Coaxial arrangement of a scanning probe and an X-ray microscope as a novel tool for nanoscience

We report on the design and first tests of a novel instrument aimed at combining the benefits of scanning force microscopy with those of X-ray spectroscopy. For this we built an instrument combining a scanning transmission X-ray microscope with a beam-deflection atomic force microscope in a coaxial geometry. This allows to combine X-ray absorption spectroscopy and high resolution topography in-situ. When replacing the conventional scanning probe tip by a coaxially shielded tip the instrument will allow detection of the photoelectrons produced by resonant X-ray absorption. This could yield spectroscopic information with a spatial resolution approaching the values achievable with atomic force microscopy.     

微机械氮化硅梁谐振式压力传感器

报导一种新型的电热激励、压阻拾振的氮化硅梁谐振式压力传感器。器件采用微电子机械加工技术和键合技术研制。谐振频率85kHz,空气中品质因素Q值接近1000,在真空中达到40000。采用闭环自激振荡方式测定压力传感器的压力特性,压力测试范围0－400kPa,灵敏度23．8Hz/kPa。     

Scanning properties of a resonant fiber-optic piezoelectric scanner

We develop a resonant fiber-optic scanner using four piezoelectric elements arranged as a square tube, which is efficient to manufacture and drive. Using coupled-field model based on finite element method, scanning properties of the scanner, including vibration mode, resonant frequency, and scanning range, are numerically studied. We also physically measure the effects of geometry sizes and drive signals on the scanning properties, thus providing a foundation for general purpose designs. A scanner adopted in a prototype of imaging system, with a diameter of ~2 mm and driven by a voltage of 10 V (peak to peak), demonstrates the scanning performance by obtaining an image of resolution target bars. The proposed fiber-optic scanner can be applied to micro-endoscopy that requires two-dimensional scanning of fibers.     

Ultrafast photon counting applied to resonant scanning STED microscopy

To take full advantage of fast resonant scanning in super‐resolution stimulated emission depletion (STED) microscopy, we have developed an ultrafast photon counting system based on a multigiga sample per second analogue‐to‐digital conversion chip that delivers an unprecedented 450 MHz pixel clock (2.2 ns pixel dwell time in each scan). The system achieves a large field of view (～50 × 50 μm) with fast scanning that reduces photobleaching, and advances the time‐gated continuous wave STED technology to the usage of resonant scanning with hardware‐based time‐gating. The assembled system provides superb signal‐to‐noise ratio and highly linear quantification of light that result in superior image quality. Also, the system design allows great flexibility in processing photon signals to further improve the dynamic range. In conclusion, we have constructed a frontier photon counting image acquisition system with ultrafast readout rate, excellent counting linearity, and with the capacity of realizing resonant‐scanning continuous wave STED microscopy with online time‐gated detection.     

双腔激光干涉仪

文章针对检测长激光器光谱特性的高分辨要求,研究了一种采用双腔的高分辨率激光扫描干涉仪,大大缓和了被检光源的单色性要求,多倍提高了分辫率。文章中举例设计了双腔激光干涉仪。     

A simple and practical method to acquire geometrically correct images with resonant scanning-based line scanning in a custom-built video-rate laser scanning microscope

Most currently available confocal or two-photon laser scanning microscopes (LSMs) allow acquisition rates of the order of 1–5 images s⁻¹, which is too slow to fully resolve dynamic changes in intracellular messenger concentration in living cells or tissues. Several technologies exist to obtain faster imaging rates, either in the video-rate range (30 images s⁻¹) or beyond, but the most versatile technology available today is based on resonant scanners for horizontal line scanning. These scanning devices have several advantages over designs based on acousto-optical deflectors or Nipkow discs, but a drawback is that the scanning pattern is not a linear but rather a sinusoidal function of time. This puts additional constraints on the hardware necessary to read-in the image data flow, one of which is the generation of a pixel clock that varies in frequency with the position of the pixel on the scanned line. We describe a practical solution to obtain a variable pixel clock add-on that is easy to build and is easy to integrate into a custom-built LSM based on resonant scanning technology. In addition, we discuss some important hardware and software design aspects that simplify the construction of a resonant scanning-based LSM for high-speed, high-resolution imaging. Finally, we demonstrate that the microscope can be used to resolve calcium puffs triggered by photolytically increasing the intracellular concentration of inositol trisphosphate.     

