| 子孔径拼接检测浅度非球面 |
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| 引用本文： | 王宁,贾辛,邢廷文.子孔径拼接检测浅度非球面[J].红外与激光工程,2013,42(9):2525-2530. |
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| 作者姓名： | 王宁 贾辛 邢廷文 |
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| 作者单位： | 1.中国科学院光电技术研究所,四川 成都 610209; |
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| 基金项目： | 微细加工光学技术研究课题 |
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| 摘 要： | 子孔径拼接技术可实现无需辅助元件且低成本、高精度地对大口径光学镜面的测量。针对浅度非球面，在用子孔径拼接检测平面和高陡度非球面的基础上，提出了利用圆形子孔径检测浅度非球面的算法。对其数学模型、拼接算法以及检测过程进行了分析和探讨。利用37项Zernike多项式拟合浅度非球面，用圆形子孔径进行了划分。最后完成子孔径的拼接仿真，验证了数学模型及拼接算法的可行性，同时分析了子孔径的平移、倾斜和随机误差对拼接精度的影响。
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| 关 键 词： | 子孔径拼接 非球面 光学检测 误差 仿真 |
| 收稿时间： | 2013-01-20 |
Test of shallow asphere using sub-aperture stitching method |
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| Wang Ning
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Jia Xin
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Xing Tingwen.Test of shallow asphere using sub-aperture stitching method[J].Infrared and Laser Engineering,2013,42(9):2525-2530. |
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| Authors: | Wang Ning Jia Xin Xing Tingwen |
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| Affiliation: | 1.Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;2.University of Chinese Academy of Sciences,Beijing 100049,China |
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| Abstract: | Sub-aperture stitching technology can be used for testing large aperture optical mirrors with low-cost and high-precision and without supporting components. Based on planes and high steepness asphere, the algorithm of sub-aperture stitching for shallow asphere was detected. The mathematical model, stitching algorithm as well as the detection process were analyzed and discussed. A shallow asphere was fitted by 37 Zernike polynomials and divided by circular sub-apertures. Then the simulation of the sub-aperture stitching was completed as well as the analysis of the effect of the sub-aperture translation, tilt and random errors on stitching accuracy. |
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| Keywords: | sub-aperture stitching asphere optical test error simulation |
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