触点式微型光热驱动器设计及实验研究

随着微电机系统(MEMS)在众多领域的广泛应用,各种形式的微型驱动器不断得到发展。介绍微尺度光热膨胀与光热微驱动的原理,设计与加工制作了基本型和优化型触点式微型光热驱动器,开展了光热微驱动的实验研究,证明了光热微驱动的可行性,并验证了优化型触点式微型光热驱动器的优化性能。     

基于形状记忆合金的微小型光热驱动马达

在分析了形状记忆合金双程记忆效应原理的基础上,采用铜锌铝双向记忆合金片,设计并加工制作了两种微小型光热驱动马达,对其进行了驱动实验研究.研究结果表明,用输出波长为1064nm的YAG脉冲激光作为光热驱动马达的驱动源,在适当的输出功率和频率下,棘轮棘爪型光热驱动马达可获得较精确的步距,齿轮传动型光热驱动马达可获得较高的转...     

光热偏转谱测量装置

本文简要介绍了光热偏转谱技术的原理、应用及本实验室所建立的光热偏转光谱测试装置.     

光热偏转光谱术实验装置的建立

一、引言光热偏转光谱术是80年代初发展起来的一门新型热波探测技术。它由于具有灵敏度高、对光散射不敏感、实验装置简单稳定、可区分体吸收与面吸收以及可空间高分辨非接触实时测量等许多突出的优点,在固体、表面、气流、火焰、材料科学的研究以及大规模集成电路的非损探测等许多领域内都有着广泛的应用前景。本研究建立了一套光热偏转光谱术实验装置,并在此基础之上对光热位移偏转光谱术进行了较为细致的实验研究,结果与理论分析符合良好。文章最后给出了光热偏转光谱术的两个应用实例。二、基本原理及实验装置图1为三种基本的光热偏转光谱术实施方案,图1 a、b 的光热偏转信号,源于梯度折射率效应;图1 c 的光热偏转信号,当样品置于空气中时,主要源于样品表面的微小变形。图1 c 方案——光热位移偏转光谱术的原理如图2所示。样品受强度调制的激光束(泵     

基于光热偏转的热扩散率自动化测量系统

光热偏转检测方法以其独特的优势被广泛地应用于生产和工程中的各个领域。目前大多还是采用手动测量,这样不但工作效率低,而且也影响测量精度。因此,基于光热偏转检测理论设计搭建了热扩散率光热偏转自动化检测系统,实现了数据采集和数据处理的自动化。此外还设计了特制的样品台,即在样品台上加装了一面前表面反射镜,这样通过样品台的移动就可以实现泵浦光与探测光的相对位置的改变。     

硅基PZT压电驱动扫描微镜的设计与优化

设计并研究了一种硅基PZT压电悬臂梁驱动扫描微镜器件.这种扫描微镜采用单晶硅平面微镜面作为光扫描反射元件,由硅基压电复合弹性悬臂梁作为驱动机构控制水平微镜面偏转实现光信号的扫描.整个光扫描微器件可以阵列方式集成在单个硅芯片上,形成光扫描器阵列.采用数值有限元分析的方法模拟和优化了压电复合弹性悬臂梁驱动扫描微镜的力学性能.分析表明,微镜偏转角与压电悬臂长度和工作电压呈线性关系.在研究了影响光学扫描微镜机电性能各项因素的基础上,给出了器件结构优化的方法.     

透射式光热偏转技术实验装置的建立及应用

应用透射式的光热偏转光谱技术,建立了一套实验装置.应用这套实验装置,测量了520nm～555nm(TiO2+ZrO2)/SiO2多层高反膜的激光损伤情况.实验结果表明透射式的光热偏转技术是一种非常灵敏的热波探测技术,即使在小功率的泵浦能量条件下,它也能获得比较大的光热偏转信号.     

透射式光热偏转技术实验装置的建立及应用

应用透射式的光热偏转光谱技术,建立了一套实验装置.应用这套实验装置,测量了520nm～555nm(TiO2+ZrO2)/SiO2多层高反膜的激光损伤情况.实验结果表明透射式的光热偏转技术是一种非常灵敏的热波探测技术,即使在小功率的泵浦能量条件下,它也能获得比较大的光热偏转信号.     

