3/spl lambda/), the degree of power variation between 25 /spl deg/C and 95 /spl deg/C for the devices biased at 20 mA was apparently reduced from -2.1 dB for the standard structure design (1-/spl lambda/ cavity) to -0.6 dB. An output power of 2.4 mW was achieved at 70 mA. The external quantum efficiency achieved a maximum of 3% at 13 mA and dropped slowly with increased current for the device. The external quantum efficiency at 20mA dropped only 14% with elevated temperature from 25 /spl deg/C to 95/spl deg/C. The current dependent far-field patterns also showed that the emission always took place perfectly in the normal direction, which was suitable for plastic fiber data transmission.     

High-power vertical cavity surface emitting laser with good performances

Fabrication and performance of a high-power bottom-emitting InGaAs/GaAsP vertical cavity surface emitting laser with 430 /spl mu/m diameter are described. The device realises the maximum room temperature CW output power 1.52 W at 987.6 nm with FWHM 0.8 nm. The far-field divergence angle is below 20/spl deg/. Reliability test shows at 70/spl deg/C an output power 0.35 W over 500 h.     

Vertical-cavity surface-emitting lasers (VCSELs) with high-power and single-spot far-field distributions at 850-nm wavelength by use of petal-shaped light-emitting apertures

In this letter, we demonstrate a vertical-cavity surface-emitting laser (VCSEL) with a petal-shaped light-emitting aperture, which is realized by the Zn-diffusion technique, at a wavelength of 850 nm. The demonstrated device behaves like a two-dimensional VCSEL array and each light-emitting unit can have high coherence of in-phase lasing to form a near fundamental supermode emission. The measured far-field distributions of such a device exhibit single-lobe (spot), high-power (>7.5 mW), and narrow divergence angle (/spl sim/6/spl deg/) performance under a wide range of bias current. The ratio of in-phase lasing mode to total lasing modes, which include isolated single mode, in-phase, and out-of-phase modes, has also been analyzed by the measured far-field distributions and the theoretically calculated patterns.     

"Anti" up the aperture [antiguided VCSEL structures]

Coupled vertical cavity surface-emitting laser (VCSEL) arrays are an attractive means to increase the coherent output power of VCSELs. Single-mode VCSELs, with output powers greater than 10 mW, would be useful as telecommunication transmitters /spl lambda/=1.3-1.55 /spl mu/m) or sources for optical interconnects. Commercially available single-mode VCSELs, even at shorter wavelengths /spl lambda/=0.85 /spl mu/m), are generally limited to a few milliwatts of output power. The conventional VCSEL structure incorporates a built-in positive-index waveguide, designed to support a single fundamental mode. Promising results in the 3-5 mW range (/spl lambda/=0.85 /spl mu/m) have been obtained from wet-oxidized, positive-index-guided VCSELs with small emission apertures (less than 3.5 /spl mu/m-dia). The small aperture size leads to a high electrical resistance and high current density, which can impact device reliability. By contrast, antiguided VCSEL structures have shown promise for achieving larger aperture single-mode operation. To obtain high single-mode powers with a larger emitting aperture, the use of a negative-index guide (antiguide) is beneficial. This paper discusses antiguided structures and some of their advantages when incorporated in 2-D VCSEL array structures.     

160/spl deg/C pulsed laser operation of AlGaInP-based vertical-cavity surface-emitting lasers

Pulsed lasing operation of a 670 nm AlGaInP-based oxide-confined vertical-cavity surface-emitting laser (VCSEL) at high temperatures is demonstrated. At +120/spl deg/C heatsink temperature output power exceeded 0.5 mW and at +160/spl deg/C 25 /spl mu/W output power was achieved     

High-performance single-mode VCSELs in the 1310-nm waveband

High-performance vertical-cavity surface-emitting lasers (VCSELs) emitting in the 1310-nm waveband are fabricated by bonding AlGaAs-GaAs distributed Bragg reflectors on both sides of a InP-based cavity. A 2-in wafer bonding process is optimized to produce very good on-wafer device parameter uniformity. Carrier injection is implemented via double intracavity contact layers and a tunnel junction. A 1.2-mW single-mode output power is obtained in the temperature range of 20/spl deg/C-80/spl deg/C. Modulation capability at 3.2 Gb/s is demonstrated up to 70/spl deg/C. Overall VCSEL performance complies with the requirements of the 10 GBASE-LX4 IEEE.802.3ae standard, which opens the way for novel applications of VCSELs emitting in the 1310-nm band.     