Numerical study of geometrical effects on the performance of an H-type cylindrical resonant photoacoustic cell

We have numerically studied the geometrical effects on the performance of an H-type cylindrical resonant photoacoustic cell, composed of one resonator and two symmetrical buffer cylinders, by performing simulations on the generation of acoustic waves in the cell. Here, the acoustic response (pressure), resonance frequency and quality factor are calculated for the cell performance, while the lengths and diameters of both resonator and buffer cylinders are considered for the geometrical parameters or dimensions. Our calculation solves linearized forms of the continuity equation, Navier-Stokes equation, energy equation, and equation of state using a finite element method under an assumption that the heat addition due to the laser passage and thus the variations in the velocity, pressure and temperature fields inside the cell are small enough. First, we performed a statistical analysis using a design of experiment method to evaluate the relative impacts of the cell dimensions on the acoustic response. Subsequently, we performed a parametric study to quantify the cell performance with the dimensional variations. Our results, along with the response surface methodology, provide guidance for a systematic design optimization of the cell for the best acoustic response. The approach in this study may be applied to the design of various types of resonant photoacoustic spectroscopy devices.     

Widening the sound absorption bandwidths of flexible micro-perforated curved absorbers using structural and acoustic resonances

In this paper, the sound absorptions of flexible curved micro-perforated panels that are backed by an air cavity are studied in detail. A theoretical model that is based on the classical plate equation coupled with an acoustic wave equation is developed for the prediction of sound absorption. This model considers both symmetrical and antisymmetrical structural acoustic responses. Using the electro-acoustic analogy approach, another model is developed that only considers single structural and acoustic modes. It is proposed to make use of panel and cavity resonances to widen the absorption bandwidth of a single/double perforated absorber. The absorption of a flexible micro-perforated panel can be further enhanced by adjusting its curvature to bring the resonant frequencies closer together. The effects of various parameters such as boundary condition, incidence angle, and curvature on the absorption are studied. Predicted results for the single and double layer absorbers show good agreement with measurements.     

The design of a precision bilaminar resonating transducer assembly tool

The performance of bilaminar resonating transducers depends on the thickness and uniformity of the transducer's bond layers. Optimal resonant performance requires a bond thickness between the crystals of ≤5 μm. In addition, a later product assembly step requires precise alignment between each of the transducer components. This article describes a precision tool, designed and built for an industrial sponsor, for assembling these transducers. The tool consists of a screen printer and a press. The screen printer includes a stencil and a powered squeegee cart that rides on a bearing rail. The press contains a bellows that applies pressure, as well as two vacuum heads that hold transducer components in place while pressure is applied. Precision design techniques, such as the use of kinematic couplings and flexures, were used throughout the tool. Bond thicknesses of assembled transducers were evaluated by inspecting each transducer's cross-section with a scanning electron microscope. Preliminary results in indicate that the requirement for a bond thickness of <5 μm was easily achieved; most thicknesses were an optimal 1 μm.     

Atomic resolution ultrafast scanning tunneling microscope with scan rate breaking the resonant frequency of a quartz tuning fork resonator

We present an ultra-fast scanning tunneling microscope with atomic resolution at 26 kHz scan rate which surpasses the resonant frequency of the quartz tuning fork resonator used as the fast scan actuator. The main improvements employed in achieving this new record are (1) fully low voltage design (2) independent scan control and data acquisition, where the tuning fork (carrying a tip) is blindly driven to scan by a function generator with the scan voltage and tunneling current (I(T)) being measured as image data (this is unlike the traditional point-by-point move and measure method where data acquisition and scan control are switched many times).     