透射式光热偏转技术实验装置的建立及应用

应用透射式的光热偏转光谱技术 ,建立了一套实验装置。应用这套实验装置 ,测量了 5 2 0 nm～ 5 5 5 nm(Ti O2 +Zr O2 ) /Si O2 多层高反膜的激光损伤情况。实验结果表明透射式的光热偏转技术是一种非常灵敏的热波探测技术 ,即使在小功率的泵浦能量条件下 ,它也能获得比较大的光热偏转信号     

透射式光热透镜技术的原理和应用

透射式光热透镜技术是光热偏转技术的新发展。介绍了透射式光热透镜技术测量光学玻璃、光学薄膜弱吸收的基本原理和装置。用Matlab对透射式光热透射技术的原理进行了模拟,对K9玻璃以及在K9玻璃上镀制的薄膜样品的弱吸收进行了测试。结果表明,透射式光热透镜技术是一种高灵敏度的热波检测技术,其灵敏度最高可以达到0.1ppm,而且可以对膜层中的缺陷进行检测。     

Influence of Poisson's ratio variation on lateral spring constant of atomic force microscopy cantilevers

Atomic force microscopy (AFM) can be used to measure the surface morphologies and the mechanical properties of nanostructures. The force acting on the AFM cantilever can be obtained by multiplying the spring constant of AFM cantilever and the corresponding deformation. To improve the accuracy of force experiments, the spring constant of AFM cantilever must be calibrated carefully. Many methods, such as theoretical equations, the finite element method, and the use of reference cantilever, were reported to obtain the spring constant of AFM cantilevers. For the cantilever made of single crystal, the Poisson's ratio varies with different cantilever-crystal angles. In this paper, the influences of Poisson's ratio variation on the lateral spring constant and axial spring constant of rectangular and V-shaped AFM cantilevers, with different tilt angles and normal forces, were investigated by the finite element analysis. When the cantilever's tilt angle is 20 degrees and the Poisson's ratio varies from 0.02 to 0.4, the finite element results show that the lateral spring constants decrease 11.75% for the rectangular cantilever with 1muN landing force and decrease 18.60% for the V-shaped cantilever with 50nN landing force, respectively. The influence of Poisson's ratio variation on axial spring constant is less than 3% for both rectangular and V-shaped cantilevers. As the tilt angle increases, the axial spring constants for rectangular and V-shaped cantilevers decrease substantially. The results obtained can be used to improve the accuracy of the lateral force measurement when using atomic force microscopy.     

Step response measurement of AFM cantilever for analysis of frequency-resolved viscoelasticity

Extension of AFM-based viscoelasticity measurement into a frequency-resolved analysis is attempted. A cantilever immersed into and interacting with distilled water was employed for the trial system. Using a home-built wideband magnetic excitation AFM, a step force with a transient time less than 1 μs is applied to the AFM cantilever and its deflection is measured. The 1st and 2nd mode resonance ringing of the cantilever was suppressed using quality-factor-control technique, so that the measurement system becomes equivalent to driving a resonance-free virtual cantilever within the bandwidth limited by the surviving 3rd mode resonance. From the obtained response of the cantilever deflection, a frequency-dependent complex compliance of the cantilever-water system was derived in a frequency range of 1–100 kHz. Effect of water confining between the tip and a mica substrate is discussed.     

安装误差对直齿标准齿轮螺旋线偏差的影响规律

在齿轮螺旋线的实际测量过程中,不同轮齿的螺旋线倾斜偏差经常会出现较大差异。为提高齿轮螺旋线偏差的测量精度,分别研究了芯轴和齿轮安装误差对齿轮螺旋线偏差的影响规律。首先分别建立了芯轴安装偏心和倾斜误差及齿轮安装偏心和偏摆误差对齿轮螺旋线形状偏差和倾斜偏差影响的数学模型,然后制作了平垫圈(1#、4#)和楔角误差分别5.5μm/45mm(2#)和11.9μm/45mm(3#)的楔形垫圈,用于进行齿轮螺旋线偏差的精密测试实验。得到如下结果:采用2#楔形垫圈时,螺旋线倾斜偏差f_(Hβ)的最大值与理论模型相差0.17μm,相对误差为7%;采用3#楔形垫圈时,螺旋线倾斜偏差f_(Hβ)的最大值与理论模型相差0.06μm,相对误差为1%;而两次试验中齿轮螺旋线的形状偏差ffβ基本不变。实验结果表明:齿轮安装偏摆误差对螺旋线偏差的实测结果与理论值基本吻合,从而验证了所建数学模型的准确性。依据本文所建螺旋线的数学模型,得到通过调整齿轮安装偏摆误差补偿各齿轮螺旋线倾斜偏差差异的误差补偿方法。本文研究对于研制高精度标准齿轮具有重要研究意义。     

Expanded beam deflection method for simultaneous measurement of displacement and vibrations of multiple microcantilevers

Here we present an extension of optical beam deflection (OBD) method for measuring displacement and vibrations of an array of microcantilevers. Instead of focusing on the cantilever, the optical beam is either focused above or below the cantilever array, or focused only in the axis parallel to the cantilevers length, allowing a wide optical line to span multiple cantilevers in the array. Each cantilever reflects a part of the incident beam, which is then directed onto a photodiode array detector in a manner allowing distinguishing between individual beams. Each part of reflected beam behaves like a single beam of roughly the same divergence angle in the bending sensing axis as the incident beam. Since sensitivity of the OBD method depends on the divergence angle of deflected beam, high sensitivity is preserved in proposed expanded beam deflection (EBD) method. At the detector, each spot's position is measured at the same time, without time multiplexing of light sources. This provides real simultaneous readout of entire array, unavailable in most of competitive methods, and thus increases time resolution of the measurement. Expanded beam can also span another line of cantilevers allowing monitoring of specially designed two-dimensional arrays. In this paper, we present first results of application of EBD method to cantilever sensors. We show how thermal noise resolution can be easily achieved and combined with thermal noise based resonance frequency measurement.     

