调制周期对TiN/Ti多层膜组织结构和结合力的影响

为了阐明调制周期对薄膜微观组织及薄膜与基体结合力的影响,采用反应磁控溅射在Ti6Al4V基板上交替沉积了Ti层及TiN层制备了TiN/Ti多层膜。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、显微硬度仪和划痕仪测量分析了薄膜的晶体结构、微观组织、硬度以及薄膜与基体之间的结合力。研究结果表明:TiN/Ti多层膜中均存在TiN,Ti和Ti2N 3种相。TiN/Ti多层膜均以柱状晶方式生长,在调制周期较大(5层)时,TiN和Ti层的界面清晰;随着调制周期的减小(层数增加),TiN和Ti层的界面逐渐消失。与单层TiN薄膜相比,多层TiN/Ti薄膜的硬度显著提高;但随着薄膜层数的增加,多层TiN/Ti薄膜硬度略微降低。当调制周期为80nm(30层)时,薄膜与基体的结合力明显提高,达到73N。     

Ti层对316L不锈钢表面TiB2薄膜结合力的影晌

基于多层膜优异的力学性能,采用磁控溅射法在316L不锈钢基体表面沉淀[Ti／TiB2]。（n=1,2,3）多层膜以增强TiB2薄膜的膜基结合强度。研究周期数对多层膜的结构、硬度及结合力的影响。结果表明：TiB：单层膜表现为（001）方向的织构。随着周期数的增加,多层膜的织构方向由（001）转变为（100）;多层膜的硬度从20GPa增加到26GPa,但略低于TiB2单层膜的硬度（33GPa）;相对于单膜的膜基结合力（9．5N）,多层膜表现出较好膜基结合力,最大结合力可达24N。     

基体材料表面粗糙度对Ti/TiN/Zr/ZrN多层膜性能的影响（英文）

采用真空阴极电弧沉积技术,在4组表面粗糙度不同的Cr17Ni2钢基体上制备Ti/Ti N/Zr/Zr N多层膜。采用扫描电镜、X射线衍射仪、显微硬度计、结合力划痕仪、砂粒冲刷试验仪和盐雾试验机分析测试多层膜的截面形貌、膜层厚度、相组成、硬度、膜/基结合力、抗砂粒冲刷性能和耐腐蚀性能等。结果表明:所制备的多层膜厚度为11.37μm,维氏硬度为29.36 GPa;多层膜能显著地提高Cr17Ni2钢基体的抗砂粒冲刷和耐盐雾腐蚀能力;基体材料表面粗糙度对膜层性能的影响很大,基体表面粗糙度越小,其膜/基结合力、抗砂粒冲刷性能和耐盐雾腐蚀性能越佳;为了获得具有良好综合性能的膜层,待表面处理的基体表面粗糙度必须控制在Ra0.40μm。     

等离子复合渗镀陶瓷层腐蚀磨损性能的研究

利用等离子渗金属技术、尖端放电、空心阴极效应和反应气相沉积技术，在碳钢表面形成具有扩散层和沉积层的新型复合渗镀TiN沉积层＋TiN析出相＋Ti扩散层，并在此基础上用磁控溅射PVD沉积TiB2薄膜，对其耐蚀性、耐磨性进行了检测和分析。结果表明：由于等离子TiN复合渗镀层的均匀性、致密度高于PVD沉积TiB2薄膜，在1mol／LH2S04溶液中耐腐蚀性能是PVD沉积TiB2＋等离子TiN复合渗镀层11．7倍。TiB2／TiN复合渗镀层与碳钢基体直接PVD沉积TiB2相比硬度高达2600HV，膜层比较厚，表面光滑、平整薄膜覆盖，膜基结合力也很强，有很好的减磨耐膜性能。说明等离子渗金属技术制备的TiN渗镀复合层不仅具有优异的耐腐蚀性能同时对TiB2陶瓷有着强有力的支撑作用。     