Flip-chip bonded 0.85-/spl mu/m bottom-emitting vertical-cavity laser array on an AlGaAs substrate

We report high-performance 0.85-/spl mu/m bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) on an AlGaAs substrate with 2.1 mA threshold current density 4.2 mW maximum output power, 11.7% power conversion efficiency and a maximum operating temperature of 130/spl deg/C. We also demonstrate a flip-chip bonded 0.85-/spl mu/m bottom-emitting VCSEL array, and confirm all pixels across the 8/spl times/8 VCSEL array operate at a f/sub 3/ dB bandwidth of 2.6 GHz at only 4.2 mA.     

High-power continuous-wave operation of quantum-cascade lasers up to 60/spl deg/C

High-temperature high-power continuous-wave (CW) operation of high-reflectivity-coated 12-/spl mu/m-wide quantum-cascade lasers emitting at /spl lambda/ = 6 /spl mu/m with a thick electroplated Au top contact layer is reported for different cavity lengths. For a 3-mm-long laser, the CW optical output powers of 381 mW at 293 K and 22 mW at maximum operating temperature of 333 K (60/spl deg/C) are achieved with threshold current densities of 1.93 and 3.09 kA/cm/sup 2/, respectively. At 298 K, the same cavity gives a maximum wall plug efficiency of 3.17% at 1.07 A. An even higher CW optical output power of 424 mW at 293 K is obtained for a 4-mm-long laser and the device also operates up to 332 K with an output power of 14 mW. Thermal resistance is also analyzed at threshold as a function of cavity length.     

AlGaAs vertical-cavity surface-emitting laser responses to 4.5-MeV proton irradiation

We have irradiated single- and multimode AlGaAs vertical-cavity surface-emitting laser (VCSEL) arrays operating at a nominal wavelength of 780 nm with 4.5-MeV protons and doses ranging from 10 to 30 Mrad in the active region. We observed a peak power reduction of about 2% per Mrad in the 14-/spl mu/m aperture, multimode VCSELs. Single-mode VCSELs having an aperture of 6 /spl mu/m exhibited a smaller peak power reduction of 0.4%-1% per Mrad. A slight shift in the current threshold was observed only for the multimode VCSELs at dose levels above 10 Mrad. First results indicate a reduced VCSEL peak laser power output that is dominated by a temperature shift caused by the radiation induced increase in resistive heating. In contrast, the power reduction in edge-emitting lasers is dominated by the enhanced radiation induced nonradiative recombination rate. The VCSEL irradiation was performed with a focused ion micro beam that was rastered over the device surface, ensuring a very uniform exposure of a single device in the array.     

微小孔阵列垂直腔面发射激光器的研究

在980nm波长的大功率垂直腔面发射激光器(VCSEL)的基础上制备了高输出功率的微小孔阵列半导体激光器,其最大输出光功率达到了1mW。介绍了针对微小孔阵垂直腔面发射激光器的特殊制备工艺,并对其特性进行了分析。     

Short wavelength (/spl lambda//spl sim/4.3 /spl mu/m) high-performance continuous-wave quantum-cascade lasers

We report continuous-wave (CW) operation of a 4.3-/spl mu/m quantum-cascade laser from 80 K to 313 K. For a high-reflectivity-coated 11-/spl mu/m-wide and 4-mm-long laser, CW output powers of 1.34 W at 80 K and 26 mW at 313 K are achieved. At 298 K, the CW threshold current density of 1.5 kA/cm/sup 2/ is observed with a CW output power of 166 mW and maximum wall-plug efficiency of 1.47%. The CW emission wavelength varies from 4.15 /spl mu/m at 80 K to 4.34 /spl mu/m at 298 K, corresponding to a temperature-tuning rate of 0.87 nm/K. The beam full-width at half-maximum values for the parallel and the perpendicular far-field patterns are 26/spl deg/ and 49/spl deg/ in CW mode, respectively.     

Single-mode blue-violet laser diodes with low beam divergence and high COD level

We demonstrate GaN-based high-power single transverse-mode laser diodes (LDs) emitting at 405 nm. LD structures are designed to exhibit a high level of catastrophic optical damage and small beam divergence angle. By the control of refractive index profiles, we achieved a vertical beam divergence angle of as low as 17.5/spl deg/ and maximum output power of as high as 470 mW under continuous-wave operation condition. In addition, nearly fundamental transverse-mode operation is demonstrated up to 500-mW pulsed output power by far-field investigation.     

120/spl deg/C 10-gb/s uncooled direct Modulated 1.3-/spl mu/m AlGaInAs MQW DFB laser diodes

A 1.3-/spl mu/m AlGaInAs multiquantum well ridge waveguide distributed feedback laser diode was developed. By forming n-InGaAsP grating in the n-InP cladding layer close to the active region, accumulation of the holes in the grating layer was reduced and over 5 mW of output power was obtained at 120/spl deg/C. Clear eye opening was confirmed with no mask hits for OC-192 under 10-Gb/s direct modulation at the temperature up to 120/spl deg/C.     

