| 热处理对低损耗高反膜特性的影响分析 |
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| 引用本文： | 季一勤,姜玉刚,刘华松,王利栓,刘丹丹,姜承慧,羊亚平,樊荣伟,陈德应.热处理对低损耗高反膜特性的影响分析[J].红外与激光工程,2013,42(3):742-746. |
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| 作者姓名： | 季一勤 姜玉刚 刘华松 王利栓 刘丹丹 姜承慧 羊亚平 樊荣伟 陈德应 |
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| 作者单位： | 1.哈尔滨工业大学 光电子技术研究所 可调谐激光技术国家级重点实验室,黑龙江哈尔滨150080; |
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| 基金项目： | 国家自然科学基金（61235011）;天津市科委项目（10JCYBJC01500,12JCQNJC01200） |
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| 摘 要： | 低损耗激光薄膜反射镜是环形激光器谐振腔的关键元件之一，首先设计和制备了工作角度为45的低损耗高反膜。为了提高低损耗高反膜的光学性能，采用高温热处理的方式，研究了热处理对低损耗高反膜的透射率、散射系数、表面粗糙度、相移等特性的影响。高温热处理对高反膜的散射系数、表面粗糙度影响较小，随着热处理温度的增加，高反膜相移逐渐降低。当退火温度为550 ℃时，环形激光器输出性能稳定性最好，当工作230 h 后，输出能量仅下降到初始值的90.5%。实验结果表明，采用合适的热处理方式，可以有效改善低损耗高反膜特性以及环形激光器的输出性能。
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| 关 键 词： | 低损耗高反膜 热处理 光学特性 输出特性 |
| 收稿时间： | 2012-07-05 |
Analysis of effects of thermal treatment on optical properties of low loss high reflective coatings |
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| Affiliation: | 1.National Key Laboratory of Science and Technology on Tunable Laser,Institute of Optical-electronics,Harbin Institute of Technology,Harbin 150080,China;2.Tianjin Key Laboratory of Optical Thin Film,Tianjin Jinhang Institute of Technical Physics,Tianjin 300192,China;3.Key Laboratory of Advanced Micro-structure Materials,Ministry of Education,Department of Physics,Tongji University,Shanghai 200092,China |
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| Abstract: | Low loss optical coatings mirror is the most critical elements for resonant cavity of ring laser. In this paper, low loss high reflective coatings working at the angle of 45were designed and prepared. In order to improve optical properties of low loss high reflective coatings, high temperature thermal treatment was chosen and the impact of thermal treatment on transmittance, scattering, surface roughness and phase shift of low loss high reflective coatings was researched. The impact of thermal treatment on scattering and surface roughness was very low. With the increase of annealing temperature, the phase shift of low loss high reflective coatings reduced gradually. When the annealing temperature was 550, the optical stability of ring laser output energy was the best. After working for 230 hours, laser output energy dropped to 90.5% of its initial value. The results have shown that optical properties of low loss high reflective coatings and output energy properties of ring laser can be improved by the proper thermal treatment. |
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