| 基于光斑位置传感器的长导轨准直系统 |
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| 引用本文： | 罗凯,陈培锋,王英.基于光斑位置传感器的长导轨准直系统[J].激光技术,2018,42(1):30-33. |
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| 作者姓名： | 罗凯 陈培锋 王英 |
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| 作者单位： | 华中科技大学?光学与电子信息学院, 武汉 430074 |
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| 摘 要： | 为了检测长导轨的直线度，采用激光作为参考基准线，将2维光斑位置传感器作为光电转换器件。当固定在导轨滑块上的2维光斑位置传感器沿着导轨移动时，光斑的位置数据会通过蓝牙模块传输到终端上，输入位置信息之后，软件会自动绘制出导轨的2维直线度曲线。结果表明，计算出激光偏角带来的误差远小于1μm；通过高精度位移平台，实验验证了系统的精度可达到3.4μm；实际使用中，检测了7.2m的长导轨，取得了长导轨的直线度数据，重复精度可达5μm。这一结果对长导轨直线度测量的研究是有帮助的。
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| 关 键 词： | 激光技术 激光准直 比对实验 光斑位置传感器 |
| 收稿时间： | 2017-02-22 |
Long guide rail alignment systems based on position sensitive detectors |
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| Abstract: | In order to detect the long rail straightness, laser was used as the reference line, and 2-D position sensitive detector was used as photoelectric converter. When 2-D position sensitive detector was fixed on the guide rail slider and moved along the guide rail, the spot position data was transmitted to the terminal through bluetooth module. After entering the location information, the curve of 2-D straightness was drawn by the software automatically. The results show that, through theoretical analysis, the error of laser deflection angle is calculated and is less than 1μm. The system accuracy is verified by high-precision displacement platform experiment and reaches 3.4μm. In practical appliaction, a long rail of 7.2m is detected and the straightness data of long guide rail is obtained. The repeatability precision can reach 5μm. The study is helpful for straightness measurement of long rails. |
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