超材料完美吸波器研究进展

超材料是一种人工复合材料,一般是由金属和电介质周期性排列的单元结构所构成,它具有天然材料不具备的某些特殊电磁性质。超材料的电磁响应不仅由它的构成材料决定,也与其谐振单元的微结构和排列方式有关。基于超材料设计的完美吸波器通过合理改变谐振单元的微结构参数和排列方式可以实现对特定波长的电磁波接近100%的吸收。超材料完美吸波器(PMA)具备设计灵活、响应可调、厚度小、吸波强等优点,通过设计合理的结构可以实现超宽带宽和极窄带宽,可以广泛应用于隐身材料、频率选择表面、太赫兹成像、智能通信、光电检测等领域。本文结合国内外研究现状,综述了PMA的研究近况与发展前景,以期获得对PMA更全面的理解。最后对PMA的发展趋势和应用前景进行了深入探讨,多功能、结构简单的新型PMA是未来的发展趋势。     

微谐振式压力传感器的系统级建模与仿真

具有微型化、多域耦合等特点的MEMS传感器对设计具有高精度、高效率、迭代设计、结构与电路联合设计等要求。基于组件库或集总参数的MEMS系统级设计方法虽然满足了这些要求,但在面向特定器件的定制化设计方面却略显不足。以一MEMS谐振式压力传感器为例,提出了一种全参数化系统级建模与仿真方法。在建立的详细数学模型基础上,通过硬件描述语言对传感器谐振子按照详细拓扑结构进行了建模与仿真。仿真结果和实验结果的对比显示这是一种满足MEMS设计要求的建模与仿真方法。     

Masked illumination scheme for a galvanometer scanning high-speed confocal fluorescence microscope

High-speed beam scanning and data acquisition in a laser scanning confocal microscope system are normally implemented with a resonant galvanometer scanner and a frame grabber. However, the nonlinear scanning speed of a resonant galvanometer can generate nonuniform photobleaching in a fluorescence sample as well as image distortion near the edges of a galvanometer scanned fluorescence image. Besides, incompatibility of signal format between a frame grabber and a point detector can lead to digitization error during data acquisition. In this article, we introduce a masked illumination scheme which can effectively decrease drawbacks in fluorescence images taken by a laser scanning confocal microscope with a resonant galvanometer and a frame grabber. We have demonstrated that the difference of photobleaching between the center and the edge of a fluorescence image can be reduced from 26 to 5% in our confocal laser scanning microscope with a square illumination mask. Another advantage of our masked illumination scheme is that the zero level or the lowest input level of an analog signal in a frame grabber can be accurately set by the dark area of a mask in our masked illumination scheme. We have experimentally demonstrated the advantages of our masked illumination method in detail.     

Quasi in situ scanning force microscope with an automatic operated reaction chamber

We describe the design and performance of a quasi in situ scanning force microscope with an automatic operated reaction chamber. The design provides a repetitive hermetically sealed sample environment for successive processing. The reaction chamber is based on a combination of a flexure-guided cover, a piezo-positioning system and a force applicator system. An axial force seals the cover against the reactor enabling flow-through applications at low pressure, ambient pressure, or elevated pressure. The position stability of the sample relative to the probe is characterized and a full automated operation of the instrument is explored by the alignment of an ABC terblock copolymer thin film undergoing solvent vapor annealing in the presence of a high electric field. Due to the high electric field strength and the sharp scanning force microscope tip it is impossible to perform in situ scanning in the presence of the electric field.     

Study of the sensitivity of the first four flexural modes of an AFM cantilever with a sidewall probe

The resonant frequency and sensitivity of flexural vibration for an atomic force microscope (AFM) cantilever with a sidewall probe have been analyzed. A closed-form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness of cantilever and sample. The results show that a sidewall scanning AFM is more sensitive when the contact stiffness is lower and that the first mode is the most sensitive. However, the high-order modes become more sensitive than the low-order modes as the contact stiffness increases. The resonance frequency of an AFM cantilever is low when contact stiffness is small. However, the frequency rapidly increases as contact stiffness increases. In addition, it can be found that the effects of the vertical extension on the sensitivity and the resonant frequency of an AFM cantilever are significant. Decreasing the length of vertical extension can increase the resonance frequency and sensitivity of mode 1 when the contact stiffness is small. However, the situation is reverse when the contact stiffness becomes large.     

电涡流传感器的脉冲激励与双参数检测

采用矩形脉冲作为激励信号,对电涡流传感器在位移检测过程中谐振频率及谐振阻尼的变化情况进行了研究分析.建立了以现场可编程门阵列(FPGA)为核心芯片的检测系统,用于产生所需要的矩形脉冲激励信号以及对传感器响应信号的欠采样.利用8 mm直径的电涡流线圈,对0～10 mm范围内碳钢目标靶的位移响应特性进行了测量,借助短时傅里叶变换分析了响应信号中频率成分的分布情况,同时获得了谐振频率及谐振阻尼的测量值.验证了通过脉冲激励同时获取电涡流传感器双参数检测的可行性.为研制基于电涡流效应的位移传感器及无损探伤传感器提供了一种新思路.     

