| 单光栅数字莫尔位移测量法 |
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| 引用本文： | 伍剑,袁波,王立强.单光栅数字莫尔位移测量法[J].红外与激光工程,2014,43(10):3404-3409. |
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| 作者姓名： | 伍剑 袁波 王立强 |
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| 作者单位： | 1.浙江大学 现代光学仪器国家重点实验室,浙江 杭州 310027; |
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| 摘 要： | 提出了一种使用单光栅测量位移的新方法,在该方法中,光栅信号经放大后由图像传感器阵列接收并被传送至计算机,然后通过与其镜像图像叠加的方式得到数字莫尔条纹,最后利用图像传感器像素的空间均匀性对莫尔条纹直接进行细分进而测得位移量。与传统的双光栅莫尔条纹位移测量法相比,该方法完全消除了光栅副层叠间隙,装调更为方便,而且细分成本更低。在阿贝比长仪上对由周期为20 m的光栅和2 0481 536像素的CMOS图像传感器构成的分辨率为0.04 m的测量系统进行测试,结果表明其最大位移误差优于0.18 m。
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| 关 键 词： | 单光栅 数字莫尔条纹 位移测量 |
| 收稿时间： | 2014-02-08 |
New displacement measurement method based on digital Moiré fringes formed by a single grating |
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| Wu Jian,Yuan Bo,Wang Liqiang.New displacement measurement method based on digital Moiré fringes formed by a single grating[J].Infrared and Laser Engineering,2014,43(10):3404-3409. |
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| Authors: | Wu Jian Yuan Bo Wang Liqiang |
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| Affiliation: | 1.State Key Laboratory of Modern Optical Instrumentation,Zhejiang University,Hangzhou 310027,China;2.CNERC for Optical Instrument,Hangzhou 310027,China |
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| Abstract: | A new method for displacement measurement with a single grating was proposed in the present study. In this method, the magnified grating image was received by image sensor and sent into the computer. Then, the digital Moir fringes were generated by overlaying the grating image with its mirror image, and the Moir fringe pitch was directly subdivided by image sensor pixels, which had a good space consistency. Compared with the traditional displacement measurement method that generated Moir fringes with the superposition of two gratings, this method totally eliminated the interval between two gratings, was easier to assemble and adjust, and had a lower cost for subdivision. The subdivision system with the resolution of 0.04 m, which consisted of the grating with 20 m pitch and the CMOS image sensor with the pixels of 2 0481 536, was tested on the Abbe comparator platform. The results show that the maximum displacement error is less than 0.18 m. |
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| Keywords: | single grating digital Moiré fringes displacement measurement |
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