共查询到19条相似文献,搜索用时 203 毫秒
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数字无透镜傅里叶变换全息术中非傍轴及离焦像差的校正 总被引:2,自引:0,他引:2
对数字无透镜傅里叶变换全息图直接采用逆傅里叶变换进行物场的数值重建时.需要满足两个条件:第一,全息图的记录过程必须满足傍轴近似条件,否则再现过程中会产生非傍轴像差;第二,记录全息图时物平面与参考点光源到全息图记录平面的距离必须相等,否则再现过程中会产生离焦像差.理论分析了非傍轴及离焦记录条件下数字无透镜傅里叶变换全息图的灰度分布特点,并提出了相应的非傍轴及离焦像差的数值校正方法.根据实际的非傍轴或离焦记录情况.分别给所记录的数字全息图灰度分布矩阵乘以适当的非傍轴或离焦校正因子,以消除灰度矩阵中非傍轴或离焦因素的影响.然后再对校正后的伞息图灰度矩阵做逆傅里叶变换处理.即可得到准确的数字再现像.实验结果表明.该数值重建方法能够有效地消除无透镜傅里叶变换全息术中数字再现像的非傍轴像差及离焦像差,提高再现像的质量. 相似文献
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离轴照明技术(OAI)是极紫外光刻技术中提高光刻分辨率的关键技术之一。为了实现考虑掩模阴影效应情况下离轴照明的优化选择,构造了一种新型实现OAI曝光的成像模型。将照射到掩模上的非相干光等效为一系列具有连续入射方向的等强度平行光,基于阿贝成像原理分别对掩模进行成像,最终在像面进行强度叠加实现OAI方式下空间成像的计算;并通过向投影系统函数添加离焦像差项实现不同离焦面上空间成像计算。该模型极大地简化了OAI条件下对掩模阴影效应的计算,提高了成像质量计算效率。结合光刻胶特性及投影曝光系统焦深设计要求,以显影后光刻胶轮廓的侧壁倾角为判据,获得了采用数值孔径为0.32的投影系统实现16 nm线宽黑白线条曝光的最优OAI参数。 相似文献
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微细光刻中部分相干系统成像研究 总被引:2,自引:1,他引:1
分析了投影光刻系统中部分相干成像的过程,结果表明部分相干成像的像强是相干成像的像强对光源上每一点互相干强度的权重和,得出了近年来改进照明条件提高分辨力的物理本质,部分相干成像系统是一个空间频率可变的系统,频率的调制是通过照明函数的变化来实现的提出了进一步提高光刻分辨力的新途径。 相似文献
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基于旋转波片的斯托克斯参量检测与精度分析 总被引:1,自引:0,他引:1
用于偏振光学遥感器定标的参考光源,其偏振态的检测精度会直接影响偏振光学遥感器的定标精度,进而影响目标特性的反演水平。选用870 nm波段的水平线偏振光作为被测试的定标参考光源,通过旋转1/4波片(quarter-wave plate, QWP)对其光强进行调制。调制光强可表达为波片快轴旋转角度的傅里叶级数,采用傅里叶变换法反演出级数的系数,根据该系数即可计算出被测试光源的Stokes参量。给出10次测量各参量及偏振度的平均值、标准偏差、合成不确定度以及测量平均值与理论值的相对偏差。为提高测试精度,通过对波片快轴初始定位角度偏差Δα、延迟量偏差Δδ与检偏器透光轴角度偏差Δβ进行分析,提出了偏差修正模型。该模型通过Stokes参量检测偏差随Δδ和Δβ的变化趋势及实际偏差值,确定Δδ和Δβ的大小。结合模拟出的波片快轴初始定位角度偏差Δα,对实验装置加以调整,再次对光源的偏振态进行检测。结果表明,基于该修正模型测得光源的各Stokes参量与理论值最大偏差从未经修正的3.77%降低至1.41%。证实了基于本实验的原理、装置、测量方法及所提出的偏差修正模型可有效提高定标参考光源偏振态检测的精度。 相似文献
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光刻空间像仿真作为各种计算光刻技术的基础,受到越来越多的重视.提出一种基于互强度傅里叶分析的光刻机投影成像快速模拟方法,从光刻成像互强度传播过程入手,基于傅里叶光学原理对成像要素进行多次空域-频域变换,得到一种快捷的空间像模拟途径.通过与标准解析空间像对比,发现该方法的计算精度可达10-4(最大光强归一化).该方法避免了部分相干成像的Hopkins方程中繁琐的积分运算,操作性强、计算精度高.该方法适用于各种灵活多变的曝光成像条件,具备广阔的工程应用前景. 相似文献
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被动遥测红外信号的精确解译,对远距离、非接触获取污染云团信息具有重要意义。然而,测量过程中的光谱畸变阻碍了这一目的的达成。针对遥测信号中的谱线畸变问题,提出了一种利用线形函数模型自适应补偿傅里叶变换红外光谱仪光谱线形函数的方法。通过对傅里叶变换光谱仪线形函数的成因分析,结合实际仪器设计参数,从理想线形函数、固有线形函数和相位误差三个方面构建线形函数模型;在此基础上,以实测畸变光谱与理论仿真光谱的均方误差作为代价函数,利用迭代优化方法实现了对实际线形函数关键参数进行估算的算法流程;将重构得到的线形函数应用于理论光谱补偿,显著减少了理论仿真光谱与实测光谱之间的差异。分析结果表明,理想线形函数主要影响谱线展宽及旁瓣幅值;固有线形函数造成向低频方向的非对称展宽;而相位误差则会造成谱峰非对称。必须在理论仿真光谱中综合考虑三种来源线形函数的贡献,才能有效建立测量光谱和待反演云团参数之间的联系。实际线形函数畸变参数的获取和补偿应用,有助于提高红外遥测信号的定量解译水平。 相似文献
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通过对坐标系统进行旋转,计算得到了三次型波前编码系统的倾斜入射的光瞳函数,并给出了近似表达式. 分析表明倾斜入射会产生三次相位扩大效应和离焦扩大效应,它们和入射角的正负无关,且随着入射角绝对值的增大而增大. 这表现在点扩散函数(point spread function, PSF)上会扩展PSF包络的两条直角边,表现在调制传递函数(modulation transfer function, MTF)上会降低MTF值. 子午面倾斜入射时,子午方向的三次相位扩大效应和离焦放大效应大于弧矢方向,从而导致子午方向