Analysis of simulated scanning of atomic-scale silicon surface by atomic force microscopy

This study constructs a contact-mode atomic force microscopy (AFM) simulation measurement model with constant force mode to simulate and analyze the outline scanning measurement by AFM. The simulation method is that when the probe passes the surface of sample, the action force of the atom of sample received by the atom of the probe can be calculated by using Morse potential. Through calculation, the equivalent force on the cantilever of probe can be acquired. By using the deflection angle equation for the cantilever of probe developed and inferred by this study, the deflection angle of receiving action force can be calculated. On the measurement point, as the deflection angle reaches a fixed deflection angle, the scan height of this simulation model can be acquired. By scanning in the right order, the scan curve of the simulation model can be obtained. By using this simulation measurement model, this study simulates and analyzes the scanning of atomic-scale surface outline. Meanwhile, focusing on the tip radii of different probes, the concept of sensitivity analysis is employed to investigate the effects of the tip radius of probe on the atomic-scale surface outline. As a result, it is found from the simulation on the atomic-scale surface that within the simulation scope of this study, when the tip radius of probe is greater than 12 nm, the effects of single atom on the scan curve of AFM can be better decreased or eliminated.     

汽车等速节传动轴的八功能测试

介绍了汽车传动轴八项功能测试的工作原理,即摆角测试、偏转角度矩测试、移动力测试、移动量测试、滚动矩测试、轴向间隙测试、圆周间隙测试、摆角间隙测试。从精确、可靠的角度出发,论述了测试台总体方案结构、控制系统的原理框图、软件系统的构成及其特点。     

A complete analysis of the laser beam deflection systems used in cantilever-based systems

A working model has been developed which can be used to significantly increase the accuracy of cantilever deflection measurements using optical beam techniques (used in cantilever-based sensors and atomic force microscopes), while simultaneously simplifying their use. By using elementary geometric optics and standard vector analysis it is possible, without any fitted or adjustable parameters, to completely and accurately describe the relationship between the cantilever deflection and the signal measured by a position sensitive photo-detector. By arranging the geometry of the cantilever/optical beam, it is possible to tailor the detection system to make it more sensitive at different stages of the cantilever deflection or to simply linearize the relationship between the cantilever deflection and the measured detector signal. Supporting material and software has been made available for download at http://www.physics.mun.ca/beauliu_lab/papers/cantilever_analysis.htm so that the reader may take full advantage of the model presented herein with minimal effort.     

多层悬臂梁静电作用下的弯曲及吸合电压分析

多层悬臂粱MEMS器件具有广泛的应用,其吸合电压对器件性能有重要影响。通过选取合适的挠度试函数,并考虑多层悬臂梁中的绝缘层对等效间隙高度的影响,运用能量法分析了多层悬臂梁在静电作用下的弯曲情况。推导出了梁在发生吸合现象时,其自由端归一化的挠度值和对应的吸合电压的解析表达式。用Coventor软件中的CoSolveEM模块验证所得公式,表明模型具有较高的精度。所得结论对静电执行结构设计具有一定的参考价值。     

On the electromechanical modelling of a resonating nano-cantilever-based transducer

An electromechanical model for a transducer based on a lateral resonating cantilever is described. The on-plane vibrations of the cantilever are excited electrostatically by applying DC and AC voltages from a driver electrode placed closely parallel to the cantilever. The model predicts the static deflection and the frequency response of the oscillation amplitude for different voltage polarization conditions. For the electrostatic force calculation the model takes into account the real deflection shape of the cantilever and the contribution to the cantilever-driver capacitance of the fringing field. Both the static and dynamic predictions have been validated experimentally by measuring the deflection of the cantilever by means of an optical microscope.     

柔性关节板弹簧骨架大挠度变形的数值计算方法

对板弹簧为柔性骨架关节的弯曲角度、位移等与弹性波纹管内腔气体压力之间的静态模型进行研究。由此得出悬臂梁在受一大小变化的力偶和一大小、方向不断变化的切向力的共同作用下,悬臂梁大挠度变形的数学模型。通过MATLAB常微分方程法求得模型的数值解。