| 横向压电效应变形镜优化设计 |
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| 引用本文： | 吴伟彬,戴一帆,关朝亮,范占斌,钟曜宇.横向压电效应变形镜优化设计[J].红外与激光工程,2016,45(8):818003-0818003(7). |
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| 作者姓名： | 吴伟彬 戴一帆 关朝亮 范占斌 钟曜宇 |
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| 作者单位： | 1.国防科学技术大学 机电工程与自动化学院,湖南 长沙 410073; |
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| 基金项目： | 新世纪优秀人才资助计划（NCET-12-0144） |
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| 摘 要： | 变形镜作为自适应光学系统中的关键部件，起到校正波前误差的作用。其中横向压电效应变形镜应用较为广泛，其设计参数对系统的性能有重要影响，因此需要进行优化设计。仿真表明，减小Si镜和PZT的厚度可以提高系统最大变形量，但会降低一阶固有频率。通过正交匹配两者的厚度参数可满足系统的工作要求。夹具的材料和结构参数会影响系统的热变形特性。使用与镜片材料相同的夹具，系统的热变形最小，对高度和壁厚进行优化可以减小甚至消除系统的热变形。最后，通过电压特性仿真得到了优化后变形镜各分立电极的影响函数。
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| 关 键 词： | 自适应光学 横向压电效应 变形镜 优化设计 仿真 |
| 收稿时间： | 2015-12-20 |
Optimization design for transversal piezoelectric effect deformable mirror |
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| Affiliation: | 1.College of Mechatronic Engineering and Automation,National University of Defense Technology,Changsha 410073,China;2.Hunan Key Laboratory of Ultra-precision Machining Technology,Changsha 410073,China |
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| Abstract: | Deformable mirror as the key part of the adaptive optics systems, plays a role of correcting the wavefront error. The transversal piezoelectric deformable mirror is widely used, and its design parameters have important influence on the system performance, so the optimization is needed. The simulation results show that minishing the thickness of Si mirror and PZT player can increase the maximal displacement, but decrease the first natural frequency of the system. The system working requirements can be satisfied by the orthogonal matching of thicknesses. The material and structure parameters of the fixture affect the system thermal deformation performance. Using the same material as the mirror for the fixture, the system thermal deformation is minimum, the height and wall thickness of the fixture can be optimized to reduce or even eliminate the system thermal deformation. Finally, the influence function of the discrete electrode is obtained by the simulation of voltage performance. |
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