关键词:
倾斜入射
波前编码
三次相位扩大效应
离焦扩大效应 相似文献
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通过对坐标系统进行旋转,计算得到了三次型波前编码系统的倾斜入射的光瞳函数,并给出了近似表达式. 分析表明倾斜入射会产生三次相位扩大效应和离焦扩大效应,它们和入射角的正负无关,且随着入射角绝对值的增大而增大. 这表现在点扩散函数(point spread function, PSF)上会扩展PSF包络的两条直角边,表现在调制传递函数(modulation transfer function, MTF)上会降低MTF值. 子午面倾斜入射时,子午方向的三次相位扩大效应和离焦放大效应大于弧矢方向,从而导致子午方向 相似文献
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Chongwei Zheng 《Optics Communications》2006,259(2):445-448
The fractional Fourier transform (FRT) is applied to off-axis elliptical Gaussian beam (EGB). An analytical formula is derived for the FRT of off-axis EGB in terms of the tensor method. The corresponding tensor ABCD law for performing the FRT of off-axis EGB is also obtained. By using the derived formulae, numerical examples are given. The derived formulae provide a convenient way for analyzing and calculating the FRT of off-axis EGB. 相似文献
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de la Barrière F Druart G Guérineau N Ferrec Y Taboury J Primot J 《Optics letters》2011,36(5):684-686
We present a optical system with an extended point-spread function (PSF) for the localization of point sources in the visible and IR spectral ranges with a subpixel precision. This compact system involves a random phase mask (RPM) as its unique component. It exhibits original properties, because this RPM is used in a particular regime, called the "filamentation regime," before the speckle region. The localization is performed by calculating the phase correlation between the PSF and the image obtained under off-axis illumination. Numerical simulations are presented to assess the basic optical properties of this RPM in the filamentation regime. 相似文献
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基于广义惠更斯-菲涅尔原理,推导出了超短脉冲厄米-高斯(H-G)光束在湍流大气中的光谱传输方程,研究了其光谱移动和光谱跃变特性,并给予了合理的物理解释.研究表明,超短脉冲H-G 光束通过湍流大气传输其光谱特性由大气折射率结构常数、厄米多项式阶数、脉冲宽度和观察点位置坐标等因素共同决定.轴上点光谱为蓝移,随着离轴距离的增大,光谱由蓝移变为红移,无光谱移动点的位置坐标与脉冲宽度无关.此外,当湍流增强到一定程度时离轴点还存在光谱跃变现象.自由空间与湍流大气中的光谱跃变行为存在很大的差异,本文对此进行了详细的分析.
关键词:
超短脉冲厄米-高斯(H-G)光束
湍流大气
光谱移动
光谱跃变 相似文献
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The analytical far-field expressions for the TE and TM terms and energy flux distributions of nonparaxial Gaussian beams with a pair of vortices are derived by using vector angular spectrum representation and stationary phase method. The far-field properties including phase singularities and energy flux distributions of the TE and TM terms and whole beam are studied in detail. It is shown that there exist a saddle point and phase singularities that depend on the off-axis distance, waist width, and propagation distance. By suitably varying the off-axis distance, the motion and variation of topological charge of phase singularities may take place. The results are interpreted and compared with the previous work. 相似文献