磁控溅射沉积Ti/TiN多层膜的组织特征及耐磨损性能

采用固定Ti间隔层厚度,改变Ti N层厚度的方法在Ti6Al4V合金表面制备Ti/Ti N多层膜,研究循环周期对Ti/Ti N多层膜的相结构、形貌特征、结合力、硬度和在模拟人体液中摩擦磨损行为的影响.结果表明,与Ti N单层膜相比,Ti/Ti N多层膜中Ti N由(111)择优取向转变为(200)择优取向,多层膜表面粗糙度、硬度和结合力得到显著改善.增加循环周期降低Ti/Ti N多层膜表面硬度,但有利于提高结合强度.多层Ti/Ti N膜的强韧化主要来自于Ti N层的细晶强化和界面共格强化效应.当Ti N与Ti层厚度比为30,循环周期为3时,Ti/Ti N多层膜具有良好的综合性能,硬度为15.8 GPa,结合强度为50 N,摩擦系数为0.35,体积磨损率低于4.0×10-6mm3/(N·m).     

QTi2.5/Cu同基合金离子镀

采用同基合金电弧离子镀方法,在紫铜基体上制备了Cu-Ti合金薄膜,研究了弧电流和靶.基距离对膜层质量、沉积速率的影响.结果表明,镀层沉积速率随着弧电流的增加而增大,随靶-基距离的增大而下降;镀层近表面为层片状组织,镀层表面有颗粒存在,显示电弧源后期喷射的是Cu-Ti合金液滴;近界面处,组织细密,晶粒较小.镀层由沉积层和过渡层构成,Ti含量由表至里逐渐降低,过渡层的存在有利于提高膜-基结合力.镀层显微硬度呈梯度分布,表面显微硬度约为铜基材的3倍.     

氧化铝陶瓷表面化学镀镍工艺及镀层性能研究

目的在氧化铝陶瓷表面化学镀金属镍镀层,研究施镀时间对Al_2O_3陶瓷表面化学镀镍层的表面形貌、组织结构、显微硬度、表面粗糙度和镀镍层结合力的影响。方法所用镀液组成及工艺参数为:NiSO_4·6H_2O_25g/L,NaH_2PO_2·H_2O 22g/L,Na_3C_6H_5O_7·2H_2O 64g/L,(NH_4)SO_4 62g/L,pH=5.0~6.0,水浴加热至90℃,施镀时间1~4h。采用NovaNanoSEM50型场发射扫描电子显微镜观察镀层的表面微观形貌,采用TH765型自动显微硬度仪测试镀层硬度,采用OLS4000型三维形貌测量仪测量镀层表面粗糙度,采用压入法和热震试验评价镀层的结合性能。结果施镀时间为1~4h时,1h镀层表面金属光泽性好,呈银白色,4h镀层表面更为细腻,但表面光泽性较差。随着施镀时间的增长,Al_2O_3陶瓷表面化学镀镍层表面越光滑,显微硬度越大。不同施镀时间下的化学镀层均没有出现起泡、片状剥落或者与氧化铝基体分离等现象。结论施镀时间为1~4h时,在温度和pH不变的情况下,随着施镀时间增加,化学镀镍层厚度变化不大,但是镀层颗粒更细小,显微硬度明显提高,表面粗糙度降低,镀层结合力良好。     

基体偏压对磁控溅射AlSn20镀层组织形貌与性能的影响

采用非平衡磁控溅射在铝基轴承合金表面制备了AlSn20镀层,分析不同基体偏压对AlSn20镀层的组织形貌、硬度、膜基结合力、摩擦因数等的影响.结果表明,非平衡磁控溅射AlSn20镀层,基体偏电压在-60～-120 V范围内,镀层呈层状生长,随着基体偏电压增大,镀层由粗大结构向细晶结构变化,镀层硬度与基体偏电压成反比,当偏电压为-120 V时,镀层硬度(HV0.025)最高为80,镀层与基体结合力最高可达35 N,镀层的摩擦因数最低为O.15.     

