| Simulink仿真指导放电准分子激光长脉宽的实验探究 |
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| 引用本文： | 刘冬生,梁勖,林颖,徐一帆,方晓东.Simulink仿真指导放电准分子激光长脉宽的实验探究[J].红外与激光工程,2021,50(11):20210022-1-20210022-7. |
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| 作者姓名： | 刘冬生 梁勖 林颖 徐一帆 方晓东 |
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| 作者单位： | 1.安徽大学 物质科学与信息技术研究院，安徽 合肥 230601 |
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| 基金项目： | 中国科学院青促会资助项目（2018481）；深圳市科技计划资助项目（KQTD20170331115422184） |
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| 摘 要： | 针对医疗用308 nm准分子激光器长脉宽的实际需求，提出Simulink仿真模型指导延长激光脉宽的方案，并进行实验研究。首先建立并验证了典型准分子激光器放电激励回路仿真模型的有效性，其次基于脉冲形成网络原理建立4级LC峰化回路的放电激励模型，并进行了具体的激光器结构设计和参数选择。对一台储能电容为60 nF，工作电压范围在20~29 kV的308 nm准分子激光器进行实验，通过改变激励回路的结构和参数，激光脉宽由30 ns延长到60 ns，且当储能电容电压值为28 kV时，输出能量达407 mJ，激光脉冲能量的转移效率由典型结构的1.531%提高至1.73%，实现了放电激励308 nm准分子激光长脉冲输出条件下的高能量转移率，验证了Simulink仿真模型的有效性和指导意义，为实用化长脉宽准分子激光的设计和应用提供基础。
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| 关 键 词： | 准分子激光 Simulink仿真 长脉宽 转移效率 |
| 收稿时间： | 2020-12-29 |
Simulink simulation guiding the experimental exploration of long pulse width of discharge excimer laser |
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| Liu Dongsheng,Liang Xu,Lin Ying,Xu Yifan,Fang Xiaodong.Simulink simulation guiding the experimental exploration of long pulse width of discharge excimer laser[J].Infrared and Laser Engineering,2021,50(11):20210022-1-20210022-7. |
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| Authors: | Liu Dongsheng Liang Xu Lin Ying Xu Yifan Fang Xiaodong |
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| Affiliation: | 1.Institude of Physical Science and Information Technology, Anhui University, Hefei 230601, China2.Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, China3.Shenzhen ShengFang Tech Co., Ltd., Shenzhen 518100, China |
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| Abstract: | Aiming at the actual demand for long pulse width of 308 nm excimer laser for medical use, a Simulink simulation model was proposed to guide the scheme of extending the laser pulse width, and experimental research was carried out. First, the effectiveness of the simulation model of the excitation circuit of a typical excimer laser discharge was established and verified. Second, the discharge excitation model of a 4-level LC peaking circuit was established based on the principle of pulse forming network, and the design and parameter selection of specific laser structure were carried out. Experiment with a 308 nm excimer laser, an energy storage capacitor of 60 nF and a voltage range of 20-29 kV was completed. By changing the structure and parameters of excitation circuit, the laser pulse width was extended from 30 ns to 60 ns, and when the voltage value of energy storage capacitor was 28 kV, the output energy was up to 407 mJ, the transfer efficiency of laser pulse energy was increased from 1.531% of the typical structure to 1.73%, and the high energy transfer rate under the condition of the long pulse output of discharge excitation 308 nm excimer laser was realized. It verifies the validity and effectiveness of the Simulink simulation model. The guiding significance is to provide the basis for the design and application of the practical long pulse width excimer laser. |
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