A line-scanning semi-confocal multi-photon fluorescence microscope with a simultaneous broadband spectral acquisition and its application to the study of the thylakoid membrane of a cyanobacterium Anabaena PCC7120

We describe the construction and characterization of a laser‐line‐scanning microscope capable of detection of broad fluorescence spectra with a resolution of 1 nm. A near‐infrared femtosecond pulse train at 800 nm was illuminated on a line (one lateral axis, denoted as X axis) in a specimen by a resonant scanning mirror oscillating at 7.9 kHz, and total multi‐photon–induced fluorescence from the linear region was focused on the slit of an imaging polychromator. An electron‐multiplying CCD camera was used to resolve fluorescence of different colours at different horizontal pixels and fluorescence of different spatial positions in a specimen at different vertical pixels. Scanning on the other two axes (Y and Z) was achieved by a closed‐loop controlled sample scanning stage and a piezo‐driven objective actuator. The full widths at half maximum of the point‐spread function of the system were estimated to be 0.39–0.40, 0.33 and 0.56–0.59 μm for the X (lateral axis along the line‐scan), Y (the other lateral axis) and Z axes (the axial direction), respectively, at fluorescence wavelengths between 644 and 690 nm. A biological application of this microscope was demonstrated in a study of the sub‐cellular fluorescence spectra of thylakoid membranes in a cyanobacterium, Anabaena PCC7120. It was found that the fluorescence intensity ratio between chlorophyll molecules mainly of photosystem II and phycobilin molecules of phycobilisome (chlorophyll/phycobilin), in the thylakoid membranes, became lower as one probed deeper inside the cells. This was attributable not to position dependence of re‐absorption or scattering effects, but to an intrinsic change in the local physiological state of the thylakoid membrane, with the help of a transmission spectral measurement of sub‐cellular domains. The efficiency of the new line‐scanning spectromicroscope was estimated in comparison with our own point‐by‐point scanning spectromicroscope. Under typical conditions of observing cyanobacterial cells, the total exposure time became shorter by about 50 times for a constant excitation density. The improvement factor was proportional to the length of the line‐scanned region, as expected.     

超声微流混合器内流场试验

制作超声微流混合器,该混合器混合腔直径6 mm,深60 μm,振动膜厚和压电层厚210 μm,测量辅助立管高度2 cm。计算该混合器不同的振动模态,利用粒子图像技术测量实际振动模态图和流场图,分析模态计算结果与试验的误差原因。试验结果表明,混合器在超声激励下腔体内存在平面旋状结构;环流边界处有明显地微粒汇聚现象;一阶模态振动会产生净压差。最后得到压差的高度与压电驱动电压的近似关系。     

Simulation-aided design and fabrication of nanoprobes for scanning probe microscopy

We proposed and demonstrated a flexible and effective method to design and fabricate scanning probes for atomic force microscopy applications. Computer simulations were adopted to evaluate design specifications and desired performance of atomic force microscope (AFM) probes; the fabrication processes were guided by feedback from simulation results. Through design-simulation-fabrication iterations, tipless cantilevers and tapping mode probes were successfully made with errors as low as 2% in designed resonant frequencies. For tapping mode probes, the probe tip apex achieved a 10 nm radius of curvature without additional sharpening steps; tilt-compensated probes were also fabricated for better scanning performance. This method provides AFM users improved probe quality and practical guidelines for customized probes, which can support the development of novel scanning probe microscopy (SPM) applications.     

振筒式压力传感器弹性元件结构设计与分析

利用有限元分析软件ANSYS对振筒式压力传感器弹性元件——谐振筒进行了动态特性仿真分析,建立了谐振筒的参数化模型,基于模态分析选定合适的工作振型,重点利用谐响应分析讨论了谐振筒品质因数的影响因素。研究表明,当谐振筒的基模态为（4,1）模态时,品质因数随谐振筒外半径、有效长度以及壁厚的增加而减小,而工作时作用于谐振筒的激...