汽车发动机缸体用AZ91合金的表面改性与耐磨耐蚀性能

对汽车发动机缸体用AZ91合金表面进行了等离子熔覆改性处理,对比分析了AZ91合金基体、TiB2-Al2O3和三种不同比例的Al:(TiB2-Al2O3)改性层的显微组织和物相组成,并对改性层的硬度、耐磨性和耐腐蚀性能进行了研究。结果表明,随着距离改性层表面距离的增加,显微硬度整体呈逐渐降低的趋势,不同配比的改性层的显微硬度都高于AZ91合金基体(98 HV0.1),TiB2-Al2O3改性层的显微硬度最高,随着熔覆材料中Al含量的增加,改性层显微硬度呈现逐渐降低的趋势;经过等离子熔覆TiB2-Al2O3和Al:(TiB2-Al2O3) 改性处理后的发动机缸体的耐磨性与耐腐蚀性均有所提高,其中Al:(TiB2-Al2O3)=1:2改性层的耐磨性及耐腐蚀性能最好。     

多层结构对Ti/TiN涂层性能的影响

以TiN、TiAlN为主的过渡族金属氮化物硬质涂层以其较高的表面硬度、良好的耐磨以及抗高温氧化性能,被广泛应用于材料表面防护涂层。然而,涂层内部积聚的高内应力却容易易引发起涂层与基体的结合力问题。利用PVD技术很难在材料表面制备出厚度超过10微米的TiN或TiAlN涂层。多层复合结构能够有效控制涂层中的应力分布,从而使得其成为获得较厚硬质涂层的一种有效方法。本文在TC4合金以及Si（100）基体上利用等离子增强离子镀技术制备了具有不同复合层数的多层Ti/TiN涂层,并研究了复合层数对涂层力学性能的影响。结果表明,随着复合层数的增加,涂层的各项力学性能得到了显著强化。涂层的显微硬度高达2750HV,厚度大于50微米,且具有较好的韧性。涂层的韧性与显微硬度成正比例关系。同时,48层复合结构的Ti/TiN涂层具有低于0.35的摩擦系数以及最佳的抗磨损性能。然而,随着复合层数的进一步增加,涂层与基体的界面显著弱化了涂层的结合强度。     

Effect of some parameters on microstructure and hardness of alumina coatings prepared by the air plasma spraying process

The spraying distance, substrate temperature, coating thickness and surface roughness of substrate during deposition play an important role on the plasma spray coating process and effect the final properties of the coatings. Al₂O₃ coatings on AISI 304 L stainless steel substrate were prepared to investigate the effects on the coating of these parameters. The results indicated that the parameters such as the spraying distance, substrate temperature, coating thickness and substrate roughness were fairly effected the hardness, porosity and surface roughness of Al₂O₃ coatings. The lowest surface roughness and the lowest porosity and the highest hardness values of Al₂O₃ coating were obtained for the spraying distance of 12 cm and the surface roughness of 3.28 μm and the substrate temperature of 500 °C. It also found that the increases of coating thickness were lowered the hardness and enhanced the porosity and the coating roughness.     

TC4钛合金表面TiAlN/Ti涂层的抗冲蚀性能研究

目的 通过明晰TC4钛合金表面不同结构的TiAlN/Ti涂层的冲蚀机制,为提高TC4钛合金的抗冲蚀性能、制备具有良好冲蚀性能的涂层奠定基础.方法 采用磁过滤真空阴极弧(FCVA)与金属蒸汽真空弧(MEVVA)技术,按照一定方式在TC4钛合金表面制备相同厚度不同层数的TiAlN/Ti涂层,采用扫描电镜(SEM)、光学显微镜、纳米压痕仪,对TiAlN/Ti涂层的微观结构和力学性能进行表征和分析.采用冲蚀试验平台,通过参数的调整来模拟沙尘环境,开展TC4钛合金和TiAlN/Ti涂层的冲蚀试验,计算获得冲蚀率.采用Proto-LXRD应力仪测试分析冲蚀前后TiAlN/Ti涂层的残余应力,利用SEM对涂层的冲蚀形貌进行表征和分析,并探讨涂层冲蚀损伤机理.结果 相比于TC4基体试样,层数为4、8、12层的TiAlN/Ti涂层试件冲蚀后的质量损失分别降低了86.9％、91.3％和94.0％,残余压应力分别增加了34、135、203 MPa.对比冲蚀区表面形貌,当涂层的层数为4层时,冲蚀区涂层脱落明显;当涂层层数为8层时,冲蚀区涂层局部有脱落;当涂层层数为12层时,冲蚀区涂层脱落不明显,对基体的防护较好.结论 MEVVA离子源注入技术显著提高了涂层的致密度和涂层与基体间的结合力.TiAlN/Ti涂层能显著改善试样的表面性能.相同涂层厚度下TiAlN/Ti涂层的层数越多,H3/E2值越大,抗冲蚀性能越优异.     

