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Development of flexible displays using back‐channel‐etched In–Sn–Zn–O thin‐film transistors and air‐stable inverted organic light‐emitting diodes
Authors:Mitsuru Nakata  Genichi Motomura  Yoshiki Nakajima  Tatsuya Takei  Hiroshi Tsuji  Hirohiko Fukagawa  Takahisa Shimizu  Toshimitsu Tsuzuki  Yoshihide Fujisaki  Toshihiro Yamamoto
Affiliation:NHK Science & Technology Research Laboratories, Setagaya, Tokyo, Japan
Abstract:We developed flexible displays using back‐channel‐etched In–Sn–Zn–O (ITZO) thin‐film transistors (TFTs) and air‐stable inverted organic light‐emitting diodes (iOLEDs). The TFTs fabricated on a polyimide film exhibited high mobility (32.9 cm2/Vs) and stability by utilization of a solution‐processed organic passivation layer. ITZO was also used as an electron injection layer (EIL) in the iOLEDs instead of conventional air‐sensitive materials. The iOLED with ITZO as an EIL exhibited higher efficiency and a lower driving voltage than that of conventional iOLEDs. Our approach of the simultaneous formation of ITZO film as both of a channel layer in TFTs and of an EIL in iOLEDs offers simple fabrication process.
Keywords:flexible display  oxide semiconductor  back‐channel‐etched TFT  ITZO  solution‐processed passivation layer  inverted OLED
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