| 基于光谱干涉技术的玻璃厚度及折射率测量方法 |
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| 引用本文： | 赵媛媛,肖作江,梁旭.基于光谱干涉技术的玻璃厚度及折射率测量方法[J].红外与激光工程,2020,49(2):0213004-0213004. |
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| 作者姓名： | 赵媛媛 肖作江 梁旭 |
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| 作者单位： | 1. 长春理工大学 光电工程学院, 吉林 长春 130000; |
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| 摘 要： | 基于光谱干涉技术提出了一种能够同时测量玻璃厚度及折射率的方法,该方法利用迈克尔逊光路,通过傅里叶变换算法对光谱仪接收的干涉信号进行解算,获取光谱干涉条纹的调制周期,根据待测玻璃样品放入测量臂前后,测量臂与参考臂所形成的光程差即可求出玻璃样品的几何厚度和折射率。该方法无需机械扫描延迟线并采用改进的傅里叶域下的相位提取算法,提高了测量系统抗干扰能力,探测速度快。实验结果表明:对玻璃样品的厚度测量精度优于±1μm,折射率测量精度±5×10^-4。
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| 关 键 词： | 光谱干涉 傅里叶变换 玻璃厚度 折射率 |
| 收稿时间： | 2019-10-05 |
Measurement method of glass thickness and refractive index based on spectral interference technology |
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| Zhao Yuanyuan,Xiao Zuojiang,Liang Xu.Measurement method of glass thickness and refractive index based on spectral interference technology[J].Infrared and Laser Engineering,2020,49(2):0213004-0213004. |
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| Authors: | Zhao Yuanyuan Xiao Zuojiang Liang Xu |
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| Affiliation: | 1. College of Optical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130000, China;2. College of Precision Instruments and Optoelectronic Engineering, Tianjin University, Tianjin 300072, China |
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| Abstract: | Based on spectral interference technique, a method for simultaneously measuring the thickness and refractive index of a glass was proposed. This method used the Michelson optical path to solve the interference signal received by the spectrometer through a Fourier transform algorithm to obtain the modulation period of the spectral interference fringe. The modulation period was determined according to the optical path difference formed between the measuring arm and the reference arm before and after the glass sample to be tested was placed in the measuring arm, and the geometric thickness and refractive index of the glass sample can be obtained. The method did not need mechanical scanning delay line and adopted the improved phase extraction algorithm in the Fourier domain, which improved the anti-interference ability of the measurement system and the detection speed was fast. The experimental results show that the thickness measurement accuracy of the glass sample is better than±1μm, and the refractive index measurement accuracy is ±5×10-4. |
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| Keywords: | spectral interference Fourier transform glass thickness refractive index |
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