Wear and corrosion behavior of CrCN/CrN coatings deposited by cathodic arc evaporation on nitrided 42CrMo4 steel substrates

In the paper, the results of wear and corrosion tests of the CrCN/CrN multilayer coatings, formed by cathodic arc evaporation on 42CrMo4 (AISI 4140) steel substrates are presented. The substrates were subjected to thermo-chemical treatment–nitriding with various nitriding potential. The results of nitriding were determined by XRD and the hardness profile in the samples cross-section. The morphology of thin coatings was examined with SEM. A Vickers FV-700 and Fisherscope HM2000 hardness testers enabled to investigate hardness of steel substrates and CrCN/CrN coatings respectively. A pin-on-disc wear tests were used to determine the hardness and tribological parameters of the coatings: the coefficient of the friction and wear rate. The scratch test and Rockwell test were applied to assess the adhesion of the coatings to the substrates. The corrosion properties of coating–steel substrate systems were investigated using potentiodynamic polarisation tests. Corrosion potential, corrosion current density and polarization resistance were determined. It was found that that the nitriding of steel substrates improves properties of the coating–substrate system. The nitriding 42CrMo4 steel substrate with low nitriding potential enable to obtain substrates without surface “white layer” what favours good adhesion of the coating to the substrate. The CrCN/CrN multilayer coating–steel substrate systems show good mechanical and tribological properties and corrosion resistance.     

基体材料对Cr/CrN多层涂层在海水环境中磨蚀性能的影响

目的 讨论海水环境下不同基体材料对Cr/CrN交替的多层复合涂层磨蚀性能的影响,为海水环境下耐磨蚀材料基体的选择和应用提供参考。方法 采用多弧离子镀技术在316L不锈钢和TC4钛合金基体上沉积Cr/CrN多层复合涂层,通过XRD、SEM等技术对涂层材料的微观结构进行表征,通过硬度测试、结合力测试、电化学分析、摩擦磨损试验等技术对涂层材料的力学性能、电化学性能以及摩擦学性能进行分析,比较不同基体对Cr/CrN多层涂层在海水环境中磨蚀性能的影响。结果 以TC4钛合金为基体的Cr/CrN多层涂层的硬度为1727.2HV0.3,虽略小于以316L不锈钢为基体的涂层硬度（2241.5HV0.3）,但其在膜-基结合力、海水环境下电化学性能和摩擦学性能等方面均优于以316L不锈钢为基体的涂层。结合力测试中,以TC4为基体的多层涂层初始裂纹出现在31 N,扩展裂纹出现在42 N,大于316L基体涂层的22 N和35 N。电化学测试中TC4基体涂层的腐蚀电位为?0.20 V,大于316L基体涂层的腐蚀电位（?0.21 V）。海水环境下TC4基体涂层的平均摩擦系数和磨损率分别为0.35和2.9950×10?5 mm3/(N?m),均小于316 L基体涂层的平均摩擦系数（0.36）和磨损率（4.9895×10?5 mm3/(N?m)）。结论 TC4钛合金更适合作为海水环境用Cr/CrN多层涂层耐磨蚀材料的基体材料。     

Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD

Carbon based multilayer coatings were prepared by plasma assisted chemical vapor deposition (PACVD) using methane (CH₄) and hexamethyldisiloxane (HMDSO) or methane and tetramethylsilane (TMS) as precursors. These coatings were deposited in a modified plasma nitriding plant operated at relatively high working pressures of 20 Pa. The multilayer design consisted of a-C:H and a-C:H:Si:O or a-C:H and a-C:H:Si single layers, respectively. The number of single layers and the material of the top layer were varied at constant total coating thicknesses. These multilayer coatings were investigated with regard to their morphology and composition as well as indentation hardness, abrasive wear, lubricant free friction and wetting behavior via contact angle measurements. The multilayer coatings exhibited lower wear rates and higher hardness values than a-C:H:Si:O or a-C:H:Si single layers and lower friction coefficients than pure a-C:H coatings under unlubricated test condition. Utilizing duplex processes, combining plasma nitriding pre-treatment and a following coating deposition, the adhesion of the multilayer coatings on high speed and cold working steel substrates could be considerably improved.     

Analysis of diamond-like carbon and Ti/MoS2 coatings on Ti–6Al–4V substrates for applicability to turbine engine applications

Ti–6Al–4V substrates have been coated by diamond-like carbon (DLC) films, with no surface pretreatment, and have been coated by Ti/MoS₂ films, with a simple surface pre-cleaning. The DLC films were deposited by planar coil r.f. inductively-coupled plasma-enhanced chemical vapor deposition (r.f. ICPECVD); the Ti/MoS₂ films were deposited by magnetron sputtering. Both the DLC and Ti/MoS₂ films were characterized by pull tests, hardness tests, scanning electron microscopy (SEM), and wear tests (pin-on-disk and block-on-ring) to compare their adhesion, hardness, surface topology, and wear properties to plasma-sprayed Cu–Ni–In coating currently used for turbine engine applications. The DLC films were easily characterized by their optical properties because they were highly transparent. We used variable-angle spectroscopic ellipsometry (VASE) to characterize thickness and to unequivocally extract real and complex index of refraction, providing a rapid assessment of film quality. Thicker coatings yielded the largest hardness values. The DLC coatings did not require abrasive pretreatment or the formation of bond-layers to ensure good adhesion to the substrate. Simple surface pre-cleaning was also adequate to form well-adhered Ti/MoS₂ on Ti–6Al–4V. The results show that the DLC and Ti/MoS₂ coatings are both much better fretting- and wear-resistant coatings than plasma-sprayed Cu–Ni–In. Both show excellent adhesion to the substrates, less surface roughness, harder surfaces, and more wear resistance than the Cu–Ni–In films.     

Characterization of the mechanical properties and failure modes of hard coatings deposited by RF magnetron sputtering

Chromium oxide coatings with thicknesses of several micrometers were deposited by RF magnetron sputtering at various oxygen flow rates and sputter powers on carbon steel and high speed steel (HSS) substrates, respectively. The compositions and structures of the coatings were characterized by EDS, XRD, and XPS. The mechanical properties of the coatings, in terms of hardness and reduced elastic modulus, were determined by nanoindentation technique. UMT was used to carry out scratch test to study the coating failure mode. Correlations between the mechanical properties of the coating and substrates and the coating failure mode are discussed, which reveal that the coating with a low thickness and high hardness underwent plastic deformation during the scratch process, while the thicker coating with a lower hardness failed in chipping or spallation. The substrate plays a more important role than the coating itself in determining the coating failure mode.     

