| 集成AlGaN/GaN HEMT混频探测器的太赫兹矢量测量系统 |
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| 引用本文： | 刘一霆,丁青峰,冯伟,朱一帆,秦华,孙建东,程凯.集成AlGaN/GaN HEMT混频探测器的太赫兹矢量测量系统[J].红外与激光工程,2023,52(1):20220278-1-20220278-8. |
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| 作者姓名： | 刘一霆 丁青峰 冯伟 朱一帆 秦华 孙建东 程凯 |
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| 作者单位： | 1.中国科学技术大学 纳米技术与纳米仿生学院，安徽 合肥 230026 |
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| 基金项目： | 中国科学院青年创新促进会 (Y2021089)；国家自然科学基金 (61771466, 61775231)；江苏省重点研发计划 (BE2018005) |
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| 摘 要： | 矢量测量是表征太赫兹波段天线与准光系统波束特性的主流技术。该文介绍了一种基于AlGaN/GaN高电子迁移率晶体管(High-electron-mobility transistor, HEMT)混频探测器的太赫兹矢量测量系统。该系统核心器件为以准光-波导为耦合方式的高灵敏度太赫兹混频探测器，在340 GHz频率外差模式下，其噪声等效功率达-113 dBm/Hz。为了抑制系统相位噪声，搭建了基于二次下变频原理的硬件电路。通过对固定位置天线的长时间测量，表明系统相位稳定度优于4°，系统最小可测功率达到119 nW。基于相干AlGaN/GaN HEMT混频探测器实现了太赫兹连续波幅度和相位分布测量，该工作为后续阵列化太赫兹矢量测量提供了基础。
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| 关 键 词： | 矢量测量 太赫兹探测器 相干探测 高电子迁移率晶体管 氮化镓 |
| 收稿时间： | 2022-04-15 |
Terahertz vector measurement system based on AlGaN/GaN HEMT terahertz mixer |
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| Affiliation: | 1.School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei 230026, China2.Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China3.Jiangsu Provincial Key Laboratory of Nano Devices, Suzhou 215123, China4.School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China5.Enkris Semiconductor, Inc., Suzhou 215000, China |
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| Abstract: | Vector measurement is an important technology for beam testing of antennas and quasi-optical systems in terahertz band. This paper introduces a terahertz vector measurement system based on a high-sensitivity AlGaN/GaN high-electron-mobility transistor (HEMT) terahertz detector integrated with a quasi-optical lens and waveguide together, which reached the noise equivalent power of ?113 dBm/Hz in heterodyne mode at 340 GHz. A hardware circuit is established based on the double frequency-down-conversion technique to suppress phase noise in the system. The experimental results indicate that the minimum measurable power is 119 nW and the phase stability is better than 4° of the system. Measurement of the distribution of both terahertz amplitude and phase has been achieved based on this coherent AlGaN/GaN HEMT detector. An arrayed terahertz vector measurement system could be developed based on this work. |
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