| 微纳结构增强型红外探测器研究进展（特邀） |
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| 引用本文： | 朱鹏,肖磊,孙泰,史浩飞.微纳结构增强型红外探测器研究进展（特邀）[J].红外与激光工程,2022,51(1):20210826-1-20210826-16. |
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| 作者姓名： | 朱鹏 肖磊 孙泰 史浩飞 |
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| 作者单位： | 中国科学院重庆绿色智能技术研究院 微纳制造与系统集成中心，重庆 400714 |
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| 摘 要： | 红外探测器在军事侦查、遥感、通信、精确制导和航空航天等领域发挥着关键作用，受到世界各国长期关注，具有重要的研究价值和应用前景。微纳结构与传统半导体探测器集成后能够有效提高光子耦合效率和等效光程，突破传统体材料的吸收极限，提高光电器件的量子效率并降低器件的暗电流，为高性能红外探测器的研究提供了全新的技术手段。文中围绕近年来各种不同类型的微纳结构增强型红外探测器的研究展开综述。首先，介绍了微纳结构增强型红外探测器的基本原理，根据微纳结构的材料和功能不同，进行了分类和对比；其次，分别从介质型、表面金属型和三维等离子腔型等方面对微纳结构在红外探测器上的研究进展进行了阐述；最后，对基于微纳结构增强型红外探器的发展趋势进行了总结和展望。
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| 关 键 词： | 红外探测 微纳结构 光子捕获 局域增强 等离子体激元 |
| 收稿时间： | 2021-10-25 |
Research progress of micro-nano structures enhanced infrared detectors (Invited) |
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| Zhu Peng,Xiao Lei,Sun Tai,Shi Haofei.Research progress of micro-nano structures enhanced infrared detectors (Invited)[J].Infrared and Laser Engineering,2022,51(1):20210826-1-20210826-16. |
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| Authors: | Zhu Peng Xiao Lei Sun Tai Shi Haofei |
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| Affiliation: | Micro-nano Manufacturing and System Integration Center, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China |
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| Abstract: | Infrared detectors play an important role in the areas of military investigation, remote sensing, communication, precision guidance and aerospace, which have been concerned by the world for a long time and have high research value and good application prospect. The integration of micro-nano structures and traditional semiconductor detector can effectively improve the photon coupling efficiency and equivalent optical path, exceed the absorption limit of traditional bulk materials, improve the quantum efficiency of photoelectric devices and reduce the dark current of devices, providing a new technical means for the research of high-performance infrared detectors. Various types of enhanced infrared photodetectors with micro-nano structures were reviewed in this paper. Firstly, the basic principle of performance enhancd infrared detectors with micro-nano structures were introduced. According to the different materials and functions of micro-nano structures, it was classified and compared; Secondly, the research progress of the above micro-nano structures in infrared detectors were systematically demonstrated from the aspects of dielectric type, surface metal type and 3D plasma cavity type. Finally, the development trend of infrared detector based on micro-nano structure enhancement was prospected. |
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