钛合金表面百微米级Ti/TiN多层复合涂层性能研究

目的提高TiN硬质涂层的厚度及各项力学性能。方法采用等离子增强PVD技术在钛合金(TC4)基体表面制备多层复合Ti/TiN涂层,对涂层进行扫描电镜(SEM)分析,采用划痕法表征涂层的结合强度,用维氏显微硬度计测试涂层的显微硬度,利用销盘式摩擦磨损试验仪评价涂层的摩擦磨损性能。结果制备的多层复合Ti/TiN涂层厚度最高可达100μm,且未发生剥落等失效,结合强度相对于单层TiN提高了近3倍。由于Ti、TiN的多层复合调制作用,制备的Ti/TiN显微硬度测试表明复合涂层的显微硬度高达2700 HV0.025,同时,涂层在原有耐磨性能优良的基础上具备自润滑减摩作用,经过近20 000 m的磨损测试,复合涂层的摩擦系数低至0.25左右,且未完全失效。结论多层复合结构能够有效提高TiN硬质涂层的厚度,制备的Ti/TiN多层复合涂层的各项力学性能显著提高。     

Pulsed DC plasma enhanced chemical vapor deposited TiN/Ti(C,N) multilayer coatings

1　ＩＮＴＲＯＤＵＣＴＩＯＮＶａｒｉｏｕｓｃｏａｔｉｎｇｓｄｅｐｏｓｉｔｉｏｎｔｅｃｈｎｉｑｕｅｓ ,ｓｕｃｈａｓＰＶＤ ,ＣＶＤ ,ＰＣＶＤ ,ＩＢＥＤａｎｄＰＳＩＩｈａｖｅｂｅｅｎｕｓｅｄｔｏｉｍｐｒｏｖｅｔｈｅｗｅａｒ ｒｅｓｉｓｔａｎｃｅ ,ｃｏｒｒｏｓｉｏｎ ｒｅｓｉｓｔａｎｃｅａｓｗｅｌｌａｓｅｌｅｖａｔｅｄａｎｔｉ ｏｘｉｄａｔｉｏｎｂｅｈａｖｉｏｒｏｆｓｕｒｆａｃｅｏｆｓｔｅｅｌｓ ,ｆｏｒｉｎｓｔａｎｃｅ ,ｃｕｔｔｉｎｇｔｏｏｌｏｒｄｉｅｓｔｅｅｌｓａｎｄｎｏｎ ｆｅｒｒｏｕｓｍｅｔａｌｓｉｎ…     

TiN/TiCN/Al2O3/TiN与TiN/TiCN/Al2O3/TiCNO多层涂层的组织性能比较

目的对比TiN/TiCN/Al_2O_3/TiN和TiN/TiCN/Al_2O_3/TiCNO两种多层涂层的组织性能。方法采用化学气相沉积(CVD)技术在硬质合金基体上沉积TiN/TiCN/Al_2O_3/TiN和TiN/TiCN/Al_2O_3/TiCNO两种多层涂层。通过X射线衍射仪(XRD)和扫描电子显微镜(SEM)分析涂层的物相和组织形貌,采用纳米力学测试系统测试涂层顶层的硬度和弹性模量,利用显微维氏硬度计和划痕仪分别测量涂层的显微硬度和结合强度,利用往复式多功能摩擦磨损试验机研究涂层的摩擦磨损性能。结果顶层TiN晶粒为柱状晶,顶层TiCNO晶粒呈细针状。与顶层TiN相比,顶层TiCNO硬度更大,抗塑性变形能力更强。与以TiN为顶层的多层涂层相比,以TiCNO为顶层的多层涂层表面粗糙度、摩擦系数较大,结合强度较低。当磨损只发生在顶层时,耐磨性取决于顶层涂层的性能,TiN/TiCN/Al_2O_3/TiN的磨损体积和磨损率为TiN/TiCN/Al_2O_3/TiCNO的1.2倍。当磨损进行到顶层与Al_2O_3层界面时,结合强度对耐磨性也有重要影响,TiN/TiCN/Al_2O_3/TiN的磨损体积和磨损率是TiN/TiCN/Al_2O_3/TiCNO的82%。结论与TiN/TiCN/Al_2O_3/TiN相比,TiN/TiCN/Al_2O_3/TiCNO的顶层TiCNO硬度较大,抗塑性变形能力强,其顶层耐磨性较好。改善TiN/TiCN/Al_2O_3/TiCNO多层涂层表面粗糙度和结合强度将进一步提高该涂层的摩擦磨损性能。