Ultralow-threshold sapphire substrate-bonded top-emitting 850-nm VCSEL array

Oxide-confined top-emitting vertical-cavity surface-emitting-laser (VCSEL) 8 /spl times/ 8 arrays were designed and fabricated with ultralow thresholds. The arrays were flip-chip bonded onto sapphire substrates and mounted in pin-grid-array packages as optical transmitter arrays. By using the offset-contact bonding process, we were able to obtain very high yield for hybridized devices without damaging the VCSEL mesas. Room-temperature lasing thresholds below 70 /spl mu/A were found from some of these packaged VCSELs with measured oxide apertures 2.6 /spl mu/m in diameter. The emission spectrum at an injection current of 70 /spl mu/A showed a full-width at half-maximum linewidth of less than 2.5 A. Polarization properties were also confirmed from the output of the device. The superior performance was attributed to the optimized size and placement of the confinement aperture and the precise alignment of the gain profile of the active region to the mode of the resonant cavity.     

1 W fibre coupled power InGaAsP/InP 14xx pump laser for Raman amplification

A 1 W record singlemode fibre coupled output power using 1460 nm InGaAsP/InP non-tapered buried ridge lasers has been demonstrated. The impact of the bandgap of the passive quaternary waveguide on internal loss was investigated. Optimised design allows internal losses as low as 3.3 cm/sup -1/, external efficiency of 0.46 W/A for a 3 mm-long laser and symmetrical (12/spl deg//spl times/12/spl deg/) far-field pattern.     

High-power (200 mW) singlemode operation of InGaAsN/GaAs ridge waveguide lasers with wavelength around 1.3 /spl mu/m

High-power narrow ridge waveguide lasers emitting with a wavelength around 1.3 /spl mu/m were realised with a single In/sub 0.36/GaAsN/sub 0.022/ quantum well with GaAs barriers. A narrow vertical far-field angle of 35/spl deg/ was obtained. Single lateral mode continuous-wave operation with slope efficiency of 0.57 W/A, series resistance of 2.6 /spl Omega/, and kink-free output power of 210 mW was achieved.     

Semiconductor laser with tapered-rib adiabatic-following fiber coupler for expanded output-mode diameter

A new expanded-mode AlGaAs diode laser with reduced far-field divergence and 0.9 dB single-mode optical fiber coupling loss is demonstrated. This new laser achieves a two-dimensional (2-D) expansion of the fundamental output mode with a rib waveguide tapered in only one dimension. Stable fundamental-mode operation with a narrow, 5.7/spl deg/ by 7.40 full-width-at-half-maximum far-field divergence is observed well above lasing threshold. Tapered waveguide dimensions are compatible with conventional optical lithographic techniques, making this device suitable for mass production.     

Continuously tunable 1.55-/spl mu/m VCSEL implemented by precisely curved dielectric top DBR involving tailored stress

We present an optically pumped and continuously tunable 1.55-/spl mu/m vertical-cavity surface-emitting laser (VCSEL). The device shows 26-nm spectral tuning range, 400-/spl mu/W maximum output power, and 57-dBm side-mode suppression ratio. The VCSEL is implemented using a two-chip concept. The movable top mirror membrane is precisely designed to obtain a tailored air-gap length (L'=16 /spl mu/m) and a radius of curvature (ROC=4.5mm) in order to efficiently support the fundamental optical mode of the plane-concave resonator. It consists of a distributed Bragg reflector (DBR) with periodic, differently stressed silicon nitride and silicon dioxide multilayers implemented by plasma-enhanced chemical vapor deposition. The lower InP-based part, comprising the InP-InGaAsP bottom DBR and the active region, is grown monolithically using metal-organic vapor phase epitaxy.     

Planar laterally oxidized vertical-cavity lasers for low-threshold high-density top-surface-emitting arrays

We introduce a novel device architecture that enables the fabrication of low threshold high density vertical-cavity surface-emitting laser (VCSEL) arrays. Our structure relies on a group of small via holes to access a buried AlGaAs layer for lateral oxidation. In contrast to the conventional method of exposing mesa sidewalls through etched pillars, this technique provides our VCSEL's with the benefits of oxide confinement without sacrificing wafer planarity. Maintaining wafer planarity is essential for the easy fabrication and contacting of densely packed devices. The devices operate at 827 nm, with a minimum threshold current of 200 /spl mu/A, and a maximum output power of 3.15 mW.