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We developed a new full off-axis red-green-blue (RGB) digital holographic microscope with an LED illumination. A decisive advantage of the use of LED illumination is a large image quality improvement due to its partially coherent nature. The off-axis configuration enables the fast recording of the holographic data in each spectral channel. The digital holographic refocusing and the optical phase map computation are successfully demonstrated. The multiwavelength operation provides a significant improvement of the collected information for colored samples. 相似文献
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FISICA (Far-Infrared Space Interferometer Critical Assessment) was a three year study of a far-infrared spatio-spectral double-Fourier interferometer concept. One of the aims of the FISICA study was to set-out a baseline optical design for such a system, and to use a model of the system to simulate realistic telescope beams for use with an end-to-end instrument simulator. This paper describes a two-telescope (and hub) baseline optical design that fulfils the requirements of the FISICA science case, while minimising the optical mass of the system. A number of different modelling techniques were required for the analysis: fast approximate simulation tools such as ray tracing and Gaussian beam methods were employed for initial analysis, with GRASP physical optics used for higher accuracy in the final analysis. Results are shown for the predicted far-field patterns of the telescope primary mirrors under illumination by smooth walled rectangular feed horns. Far-field patterns for both on-axis and off-axis detectors are presented and discussed. 相似文献
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Based on the vectorial Rayleigh--Sommerfeld integral formula and the
complex Gaussian expansion of the hard-edge aperture function, an
analytical propagation expression for a nonparaxial vectorial
off-axis Lorentz beam passing through a rectangular aperture is
derived. The unapertured case, the far field expression and the
scalar paraxial result are also presented as special cases of the
general formulae, respectively. Some numerical examples are also
given to show the propagation characteristics of a nonparaxial
vectorial off-axis Lorentz beam through a rectangular aperture. It
is indicated that the f parameter, the off-axis displacement and
the truncation parameter all play an important role in determining
nonparaxial propagation behaviour. 相似文献