| A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting |
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| 作者姓名： | 方华斌 刘景全 徐峥谊 董璐 陈迪 蔡炳初 刘跃 |
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| 作者单位： | [1]Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education, National Key Laboratory of Micro/Nano Fabrication, Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030 [2]ACS Sensors Lab, Honeywell Company, Shanghai 201203 |
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| 基金项目： | Supported by Honeywell Company. |
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| 摘 要： | A novel power generator has been achieved to convert vibration to electrical energy via the piezoelectric effect. The generator obtained by micro fabrication process mainly consists of silicon based frame and composite cantilever. The prototype tested at resonant vibration generates 1.15μW of effective power to a 20.4-kΩ resistance load. The potential of this work is to offer miniaturization solutions for power generators, and with the proposed method the ambient ubiquitous vibration can be harvested effectively as endless energy source to form an integrated self-powering system.
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| 关 键 词： | 压电式功率发电机 低频振动能量 压电效应 电势 |
| 收稿时间： | 2005-11-25 |
| 修稿时间： | 2005-11-25 |
A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting |
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| FANG Hua-Bin, LIU Jing-Quan, XU Zheng-Yi, DONG Lu, CHEN Di, CAI Bing-Chu, LIU Yue.A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting[J].Chinese Physics Letters,2006,23(3):732-734. |
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| Authors: | FANG Hua-Bin LIU Jing-Quan XU Zheng-Yi DONG Lu CHEN Di CAI Bing-Chu LIU Yue |
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